CN110737081A - -angle double telecentric zoom lens system for lens defect detection - Google Patents
-angle double telecentric zoom lens system for lens defect detection Download PDFInfo
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- CN110737081A CN110737081A CN201911131959.8A CN201911131959A CN110737081A CN 110737081 A CN110737081 A CN 110737081A CN 201911131959 A CN201911131959 A CN 201911131959A CN 110737081 A CN110737081 A CN 110737081A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B15/00—Optical objectives with means for varying the magnification
- G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
- G02B15/15—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective compensation by means of only one movement or by means of only linearly related movements, e.g. optical compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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Abstract
The invention provides lens defect detection-based system from angles to double telecentric zoom lenses, relates to the technical field of machine vision measurement, and solves the technical problems of low defect detection efficiency and high cost of manual visual inspection.
Description
Technical Field
The invention relates to the technical field of machine vision measurement, in particular to zoom lens systems from degrees to double telecentricity for online lens defect detection.
Background
The detection of lens defects is which is the most important step in the lens production process, and under the background of widespread application of optical lenses , the requirement on the detection of lens defects is higher and higher, and the corresponding detection requirements are stricter and stricter.
The applicant has found that the prior art has at least the following technical problems:
at present, the optical lens processing enterprises mainly aim at manual visual detection, aiming at lens defects such as scratches, pocks, bubbles and the like, the limit resolution angle of human eyes is small, some defects cannot be detected, the detection efficiency is low, the labor cost is high, the detection standard is not , and the optical lens processing enterprises are easily influenced by artificial subjectivity.
Disclosure of Invention
The invention aims to provide double-telecentric zoom lens systems from angles (large view field image space) to an object image space for online real-time lens defect detection, so as to solve the technical problems of low defect detection efficiency and high cost of manual visual inspection in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
the zoom lens system from angle to double telecentricity for detecting lens defects changes the object space view field by combining the front fixed group and the zooming image space telecentric system, comprises the front fixed group, the zoom group, the compensation group and the rear fixed group which are sequentially arranged from the object space to the image space along the optical axis direction, wherein the zoom group and the compensation group are in a linkage structure, and the zoom lens system can be changed from the large view field image space telecentric system to the object image space double telecentric system by the synchronous distance or synchronous approach of the zoom group and the compensation group.
As a further improvement of the present invention, the zoom lens system has a field angle of 74 ° when it is in a large-field image-side telecentric system.
The zoom lens system provided by the invention has the advantages that the focal depth is large, the depth of focus is long, the object height is small, the defect details of a local single group of lenses can be detected, the small-field object space system can eliminate the error caused by inaccurate focusing of the object space, the telecentric degree of the image space is 0.02 degrees in two states, the telecentric system of the image space can eliminate the measurement error caused by inaccurate focusing of the image space, the backlight source irradiation is matched, the lens defect images with different sizes (the diagonal length of the whole lens is 150mm, the local object space field is 30mm) produced on line can be collected into a computer through the image system, the defect detection of the defects can be visually and clearly completed through image processing, the defect detection efficiency of workers is improved, and the detection accuracy of the traditional eye defect detection mode is guaranteed.
As a further improvement , all the surfaces of the lens groups in the zoom lens system are spherical or planar.
As a further improvement , the front fixed group includes a front cemented lens group and a front meniscus lens group, the front cemented lens group is a positive power lens group, the front meniscus lens group is a positive meniscus lens, and the convex surface of the front cemented lens group faces the object space, the front cemented lens group includes a th lens and a second lens, the th lens is a biconvex lens, the second lens is a negative meniscus lens, the concave surface of the second lens faces the object space, and the convex surface of the th lens is cemented with the concave surface of the second lens.
As a further improvement , the second lens element is connected with the front meniscus lens group by a spacer, and the distance is 7 +/-0.5 mm.
As a further improvement, the th lens and the front meniscus lens are both made of crown glass of a low dispersion system and the second lens is made of flint glass of a high refractive index.
As a further improvement, the abbe numbers (abbe number is the reciprocal abbe number) of the th lens and the front meniscus lens are 55.49 and 54.67, respectively.
As a further improvement of the invention at , the second lens has a refractive index of 1.69.
