CN110708855B - Position adjusting mechanism of rigid ion source in cyclotron and adjusting method thereof - Google Patents

Position adjusting mechanism of rigid ion source in cyclotron and adjusting method thereof Download PDF

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Publication number
CN110708855B
CN110708855B CN201911097981.5A CN201911097981A CN110708855B CN 110708855 B CN110708855 B CN 110708855B CN 201911097981 A CN201911097981 A CN 201911097981A CN 110708855 B CN110708855 B CN 110708855B
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guide rail
flange
driving device
ion source
accelerator
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CN110708855A (en
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赵良超
何小中
马超凡
龙全红
杨兴林
李洪
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Institute of Fluid Physics of CAEP
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Institute of Fluid Physics of CAEP
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H13/00Magnetic resonance accelerators; Cyclotrons
    • H05H13/005Cyclotrons
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/08Arrangements for injecting particles into orbits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/08Arrangements for injecting particles into orbits
    • H05H2007/081Sources
    • H05H2007/082Ion sources, e.g. ECR, duoplasmatron, PIG, laser sources

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)

Abstract

The invention discloses a position adjusting mechanism of a rigid ion source in a cyclotron, wherein a first guide rail is arranged in a support frame, a first driving device is arranged outside the support frame, the first driving device is connected with a first transmission device, and the first transmission device is connected with the first guide rail; the support frame is fixed with the flange one that is used for being fixed with the accelerator shell, is connected with the guide rail two on the guide rail one, is provided with flange two and drive arrangement two on the guide rail two, and drive arrangement two is connected with transmission, and transmission is connected with flange two, and the direction of movement of flange two is perpendicular with the direction of movement of guide rail one. The invention is arranged outside vacuum, the volume size of the invention is not limited by the internal space of the accelerator, and complex and accurate multidimensional motion control can be realized. The bearing, the lead screw and the guide rail are not limited by oil-free lubrication. The transmission mechanism, the driving motor, the signal wire, the power wire and the like are all outside the accelerator, and the selection and design are not limited by vacuum conditions.

