CN110737115A - Distributed optical phase modulator - Google Patents
Distributed optical phase modulator Download PDFInfo
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- CN110737115A CN110737115A CN201911210182.4A CN201911210182A CN110737115A CN 110737115 A CN110737115 A CN 110737115A CN 201911210182 A CN201911210182 A CN 201911210182A CN 110737115 A CN110737115 A CN 110737115A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000005452 bending Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 8
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0327—Operation of the cell; Circuit arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The application discloses an distributed optical phase modulator, which comprises a substrate, an optical waveguide arranged on the substrate, a driving electrode arranged on the substrate and comprising a plurality of sub-driving electrodes arranged at intervals, and a plurality of shielding electrodes respectively arranged among the plurality of sub-driving electrodes, wherein the optical waveguide sequentially passes through the sub-driving electrodes and the plurality of shielding electrodes.
Description
Technical Field
The application relates to the technical field of optical modulation, in particular to an distributed optical phase modulator.
Background
High speed electro-optic modulation has become a very popular and important applications such as optical communication, microwave photoelectron, laser beam deflection, wave front modulation, etc. electro-optic modulators are those made using the electro-optic effect of certain electro-optic crystals such as lithium niobate crystal (LiNb03), gallium arsenide crystal (GaAs) and lithium tantalate crystal (LiTa 03).
However, in modulating light, it is difficult to achieve both low driving voltage and high modulation bandwidth modulation.
Disclosure of Invention
The main object of the present application is to provide distributed optical phase modulator to achieve modulation with low driving voltage and high modulation bandwidth.
Based on this, the distributed optical phase modulator provided by the embodiment of the application comprises a substrate, an optical waveguide arranged on the substrate, a driving electrode arranged on the substrate and comprising a plurality of sub-driving electrodes arranged at intervals, a plurality of shielding electrodes respectively arranged between the plurality of sub-driving electrodes, and the optical waveguide sequentially penetrates through the sub-driving electrodes and the plurality of shielding electrodes.
Optionally, the drive electrode is a coplanar waveguide structure.
Optionally, the same electrical signal is applied to the sub-driving electrodes.
Optionally, the electrical signal applied to the adjacent sub driving electrode has a time delay, wherein the time duration of the time delay is a time duration required for the optical signal to be transmitted from the starting end of the upper sub driving electrode to the starting end of the adjacent lower sub driving electrode.
Optionally, the optical waveguide comprises a plurality of modulating portions and a plurality of bending portions connected between the modulating portions, wherein a bending direction of the bending portions is toward an upper modulating portion connected with the bending portions.
Optionally, the modulation section includes th sub-modulation section and a second sub-modulation section, wherein light propagation directions inside the th sub-modulation section and the second sub-modulation section are opposite.
Optionally, the th sub-modulation section is parallel to the second sub-modulation section, and the propagation directions of optical signals in the th sub-modulation section and the second sub-modulation section are opposite.
Optionally, the th sub-modulation part passes through the sub-driving electrode, and the second sub-modulation part passes through the shielding electrode.
Optionally, the sub driving electrodes include a signal electrode on the side of the optical waveguide to which the driving signal is applied, and a ground electrode on the other side of the optical waveguide.
Optionally, the shielding electrode includes an th ground line, a second ground line on the side of the optical waveguide , and on the side of the optical waveguide .
The application has the following beneficial effects:
the driving electrodes are distributed, the length of each part of the driving electrodes is far smaller than the total length of an equivalent traditional modulator, and the voltage of a driving signal of each part is also far smaller than the voltage of the driving signal of the equivalent traditional modulator.
The same electric signal is applied to each sub-driving electrode, and the same electric signal is applied to each part of driving electrodes, which is equivalent to resetting the electric signal when the electric signal propagates along each part of driving electrodes, thereby greatly reducing the loss of the electric signal and greatly improving the modulation efficiency.
Drawings
The accompanying drawings, which form a part hereof , are included to provide a further understanding of the present application and to enable further features, objects, and advantages of the present application to become more apparent the drawings, and the description thereof, are provided to explain the present application by way of example and not by way of limitation.
