CN110711492A - Electroosmosis micropump device - Google Patents
Electroosmosis micropump device Download PDFInfo
- Publication number
- CN110711492A CN110711492A CN201810763237.3A CN201810763237A CN110711492A CN 110711492 A CN110711492 A CN 110711492A CN 201810763237 A CN201810763237 A CN 201810763237A CN 110711492 A CN110711492 A CN 110711492A
- Authority
- CN
- China
- Prior art keywords
- micro
- liquid
- electroosmosis
- channel
- microelectrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
Landscapes
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Health & Medical Sciences (AREA)
- Urology & Nephrology (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
Abstract
An electroosmosis micropump device comprises an electroosmosis micro-channel and a liquid microelectrode cavity channel which are integrated on a microfluidic chip, wherein the electroosmosis micro-channel is used for generating electroosmosis driving force under voltage to form electroosmosis flow, and two ends of the electroosmosis micro-channel are respectively connected with a fluid inlet and a fluid outlet through a fluid transition micro-cavity channel. The beneficial effects are as follows: the micro-electrode can completely avoid hydrolysis reaction on the surface of the micro-electrode and the generation of current joule heat, thereby improving the anti-interference capability of the micro-electrode, enhancing the stability and reliability of the operation of the micro-pump and prolonging the service life of the micro-pump.
Description
Technical Field
The invention relates to the technical field of microfluidics, in particular to an electroosmosis micropump device.
Background
The electroosmosis micropump is an electric control microfluid non-mechanical driving micropump based on electroosmosis flow phenomenon. The electroosmosis micropump has the characteristics of multiple types of driving fluids, good high-pressure performance, continuous and pulsation-free flow, high stable operation reliability, long service life of no moving part, capability of realizing accurate control of fluid flow speed and bidirectional regulation of flow direction and the like, and is widely concerned and practically applied in the technical field of microfluidics.
Porous dielectric filled electroosmotic micropumps are one of the most widely used forms of microfluidic technology and can be used to achieve high pressure or flow output. The channel of the electroosmosis micropump is filled with a large amount of micro granular dielectric materials, and under the action of an external voltage, microfluid on the surface of the granules forms electroosmosis flow under the action of electroosmosis driving force. Due to the stable physicochemical properties, platinum or gold is often used as the electrode material of such micropumps. The platinum wire or the gold wire is directly inserted into the inlet and outlet liquid storage tank of the micro pump, which is the simplest electrode form; the porous platinum or gold film integrated in the reservoir of the inlet and the outlet of the micropump by deposition or sputtering and the like is another common electrode form. Both forms of electrodes are immersed in the microfluidics, in direct contact with the microfluidics. When the driving voltage is directly loaded on the microfluid through the two contact electrodes to generate the electroosmosis driving force, the surface of the electrode is easy to generate electrolytic reaction, bubbles, hydrolysis byproducts, current joule heat and the like, so that the components and the temperature environment of the microfluid are changed, the electroosmosis flow is blocked, and the electroosmosis driving force is reduced.
The conductive gel polymer or conductive glass film is arranged between the platinum or gold electrode and the microfluid and is used for physically isolating the direct contact between the metal electrode and the microfluid, and although the occurrence of electrolytic reaction can be completely avoided and bubbles, electrolytic products and joule heat can be eliminated, the manufacturing process of the conductive film is particularly complex, the structural stability is poor and the service life is short.
Disclosure of Invention
The invention aims to solve the problems and designs an electroosmosis micropump device. The specific design scheme is as follows:
the utility model provides an electroosmosis micropump device, is including integrated electroosmosis miniflow channel and the liquid microelectrode chamber way on micro-fluidic chip, the electroosmosis miniflow channel is used for producing the electroosmosis drive power and forms the electroosmosis flow under voltage, electroosmosis miniflow channel both ends are connected with fluid inlet, fluid outlet through fluid transition microcavity way respectively, be equipped with on the liquid microelectrode chamber way and be used for the filling opening, the pouring outlet of conductive liquid business turn over irritate, it is connected with controllable power module to irritate the filling opening, pour the exit linkage, controllable power module is used for the both ends of electroosmosis miniflow channel form the potential difference.
The fluid micro-channel comprises an electroosmosis micro-channel, a transition micro-cavity channel, a fluid inlet and a fluid outlet, wherein the electroosmosis micro-channel is formed by connecting a plurality of channels in parallel, and the fluid inlet and the fluid outlet are respectively connected with two ends of the electroosmosis micro-channel through the transition micro-cavity channel and are parallel to the electroosmosis micro-channel; the fluid inlet and outlet can be respectively connected with the micro-fluid system outside the chip for the inlet and outlet of the micro-pump, and can provide pump flow outside the chip, or can be used as a unified part of the micro-fluid system inside the chip for providing pump flow inside the chip.