Description

Position adjusting mechanism of rigid ion source in cyclotron and adjusting method thereof
Technical Field
The invention relates to the technical field of cyclotrons, in particular to a position adjusting mechanism of a rigid ion source in a cyclotron and an adjusting method thereof.
Background
The cyclotron has an externally generated and an internally generated ion source, i.e., an external ion source and an internal ion source, for the spot beam of particles when accelerating the charged particles. Compared with the external ion source, the cyclotron adopting the internal ion source has the advantages of compact overall structure, relatively simple equipment structure and far lower manufacturing cost and maintenance cost than the external ion source.
The internal ion source needs to be maintained and disassembled regularly, and the relative position of the internal ion source is not easy to fix. Whereas the accelerator is extremely sensitive to the position of the internal ion source, in general an on-line adjustment of the corresponding position adjustment mechanism is required. The environment of the internal ion source is the inside of the accelerator, and generally, high radiation dose exists, so that the internal ion source is inconvenient to enter the inside of the accelerator to finish corresponding operation. Turning on and lifting the accelerator can also have other adverse effects.
In order to achieve the adjustment of the ion source position, a position adjustment mechanism is usually installed inside the accelerator and in the vicinity of the ion source discharge chamber, and the ion source is fixed to the adjustment mechanism by means of screws or the like. Meanwhile, the ion source is also required to be externally connected with pipelines such as water, electricity and gas, and the like, so that the ion source is flexible as a whole, can be bent, stretched to a certain extent, and the like, and is not damaged when the ion source is driven to move by the current position adjusting mechanism.
There are two significant disadvantages to this construction: the ion source is fixed on a displacement platform inside the accelerator, and the accelerator must be opened to be disassembled to access the inside of the accelerator. The radiation dose that personnel need to bear, the required time of dismantling is also longer. Secondly, the accelerator has a narrow internal space, and is inconvenient for installing a multidimensional displacement control console. The device is arranged inside the accelerator, the displacement travel is limited by the inner space of the accelerator, and the device is inconvenient for large-scale adjustment. Therefore, designers consider whether a rigid design can be made on an ion source, but how to adjust the position of the rigid ion source after the rigid ion source is designed is a problem to be solved.
Disclosure of Invention
The invention aims to solve the technical problems that the existing flexible ion source is positioned in the accelerator, the time consumption is long when people dismount, the radiation hazard is large, the internal space of the accelerator is small, the adjusting range is small, the displacement stroke is limited, the large-range adjustment is inconvenient, and the adjusting precision is low, so that the position adjusting mechanism of the rigid ion source in the cyclotron and the adjusting method thereof are provided.
The invention is realized by the following technical scheme: the position adjusting mechanism of the rigid ion source in the cyclotron comprises a support frame, wherein a first guide rail is arranged in the support frame, a first driving device is arranged outside the support frame, the first driving device is connected with a first transmission device, the first transmission device is connected with the first guide rail, and the first driving device can drive the first guide rail to move along the axial direction through the transmission device; the support frame is fixed with the flange one that is used for being fixed with the accelerator shell, is connected with the guide rail two on the guide rail one, is provided with flange two and drive arrangement two on the guide rail two, and the guide rail two sets up between flange one and flange two, and drive arrangement two is connected with transmission, and transmission two is connected with flange two, and drive arrangement two can drive flange two through transmission and remove along the guide rail two, and the direction of movement of flange two is perpendicular with the direction of movement of guide rail one.
Currently, flexible ion sources are commonly used, and are held in vacuum. The ion source is fixed on the displacement platform in the accelerator, the accelerator is required to be opened to complete the disassembly of the ion source, the whole disassembly process is long, and personnel are required to bear long-time radiation dose, so that the damage to the body of the personnel is caused. Meanwhile, due to the design of the manufacturing process and the space pattern, the size of the space inside the accelerator is not too large, but the ion source needs to be moved to adjust the position, and the structure and the function are required to limit the displacement travel of the ion source, so that the large-scale adjustment is inconvenient. The displacement platform is limited only, multidimensional adjustment cannot be carried out, the adjustment precision is low, the displacement platform and all the affiliated mechanisms are arranged in the accelerator, the displacement platform is limited by space and also limited by vacuum, strong magnetic field and radio frequency electric field, the displacement platform is separated, the structure is complex, one-dimensional motion is controlled, and the stroke is limited; the support frame is also fixedly provided with a flange I which is used for being fixed with the accelerator shell, the guide rail I is connected with a guide rail II, the guide rail II is provided with a flange II and a driving device II, the driving device II is connected with the flange II, the driving device II can drive the flange II to move along the guide rail II through the driving device II, and the moving direction of the flange II is vertical to the moving direction of the guide rail I. The scheme combines the requirement of the rigid ion source for adjusting the position, and realizes multidimensional adjustment by utilizing the driving device, wherein the driving device I is used for large-range adjustment, the driving device II is used for small-range adjustment, and the two adjustment directions are vertically arranged, so that the requirement can be met during adjustment. The technical proposal is arranged outside vacuum, the volume size of the technical proposal is not limited by the internal space of the accelerator, and the complex and accurate multidimensional motion control can be realized. The device is arranged outside vacuum, the lubrication of moving parts is not limited by oil-free, and various lubrication modes can be adopted. The vacuum accelerator is arranged outside vacuum, and the parts are all outside the accelerator, so that the model selection and design are not limited by vacuum conditions. Thereby enabling an increase in the variety of choice of components, enabling an increase in service life and a reduction in cost.