FIG. 1 is a schematic diagram of a distributed optical phase modulator according to an embodiment of the present application;
fig. 2 is a schematic partial cross-sectional view of a distributed optical phase modulator according to an embodiment of the present application.
Detailed Description
For a better understanding of the present disclosure, reference will now be made to the embodiments of the present disclosure, which are illustrated in the accompanying drawings in the drawings, wherein like reference numerals refer to the same elements throughout the several views, and wherein the same reference numerals refer to the same elements throughout the several views
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
The inventors have discovered, however, that there is a group velocity mismatch between the optical wave and the driving electrical signal, which results in a severe lightwave-drive-point signal walk-off phenomenon over long distances, severely limiting the modulation bandwidth.
Based on the research of the inventor, the distributed optical phase modulator is provided according to the embodiment of the present invention, as shown in fig. 1, the optical phase modulator includes a substrate 10 and an optical waveguide 20 disposed on the substrate 10, a driving electrode 30 disposed on the substrate 10 and including a plurality of sub-driving electrodes 31 arranged at intervals, and a plurality of shielding electrodes 40 disposed between the plurality of sub-driving electrodes 31, wherein the optical waveguide 20 sequentially passes through the sub-driving electrodes 31 and the plurality of shielding electrodes 40, due to group velocity mismatch between the optical wave and the driving electrical signal, the long distance transmission may generate a serious optical wave-driving point signal walk-off phenomenon, which severely limits the reduction of the driving voltage and the increase of the modulation bandwidth, and therefore, the driving electrode 30 is configured as a distributed driving electrode, because the driving electrode 30 is distributed, the length of each partial driving electrode 30 is far less than the total length of the modulator, and in each partial driving electrode 30, the propagation of the optical signal and the electrical signal may reach approximately synchronous propagation, even the increase of the crosstalk among the sub-driving electrodes , the crosstalk between the plurality of sub-driving electrodes may be increased greatly.
As exemplary embodiments, the optical modulator may be a lithium niobate crystal (LiNb03) optical modulator, a gallium arsenide crystal (GaAs) optical modulator, or a lithium tantalate crystal (LiTa03) optical modulator. In this embodiment, a lithium niobate crystal optical modulator will be described as an example. As shown in fig. 2, the optical waveguide 20 and the driving electrode 30 are located on the surface of the substrate 10, and a bonding layer 50 may be further disposed between the substrate 10 and the optical waveguide 20 and the driving electrode 30.
As an exemplary embodiment, the driving electrode 30 includes a signal electrode S to which an electric signal is applied and a ground electrode G. The optical waveguide is located between the signal electrode S and the ground electrode G. In the present embodiment, the signal electrode S and the ground electrode G of the driving electrode may be disposed in parallel with the optical waveguide. In this embodiment, the optical waveguide is made of an electro-optical material, the refractive index of which varies with the magnitude of an applied voltage, and the accumulated phase of input light passing through the optical waveguide varies with the voltage applied to the optical waveguide. Optical phase modulation is achieved by applying an electrical signal across the drive electrodes to change the phase of the optical signal in the optical waveguide.
As an exemplary embodiment, the driving electrode 30 includes N sub-driving electrodes 31 arranged at intervals along the optical waveguide 20, where N is equal to or greater than 2, as shown in fig. 1, the driving electrode 30 is divided into N portions, each portion has a shorter length L, and the final effective driving length is N × L.
In order to better match the electrical signals on the sub-driving electrodes 31 so that the modulation of the optical signals on each sub-driving electrode 31 is as same as possible, in the present embodiment, the electrical signals applied on the adjacent sub-driving electrodes 31 have a delay, wherein the duration of the delay is the duration of the optical signal transmitted from the end of the upper sub-driving electrode 31 to the start of the adjacent lower sub-driving electrode 311(T), the time required for the optical signal to travel from the end of the nth sub-driving electrode 31 to the start of the (n + 1) th sub-driving electrode 31 is TnWhere N-1, 2, …, N-1 indicates that it is the second sub-drive electrode 31. The expression of the electric signal applied to each sub-drive electrode 31 is as follows:
due to the delay of the electrical signal and the optical signal applied to the adjacent sub-driving electrodes 31 before the distributed driving electrode 30, the sub-driving electrodes 31 in each part have the same electrical signal, which is equivalent to resetting the electrical signal when the electrical signal propagates along each part of the sub-driving electrodes 31, so that the loss of the electrical signal is greatly reduced, and the modulation efficiency is greatly improved.