The liquid conductive medium is injected into the porous electrode cavity through the electrode injection inlet to form a microelectrode, and the redundant conductive medium overflows from the electrode injection outlet; thin metal wires are inserted into the electrode filling inlet and the electrode filling outlet and are used as leads to be connected with an external power supply.
The number of the electroosmosis micro-channels is a plurality, the plurality of the electroosmosis micro-channels are distributed in a rectangular array in the radial direction,
the liquid microelectrode cavity channel is of a vertically placed plate-shaped structure, conductive liquid such as low-melting-point metal, ionic liquid or low-melting-point molten salt is filled in the liquid microelectrode cavity channel,
the electroosmosis micro-channel is of a tubular structure, a hollow channel for the electroosmosis micro-channel to penetrate through is arranged on the liquid microelectrode channel, the diameter of the hollow channel is larger than the outer diameter of the electroosmosis micro-channel, the axial direction of the electroosmosis micro-channel is perpendicular to the plate surface of the liquid microelectrode channel, and the hollow channel is one of a micron-sized channel, a submicron-sized channel and a nanoscale channel.
The liquid conductive medium is mercury in a liquid state, or metal gallium, or gallium-indium alloy, or gallium-indium-tin alloy, or bismuth-indium-tin alloy, or ionic liquid, or molten salt. The conductive liquid may be in a liquid state or a solid state in a working state with a temperature change after filling the electrode microchannel to form the electrode.
The number of the liquid microelectrode cavity channels is two, the two liquid microelectrode cavity channels are respectively sleeved at the left end and the right end of the electroosmosis micro-channel, and the two liquid microelectrode cavity channels are positioned between the two fluid transition micro-cavity channels at the two ends of the electroosmosis micro-channel.
The electroosmosis micro-channel and the liquid microelectrode cavity channel are manufactured by adopting an MEMS micromachining method.
The components for manufacturing the electroosmotic micro-channel comprise polydimethylsiloxane PDMS, polymethyl methacrylate PMMA, silicon, glass or quartz
The liquid microelectrode cavity channel is made of polydimethylsiloxane PDMS, polymethyl methacrylate PMMA, silicon, glass or quartz.
After the fluid micro-channel and the electrode micro-channel are manufactured, the liquid microelectrode is preferably manufactured and molded by a micro-injection filling method.
The liquid microelectrode material is mercury, or metal gallium, or gallium-indium alloy, or gallium-indium-tin alloy, or bismuth-indium-tin alloy, or ionic liquid, or molten salt which is in a liquid state at room temperature.
And the filling inlet or the filling outlet of the liquid microelectrode runner is respectively connected with the positive electrode and the negative electrode of the controllable power supply module through two solid metal wire leads.
The hollow cavity channel in the electroosmosis micro-channel and the liquid microelectrode cavity channel is in a cylinder shape or a cuboid shape.
The width of the liquid microelectrode cavity channel is larger than the length of the electroosmosis micro-channel, and the thickness is smaller than the length of the electroosmosis micro-channel. The gap between the liquid microelectrode cavity channel and the electroosmosis micro-channel and between the liquid microelectrode cavity channel and the fluid transition micro-cavity channel is far shorter than the length of the electroosmosis micro-channel.
The liquid conductive medium is injected into the liquid microelectrode cavity channel by adopting a micro-irrigation method.
The electroosmosis micropump device obtained by the technical scheme of the invention has the beneficial effects that:
the microelectrode is formed by injecting a liquid conductive medium into a pre-manufactured electrode micro-channel by using low-melting-point metal, ionic liquid or low-melting-point molten salt with excellent conductivity as a microelectrode material and using a simple micro-injection method, and the microelectrode is kept in non-contact with the electroosmosis micro-channel. Compared with a contact type platinum or gold film microelectrode, the liquid microelectrode provided by the invention can completely avoid hydrolysis reaction on the surface of the microelectrode and generation of current joule heat when the micropump operates, so that the anti-interference capability of the microelectrode is improved, the stability, the reliability and the service life of the micropump during operation are enhanced, and the micropump has the advantages of compact structure, convenience in manufacturing and easiness in integration.