In order to ensure the vacuum environment inside the cyclotron, the vacuum is not destroyed by connection with an external ion source, a corrugated pipe is arranged between the guide rail II and the flange I, and two ends of the corrugated pipe are respectively connected with the guide rail II and the flange in a seamless way. The corrugated pipe is a tubular elastic sensing element formed by connecting foldable corrugated sheets along the folding and stretching directions. The bellows is widely used in instruments and meters, and is mainly used as a measuring element of a pressure measuring instrument to convert pressure into displacement or force. The corrugated pipe has thinner pipe wall and higher sensitivity, and the measuring range is tens of Pa to tens of megaPa. The structure of current bellows is utilized to this scheme, realizes deformation when guide rail two removes along with guide rail one, guarantees that can not appear the gap between guide rail two and the flange one and lead to the inside vacuum environment of accelerator to change.
In order to ensure that the structure is compact and interference can not occur during movement, the guide rail II, the flange I, the flange II and the corrugated pipe are all arranged outside the support frame.
The first transmission device is preferably a first lead screw, one end of the first lead screw is connected with the first driving device, the other end of the first lead screw penetrates through the first guide rail and then is inserted into the support frame, the first lead screw can rotate around the axis of the first lead screw, and the first lead screw is long in size so as to realize large-range adjustment; the second transmission device is preferably a second screw, one end of the second screw is connected with the second driving device, the other end of the second screw is connected with the second flange, the second screw can rotate around the axis of the second screw, and the second screw is short in size and used as fine adjustment. Through the adjustment of the screw rod, not only is the stability of the adjustment action ensured, but also the accuracy of the adjustment is ensured.
In order to enable the second flange to form a connecting and moving function on the second guide rail, a guide groove is formed in the second guide rail, the second flange protrudes to form a guide block, the guide block is inserted into the guide groove and can move along the guide groove, so that when the second flange is not adjusted, the second flange is matched with the guide groove and the guide block, the gravity direction of the second flange is perpendicular to the moving direction, and the second flange is stable, and therefore the guide groove and the second guide screw are required to be arranged in parallel.
A method for adjusting the position of a rigid ion source in a cyclotron, comprising the steps of:
(1) Starting the first driving device to drive the first transmission device to rotate, so that the first guide rail moves along the axis direction of the first transmission device;
(2) The first guide rail drives the second guide rail to move along the axis direction of the first transmission device, so that the corrugated pipe is compressed or prolonged, and the first driving device is closed after the corrugated pipe reaches a required position;
(3) And starting the driving device II to drive the driving device II to rotate, so that the flange II moves along the axial direction of the driving device II, the guide block moves along the guide groove, and the driving device II is closed after the required position is reached.
By the method, the rigid ion source can be moved, the ion source does not need to be fixed in the accelerator, the accelerator is not required to be opened for disassembly of the ion source, the assembly and disassembly process of the ion source is simplified, and the radiation dose born by staff is reduced. Meanwhile, the driving platform is arranged outside vacuum, is not limited by the inner space of the accelerator any more, can conveniently and accurately realize two-dimensional adjustment, reduces the complexity of the system and improves the reliability. The moving mode can realize multidirectional, so that complex and accurate multidimensional motion control is performed, the movement is more accurate, and the ion beam generated by the ion source meets the requirements.
Compared with the prior art, the invention has the following advantages and beneficial effects:
(1) The rigid ion source is arranged outside vacuum and driven by the vacuum external displacement table, the rigidity of the rigid ion source ensures the accuracy of displacement of the rigid ion source, and the rigid ion source is fixedly arranged outside vacuum, so that the rigid ion source can be quickly disassembled without being limited by the state of an accelerator. Implementations of the rigid ion source may be, but are not limited to, the use of a support plate.
(2) The position adjusting mechanism adopted by the invention is arranged outside vacuum, the volume size of the position adjusting mechanism is not limited by the internal space of the accelerator, and complex and accurate multidimensional motion control can be realized. The bearing, the screw rod and the guide rail are not limited by oil-free lubrication, and various lubrication modes can be adopted. The vacuum accelerator is arranged outside the vacuum, and the transmission mechanism, the driving motor, the signal wire, the power wire and the like are all arranged outside the accelerator, so that the selection and design are not limited by vacuum conditions.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. In the drawings:
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a rear view of the present invention;
FIG. 3 is a schematic view of the overall installation;
FIG. 4 is a partial schematic view of FIG. 3;
FIG. 5 is a schematic structural view of a rigid ion source;
Fig. 6 is a side view of fig. 5.
In the drawings, the reference numerals and corresponding part names:
1-driving device I, 2-transmission device I, 3-guide rail I, 4-bellows, 5-flange I, 6-guide rail II, 7-transmission device II, 8-driving device II, 9-flange II, 10-support frame, 11-mounting frame.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present invention and the descriptions thereof are for illustrating the present invention only and are not to be construed as limiting the present invention.
Examples
As shown in fig. 1 and 2, the position adjustment mechanism is dedicated to a rigid ion source within a cyclotron, which refers to a cyclotron that employs an internal ion source, where the ion beam is generated within the accelerator. The support frame 10 with the hollow inside and the openings on two sides is adopted, the driving device 1 is arranged outside the support frame 10, the driving device 1 adopts a motor, the guide rail 3 is arranged in the cavity of the support frame 10, the connection between the driving device 1 and the guide rail 3 is realized through the transmission device 2, the transmission device 2 is preferably a lead screw 1, one end of the lead screw 1 is connected with the driving device 1, the other end of the lead screw penetrates through the guide rail 3, the lead screw 1 is sleeved with a bearing and then is inserted into the support frame 10, and therefore, the lead screw 1 can rotate around the axis of the lead screw when driven by the driving device 1. The guide rail I3 has the side effect similar to a nut, and the rotation of the guide screw I is converted into horizontal movement, so that the driving device I1 can drive the guide rail I3 to move along the axis direction of the guide rail I through the guide screw I. The support frame 10 is also fixedly provided with a flange I5 which is used for being fixed with an