CN110709804A

CN110709804A - Manufacturing method of touch electrode

Info

Publication number: CN110709804A
Application number: CN201780091763.3A
Authority: CN
Inventors: 李烨
Original assignee: Shenzhen Royole Technologies Co Ltd
Current assignee: Shenzhen Royole Technologies Co Ltd
Priority date: 2017-09-21
Filing date: 2017-09-21
Publication date: 2020-01-17
Also published as: WO2019056260A1

Abstract

A method of making a touch electrode (10), comprising: forming a barrier layer (40) on a surface (32) of a substrate (30); patterning the shielding layer (40) to form a groove (42); injecting metal ink (50) into the groove (42); forming a touch electrode ring (60) in the groove (42) by using the coffee ring effect and the metal ink (50); the mask layer (40) on the substrate (30) is removed.

Description

Manufacturing method of touch electrode

Technical Field

The invention relates to the technical field of touch control, in particular to a manufacturing method of a touch electrode.

Background

The conventional touch electrode is wider, and if the touch electrode needs to be manufactured thinner, the requirement on the manufacturing process is higher, so that the production cost is increased.

Disclosure of Invention

The embodiment of the invention provides a manufacturing method of a touch electrode with simple manufacturing process.

The manufacturing method of the touch electrode in the embodiment of the invention comprises the following steps:

forming a shielding layer on a surface of a substrate;

patterning the shielding layer to form a groove;

injecting metal ink into the groove;

forming a touch electrode ring in the groove by using the metal ink by using a coffee ring effect; and

and removing the shielding layer on the substrate.

In some embodiments, the step of injecting the metal ink into the groove comprises:

and injecting a plurality of droplets of the metal ink into the groove.

In certain embodiments, a plurality of droplets of the metallic ink are separated from each other.

In some embodiments, the step of forming the metal ink into the touch electrode ring in the groove by using a coffee ring effect includes:

and mutually converging and mixing a plurality of droplets of the metal ink to form a liquid block.

In some embodiments, the step of forming the metal ink into the touch electrode ring in the groove by using the coffee ring effect further includes:

and gathering the metal particles in the liquid block at the edge of the groove by using capillary action to form the touch electrode ring.

drying the liquid block to volatilize the liquid in the middle of the groove.

In some embodiments, the step of drying the slug to volatilize liquid in the slug in the groove comprises:

and placing the substrate with the liquid block in a thermostat for heat preservation for preset time.

In some embodiments, the method of making further comprises:

and removing the two opposite ends of the touch electrode ring to form a touch electrode.

In some embodiments, the step of removing the opposite ends of the touch electrode ring to form the touch electrode is performed in the same process as the step of removing the shielding layer on the substrate.

In some embodiments, the removing the shielding layer on the substrate is performed by laser lift-off, and the removing the two opposite ends of the touch electrode ring to form the touch electrode is performed by laser cutting.

In some embodiments, the number of the grooves is multiple, the touch electrode rings in each groove are in a continuous annular structure, and the touch electrode rings in adjacent grooves are separated by the shielding layer.

In certain embodiments, a plurality of the grooves are parallel to each other.

In some embodiments, the grooves have a rectangular or parallelogram cross-section in a direction parallel to the surface of the substrate.

In certain embodiments, the width of the groove is less than 0.4 mm.

In certain embodiments, the grooves have a width of 24 μm to 100 μm.

In some embodiments, the width of the touch electrodes is 2 μm to 10 μm, and the distance between two adjacent touch electrodes is 20 μm to 80 μm.

In certain embodiments, the metal ink comprises a metal organic complex.

In some embodiments, the substrate is made of silicon oxide, silicon nitride or silicon oxynitride.

In some embodiments, the substrate includes a thin film encapsulation layer disposed on the display module.

In some embodiments, the substrate is fabricated on the display module by a chemical vapor deposition and inkjet printing process.