In the present embodiment, the driving electrode 30 is a coplanar waveguide structure, which may be exemplified by a GS coplanar waveguide line (other phase modulation units may also be used in the coplanar waveguide structure). The unmodulated constant-brightness light source passes through the N sub-drive electrode 31 regions in sequence from the entrance end input. The sub-driving electrode 31 has a left end which is an input region of an electrical signal and a right end which is coupled to an external microwave termination isolator (RF terminator) or an on-chip circuit. The input optical signal is output after passing through the multi-segment sub-driving electrodes 31. . As an exemplary embodiment, the impedance of the sub driving electrode 31 is the same as or similar to the impedance of the electric signal input terminal, for example, may be 50 Ω; the propagation speed of the electrical signal in the driving electrode 30 is the same as or similar to the speed of light in the optical waveguide 20; the resistance loss of the electric signal transmitted in the driving electrode 30 is as low as possible, and in this embodiment, the driving electrode 30 may be made of a high-conductivity low-resistance material such as gold, silver, graphene, or the like.
As an exemplary embodiment, as shown in fig. 1, the optical waveguide includes a plurality of modulation sections 21 and a plurality of bending sections 22 connected between the modulation sections 21, wherein a bending direction of the bending section 22 is toward an upper modulation section 21 connected to the bending section 22. in an exemplary embodiment, the optical waveguide starts from a th modulation section 21, and a bending direction of a th bending section 22 connected to a th modulation section 21 is toward an th modulation section 21, so that an extending direction of a second modulation section 21 connected to a th bending section 22 is toward a th modulation section 21, and the plurality of modulation sections 21 are connected to the plurality of bending sections 22 to form a shape of "S" or a "snake" extending back and forth.
As an exemplary embodiment, the th sub-modulation section passes through the sub-driving electrodes, the second sub-modulation section passes through the shielding electrodes, illustratively, as shown in FIG. 1, the th sub-modulation section and the second sub-modulation section are arranged at intervals along the Y direction of the substrate surface, and the sub-driving electrodes are arranged at intervals from the shielding electrodes, the signal electrode is positioned at the side of the th sub-modulation section, the ground electrode is positioned at the side of the th sub-modulation section, meanwhile, the ground line G1 of the shielding electrode is positioned at the side of the second sub-modulation section, and the second ground line G2 of the shielding electrode is positioned at the side of the second sub-modulation section, because of the crosstalk existing between the respective sub-driving electrodes while synchronizing the low driving voltage and the high modulation bandwidth, the shielding electrodes are arranged at intervals along the Y direction of the substrate surface, the modulator can reduce the crosstalk between the sub-driving electrodes while synchronizing the low driving voltage and the high modulation bandwidth, and further can greatly reduce the driving voltage, thereby greatly improving the modulation performance of the optical modulator.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1, distributed optical phase modulator, comprising:
a substrate, and an optical waveguide disposed on the substrate;
a driving electrode disposed on the substrate and including a plurality of sub-driving electrodes arranged at intervals,
a plurality of shield electrodes respectively disposed between the plurality of sub-drive electrodes;
the optical waveguide sequentially passes through the sub driving electrodes and the plurality of shielding electrodes.
2. The distributed optical phase modulator of claim 1,
the driving electrode is a coplanar waveguide structure.
3. The distributed optical phase modulator of claim 2,
the same electrical signal is applied to the sub-driving electrodes.
4. The distributed optical phase modulator of claim 3,
the electrical signal applied to the adjacent sub driving electrode has a delay time, wherein the duration of the delay time is a time period required for the optical signal to be transmitted from the start end of the upper sub driving electrode to the start end of the adjacent lower sub driving electrode.