accelerator shell, the guide rail I3 is connected with a guide rail II 6, the guide rail II 6 is provided with a flange II 9 and a driving device II 8, the driving device II 8 is also provided with a motor, the driving device II 8 is fixed with the guide rail II 6 through a mounting frame 11, a rigid ion source is arranged on the flange II 9, the guide rail II is arranged between the flange I5 and the flange II 9, the driving device II 8 is connected with a transmission device II 7, the transmission device II is a screw rod II, one end of the screw rod II is connected with the driving device II 8, the other end of the screw rod II is connected with the flange II 9, the screw rod II can rotate around the axis of the screw rod II, the driving device II can drive the flange II 9 to move along the guide rail II 6, in particular, a guide groove is arranged in the guide rail II 6, a guide block is formed by protruding on the flange II 9, and the guide block is inserted into the guide groove and can move along the guide groove, and the guide groove and the screw rod II are arranged in parallel. In order to realize the multi-dimension of movement, the movement direction of the second flange 9 is perpendicular to the movement direction of the first guide rail 3, meanwhile, a corrugated pipe 4 is arranged between the second guide rail 6 and the first flange 5, and two ends of the corrugated pipe 4 are connected with the second guide rail 6 and the first flange 5 in a seamless mode respectively. In order to achieve a compact structure and to prevent interference of movements, the guide rail two 6, the flange one 5, the flange two 9 and the bellows 4 are arranged outside the support frame 10. The specific adjusting method is that the first driving device 1 drives the first screw to rotate, so that the first guide rail 3 sleeved on the first screw moves along the axial direction of the first screw, the first guide rail 3 and the second guide rail 6 are fixed, so that the second guide rail 6 is driven to move along the axial direction of the first screw, namely, the bellows 4 is compressed or prolonged, adjustment of the rigid ion source position in the direction is formed, the second driving device 8 drives the second screw to rotate, so that the second flange 9 sleeved on the second screw moves along the axial direction of the second screw, at the moment, the second guide rail 6 does not move to be positioned, and only the second flange 9 is inserted into the guide groove through the guide block and moves along the guide groove, so that fine adjustment is realized. The ion source to which the present solution is directed is rigid, not flexible. The rigid condition ensures that driving the ion source outside the accelerator enables accurate displacement of the ion source inside the accelerator.
The invention is arranged on the outer surface of the accelerator or the outer surface of the vacuum chamber, can realize one-dimensional, two-dimensional, three-dimensional and multidimensional motion control, and adopts a bellows structure to realize a plurality of dimensional control under the vacuum condition. The rigid ion source is inserted into the accelerator, then is arranged outside the vacuum external displacement table, and a guide device can be arranged or not arranged in the accelerator.
Due to the principle limitations of cyclotrons, the discharge chamber of the ion source is located near the center of the accelerator, and the position, angle, etc. of the discharge chamber needs to be precisely positioned and adjustable within a certain range with respect to the accelerator. The inside of the accelerator is a vacuum structure, and the vacuum is blocked from the atmosphere by a vacuum chamber (the accelerator magnet is also a component of the vacuum chamber).
One particular internal ion source cyclotron uses an internal ion source embodiment as shown in fig. 5 and 6. By discharge cells, water and electricity lines, rigid reinforcing structures (which may be, but are not limited to, support plates, support blocks). In the structure, the ion source is fixed on the position adjusting mechanism through the fixed flange, two sides of the adjusting mechanism are respectively provided with a flange,
As shown in fig. 1 and 2, one end is fixed to the ion source and the other end is fixed to the accelerator (e.g., mounted on the outer wall of the vacuum chamber). When the position adjusting mechanism is not in operation, one end of the ion source, which is far away from the discharge chamber, is relatively fixed with the accelerator. Although the ion source is long, a rigid reinforcing structure is employed to provide sufficient rigidity so that the overall position of the ion source (particularly the position of the discharge chamber) is precisely fixed although only one end is fixed. When the position adjusting mechanism works, one end of the ion source, which is far away from the discharge chamber, is driven to move along one or more directions, and the rigid structure ensures that the discharge chamber also moves accurately. Thereby realizing the fixation and adjustment of the ion source position.
The position adjusting mechanism can complete motion control in two directions, the two motors respectively drive the lead screws in the two directions to move, the load (ion source) is driven to move, and the deformation amount during the motion is strictly controlled by the guide rail to realize precision control. The adjusting mechanism can stretch, compress and twist by using the metal corrugated pipe, so that vacuum sealing during load movement is realized.
Fig. 3 and 4 show examples of the mounting of the rigid ion source and the position adjustment mechanism on the accelerator. The position adjusting mechanism arranged outside the vacuum is used as a transition mechanism to realize the positioning and installation of the ion source and the accelerator. After installation, all components are visible outside the vacuum chamber. The ion source is disassembled only by taking down 6 screws on the ion source fixing flange to extract the ion source. The installation is only needed to insert an ion source and screw 6 screws. The entire process does not require the accelerator to be turned on.
The invention comprises a rigid ion source structure and a two-dimensional driving platform outside vacuum. Wherein the vacuum external two-dimensional driving platform is arranged at the outer side of the accelerator or the accelerator vacuum chamber, the rigid ion source is arranged on the displacement platform, and the platform drives the ion source to complete the two-dimensional movement on the extraction plane. Because the rigid ion source is adopted, the drive outside the vacuum can be precisely transmitted to the center of the accelerator, so that the precise control of the position of the ion source in the accelerator is realized. After the mechanism is adopted, the ion source is not required to be fixed in the accelerator, and the accelerator is not required to be opened for completing the disassembly of the ion source, so that the assembly and disassembly processes of the ion source are simplified, and the radiation dose born by staff is reduced. Meanwhile, the driving platform is arranged outside vacuum, is not limited by the inner space of the accelerator any more, can conveniently and accurately realize two-dimensional adjustment, reduces the complexity of the system and improves the reliability.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the scope of the invention, but to limit the invention to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (6)