As a further improvement , the variable power group includes a fourth lens, a fifth lens and a variable power cemented lens group, the variable power cemented lens group is a negative focal power lens group, the fourth lens and the fifth lens are negative meniscus lenses, concave surfaces of the positive meniscus lenses face the image space, the variable power cemented lens group includes a sixth lens and a seventh lens, the sixth lens is a biconcave lens, and the seventh lens is a biconvex lens.
As a further improvement , the zoom group moves linearly in the lens barrel by the designed cam curve, and the movement is 1-48 mm.
As a further improvement , the compensation group comprises an eighth lens, a compensation cemented lens group and an aperture diaphragm, the compensation cemented lens group is a positive focal power lens group, the eighth lens is a double-convex lens, the compensation cemented lens group comprises a ninth lens and a tenth lens, the ninth lens is a negative meniscus lens, the concave surface of the ninth lens faces the image space, the tenth lens is a double-convex lens, and the distance between the tenth lens and the aperture diaphragm is 27.5-72.5 mm.
As a further improvement , the compensation group moves non-linearly in the lens barrel by the designed cam curve, and the movement is 1-45 mm.
As a further improvement, the rear fixing group includes a tenth lens and a rear cemented lens group, the rear cemented lens group is a positive power lens group, the tenth lens is a negative meniscus lens, and a concave surface faces an object space, the rear cemented lens group includes a twelfth lens and a thirteenth lens, the twelfth lens is a double convex lens, and the thirteenth lens is a double concave lens.
As a further improvement , the front fixing group is arranged in a lens barrel, the length of the lens barrel is 40mm, the zoom group and the compensation group are arranged in a second lens barrel in a sliding mode and slide back and forth in the lens barrel through designed cam curves, the length of the second lens barrel is 245mm, the rear fixing group is arranged in a third lens barrel, adjacent lens barrels are connected through threads, the distance from the third lens barrel to the image space is 20mm, and the distance from the lens barrel to the object space is 100 mm.
Compared with the existing fixed-focus -angle lens, the invention has the following advantages and positive effects:
1. the invention changes the object space view field by combining the front fixed group and the zooming image space telecentric system, can be used for detecting the lens defects of different view fields at different times, can focus to the object space double telecentric system from angle by moving the zooming group and the compensation group through the linkage of the motor double groups, detects the defects of the whole lens (4 x 8) at angle (74 degree of field angle), can locally detect the defect details of a single group of lenses at the time of small view field object space telecentric, has constant multiplying power of the object image double telecentric system under the required object distance, integrates the characteristics of the object space telecentric light path, has large depth of field and long focal depth, accurately measures the size of the defects, can eliminate the measurement error and the focusing error, can collect the online produced lens defect images into a computer through the image system in real time by being matched with the illumination of a backlight source, can visually and clearly complete the defect detection through the image processing, comprehensively improves the efficiency of workers, and ensures the detection accuracy.
2. The invention adopts a zooming structure of a mechanical compensation method, which comprises a front fixed group, a zooming group, a compensation group and a rear fixed group.
3. The zoom lens system achieves the zoom effect by adjusting the zoom group and the compensation group, the zoom group moves linearly, and the compensation group moves nonlinearly, so that the change from a large view field to object space telecentricity is realized.
4. The invention adopts crown glass with low dispersion coefficient, and the imaging is clearer when the dispersion coefficient is smaller.
5. The surface types of the lenses adopted by the invention are all spherical surfaces or planes, and no aspheric surface is introduced, so that the processing and adjusting difficulty is reduced, and the cost is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a zoom structure diagram from to double telecentric zoom lens system from to double telecentric for lens defect detection according to the present invention;
FIG. 2 is a diagram showing the variation of the zoom group and the compensation group in the zoom lens system from angle to double telecentric for detecting lens defects according to the present invention;
FIG. 3 is a schematic structural diagram of an angle -double telecentric zoom lens system for detecting lens defects according to the present invention.
In the figure, the lens comprises a front fixed group 1, a zoom group 2, a compensation group 3, a rear fixed group 4, a G1 lens lens, a G2 lens, a second lens 3 lens, a front meniscus lens, a G4 lens, a fourth lens, a G5 lens, a fifth lens, a G6 lens, a sixth lens, a G7 lens, a seventh lens, a G8 lens, an eighth lens, a G9 lens, a ninth lens, a G10 lens, a tenth lens, a G11 lens, a tenth lens, a G12 lens, a twelfth lens, a G13 lens, a thirteenth lens, a G14 lens and an aperture diaphragm.
