CN110726757A - Humidity sensor based on halloysite nanotube and preparation method thereof - Google Patents

Humidity sensor based on halloysite nanotube and preparation method thereof Download PDF

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CN110726757A
CN110726757A CN201910990062.4A CN201910990062A CN110726757A CN 110726757 A CN110726757 A CN 110726757A CN 201910990062 A CN201910990062 A CN 201910990062A CN 110726757 A CN110726757 A CN 110726757A
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humidity sensor
humidity
halloysite nanotube
halloysite
substrate
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CN110726757B (en
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太惠玲
段再华
蒋亚东
赵秋妮
黄琦
谢光忠
杜晓松
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University of Electronic Science and Technology of China
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    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance

Abstract

The invention provides a humidity sensor based on a halloysite nanotube and a preparation method thereof, belongs to the technical field of humidity sensitive elements and preparation thereof, and discloses a humidity sensor based on a halloysite nanotube. The halloysite nanotube-based humidity sensor has large humidity response, and impedance change is 5 orders of magnitude; the detection range is wide, and the relative humidity in the range of 0-91.5% can be detected; the response time is fast and is not more than 1 second; the method has the advantages of rich raw material resources, low cost, environmental protection and simple device preparation process, and has better practical application value.

Description

Humidity sensor based on halloysite nanotube and preparation method thereof
Technical Field
The invention relates to the technical field of humidity-sensitive elements and preparation thereof, in particular to a humidity sensor based on halloysite nanotubes and a preparation method thereof.
Background
Moisture sensing technology has been developed for over 200 years, and the recognition of moisture sensors began with the successful development of dip-coated LiCl moisture sensors in 1938 us f.w.dumcore, since which several dozen moisture sensors and sensors have been developed.
The relative humidity is used as an important environmental parameter in places such as home, industry, agriculture and medical treatment, and it is necessary to develop a high-performance and low-cost humidity sensor to accurately monitor the humidity.
The humidity sensor is a device type device capable of converting humidity into electric quantity in a certain proportional relation with the humidity and outputting the electric quantity. The main characteristic parameters include humidity range, humidity sensing characteristic quantity, sensitivity, humidity temperature coefficient, response time and humidity hysteresis return difference.
The moisture-sensitive material serves as the core of the humidity sensor, and is characterized by containing hydrophilic functional groups and having hydrophilic characteristics.
Chinese patent 200810037939.X discloses a preparation method of a Ni/Si nanowire array and a micro-nano humidity sensor based on the nanowire array. The device is to manufacture a large-area silicon nanowire array on an N-type silicon substrate by adopting an electrochemical etching technology, and then to electrolessly deposit a nickel film on the array. The structure has large length-diameter ratio and specific surface area, and the microstructure is unique, so that the structure can generate unique physical and chemical properties, and the adsorption and desorption capacity of the structure to water molecules is better than that of a pure silicon nanowire array. The preparation process is complex and the process control is difficult.
Chinese patent CN200810046860.3 discloses a method for preparing a nano metal oxide ceramic thin/thick film, which sequentially comprises the steps of preparing mixed solution containing metal cations, organic monomers, a cross-linking agent and an initiator ①, catalyzing and initiating ② to form gel, preparing slurry suitable for film coating ③, coating ④ and carrying out ⑤ heat treatment, wherein the method takes cheap inorganic salt as raw materials, and has the advantages of simple process and easy operationThe method has high efficiency and good repeatability, and the size of the metal oxide particles and the thickness of the film can be easily controlled by adjusting process parameters. Can effectively inhibit the mutual contact and agglomeration of particles, and simultaneously makes up the defects of high requirement and high cost of common film preparation technology on experimental equipment. Has stronger universality and universality, and is also suitable for preparing the composite multilayer nano metal oxide ceramic thin/thick film. However, since tin oxide itself is easily reacted with NO, NO2,CO,H2,H2S and C2H5Other gases such as OH react chemically, and thus have poor selectivity for humidity detection.
In order to develop a high-performance and low-cost humidity sensor, on one hand, researchers improve the humidity-sensitive performance of the traditional humidity-sensitive material by using a novel preparation process; on the other hand, the performance of the humidity sensor is improved by using the novel humidity sensitive material. The humidity sensors reported at present generally do not allow for a compromise between high performance and low cost.