1. The position adjusting mechanism of the rigid ion source in the cyclotron comprises a support frame (10), and is characterized in that a first guide rail (3) is arranged in the support frame (10), a first driving device (1) is arranged outside the support frame (10), the first driving device (1) is connected with a first transmission device (2), the first transmission device (2) is connected with the first guide rail (3), and the first driving device (1) can drive the first guide rail (3) to move along the axial direction of the guide rail through the first transmission device (2); the support frame (10) is fixedly provided with a first flange (5) which is used for being fixed with the accelerator shell, the first guide rail (3) is connected with a second guide rail (6), the second guide rail (6) is provided with a second flange (9) and a second driving device (8), the second guide rail is arranged between the first flange (5) and the second flange (9), the second driving device (8) is connected with a second driving device (7), the second driving device (7) is connected with the second flange (9), the second driving device (8) can drive the second flange (9) to move along the second guide rail (6) through the second driving device (7), and the moving direction of the second flange (9) is perpendicular to the moving direction of the first guide rail (3);
a corrugated pipe (4) is arranged between the guide rail II (6) and the flange I (5), and two ends of the corrugated pipe (4) are respectively in seamless connection with the guide rail II (6) and the flange I (5);
The second transmission device (7) is a second lead screw, one end of the second lead screw is connected with the second driving device (8), the other end of the second lead screw is connected with the second flange (9), and the second lead screw can rotate around the axis of the second lead screw.
2. The mechanism for adjusting the position of a rigid ion source in a cyclotron according to claim 1, wherein the guide rail two (6), the flange one (5), the flange two (9) and the bellows (4) are all arranged outside the support frame (10).
3. The position adjusting mechanism of a rigid ion source in a cyclotron according to claim 1, wherein the first transmission device (2) is a first screw, one end of the first screw is connected with the first driving device (1), the other end of the first screw passes through the first guide rail (3) and then is inserted into the support frame (10), and the first screw can rotate around the axis of the first screw.
4. The position adjusting mechanism of a rigid ion source in a cyclotron according to claim 1, wherein a guide groove is arranged in the second guide rail (6), a guide block is formed by protruding the second flange (9), and the guide block is inserted into the guide groove and can move along the guide groove.
5. The mechanism of claim 4, wherein the guide slot and the second lead screw are disposed in parallel.
6. A method for adjusting the position of a rigid ion source in a cyclotron based on a mechanism for adjusting the position of a rigid ion source in a cyclotron according to any one of claims 1 to 5, comprising the steps of:
Starting the first driving device (1) to drive the first transmission device (2) to rotate, so that the first guide rail (3) moves along the axis direction of the first transmission device (2);
(2) The first guide rail (3) drives the second guide rail (6) to move along the axial direction of the first transmission device, so that the corrugated pipe (4) is compressed or prolonged, and the first driving device (1) is closed after the corrugated pipe reaches a required position;
(3) And starting the second driving device (8) to drive the second driving device (7) to rotate, so that the second flange (9) moves along the axial direction of the second driving device (7), the guide block moves along the guide groove, and the second driving device (8) is closed after the required position is reached.
CN201911097981.5A 2019-11-12 2019-11-12 Position adjusting mechanism of rigid ion source in cyclotron and adjusting method thereof Active CN110708855B (en)

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