Drawings
FIG. 1 is a schematic diagram of an electroosmotic micropump device according to the present invention;
FIG. 2 is a schematic view of an electroosmotic microchannel according to the present invention;
FIG. 3 is a schematic diagram of the liquid microelectrode of the present invention on the axis of the lumen;
in the figure, 1, a controllable power supply module; 2. an electroosmotic microchannel; 3. a fluid inlet; 4. a fluid outlet; 5. a fluid transition microcavity; 6. a liquid microelectrode cavity channel; 7. filling the liquid microelectrode into an injection port; 8. a liquid microelectrode perfusion outlet; 9. a solid state wire lead.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings.
The utility model provides an electroosmosis micropump device, is including integrated electroosmosis micro channel 2 and liquid microelectrode chamber way 6 on micro-fluidic chip, electroosmosis micro channel 2 is used for producing the electroosmosis drive power and forms the electroosmosis flow under the voltage, 2 both ends of electroosmosis micro channel are connected with fluid import 3, fluid outlet 4 through fluid transition micro chamber way 5 respectively, be equipped with on the liquid microelectrode chamber way 6 and be used for the infusion mouth 7, the export 8 of infusing of conducting liquid business turn over, it is connected with controllable power module 1 to irritate injection mouth 7, infuse export 8, controllable power module 1 is used for the both ends of electroosmosis micro channel 2 form the potential difference.
The number of the electroosmotic micro flow channels 2 is a plurality, the plurality of the electroosmotic micro flow channels 2 are distributed in a rectangular array in the radial direction,
the liquid microelectrode cavity channel 6 is a vertically placed plate-shaped structure, conductive liquid such as low-melting-point metal, ionic liquid or low-melting-point molten salt is filled in the liquid microelectrode cavity channel 6,
the electroosmosis micro-channel 2 is of a tubular structure, a hollow cavity channel used for penetrating through the electroosmosis micro-channel 2 is arranged on the liquid microelectrode cavity channel 6, the diameter of the hollow cavity channel is larger than the outer diameter of the electroosmosis micro-channel 2, the axial direction of the electroosmosis micro-channel 2 is perpendicular to the plate surface of the liquid microelectrode cavity channel 6, and the hollow cavity channel is one of a micron-sized cavity channel, a submicron-sized cavity channel and a nanometer-sized cavity channel.
The liquid conductive medium is mercury in a liquid state, or metal gallium, or gallium-indium alloy, or gallium-indium-tin alloy, or bismuth-indium-tin alloy, or ionic liquid, or molten salt. The conductive liquid may be in a liquid state or a solid state in a working state with a temperature change after filling the electrode microchannel to form the electrode.
The number of the liquid microelectrode cavity channels 6 is two, the two liquid microelectrode cavity channels 6 are respectively sleeved at the left end and the right end of the electroosmosis micro-channel 2, and the two liquid microelectrode cavity channels 6 are positioned between the two fluid transition micro-cavity channels 5 at the two ends of the electroosmosis micro-channel 2.
The electroosmosis micro-channel 2 and the liquid microelectrode cavity channel 6 are manufactured by adopting an MEMS micro-processing method.
The components for manufacturing the electroosmotic micro-channel 2 comprise polydimethylsiloxane PDMS, polymethyl methacrylate PMMA, silicon, glass or quartz
The liquid microelectrode cavity channel 6 is made of polydimethylsiloxane PDMS, polymethyl methacrylate PMMA, silicon, glass or quartz.
The hollow cavity channels in the electroosmosis micro-channel 2 and the liquid microelectrode cavity channel 6 are in a cylindrical shape or a cuboid shape.
The width of the liquid microelectrode cavity channel 6 is larger than the length of the electroosmosis micro-channel 2, and the thickness is smaller than the length of the electroosmosis micro-channel 2. The gap between the liquid microelectrode cavity channel 6 and the electroosmosis micro-channel 2 and between the liquid microelectrode cavity channel and the fluid transition micro-cavity channel 5 is far shorter than the length of the electroosmosis micro-channel 2.
The liquid conductive medium is injected into the liquid microelectrode cavity channel 6 by adopting a micro-irrigation method.
Example 1
When the electroosmosis micropump device works, a liquid conductive medium is poured into the liquid microelectrode cavity channel 6 from a pouring inlet 7 on the liquid microelectrode cavity channel 6, and redundant liquid conductive medium overflows from a pouring outlet 8 to form a liquid microelectrode; the positive and negative poles of the controllable power module 1 make the liquid microelectrode cavity channel 6 at the two ends of the electroosmosis micro-channel 2 generate high potential and low potential respectively, because the electroosmosis micro-channel 2 is in the potential field, the fluid flowing through the electroosmosis micro-channel is influenced by the high and low potential difference of the potential field, and is pumped from the fluid inlet 3 to the fluid outlet 4 by the driving of electroosmosis output pressure. Varying the output voltage of the controllable power supply module 1 can adjust the electroosmotic output pressure and thus the flow rate and flow of the fluid being pumped.