Disclosure of Invention
Aiming at the defects that the existing humidity sensor generally cannot give consideration to high performance and low cost, the invention provides a humidity sensor based on halloysite nanotubes and a preparation method thereof.
The humidity sensor based on the halloysite nanotube comprises a substrate, wherein the surface of the substrate contains interdigital electrodes, a humidity sensing layer is coated on the substrate, the humidity sensing layer completely covers the interdigital electrodes, the humidity sensing layer is made of the halloysite nanotube and a solvent, and the mass ratio of the halloysite nanotube to the solvent is 1: 1-10.
In the technical scheme of the application: the halloysite is a natural tubular silicate mineral and structurally consists of a dioctahedral structure with a 1:1 structural unit layer, and the structural characteristics determine that a large number of pore channels exist in the halloysite, the surface of the halloysite has Si-OH and negative charges, the halloysite has good heat resistance, acid and alkali resistance, high water absorption and large specific surface area; by utilizing the large specific surface area and good hydrophilic property of the halloysite nanotube, the halloysite nanotube and a solvent are uniformly mixed according to the mass ratio and then coated on the surface of the substrate and the surface of the interdigital electrode to form a humidity sensing layer, the impedance change of the humidity sensor is 5 orders of magnitude, the detection range is wide, and the relative humidity in the range of 0-91.5% can be detected; the response time is fast and is not more than 1 second; the humidity sensor has the advantages of rich raw material resources, low cost, environmental protection and simple device preparation process, and overcomes the defect that the conventional humidity sensor cannot give consideration to high performance and low cost generally.
Preferably, the mass ratio of the halloysite nanotubes to the solvent is 1: 3.
Preferably, the solvent is deionized water, ethanol or acetone.
Preferably, the thickness of the humidity sensitive layer is 10-100 μm.
Preferably, the number of the interdigital electrodes is 1-10 pairs, and the interdigital distance of each pair of the interdigital electrodes is 50-500 μm.
More preferably, the number of the interdigital electrodes is 5 pairs, and the interdigital distance of each pair of the interdigital electrodes is 150 μm.
Preferably, the substrate is one of alumina, silicon, polyimide, polyetherimide, paper or fabric.
A preparation method of a humidity sensor based on halloysite nanotubes comprises the following steps:
(1) uniformly mixing the halloysite nanotube with a solvent to obtain a halloysite nanotube solution;
(2) coating the halloysite nanotube solution on a substrate containing interdigital electrodes to form a humidity sensing layer;
(3) and (3) drying the substrate with the humidity sensing layer at the temperature of 20-100 ℃ for 1-5 hours to obtain the halloysite nanotube humidity sensor.
Preferably, the coating in step (2) is performed by pen coating, spin coating, drop coating, air spraying, or dipping.
Preferably, in the step (3), the substrate having the humidity-sensitive layer is dried at 70 ℃ for 2 hours.
In the technical scheme of the application, the halloysite nanotubes are commercially available.
Compared with the prior art, the invention has the beneficial effects that:
(1) the humidity sensor has the advantages that the impedance change is 5 orders of magnitude, the response speed is high and is not more than 1 second, the humidity sensor has good response recovery characteristics, and the humidity sensor has high performance and low cost;
(2) the halloysite nanotube solution is uniformly coated on a substrate with interdigital electrodes, and the preparation of the halloysite nanotube humidity sensor is completed after drying, so that the preparation method is simple and convenient, the energy consumption is low, and the cost is low;
(3) the halloysite nanotube humidity sensor is simple in structure and beneficial to large-scale manufacturing, popularization and use;
(4) the halloysite nanotube is applied to a humidity sensor as a humidity sensing layer for the first time, and has important significance for developing a humidity sensor with simple structure, simple and convenient preparation technology, low cost and high performance.
Drawings
FIG. 1 is a transmission electron microscope image of a halloysite nanotube of the invention;
FIG. 2 is a graph of impedance versus relative humidity for a halloysite nanotube humidity sensor of the invention;
FIG. 3 is a graph of the wet hysteresis of a halloysite nanotube humidity sensor of the invention;
fig. 4 is a graph of 10 cycle response versus time for a halloysite nanotube humidity sensor of the invention at 0% and 91.5% relative humidity switching.
Fig. 5 is a graph of linear response versus time for a halloysite nanotube humidity sensor of the invention at 0% and 91.5% relative humidity switching.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following detailed description of the present invention is provided with reference to specific embodiments.
