CN110687170A - TiO based on ultraviolet light wave band2/SnO2Gas sensor and preparation method - Google Patents
TiO based on ultraviolet light wave band2/SnO2Gas sensor and preparation method Download PDFInfo
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- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
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Abstract
The invention belongs to the technical field of electronic components and provides TiO based on an ultraviolet band2/SnO2A gas sensor and a preparation method thereof. The TiO being2/SnO2The gas sensor comprises a gas-sensitive material and an interdigital electrode plate, wherein the gas-sensitive material is coated on the surface of the interdigital electrode plate, and the gas-sensitive material is a nano composite material formed by titanium dioxide and tin dioxide. The method has simple production process, the obtained gas sensitive material has higher sensitivity and quick response and recovery to formaldehyde, and can be used in the field of formaldehyde gas sensors.
Description
Technical Field
The invention belongs to an electronic componentThe technical field of parts, in particular to a TiO based on ultraviolet light wave band2/SnO2Preparation of gas sensor and detection method thereof.
Background
In recent years, with the increase of global environmental pollution, qualitative and quantitative detection of toxic and harmful gases is becoming more and more important. Nowadays, the analysis of these gases usually uses some testing instruments, such as spectroscopic analysis and chromatographic analysis, which are long-lasting and expensive in testing. Semiconductor oxide gas sensors have received much attention due to their numerous advantages. For example, high sensitivity, small size, and low manufacturing cost. To achieve excellent sensing performance, the sensors are typically operated at high temperatures of 100-. However, such high temperatures not only result in high power consumption but also may ignite flammable and explosive gases. In recent years, some studies have shown that, for example, irradiation of materials with ultraviolet light to lower the operating temperature of the materials is a promising option. From Camagni (P.Camagni, G.Faglia, P.Galinetto, C.Perego, G.Samoggia, G.Sbbervegrieri, Photo-sensitivity activation of SnO2After first reported in 1996 for UV-enhanced semiconductor oxide sensors, such as sensor gates and activators B, Chemical 31(1996)99-03, a number of reports have shown that UV irradiation can significantly improve the sensing performance of semiconductor oxide gas sensors.
Nanostructured titanium dioxide has been extensively studied as a traditional n-type semiconductor for sensing, environmental remediation, solar energy conversion, and energy storage applications. However, the single-component titanium dioxide has high resistance and long response recovery time to gas, and is not dominant in practical application, so that in consideration of the defects, the titanium dioxide is selected to be compounded with other metal oxides to obtain the nano composite material so as to solve the defects of the single component. The heterojunction structure is constructed while the morphology of the material is controlled, so that the gas-sensitive performance of the material is improved, and thus, the important method for improving the gas-sensitive performance of the material is not fully researched and researched. Tin dioxide is a conventional n-type semiconductor, and many studies have been made thereon, and conventional studies have been made thereonIt is known that tin dioxide is easily synthesized in various morphologies and can be compounded with other materials, such as Chongmu Lee (s.park, s.an, y.mun, c.lee, UV-enhanced NO2gas sensing properties of SnO2Core/ZnO-shellnowiresat room temperature) group reported nanocomposites of tin dioxide with zinc oxide. Therefore, the design and synthesis of the gas sensitive material compounded by titanium dioxide and tin dioxide have important scientific and practical significance. However, to the best of our knowledge, very few gas sensitive materials of titanium dioxide and tin dioxide have been reported. Therefore, in the research, the tin dioxide nano-microspheres prepared by a hydrothermal method are compounded with the titanium dioxide nano-microspheres on the surface to form a heterojunction structure, and the microstructure and the gas sensitivity of the heterojunction structure are systematically researched. In addition, in a general situation, the working temperature of a gas sensor using a metal oxide semiconductor as a sensitive material is generally 200-500 ℃, which requires a large energy requirement on one hand and accelerates the aging of the sensitive material in a high temperature process on the other hand, resulting in a shortened service life of the sensor. Recently, the nano material technology and the photo-assisted activation method are adopted to reduce the working temperature of the sensor to room temperature as much as possible. The technology has the advantages that the LED lamp with the level of only a few milliwatts can be adopted, the high sensitivity of the sensor to gas is achieved, meanwhile, the aging process of sensitive materials is reduced, and the service life of the sensor is expected to be prolonged.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide the gas sensor based on the ultraviolet light band and the detection method thereof, wherein the gas sensor is good in selectivity, high in sensitivity and good in stability.