In the embodiment, the liquidity of the liquid conductive medium is utilized, the liquid conductive medium is injected into the liquid microelectrode cavity channel 6 from the injection inlet 7 by adopting an injection method, and redundant liquid conductive medium overflows from the injection outlet 8 in the injection process. After the solid metal wire lead 9 is led out from the filling opening 7 and the filling outlet 8, the joint of the liquid microelectrode cavity channel 6 and the solid metal lead 9 is sealed by glue. The glue is preferably PDMS silicone oil or transparent electrically insulating silicone. The method for filling the liquid conductive medium is simple to operate, good in repeatability and stable in structure of the formed microelectrode through one-step forming. The liquid metal injection device preferably employs a conventional microinjector.
The liquid conductive medium is filled in the liquid microelectrode cavity 6, and the liquid conductive medium is liquid mercury, or metal gallium, or gallium alloy, or bismuth indium tin alloy, or ionic liquid, or low melting point molten salt under the room temperature condition.
It should be noted that, in this embodiment, except that the perfusion inlet 7 and the perfusion outlet 8 of the liquid microelectrode cavity 6 are connected in parallel and then connected to the controllable power module 1 through the lead 9, the following two connection methods may be selected: the perfusion inlet 7 of the liquid microelectrode cavity channel 6 is connected with the controllable power supply module 1 through a lead 9; or the perfusion outlet 8 of the liquid microelectrode cavity channel 6 is connected with the controllable power supply module 1 through a lead 9. The connection conditions of the above three connection modes are the same, and the requirements for forming the micro-electrode in the present embodiment can be met.
The technical solutions described above only represent the preferred technical solutions of the present invention, and some possible modifications to some parts of the technical solutions by those skilled in the art all represent the principles of the present invention, and fall within the protection scope of the present invention.
Claims (7)
1. The utility model provides an electroosmosis micropump device, is including integrated electroosmosis miniflow channel (2) and liquid microelectrode chamber way (6) on micro-fluidic chip, its characterized in that, electroosmosis miniflow channel (2) both ends are connected with fluid import (3), fluid outlet (4) through fluid transition microcavity way (5) respectively, be equipped with on liquid microelectrode chamber way (6) and be used for filling injection mouth (7), the export (8) of pouring into of conducting liquid business turn over, fill injection mouth (7), fill export (8) and be connected with controllable power module (1).
2. The number of the electroosmosis micro-channels (2) is multiple, the electroosmosis micro-channels (2) are distributed in a rectangular array in the radial direction, the liquid microelectrode cavity channel (6) is of a vertically placed plate-shaped structure, conductive liquid such as low-melting-point metal, ionic liquid or low-melting-point molten salt is filled in the liquid microelectrode cavity channel (6), the electroosmosis micro-channels (2) are of a tubular structure, a hollow cavity channel for the electroosmosis micro-channels (2) to penetrate through is arranged on the liquid microelectrode cavity channel (6), the diameter of the hollow cavity channel is larger than the outer diameter of the electroosmosis micro-channels (2), the axial direction of the electroosmosis micro-channels (2) is perpendicular to the plate surface of the liquid microelectrode cavity channel (6), and the hollow cavity channel is one of micron-scale cavity channel, submicron-scale cavity channel and nanometer-scale cavity channel.
3. The electroosmotic micropump device according to claim 1, wherein the liquid conductive medium is mercury, or metallic gallium, or gallium-indium alloy, or gallium-indium-tin alloy, or bismuth-indium-tin alloy, or ionic liquid, or molten salt in a liquid state. The conductive liquid may be in a liquid state or a solid state in a working state with a temperature change after filling the electrode microchannel to form the electrode.
4. The electroosmotic micropump device according to claim 1, wherein the number of the liquid microelectrode channels (6) is two, two of the liquid microelectrode channels (6) are respectively sleeved at the left end and the right end of the electroosmotic microchannel (2), and two of the liquid microelectrode channels (6) are positioned between two fluid transition microchannels (5) at the two ends of the electroosmotic microchannel (2).
5. The electroosmotic micropump device according to claim 1, wherein said electroosmotic microchannel (2) is made of polydimethylsiloxane, polymethylmethacrylate, silicon, glass or quartz, and said liquid microelectrode chamber (6) is made of polydimethylsiloxane, polymethylmethacrylate, silicon, glass or quartz.