Detailed Description
The technical solution of the present invention will be described in detail below to make the objects, technical solutions and advantages of the present invention clearer.
As shown in FIGS. 1-3, the invention provides zoom lens systems from angles to double telecentricity for lens defect detection, which change the object side view field by combining a front fixed group and a zooming image side telecentric system, and comprise a front fixed group 1, a zoom group 2, a compensation group 3 and a rear fixed group 4 which are arranged along the optical axis direction from the object side to the image side in sequence, wherein the zoom group 2 and the compensation group 3 are in a linkage structure, and the zoom lens system can be changed from a large-view-field image side telecentric system to an object side double telecentric system by synchronous distance or synchronous approach of the zoom group 2 and the compensation group 3.
The field angle of the zoom lens system is 74 degrees when the zoom lens system is in the large-field image-side telecentric system.
The zoom lens system provided by the invention has the advantages that the focal depth is large, the depth of focus is long, the object height is small, the defect details of a local single group of lenses can be detected, the small-field object space system can eliminate the error caused by inaccurate focusing of the object space, the telecentric degree of the image space is 0.02 degrees in two states, the telecentric system of the image space can eliminate the measurement error caused by inaccurate focusing of the image space, the backlight source irradiation is matched, the lens defect images with different sizes (the diagonal length of the whole lens is 150mm, the local object space field is 30mm) produced on line can be collected into a computer through the image system, the defect detection of the defects can be visually and clearly completed through image processing, the defect detection efficiency of workers is improved, and the detection accuracy of the traditional eye defect detection mode is guaranteed.
As an optional implementation manner, all the surfaces of the lens groups in the zoom lens system are spherical or planar, and no aspheric surface is introduced, so that the processing and adjusting difficulty is reduced, and the cost is reduced.
The front fixed group 1 comprises a front cemented lens group and a front meniscus lens group G3, the front cemented lens group is a positive focal power lens group, the front meniscus lens group G3 is a positive meniscus lens, the convex surface of the front cemented lens group faces the object space, the front cemented lens group comprises a th lens G1 and a second lens G2, the th lens G1 is a double convex lens, the second lens G2 is a negative meniscus lens, the concave surface of the second lens G2 faces the object space, and the convex surface of the th lens G1 is cemented and connected with the concave surface of the second lens G2.
The second lens G2 and the front meniscus lens group G3 are connected by a space ring, and the distance is 7 +/-0.5 mm.
, the G1 and the front meniscus G3 are made of crown glass of low dispersion system, and the second G2 is made of flint glass of high refractive index.
Further , the abbe numbers (the abbe numbers are reciprocal abbe numbers) of the th lens G1 and the front meniscus lens G3 are 55.49 and 54.67, respectively.
The refractive index of the second lens G2 was 1.69.
As an alternative embodiment, the variable power group 2 includes a fourth lens G4, a fifth lens G5, and a variable power cemented lens group, which is a negative power lens group; the fourth lens element G4 and the fifth lens element G5 are both negative meniscus lenses, the concave surfaces of which face the image, the variable power cemented lens group includes a sixth lens element G6 and a seventh lens element G7, the sixth lens element G6 is a biconcave lens element, and the seventh lens element G7 is a biconvex lens element.
The variable magnification group 2 moves linearly in the lens barrel through a designed cam curve, and the moving amount is 1-48 mm.
The compensation group 3 comprises an eighth lens G8, a compensation cemented lens group and an aperture diaphragm G14, and the compensation cemented lens group is a positive focal power lens group; the eighth lens element G8 is a biconvex lens, the compensating cemented lens group includes a ninth lens element G9 and a tenth lens element G10, the ninth lens element G9 is a negative meniscus lens element, and the concave surface faces the image; the tenth lens G10 is a biconvex lens; the distance between the tenth lens G10 and the aperture stop G14 is 27.5-72.5 mm. When the compensation group 3 moves back and forth, the distance between the tenth lens G10 and the aperture stop G14 is increased or decreased, the maximum distance is 72.5mm, and the minimum distance is 27.5 mm. The movement of the zoom group 2 and the compensation group 3 is a stepped movement mode, and comprises three stages of movement gears.