The technical scheme of the invention is as follows:
TiO based on ultraviolet light wave band2/SnO2The formaldehyde gas sensor mainly comprises an ultraviolet light source, a gas-sensitive material and an interdigital electrode plate, wherein the gas-sensitive material is coated on the surface of the interdigital electrode plate, and the coating thickness is 1-100 mu m; the gas sensitive materialThe material component is a heterojunction composite nano material of stannic oxide and titanium dioxide.
The tin dioxide and titanium dioxide heterojunction composite nano material is formed by growing granular titanium dioxide on the surface of hollow spherical tin dioxide by a water bath method.
The size of the hollow spherical tin dioxide is 200 nm-500 nm.
The interdigital electrode plate is an alumina substrate with a pure gold electrode on the front surface and a heating resistance wire on the back surface, and the heating temperature reaches 350 ℃.
TiO based on ultraviolet light wave band2/SnO2The preparation process of the formaldehyde gas sensor comprises the following steps:
(1) dispersing the carbon microspheres into a mixed solution of absolute ethyl alcohol and water, wherein the volume ratio of the absolute ethyl alcohol to the water is 27: 13; adding urea and sodium stannate trihydrate into the mixed solution, wherein the concentration of the urea is 52-58mol/L, the concentration of the sodium stannate trihydrate is 0.01-0.04mol/L, and the molar ratio of the carbon microspheres to the urea is controlled to be 1 (1-2);
(2) transferring the mixed solution obtained in the step (1) to a hydrothermal reaction kettle with a polytetrafluoroethylene lining, carrying out hydrothermal reaction for 18-36h at the temperature of 170-200 ℃, carrying out solid-liquid separation on a product after the hydrothermal reaction by using a centrifugal machine, washing the obtained solid product for multiple times by using deionized water and ethanol, placing the obtained solid product in a drying box, drying at 60 ℃, and then carrying out heat treatment for 3h at the temperature of 500 ℃ to obtain tin dioxide powder;
(3) dispersing the tin dioxide powder obtained in the step (2) in absolute ethyl alcohol, then respectively dropwise adding ammonia water and tetrabutyl titanate, and stirring for 24 hours at room temperature; wherein the concentration of tin dioxide is controlled to be 0.001-0.002mol/L, the concentration of ammonia water is controlled to be 0.005-0.01mol/L, and the concentration of tetrabutyl titanate is controlled to be 0.001-0.002 mol/L;
(4) carrying out heat treatment on the solid product obtained in the step (3) at 500 ℃ for 2h to obtain TiO2/SnO2A nanocomposite;
(5) adding TiO into the mixture2/SnO2Grinding the nano composite material into powder, and grinding the ground TiO2/SnO2Dispersing the nano composite material powder into deionized water, carrying out ultrasonic treatment to obtain dispersion liquid of 8-10 mg/ml, coating the dispersion liquid on the surface of the interdigital electrode plate, placing the interdigital electrode plate in a drying box, drying for 4-6 h at the temperature of 60 ℃, and naturally cooling to room temperature to obtain TiO2/SnO2A nanocomposite gas sensor.
In the step (5), the ultrasonic power is 240W-260W, and the ultrasonic time is 1 min;
TiO based on ultraviolet light wave band2/SnO2The working temperature of the gas sensor prepared from the nano composite material is room temperature, and the integration of the material and the silicon-based microelectronic is realized.
The working principle is as follows: the invention relates to TiO based on ultraviolet light wave band2/SnO2The gas sensor of nanometer composite material is a resistance type semiconductor gas sensor, and mainly utilizes the change of resistance value of the semiconductor when contacting gas to detect the components or the concentration of the gas. When the device is placed in the air, oxygen in the air is adsorbed on the surface of the gas-sensitive material and reacts with electrons to form surface-adsorbed oxygen ions, at the moment, the material is in a high-resistance state, when the gas-sensitive material is contacted with gas to be detected, the surface-adsorbed oxygen ions react with the gas to be detected, the electrons return to the semiconductor, and the resistance is reduced. The reaction can be carried out at room temperature under the irradiation of ultraviolet light.