6. The electroosmotic micropump device according to claim 2, wherein the liquid microelectrode chamber channel (6) has a width larger than the length of the electroosmotic microchannel (2) and a thickness smaller than the length of the electroosmotic microchannel (2). The gap between the liquid microelectrode cavity channel (6) and the electroosmosis micro-channel (2) and between the liquid microelectrode cavity channel and the fluid transition micro-cavity channel (5) is far shorter than the length of the electroosmosis micro-channel (2).
7. An electroosmotic micropump device according to claim 3, wherein the liquid conductive medium is injected into the liquid microelectrode chamber (6) by micro-irrigation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810763237.3A CN110711492A (en) | 2018-07-12 | 2018-07-12 | Electroosmosis micropump device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810763237.3A CN110711492A (en) | 2018-07-12 | 2018-07-12 | Electroosmosis micropump device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110711492A true CN110711492A (en) | 2020-01-21 |
Family
ID=69208313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810763237.3A Pending CN110711492A (en) | 2018-07-12 | 2018-07-12 | Electroosmosis micropump device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110711492A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113441010A (en) * | 2021-05-19 | 2021-09-28 | 杭州未名信科科技有限公司 | Biocompatible microelectrode, electroosmosis micropump device with biocompatible microelectrode and fluid pumping system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020023840A1 (en) * | 2001-01-09 | 2002-02-28 | Johnson Timothy J. | Surface charge modification within preformed polymer microchannels with multiple applications including modulating electroosmotic flow and creating microarrays |
| CN101817495A (en) * | 2010-03-25 | 2010-09-01 | 湖南大学 | Micro fluid control chip and preparation method and application thereof |
| CN205055830U (en) * | 2015-09-18 | 2016-03-02 | 中国科学院理化技术研究所 | Electric osmose micropump device |
-
2018
- 2018-07-12 CN CN201810763237.3A patent/CN110711492A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020023840A1 (en) * | 2001-01-09 | 2002-02-28 | Johnson Timothy J. | Surface charge modification within preformed polymer microchannels with multiple applications including modulating electroosmotic flow and creating microarrays |
| CN101817495A (en) * | 2010-03-25 | 2010-09-01 | 湖南大学 | Micro fluid control chip and preparation method and application thereof |
| CN205055830U (en) * | 2015-09-18 | 2016-03-02 | 中国科学院理化技术研究所 | Electric osmose micropump device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113441010A (en) * | 2021-05-19 | 2021-09-28 | 杭州未名信科科技有限公司 | Biocompatible microelectrode, electroosmosis micropump device with biocompatible microelectrode and fluid pumping system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203090949U (en) | Multistage drive electric osmosis micro-pump device | |
| CN205055830U (en) | Electric osmose micropump device | |
| CN103816805B (en) | Electric osmose Micropump device | |
| CN204746344U (en) | Electric osmose micropump device | |
| Gao et al. | A handy liquid metal based electroosmotic flow pump | |
| EP1865199A1 (en) | Liquid-transport device and system | |
| CN1232728C (en) | Valve less thin film driving micro pump | |
| Shin et al. | A miniature, nongassing electroosmotic pump operating at 0.5 V | |
| CN111043005B (en) | Micropump based on capillary phenomenon and electrowetting phenomenon | |
| WO2006068959A2 (en) | Electrokinetic device employing a non-newtonian liquid | |
| CN103195694A (en) | Valveless piezoelectric micro pump | |
| Li et al. | Ultra-monodisperse droplet formation using PMMA microchannels integrated with low-pulsation electrolysis micropumps | |
| CN110711492A (en) | Electroosmosis micropump device | |
| CN110354926B (en) | Electroosmosis micropump device | |
| CN112933392A (en) | Microneedle transdermal drug delivery system based on micro-piezoelectric pump thermal drive coupling accurate control | |
| CN111030418B (en) | Double-cavity micropump based on electrowetting phenomenon | |
| CN1194800C (en) | Chip micro flow electroosmosis pump | |
| Bodén et al. | A metallic micropump for high-pressure microfluidics | |
| CN112855490A (en) | Electroosmosis micropump device and electroosmosis micropump device set | |
| CN203175814U (en) | Valveless piezoelectric micro pump | |
| Ge et al. | Pump-valve dual-functional liquid metal soft actuators | |
| CN110601497A (en) | Alternating current electroosmosis driven ethanol traveling wave type micropump and working method | |
| CN107123625B (en) | Straight-through electrohydraulic power micropump | |
| CN203457024U (en) | Flat electrofluid power micro-pump limiting electric fields | |
| CN109231148A (en) | Micro-pump structure based on room temperature liquid metal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200121 |