CN110709982A - 对位装置和测试设备 - Google Patents

对位装置和测试设备 Download PDF

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Publication number
CN110709982A
CN110709982A CN201780091706.5A CN201780091706A CN110709982A CN 110709982 A CN110709982 A CN 110709982A CN 201780091706 A CN201780091706 A CN 201780091706A CN 110709982 A CN110709982 A CN 110709982A
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China
Prior art keywords
alignment mark
alignment
image
display panel
aligning
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Pending
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CN201780091706.5A
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English (en)
Inventor
董晓雪
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Shenzhen Royole Technologies Co Ltd
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Shenzhen Royole Technologies Co Ltd
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Publication of CN110709982A publication Critical patent/CN110709982A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

一种对位装置(100)及具有该对位装置(100)的测试设备(1000)。对位装置用于对准显示面板(200)及压头(300)。显示面板(200)设置有对位标识(202)，压头(300)设置有与对位标识(202)对应的对准标识(302)。对位装置(100)包括反射组件(10)和图像获取装置(30)。反射组件(10)用于反射对位标识(202)和对准标识(302)；图像获取装置(30)与对位标识(202)及对准标识(302)对应。图像获取装置(30)用于拍摄反射组件(10)反射的对位标识(202)和对准标识(302)以得到对位标识图像和对准标识图像，对位标识图像和对准标识图像用于辅助调整显示面板(200)和压头(300)处于对准状态。

Description

PCT国内申请，说明书已公开。

Claims (15)

  1. PCT国内申请，权利要求书已公开。
CN201780091706.5A 2017-09-05 2017-09-05 对位装置和测试设备 Pending CN110709982A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2017/100496 WO2019047005A1 (zh) 2017-09-05 2017-09-05 对位装置和测试设备

Publications (1)

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CN110709982A true CN110709982A (zh) 2020-01-17

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CN201780091706.5A Pending CN110709982A (zh) 2017-09-05 2017-09-05 对位装置和测试设备

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CN (1) CN110709982A (zh)
WO (1) WO2019047005A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113115517A (zh) * 2021-04-09 2021-07-13 武汉先河激光技术有限公司 一种基于机器视觉的套准方法
CN113329147A (zh) * 2021-04-29 2021-08-31 苏州科韵激光科技有限公司 一种图像获取装置以及显示面板的修复设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050219492A1 (en) * 2001-06-27 2005-10-06 Canon Kabushiki Kaisha Alignment method, exposure apparatus and device fabrication method
CN101083904A (zh) * 2006-05-29 2007-12-05 东捷科技股份有限公司 使用双摄影机定位使二物件结合的方法
CN101192361A (zh) * 2006-11-21 2008-06-04 胜华科技股份有限公司 应用于平面显示面板的高定位精准度影像检测装置及其方法
CN204086815U (zh) * 2014-07-03 2015-01-07 浙江金指科技有限公司 一种改进的曝光机靶标识别对准装置
CN104698660A (zh) * 2015-03-20 2015-06-10 昆山龙腾光电有限公司 基板标记位置的抓取装置与抓取方法
CN206401288U (zh) * 2017-01-19 2017-08-11 合肥鑫晟光电科技有限公司 一种绑定对位装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050219492A1 (en) * 2001-06-27 2005-10-06 Canon Kabushiki Kaisha Alignment method, exposure apparatus and device fabrication method
CN101083904A (zh) * 2006-05-29 2007-12-05 东捷科技股份有限公司 使用双摄影机定位使二物件结合的方法
CN101192361A (zh) * 2006-11-21 2008-06-04 胜华科技股份有限公司 应用于平面显示面板的高定位精准度影像检测装置及其方法
CN204086815U (zh) * 2014-07-03 2015-01-07 浙江金指科技有限公司 一种改进的曝光机靶标识别对准装置
CN104698660A (zh) * 2015-03-20 2015-06-10 昆山龙腾光电有限公司 基板标记位置的抓取装置与抓取方法
CN206401288U (zh) * 2017-01-19 2017-08-11 合肥鑫晟光电科技有限公司 一种绑定对位装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113115517A (zh) * 2021-04-09 2021-07-13 武汉先河激光技术有限公司 一种基于机器视觉的套准方法
CN113329147A (zh) * 2021-04-29 2021-08-31 苏州科韵激光科技有限公司 一种图像获取装置以及显示面板的修复设备

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Address after: 518052 43 Universiade Software Town, 8288 Longgang Avenue, Henggang Street, Longgang District, Shenzhen City, Guangdong Province

Applicant after: Shenzhen Ruoyu Technology Co.,Ltd.

Address before: 518052 43 Universiade Software Town, 8288 Longgang Avenue, Henggang Street, Longgang District, Shenzhen City, Guangdong Province

Applicant before: SHENZHEN ROYOLE TECHNOLOGIES Co.,Ltd.

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Application publication date: 20200117