The invention has the beneficial effects that:
(1) the invention adopts a water bath method to obtain a novel heterojunction composite nano material, has convenient raw material acquisition, low price and simple heterojunction preparation process, and is a two-dimensional semiconductor heterojunction preparation scheme with small equipment investment and simple process flow.
(2) The tin dioxide particles are uniformly distributed on the surface of the composite material, heterojunction is generated between the tin dioxide particles and the tin dioxide particles, electrons can be guided to be accumulated on the surface material, the gas-sensitive selection performance of the material is enhanced, and the electron migration between the tin dioxide and the titanium dioxide is beneficial to promoting the extra oxygen adsorption on the surface of the material, so that the gas-sensitive performance in a low-temperature environment is improved.
(3) The invention utilizes the excitation effect of ultraviolet light to reduce the temperature required by the working of the sensor, can work at room temperature and slow down the aging and damage of the material caused by the working of the material in a higher temperature environment.
Drawings
FIG. 1 is a schematic diagram of a gas sensor under irradiation of an ultraviolet lamp;
FIG. 2 is an SEM image of a titanium dioxide-tin dioxide nanocomposite;
FIG. 3 is a comparison of response recovery curves of a titanium dioxide-tin dioxide nanocomposite gas sensor and a pure titanium dioxide gas sensor at normal temperature;
figure 4 is an XRD pattern of titanium dioxide-tin dioxide nanocomposite.
Detailed Description
The following is a detailed description of the embodiments of the present invention, which is implemented on the premise of the technical solution of the present invention, and a detailed implementation manner and a specific operation process are given, but the scope of the present invention is not limited to the following embodiments.
Example 1
TiO based on ultraviolet light wave band2/SnO2The nano composite material gas sensor consists of a gas sensitive material and a heating substrate, and consists of an ultraviolet light source, the gas sensitive material and an interdigital electrode plate, wherein the gas sensitive material is coated on the surface of the interdigital electrode plate, and the coating thickness is 100 micrometers. The preparation method comprises the following steps:
(1) weighing a certain amount of carbon microspheres, and dispersing into an alcohol-water mixed solution; and weighing a certain amount of urea and sodium stannate trihydrate, dissolving the urea and the sodium stannate trihydrate in the solution, wherein the concentration of the urea is 52mol/L, the concentration of the sodium stannate trihydrate is 0.015mol/L, and the molar ratio of the carbon microspheres to the urea is controlled to be 1: 1.
(2) And (2) moving the mixed solution obtained in the step (1) to a hydrothermal reaction kettle with a polytetrafluoroethylene lining, carrying out hydrothermal reaction for 18h at the temperature of 170 ℃, carrying out solid-liquid separation on a product after the hydrothermal reaction by using a centrifugal machine, washing the obtained solid product for multiple times by using deionized water and ethanol, placing the obtained solid product in a drying box, drying at the temperature of 60 ℃, placing the dried solid product in an alumina crucible, placing the alumina crucible in a muffle furnace, and carrying out heat treatment for 3h at the temperature of 500 ℃ to obtain tin dioxide powder.
(3) Dispersing the tin dioxide powder obtained in the step (2) in 50mL of absolute ethyl alcohol, respectively dropwise adding ammonia water and tetrabutyl titanate into the solution, and stirring the solution at room temperature for 24 hours. Wherein the concentration of the tin dioxide is controlled to be 0.001mol/L, the concentration of the ammonia water is controlled to be 0.005mol/L, the concentration of the tetrabutyl titanate is controlled to be 0.002mol/L, the molar ratio of the ammonia water to the tetrabutyl titanate is controlled to be 2:1, and the molar ratio of the ammonia water to the tin dioxide is controlled to be 5: 1.
(4) Carrying out heat treatment on the solid product obtained in the step (3) at 500 ℃ for 2h to obtain TiO2/SnO2A nanocomposite material.