5. The distributed optical phase modulator of any of wherein the optical waveguide comprises a plurality of modulating segments and a plurality of bends connected between the modulating segments, wherein the bends have a bend direction towards an upper modulating segment connected to the bends.
6. The distributed optical phase modulator of claim 5 wherein the modulating section comprises -th sub-modulating section and a second sub-modulating section, wherein light propagation directions inside the -th sub-modulating section and the second sub-modulating section are opposite.
7. The distributed optical intensity modulator of claim 6,
the th sub-modulation section is parallel to the second sub-modulation section, and the propagation directions of optical signals in the th sub-modulation section and the second sub-modulation section are opposite.
8. The distributed optical intensity modulator of claim 6 or 7,
the th sub-modulation part penetrates the sub-drive electrode;
the second sub-modulation section passes through the shield electrode.
9. The distributed optical phase modulator of claim 1 wherein said sub-drive electrodes comprise:
a signal electrode located on the side of the optical waveguide to which a drive signal is applied, and a ground electrode located on the other side of the optical waveguide.
10. The distributed optical phase modulator of claim 1 wherein said shield electrode comprises:
an th ground line, a second ground line on the side of the optical waveguide , and on the side of the optical waveguide .
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911210182.4A CN110737115A (en) | 2019-11-29 | 2019-11-29 | Distributed optical phase modulator |
| US17/639,345 US12025865B2 (en) | 2019-11-29 | 2020-03-30 | Distributed optical phase modulator |
| PCT/CN2020/081992 WO2021103367A1 (en) | 2019-11-29 | 2020-03-30 | Distributed optical phase modulator |
| EP20892864.8A EP4006629A4 (en) | 2019-11-29 | 2020-03-30 | Distributed optical phase modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911210182.4A CN110737115A (en) | 2019-11-29 | 2019-11-29 | Distributed optical phase modulator |
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| CN110737115A true CN110737115A (en) | 2020-01-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911210182.4A Pending CN110737115A (en) | 2019-11-29 | 2019-11-29 | Distributed optical phase modulator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021103367A1 (en) * | 2019-11-29 | 2021-06-03 | 苏州极刻光核科技有限公司 | Distributed optical phase modulator |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1202636A (en) * | 1997-06-12 | 1998-12-23 | 托马斯及贝茨国际股份有限公司 | Chirp-controlled optical modulator and method of controlling chirp in modulation of optical signal |
| CN102224444A (en) * | 2008-12-02 | 2011-10-19 | 日本电信电话株式会社 | Light modulator |
| CN106873192A (en) * | 2016-11-07 | 2017-06-20 | 北京交通大学 | The ultrafast spatial modulator of electric light based on silicon waveguide |
| US20180341164A1 (en) * | 2017-05-23 | 2018-11-29 | Elenion Technologies, Llc | Optical waveguide modulator |
| CN211426972U (en) * | 2019-11-29 | 2020-09-04 | 苏州极刻光核科技有限公司 | Distributed optical phase modulator |
-
2019
- 2019-11-29 CN CN201911210182.4A patent/CN110737115A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1202636A (en) * | 1997-06-12 | 1998-12-23 | 托马斯及贝茨国际股份有限公司 | Chirp-controlled optical modulator and method of controlling chirp in modulation of optical signal |
| CN102224444A (en) * | 2008-12-02 | 2011-10-19 | 日本电信电话株式会社 | Light modulator |
| CN106873192A (en) * | 2016-11-07 | 2017-06-20 | 北京交通大学 | The ultrafast spatial modulator of electric light based on silicon waveguide |
| US20180341164A1 (en) * | 2017-05-23 | 2018-11-29 | Elenion Technologies, Llc | Optical waveguide modulator |
| CN211426972U (en) * | 2019-11-29 | 2020-09-04 | 苏州极刻光核科技有限公司 | Distributed optical phase modulator |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021103367A1 (en) * | 2019-11-29 | 2021-06-03 | 苏州极刻光核科技有限公司 | Distributed optical phase modulator |
| US12025865B2 (en) | 2019-11-29 | 2024-07-02 | Suzhou Lycore Technologies Co., Ltd. | Distributed optical phase modulator |
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