Compared with the method for forming the touch electrode in the groove, the method for manufacturing the touch electrode in the embodiment of the invention forms two touch electrodes arranged at intervals in the groove through the coffee ring effect, so that the width of the touch electrode is narrower, and the touch precision is improved. Furthermore, the process of forming the touch electrode by the coffee ring effect is formed spontaneously by utilizing the capillary action of the liquid, so that the manufacturing process of the electrode can be effectively simplified, and the manufacturing cost is saved.

Additional aspects and advantages of embodiments of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic flow chart of a method of making certain embodiments of the present invention;

FIG. 2 is a process schematic of a method of making certain embodiments of the present invention;

FIG. 3 is a schematic plan view of a recess formed in a masking layer according to some embodiments of the present invention;

FIG. 4 is a cross-sectional view of a recess formed in a masking layer according to some embodiments of the present invention;

FIG. 5 is a cross-sectional view of a recess formed in a masking layer according to some embodiments of the present invention;

FIG. 6 is a schematic diagram of a touch electrode ring formed by metallic ink according to some embodiments of the present invention;

FIG. 7 is a schematic plan view of a touch electrode ring formed in a groove in accordance with certain embodiments of the present invention;

FIG. 8 is a schematic plan view of a touch electrode ring formed on a substrate according to some embodiments of the invention;

FIG. 9 is a schematic flow chart of a method of making certain embodiments of the present invention;

FIG. 10 is a schematic flow chart of a method of making certain embodiments of the present invention;

FIG. 11 is a schematic flow chart of a method of making certain embodiments of the present invention;

FIG. 12 is a schematic plan view of a touch electrode formed on a substrate according to some embodiments of the invention;

FIG. 13 is a schematic flow chart of a method of making certain embodiments of the present invention;

FIG. 14 is a schematic plan view of a substrate disposed on a display module according to some embodiments of the invention; and

FIG. 15 is a schematic plan view of a substrate disposed on a display module according to some embodiments of the invention.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.

Referring to fig. 1 and 2, a method for manufacturing a touch electrode 10 according to an embodiment of the present invention includes:

s1, forming a masking layer 40 on the surface 32 of the substrate 30;

s2, patterning the shielding layer 40 to form a groove 42;

s3, injecting the metal ink 50 into the groove 42;

s4, forming a touch electrode ring 60 in the groove 42 by the metal ink 50 by using the coffee ring effect; and

s5, the mask layer 40 on the substrate 30 is removed.

The substrate 30 includes a surface 32. The material of the substrate 30 includes silicon oxide, silicon nitride, or silicon oxynitride, for example, the material of the substrate 30 may be silicon dioxide.

The masking layer 40 may be formed from a curable material by coating, spraying, etc. on the surface 32 of the substrate 30. For example, masking layer 40 may be formed by coating surface 32 with a photoresist that is a positive photoresist, i.e., the photoresist is insoluble prior to exposure and soluble after exposure.

The step of forming the groove 42 by the patterned masking layer 40 (step S2) may be to form the groove 42 by cutting the masking layer 40 with a laser, and the number of the grooves 42 may be one or more. When the shielding layer 40 is formed of photoresist, the groove 42 may be formed by laser exposure. Specifically, when the laser is irradiated onto the shielding layer 40 (i.e., the photoresist), the photoresist 40 is gradually melted, and the groove 42 is obtained by removing the melted photoresist 40 from the substrate 30. The groove 42 may penetrate through the side of the photoresist 40 (the side corresponding to the end of the groove 42), or the groove 42 may not penetrate through the side of the photoresist 40 (as shown in fig. 3). When the groove 42 penetrates the side of the photoresist 40, a barrier (not shown) may be provided at an end of the groove 42 for confining the metal ink 50 within the groove 42. Referring to FIG. 3, the cross-section of the groove 42 is rectangular or parallelogram-shaped along the direction parallel to the surface 32 of the substrate 30. Referring to fig. 4 and 5, along the depth D of the groove 42, the cross section of the groove 42 is rectangular, parallelogram, or isosceles trapezoid, and when the cross section of the groove 42 is isosceles trapezoid, the width W of the groove 42 is the average width of the cross section. In some embodiments, the width W of the groove 42 of the above embodiments is less than 0.4mm, for example, the width W of the groove 42 may be any one of 0.39mm, 0.35mm, 0.3mm, 0.25mm, 0.2mm, 0.15mm, 0.1mm, 0.05mm, 0.04mm, 0.03mm, 0.02mm, 0.01mm, or a value between any two of the above. Referring to fig. 2, the depth D of the groove 42 is proportional to the thickness T of the touch electrode 10 to be formed. Specifically, the depth of the groove 42 is positively correlated with the thickness T of the touch electrode 10. That is, if the thickness T of the touch electrode 10 to be manufactured is larger, the depth of the groove 42 is larger.