Example 1
A humidity sensor based on a halloysite nanotube comprises a substrate, wherein the surface of the substrate contains interdigital electrodes, a humidity sensing layer is coated on the substrate and completely covers the interdigital electrodes, the humidity sensing layer is made of the halloysite nanotube and a solvent, and the mass ratio of the halloysite nanotube to the solvent is 1: 1; the solvent is ethanol; the thickness of the humidity induction layer is 10 micrometers; the number of the interdigital electrodes is 1 pair, and the interdigital distance of each pair of the interdigital electrodes is 500 mu m; the substrate is polyimide.
Example 2
A humidity sensor based on a halloysite nanotube comprises a substrate, wherein the surface of the substrate contains interdigital electrodes, a humidity sensing layer is coated on the substrate and completely covers the interdigital electrodes, the humidity sensing layer is made of the halloysite nanotube and a solvent, and the mass ratio of the halloysite nanotube to the solvent is 1: 3; the solvent is deionized water; the thickness of the humidity induction layer is 30 micrometers; the number of the interdigital electrodes is 5 pairs, and the interdigital distance of each pair of the interdigital electrodes is 150 mu m; the substrate is aluminum oxide.
Example 3
A humidity sensor based on a halloysite nanotube comprises a substrate, wherein the surface of the substrate contains interdigital electrodes, a humidity sensing layer is coated on the substrate and completely covers the interdigital electrodes, the humidity sensing layer is made of the halloysite nanotube and a solvent, and the mass ratio of the halloysite nanotube to the solvent is 1: 10; the solvent is acetone; the thickness of the humidity induction layer is 100 mu m; the number of the interdigital electrodes is 10, and the interdigital distance of each pair of the interdigital electrodes is 50 μm; the substrate is paper.
In embodiments 1-3, the substrate can also be one of silicon, polyetherimide or fabric;
example 4
Based on examples 1-3, a method for preparing a humidity sensor based on halloysite nanotubes comprises the following steps:
(1) uniformly mixing the halloysite nanotube with a solvent to obtain a halloysite nanotube solution;
(2) coating the halloysite nanotube solution on a substrate containing interdigital electrodes to form a humidity sensing layer, wherein the coating is coating by a coating pen, spin coating, drop coating, air spraying or dipping;
(3) and (3) drying the substrate with the humidity sensing layer at 20 ℃ for 5 hours to obtain the halloysite nanotube humidity sensor.
Example 5
Based on the embodiment 4, in the step (3), the substrate having the humidity sensing layer is dried at 60 ℃ for 2 hours, and the halloysite nanotube humidity sensor is obtained.
Example 6
Based on the embodiment 4, in the step (3), the substrate having the humidity sensing layer is dried at 100 ℃ for 1 hour, and the halloysite nanotube humidity sensor is obtained.
Test examples
The humidity sensors based on halloysite nanotubes prepared according to examples 2, 4 and 5 (in step (3), the substrate with the humidity sensing layer was dried at 60 ℃ for 2 hours), and the performance test was performed according to a method disclosed in the art, specifically: testing the impedance signal of the prepared humidity sensor by using a CHS-1 intelligent humidity-sensitive analysis system (Beijing Elite technology Co., Ltd.), wherein different relative humidity environments are obtained by a bubbling method and are calibrated by a high-precision humidity sensor, and the relative humidity comprises 0%, 10.9%, 18.7%, 28.8%, 41.1%, 51.9%, 60.8%, 70.0%, 79.3%, 86.7% and 91.5%;
in the technical scheme of the invention, the halloysite nanotube is of a nanorod structure, a transmission electron microscope picture is shown in figure 1, the outer diameter of the halloysite nanotube is 30-50nm, and the inner diameter of the halloysite nanotube is 5-10 nm;
as shown in FIG. 2, the impedance change of the humidity sensor based on the halloysite nanotubes measured in the test example is 5 orders of magnitude, and is measured at 100 Hz operating frequency under 1V AC;
as can be seen from the graph of the hysteresis of the halloysite nanotube humidity sensor of FIG. 3, the hysteresis is about 5%;
as can be seen from the 10 cycle response versus time plots of the halloysite nanotube humidity sensor of fig. 4 at 0% and 91.5% relative humidity switching, the halloysite nanotube based humidity sensor was shown to have good response recovery characteristics.
As can be seen from the linear response-time plot of the halloysite nanotube humidity sensor of fig. 5 at 0% and 91.5% relative humidity switching, the halloysite nanotube based humidity sensor is shown to have a fast response time of 0.7 seconds.
The above-mentioned embodiments only express the specific embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present application. It should be noted that, for those skilled in the art, without departing from the technical idea of the present application, several changes and modifications can be made, which are all within the protection scope of the present application.