The compensation group 3 moves in the lens barrel in a non-linear way through a designed cam curve, and the moving amount is 1-45 mm.
The rear fixed group 4 comprises a tenth lens G11 and a rear cemented lens group, the rear cemented lens group is a positive power lens group, the tenth lens G11 is a negative meniscus lens, the concave surface faces the object space, the rear cemented lens group comprises a twelfth lens G12 and a thirteenth lens G13, the twelfth lens G12 is a double convex lens, and the thirteenth lens G13 is a double concave lens.
The front fixing group 1 is arranged in a th lens barrel, the length of the th lens barrel is 40mm, the zoom group 2 and the compensation group 3 are arranged in a second lens barrel in a sliding mode and slide back and forth in the lens barrel through designed cam curves, the length of the second lens barrel is 245mm, the rear fixing group 4 is arranged in a third lens barrel, adjacent lens barrels are connected through threads, the distance from the third lens barrel to an image space is 20mm, and the distance from the th lens barrel to an object space is 100 mm.
Example 1:
in the analysis of the detection systems existing on the market, wherein:
1. the traditional -angle lens system changes along with the object distance, the magnification is not fixed, and the lens defects cannot be accurately measured.
2. For the lenses with different sizes, -angle optical systems with different powers need to be selected, and the working efficiency is greatly reduced.
In conclusion, the existing optical systems can not meet the requirement of detecting defects of the whole lens disc on line in real time and focusing on the details of locally detecting defects of a single group of lenses.
The novel large-view-field double-telecentric zoom lens system for detecting lens defects utilizes the structural characteristics of an object-image-space telecentric system, the large-view-field double-telecentric zoom lens system comprises a front fixing group 1, a zoom group 2, a compensation group 3 and a rear fixing group 4 in the image-space telecentric system, the zoom group 2 and the compensation group 3 are adjusted (the lenses of the zoom group 2 and the compensation group 3 are controlled by a motor to move back and forth), and double-group linkage (a cam curve is designed, the lenses of the zoom group 2 and the compensation group 3 are fixed on the motor by pins, and the front and rear double groups move) is adopted to achieve a zooming effect, when the cam curve is designed, gears can be fixed according to different angles of view so as to meet the requirements of online detection of defects of the whole lens and local detection of defects of the single group of lenses, and the multiplying power is constant, and the surface of each lens group is spherical.
The novel large-field-of-view double-telecentric zoom lens system for detecting lens defects comprises 13 lenses which are sequentially G1-G13 lens groups.
The front fixed group 1 comprises groups of cemented lens groups and pieces of front meniscus lenses G3, wherein a positive power th lens G1, a negative power second lens G2, a positive power front meniscus lens G3., a th lens G1 and a front meniscus lens G3 are sequentially arranged along the optical axis direction, crown glass with low dispersion coefficient is adopted, a second lens G2 is made of flint glass with high refractive index and is favorable for correcting astigmatism and curvature of field, and the th lens G1, the second lens G2 and the front meniscus lens G3 are positive negative power lenses and are favorable for correcting high-grade off-axis aberration.
The zoom group 2 comprises two meniscus lenses and cemented lens groups, and is sequentially provided with a negative focal power fourth lens G4, a negative focal power fifth lens G5, a negative focal power sixth lens G6 and a positive focal power seventh lens G7, so that the burden of the focal power can be dispersed, and the spherical aberration can be corrected.
And the compensation group 3 comprises double convex lenses and cemented lens groups, and sequentially comprises a positive focal power eighth lens G8, a negative focal power ninth lens G9 and a positive focal power tenth lens G10, so that the compensation group is favorable for dispersing focal power burden and correcting spherical aberration.
And the rear fixed group 4 comprises meniscus lenses and group cemented lens groups, namely a negative power tenth lens G11, a positive power twelfth lens G12 and a negative power thirteenth lens G13, so that the power burden can be dispersed, and the spherical aberration can be corrected.
The lens of the variable power group 2 moves linearly in distance, and the lens of the compensation group 3 moves nonlinearly in distance.
The method comprises the steps of determining whether lenses in a sizing range have lens defects such as scratches, pits, bubbles and the like, wherein accuracies are given during detection, defects larger than the accuracy range need to be detected, and defects smaller than the accuracy range do not need to be detected (the defects are detected by adjusting a zoom group and a compensation group to achieve the purpose of zooming, different fields of view exist at different gears under a fixed working distance, and partial amplification detection can be performed on a specific range during detection of defects of the whole lens).