Referring to fig. 2, the metal ink 50 may be a suspension, wherein the suspension in the suspension is metal particles, the metal particles may be silver, gold, copper, platinum, etc., and the liquid in the suspension may be an organic substance. The metal ink 50 may also be a metal organic complex. The metallic ink 50 may fill the recess 42 or may fill only a portion of the recess 42. The step of injecting the metal ink 50 into the groove 42 (step S3) may be injecting the metal ink 50 into the groove 42 by using an inkjet printing process, and specifically, the metal ink 50 injected into the groove 42 may be in the form of separated droplets, separated mists, or continuous liquid.

Referring to fig. 6, fig. 6 shows the process from the step of injecting the metal ink 50 into the groove 42 (step S3) to the step of forming the touch electrode ring 60 in the groove 42 by the metal ink 50 using the coffee ring effect (step S4), and the process of forming the touch electrode ring 60 in the groove 42 by the metal ink 50 can be understood as follows: injecting a plurality of mutually separated metal ink 50 liquid drops into the groove 42, and gradually converging and mixing the plurality of metal ink 50 liquid drops to form a metal ink 50 liquid block; as the metal ink 50 is gradually dried, the metal concentration in the metal ink 50 gradually increases, and under the capillary action, the metal particles in the metal ink 50 flow from the center of the groove 42 to the edge of the groove 42, so that the metal concentration at the edge of the groove 42 gradually increases and gradually deposits at the edge of the groove 42; as the liquid (solvent) in the metal ink 50 gradually volatilizes, the deposition amount of the metal particles at the edge of the groove 42 gradually increases and finally the touch electrode ring 60 is obtained.

Referring to fig. 7, the touch electrode ring 60 includes two opposite initial electrodes 62 and two connecting portions 64 connecting the two initial electrodes 62, where the two connecting portions 64 are respectively located at two opposite ends of the initial electrodes 62.

Referring to fig. 2 and 8, in the manufacturing method of the embodiment of the invention, the remaining shielding layer 40 on the substrate 30 is removed (step S5) to obtain the touch electrode ring 60, and in step S5, the remaining shielding layer 40 on the substrate 30 can be removed by laser lift-off. In some embodiments, the touch electrode ring 60 can serve as the touch electrode 10. In other embodiments, the touch electrode ring 60 may be etched, cut, etc. to obtain a better shape and structure of the touch electrode 10. In other embodiments, the touch electrode 10 has a strip structure, and the touch electrode 10 can be obtained by laser cutting the touch electrode ring 60 and removing the two connecting portions 64.

Compared with the method for forming a touch electrode with the same size as the groove 42 in the groove 42, the method for manufacturing the touch electrode 10 according to the embodiment of the invention forms two touch electrodes 10 arranged at intervals in the groove 42 by the coffee ring effect, so that the width of the touch electrode 10 is narrower, and the touch precision is improved. Further, the process of forming the touch electrode 10 by the coffee ring effect is formed spontaneously by using the capillary action of the liquid, so that the manufacturing process of the electrode can be effectively simplified, thereby saving the manufacturing cost.