Claims (10)

1. A humidity sensor based on halloysite nanotubes, comprising: the interdigital electrode structure comprises a substrate, wherein the surface of the substrate contains interdigital electrodes, a humidity induction layer is coated on the substrate and completely covers the interdigital electrodes, the humidity induction layer is made of a halloysite nanotube and a solvent, and the mass ratio of the halloysite nanotube to the solvent is 1: 1-10.
2. The halloysite nanotube based humidity sensor of claim 1, wherein: the mass ratio of the halloysite nanotubes to the solvent is 1: 3.
3. The halloysite nanotube based humidity sensor of claim 1, wherein: the solvent is deionized water, ethanol or acetone.
4. The halloysite nanotube based humidity sensor of claim 1, wherein: the thickness of the humidity sensing layer is 10-100 mu m.
5. The halloysite nanotube based humidity sensor of claim 1, wherein: the number of the interdigital electrodes is 1-10 pairs, and the interdigital distance of each pair of the interdigital electrodes is 50-500 mu m.
6. The halloysite nanotube based humidity sensor of claim 5, wherein: the number of the interdigital electrodes is 5 pairs, and the interdigital distance of each pair of the interdigital electrodes is 150 mu m.
7. The halloysite nanotube based humidity sensor of claim 1, wherein: the substrate is one of aluminum oxide, silicon, polyimide, polyetherimide, paper or fabric.
8. Method for the preparation of a humidity sensor based on halloysite nanotubes according to any of claims 1 to 7, characterized in that it comprises the following steps:
(1) uniformly mixing the halloysite nanotube with a solvent to obtain a halloysite nanotube solution;
(2) coating the halloysite nanotube solution on a substrate containing interdigital electrodes to form a humidity sensing layer;
(3) and (3) drying the substrate with the humidity sensing layer at the temperature of 20-100 ℃ for 1-5 hours to obtain the halloysite nanotube humidity sensor.
9. The method of claim 8, wherein the step (2) is performed by pen coating, spin coating, drop coating, air spraying, or dipping.
10. The method of claim 8, wherein in the step (3), the substrate having the humidity sensing layer is dried at 70 ℃ for 2 hours.
CN201910990062.4A 2019-10-17 2019-10-17 Humidity sensor based on halloysite nanotube and preparation method thereof Active CN110726757B (en)

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CN112986041A (en) * 2021-02-09 2021-06-18 中国石油大学(华东) Humidity-sensitive film based on chitosan and halloysite nanotube and preparation method and application thereof
CN116355522A (en) * 2023-02-20 2023-06-30 中国电子科技集团公司第四十九研究所 Preparation method of humidity sensor with polyimide and halloysite nanotube composite humidity-sensitive sensing layer

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CN112798659A (en) * 2020-12-29 2021-05-14 电子科技大学 Humidity sensor based on sepiolite modified carbon material and preparation method thereof
CN112986041A (en) * 2021-02-09 2021-06-18 中国石油大学(华东) Humidity-sensitive film based on chitosan and halloysite nanotube and preparation method and application thereof
CN116355522A (en) * 2023-02-20 2023-06-30 中国电子科技集团公司第四十九研究所 Preparation method of humidity sensor with polyimide and halloysite nanotube composite humidity-sensitive sensing layer

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