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (10)
- The zoom lens system is characterized by comprising a front fixed group, a zoom group, a compensation group and a rear fixed group which are sequentially arranged from an object direction to an image direction, wherein the zoom group and the compensation group are in a linkage structure, and the zoom lens system can be changed from a large-view-field image space telecentric system to an object image space double telecentric system through synchronous distance or synchronous approach of the zoom group and the compensation group.
- 2. The -angle-to-double-telecentric zoom lens system for lens defect detection according to claim 1, wherein the zoom lens system has a field angle of 74 ° when it is in the large-field-of-view image-side telecentric system.
- 3. An -degree-double-telecentric zoom lens system for lens defect detection according to claim 1 or 2, wherein the front fixed group comprises a front cemented lens group and a front meniscus lens group, the front cemented lens group is a positive power lens group, the front meniscus lens group is a positive meniscus lens, and the convex surface faces the object space, the front cemented lens group comprises a -degree lens and a second lens, the -degree lens is a double convex lens, the second lens is a negative meniscus lens, the concave surface of the second lens faces the object space, and the convex surface of the -degree lens and the concave surface of the second lens are cemented.
- 4. The system according to claim 3, wherein said lens and said front meniscus lens are made of crown glass of low dispersion system, and said second lens is made of flint glass of high refractive index.
- 5. The system according to claim 1, 2 or 4, wherein the variable power group comprises a fourth lens, a fifth lens and a variable power cemented lens group, the variable power cemented lens group is a negative power lens group, the fourth lens and the fifth lens are negative meniscus lenses, the concave surfaces of the fourth lens and the fifth lens face the image side, the variable power cemented lens group comprises a sixth lens and a seventh lens, the sixth lens is a biconcave lens, and the seventh lens is a biconvex lens.
- 6. The system of claim 5, wherein the variable power group is linearly moved in the lens barrel by an amount of 1-48 mm.
- 7. An angle-double telecentric zoom lens system for lens defect detection according to claim 1, 2, 4 or 6, wherein the compensation group comprises an eighth lens, a compensation cemented lens group and an aperture stop, the compensation cemented lens group is a positive power lens group, the eighth lens is a double convex lens, the compensation cemented lens group comprises a ninth lens and a tenth lens, the ninth lens is a negative meniscus lens with the concave surface facing the image side, the tenth lens is a double convex lens, and the distance between the tenth lens and the aperture stop is 27.5-72.5 mm.
- 8. The system of claim 7, wherein the compensation group moves non-linearly in the lens barrel by an amount of 1-45 mm.
- 9. An angle-double telecentric zoom lens system for lens defect detection according to claim 1, 2, 4, 6 or 8, wherein the rear fixed group comprises a tenth lens and a rear cemented lens group, the rear cemented lens group is a positive power lens group, the tenth lens is a negative meniscus lens, the concave surface faces the object side, the rear cemented lens group comprises a twelfth lens and a thirteenth lens, the twelfth lens is a double convex lens, and the thirteenth lens is a double concave lens.
- 10. An -degree-of-freedom double telecentric zoom lens system for lens defect detection according to claim 1, 2, 4, 6 or 8, wherein the front fixed group is arranged in the lens barrel, the lens barrel is 40mm in length, the zoom group and the compensation group are both slidably arranged in the second lens barrel, the second lens barrel is 245mm in length, the rear fixed group is arranged in the third lens barrel, adjacent lens barrels are connected through threads, the distance from the third lens barrel to the image side is 20mm, and the distance from the lens barrel to the object side is 100 mm.
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| CN201911131959.8A CN110737081A (en) | 2019-11-19 | 2019-11-19 | -angle double telecentric zoom lens system for lens defect detection |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114563413A (en) * | 2022-04-24 | 2022-05-31 | 苏州高视半导体技术有限公司 | High-precision semiconductor chip detection device and compensation lens |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114563413A (en) * | 2022-04-24 | 2022-05-31 | 苏州高视半导体技术有限公司 | High-precision semiconductor chip detection device and compensation lens |
| CN114563413B (en) * | 2022-04-24 | 2022-08-16 | 苏州高视半导体技术有限公司 | High-precision semiconductor chip detection device and compensation lens |
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