The manufacturing method of the touch electrode 10 of the embodiment of the invention also has the following beneficial effects: the groove 42 is formed on the shielding layer 40, and the touch electrodes 10 are formed in the groove 42, and the manufacturing method of the invention can control the distance between the touch electrodes 10 by controlling the distance between the grooves 42.

Referring to fig. 6 and 9, in some embodiments, the step of injecting the metal ink 50 into the groove 42 (step S3) includes:

s31, a plurality of droplets of the metallic ink 50 are injected into the groove 42.

Specifically, the droplets of the metal ink 50 continuously injected into the groove 42 may be separated from each other (or spaced apart from each other), and the droplets of the metal ink 50 continuously injected into the groove 42 may also be connected to each other. The amount of metal ink 50 droplets injected into the groove 42 is easily controlled so that the user can obtain the desired width and thickness of the initial electrode 62. Meanwhile, the plurality of droplets of the metal ink 50 are facilitated to form the touch electrode ring 60 in the groove 42 by using the coffee ring effect.

s31, a plurality of droplets of the metal ink 50 are injected into the groove 42, and the plurality of droplets of the metal ink 50 are separated from each other.

Specifically, the droplets of the metallic ink 50 continuously injected into the groove 42 may be separated from each other (or spaced apart from each other). The amount of metal ink 50 droplets injected into the groove 42 is easily controlled so that the user can obtain the desired width and thickness of the initial electrode 62. Meanwhile, the plurality of droplets of the metal ink 50 are facilitated to form the touch electrode ring 60 in the groove 42 by using the coffee ring effect.

Referring to fig. 6 and 10, in some embodiments, the step of forming the touch electrode ring 60 in the groove 42 by the metal ink 50 using the coffee ring effect (step S4) according to the above embodiments includes:

s41, the droplets of the metal ink 50 are collected and mixed to form a liquid mass.

Specifically, after the plurality of droplets of the metal ink 50 are injected into the groove 42, a certain time (for example, 1 minute) is required to ensure that the plurality of droplets of the metal ink 50 are converged and mixed with each other to form a liquid mass. It is desirable to control the rate of evaporation of the liquid in the metallic ink 50 before the plurality of droplets of metallic ink 50 converge to form a slug to avoid the metallic particles in each droplet of metallic ink 50 from wicking toward the edge of each droplet of metallic ink 50 and not toward the edge of the recess 42. After the plurality of metal ink 50 droplets in the groove 42 are mutually converged and mixed to form a liquid block, metal particles in the metal ink 50 are conveniently gathered to the edge of the groove 42 under the capillary action, so as to form the touch electrode ring 60 with a better structure.

Referring to fig. 6 and 10, in some embodiments, the step of forming the touch electrode ring 60 in the groove 42 by the metal ink 50 using the coffee ring effect (step S4) according to the above embodiments further includes:

and S42, collecting the metal particles in the liquid block at the edge of the groove 42 by using capillary action to form the touch electrode ring 60.

Specifically, when the metal particles in the liquid mass are gathered at the edges of the grooves 42 by capillary action, it is necessary to control the volatilization speed of the liquid in the liquid mass so that the metal particles are fully gathered at the edges of the grooves 42. The metal particles can be uniformly gathered at the edge of the groove 42 under the capillary action to obtain a touch electrode ring 60 with a better structure; meanwhile, the edge of the metal particle aggregation groove 42 in the liquid mass is spontaneously formed by the capillary action of the liquid, so that the manufacturing process of the electrode can be effectively simplified, thereby saving the manufacturing cost.

s43, the liquid cake is dried to volatilize the liquid in the middle of the groove 42 (the middle position of the groove 42).

Specifically, the liquid in the middle of the groove 42 is evaporated to dryness first, so that the metal particles in the liquid block are all gathered to the edge of the groove 42 under the capillary action, and the metal particles are not gathered in the middle of the groove 42, so that the touch electrode ring 50 with a better structure can be obtained in the embodiment.

and S44, placing the substrate 30 with the liquid block in a thermostat and keeping the temperature for a preset time.

Specifically, the temperature of the heat preservation in the incubator is related to the material of the liquid (or solvent) in the metal ink 50, the moving speed of the metal in the metal ink 50 toward the edge of the groove 42, and the like, and the heat preservation time can be measured according to actual experimental data, and the heat preservation of the substrate 30 formed with the liquid block in the incubator can enable the liquid in the middle of the groove 42 to be volatilized first. In general, when the metal ink 50 is a metal organic complex, the temperature in the incubator may be 40 ℃ to 100 ℃, for example, the incubation temperature is any one of 40 ℃, 50 ℃, 60 ℃, 70 ℃, 80 ℃, 90 ℃, 100 ℃ or a value between any two of the above, preferably, the incubation temperature is 60 ℃, and the preset time may be 5 minutes to 60 minutes, for example, the preset time is any one of 5 minutes, 10 minutes, 15 minutes, 20 minutes, 25 minutes, 30 minutes, 35 minutes, 40 minutes, 35 minutes, 50 minutes, 55 minutes, 60 minutes or a value between any two of the above.

In the manufacturing method of the embodiment, the substrate 30 formed with the liquid block is placed in the thermostat and is kept warm, so that the metal in the metal ink 50 on the middle of the groove 42 can move to the edge of the groove 42, the metal ink 50 can form the touch electrode ring 60 with a better structure, and the metal in the metal ink 50 is prevented from depositing on the center of the groove 42, so that the metal ink 50 cannot form the touch electrode ring 60. In addition, the substrate 30 with the liquid block is placed in the thermostat and is kept warm for a preset time, so that the progress of the coffee ring effect can be accelerated, and the forming efficiency of the touch electrode ring 60 is improved.

Referring to fig. 11 and 12, in some embodiments, the manufacturing method of the present invention further includes:

s6, removing the opposite ends of the touch electrode ring 60 to form the touch electrode 10.

Specifically, when the touch electrode 10 has a strip structure, the touch electrode ring 60 needs to be obtained by removing the connecting portions 64 on the two opposite ends of the touch electrode ring 60. After the opposite ends of the touch electrode ring 60 are removed to form the touch electrode 10, two strip-shaped initial electrodes 62 can be obtained, and the initial electrodes 62 can be the touch electrode 10, or the initial electrodes 62 are etched, cut, and the like to obtain the touch electrode 10 with a better shape and structure.

In some embodiments, the step of removing the opposite ends of the touch electrode ring 60 to form the touch electrode 10 (step S6) of the above embodiments is completed in the same process as the step of removing the shielding layer 40 on the substrate 30 (step S5). The step S5 and the step S6 are completed in the same process, which can reduce the manufacturing process of the touch electrode 10, thereby improving the manufacturing efficiency of the touch electrode 10 and reducing the manufacturing cost of the touch electrode 10.

Referring to fig. 13, in some embodiments, the step of removing the opposite ends of the touch electrode ring 60 to form the touch electrode 10 (step S6) and the step of removing the shielding layer 40 on the substrate 30 (step S5) in the above embodiments include:

s51, peeling off the shielding layer 40 by laser; and

and S52, cutting the two opposite ends of the touch electrode ring 60 by using laser.

The steps S5 and S6 are performed in the same process, which can reduce the manufacturing processes of the touch electrode 10, thereby improving the manufacturing efficiency of the touch electrode 10 and reducing the manufacturing cost of the touch electrode 10. Specifically, step S51 may be performed before step S52 or after step S52. The step S52 is executed after the step S51, so that when the connecting portions 64 (the opposite ends of the touch electrode ring 60) are cut by the laser, the redundant edges of the initial electrodes 62 can be cut by the laser to obtain the touch electrodes 10 with better shapes and structures. Step S52 is performed before step S51 so that when the connection part 64 is cut using the laser, the photoresist 40 can support the touch electrode ring 60 so that the connection part 64 has a greater strength to avoid damage to the initial electrode 62 when the connection part 64 is cut.

Referring to fig. 2, in some embodiments, the number of the grooves 42 formed on the shielding layer 40 in the above embodiments is multiple, the touch electrode ring 60 in each groove 42 is a continuous annular structure, and the touch electrode rings 60 in adjacent grooves 42 are separated by the shielding layer 40. Specifically, each groove 42 is filled with metal ink 50 and a touch electrode ring 60 is formed in each groove 42. Because the width of the touch electrode 10 manufactured by the embodiment of the invention is narrower, the density of the touch electrode 10 manufactured on the substrate 30 can be made larger, so that the detection accuracy of the touch electrode 10 used for touch detection can be improved.

Referring to fig. 2 and 7, in some embodiments, the number of the grooves 42 formed on the shielding layer 40 in the above embodiments is multiple, the touch electrode ring 60 in each groove 42 is a continuous annular structure, and the touch electrode rings 60 in adjacent grooves 42 are separated by the shielding layer 40. The plurality of grooves 42 are parallel to each other. Therefore, the density of the touch electrodes 10 fabricated on the substrate 30 can be made larger, so as to improve the detection accuracy of the touch electrodes 10 in touch detection. In other embodiments, the plurality of grooves 42 are equally spaced. In this way, the detection accuracy of the touch electrode 10 formed in the groove 42 when used for touch detection is further improved.

Referring to FIGS. 4 and 12, in some embodiments, the width W of the grooves 42 is 24 μm to 100 μm. For example, the width W of the groove 42 may be any one of 24 μm, 25 μm, 30 μm, 35 μm, 40 μm, 45 μm, 50 μm, 55 μm, 60 μm, 65 μm, 70 μm, 75 μm, 80 μm, 85 μm, 90 μm, 95 μm, 100 μm, or a value between any two of the foregoing. In this case, the width W1 of the touch electrode 10 manufactured by the method for manufacturing the touch electrode 10 according to the embodiment of the present invention is 2 μm to 10 μm, and the width W1 of the touch electrode 10 may be, for example, any one of 2 μm, 3 μm, 4 μm, 5 μm, 6 μm, 7 μm, 8 μm, or a value between any two of the foregoing. The distance D1 between two adjacent touch electrodes 10 is 20 μm to 80 μm, for example, the distance D1 between two adjacent touch electrodes 10 may be any one of 20 μm, 30 μm, 40 μm, 50 μm, 60 μm, 70 μm, 80 μm, or the like, or a value between any two of the above. When the touch electrodes 10 are annular (as shown in fig. 8), the width W1 of the touch electrodes 10 refers to the width of the initial electrode 62, and the distance D1 between two adjacent touch electrodes 10 is equal to the distance between two adjacent grooves 42.

Referring to fig. 14, in some embodiments, the Display module 20 includes an Organic Light-Emitting Diode (OLED) Display module or a Liquid Crystal Display (LCD) module. The OLED display module 20 includes a module substrate 21, an anode layer 22, a light emitting layer 23, and a cathode layer 24, which are sequentially disposed. When the display module 20 is an OLED display module, the substrate 30 is disposed on the cathode layer 24, and at this time, the substrate 30 may be formed on the cathode layer 24 of the display module 20 through a Chemical Vapor Deposition (CVD) process or an Ink-jet Printing (IJP) process; alternatively, the OLED display module 20 further includes a thin film encapsulation layer 25, and the substrate 30 is disposed on the thin film encapsulation layer 25. Of course, the encapsulation film layer 25 may also be part of the substrate 30. The thin film encapsulation layer 25 is made of a corrosion-resistant material, and the thin film encapsulation layer 25 can have adhesion property, so that the thin film encapsulation layer 25 is more corrosion-resistant and can be better adhered to the cathode layer 24 compared with the common material.

Referring to fig. 15, the LCD module 20 includes a lower polarizer 26, a liquid crystal layer 27 and an upper polarizer 28 sequentially disposed. When the display module 20 is an LCD display module, the substrate 30 is disposed on the upper polarizer 28, and at this time, the substrate 30 may be formed on the upper polarizer 28 of the display module 20 through a Chemical Vapor Deposition (CVD) process or an Ink-jet Printing (IJP) process; alternatively, the LCD module 20 further includes a thin film encapsulation layer 25, and the substrate 30 is the thin film encapsulation layer 25. The thin film encapsulation layer 25 is made of a corrosion-resistant material, and the thin film encapsulation layer 25 can have adhesion property, so that the thin film encapsulation layer 25 is more corrosion-resistant and can be better adhered to the cathode layer 24 compared with the common material. In other embodiments, the substrate 30 is also the upper polarizer 28 of the LCD module.

In the description of the specification, reference to the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention, which is defined by the claims and their equivalents.

Claims

A manufacturing method of a touch electrode comprises the following steps:

forming a shielding layer on a surface of a substrate;

patterning the shielding layer to form a groove;

injecting metal ink into the groove;

forming a touch electrode ring in the groove by using the metal ink by using a coffee ring effect; and

and removing the shielding layer on the substrate.
The method of claim 1, wherein the step of injecting a metal ink into the recess comprises:

and injecting a plurality of droplets of the metal ink into the groove.
The method of manufacturing according to claim 2, wherein a plurality of droplets of the metallic ink are separated from each other.
The method according to claim 3, wherein the step of forming the metal ink into the groove with a touch electrode ring by using a coffee ring effect comprises:

and mutually converging and mixing a plurality of droplets of the metal ink to form a liquid block.
The method of claim 4, wherein the step of forming the metal ink into the groove with a touch electrode ring by using a coffee ring effect further comprises:

and gathering the metal particles in the liquid block at the edge of the groove by using capillary action to form the touch electrode ring.
The method according to claim 4 or 5, wherein the step of forming the metal ink into the groove with a touch electrode ring by using a coffee ring effect further comprises:

drying the liquid block to volatilize the liquid in the middle of the groove.
The method of claim 6, wherein the step of drying the slug to volatilize liquid in the slug in the groove comprises:

and placing the substrate with the liquid block in a thermostat for heat preservation for preset time.
The method of manufacturing of claim 1, further comprising:

and removing the two opposite ends of the touch electrode ring to form a touch electrode.
The method as claimed in claim 8, wherein the step of removing the opposite ends of the touch electrode ring to form the touch electrode is performed in the same process as the step of removing the shielding layer on the substrate.
The method according to claim 9, wherein the removing the shielding layer on the substrate is performed by laser lift-off, and the removing the opposite ends of the touch electrode ring to form the touch electrode is performed by laser cutting.
The manufacturing method according to claim 1, wherein the number of the grooves is plural, the touch electrode ring in each groove is a continuous annular structure, and the touch electrode rings in adjacent grooves are separated by the shielding layer.
The method of claim 11, wherein a plurality of the grooves are parallel to each other.
The method of manufacturing according to claim 12, wherein a cross section of the groove is rectangular or parallelogram-shaped in a direction parallel to the surface of the substrate.
The method of claim 12, wherein the width of the groove is less than 0.4 mm.
The method of claim 12, wherein the width of the groove is 24 μm to 100 μm.
The method according to claim 15, wherein the width of the touch electrodes is 2 μm to 10 μm, and the distance between two adjacent touch electrodes is 20 μm to 80 μm.
The method of manufacturing according to claim 1, wherein the metal ink includes a metal organic complex.
The method of claim 1, wherein the substrate comprises silicon oxide, silicon nitride or silicon oxynitride.
The method of claim 1, wherein the substrate comprises a thin film encapsulation layer disposed on the display module.
The method as claimed in claim 19, wherein the substrate is formed on the display module by a chemical vapor deposition or an inkjet printing process.