(5) Adding TiO into the mixture2/SnO2Grinding the nano composite material into powder, and grinding the ground TiO2/SnO2Dispersing the nano composite material powder into deionized water, carrying out ultrasonic treatment to obtain dispersion liquid of 8-10 mg/ml, coating the dispersion liquid on the surface of the interdigital electrode plate, placing the interdigital electrode plate in a drying box, drying for 6 hours at the temperature of 60 ℃, and naturally cooling to room temperature to obtain TiO2/SnO2A nanocomposite gas sensor.
In the step (5), the ultrasonic power is 240W, and the ultrasonic time is 1 min;
example 2
TiO based on ultraviolet light wave band2/SnO2The nano composite material gas sensor consists of a gas sensitive material and a heating substrate, and consists of an ultraviolet light source, the gas sensitive material and an interdigital electrode plate, wherein the gas sensitive material is coated on the surface of the interdigital electrode plate, and the coating thickness is 100 micrometers. The preparation method comprises the following steps:
(1) weighing a certain amount of carbon microspheres, and dispersing into an alcohol-water mixed solution; and weighing a certain amount of urea and sodium stannate trihydrate, and dissolving the urea and the sodium stannate trihydrate in the solution, wherein the concentration of the urea is 53mol/L, the concentration of the sodium stannate trihydrate is 0.017mol/L, and the molar ratio of the carbon microspheres to the urea is controlled to be 1: 1.
(2) And (2) moving the mixed solution obtained in the step (1) to a hydrothermal reaction kettle with a polytetrafluoroethylene lining, carrying out hydrothermal reaction for 18h at the temperature of 180 ℃, carrying out solid-liquid separation on a product after the hydrothermal reaction by using a centrifugal machine, washing the obtained solid product for multiple times by using deionized water and ethanol, placing the obtained solid product in a drying box, drying at the temperature of 60 ℃, placing the dried solid product in an alumina crucible, placing the alumina crucible in a muffle furnace, and carrying out heat treatment for 3h at the temperature of 500 ℃ to obtain tin dioxide powder.
(3) Dispersing the tin dioxide powder obtained in the step (2) in 50mL of absolute ethyl alcohol, respectively dropwise adding ammonia water and tetrabutyl titanate into the solution, and stirring the solution at room temperature for 24 hours. Wherein the concentration of tin dioxide is controlled to be 0.0015mol/L, the concentration of ammonia water is 0.005mol/L, the concentration of tetrabutyl titanate is 0.0015mol/L, the molar ratio of ammonia water to tetrabutyl titanate is controlled to be 3.33:1, and the molar ratio of ammonia water to tin dioxide is controlled to be 3.33: 1.
(4) Carrying out heat treatment on the solid product obtained in the step (3) at 500 ℃ for 2h to obtain TiO2/SnO2A nanocomposite material.
(5) Adding TiO into the mixture2/SnO2Grinding the nano composite material into powder, and grinding the ground TiO2/SnO2Dispersing the nano composite material powder into deionized water, carrying out ultrasonic treatment to obtain dispersion liquid of 8-10 mg/ml, coating the dispersion liquid on the surface of the interdigital electrode plate, placing the interdigital electrode plate in a drying box, drying for 6 hours at the temperature of 60 ℃, and naturally cooling to room temperature to obtain TiO2/SnO2A nanocomposite gas sensor.
In the step (5), the ultrasonic power is 250W, and the ultrasonic time is 1 min;
example 3
TiO based on ultraviolet light wave band2/SnO2The nano composite material gas sensor consists of a gas sensitive material and a heating substrate, and consists of an ultraviolet light source, the gas sensitive material and an interdigital electrode plate, wherein the gas sensitive material is coated on the surface of the interdigital electrode plate, and the coating thickness is 100 micrometers. The preparation method comprises the following steps:
(1) weighing a certain amount of carbon microspheres, and dispersing into an alcohol-water mixed solution; and weighing a certain amount of urea and sodium stannate trihydrate, and dissolving the urea and the sodium stannate trihydrate in the solution, wherein the concentration of the urea is 54mol/L, the concentration of the sodium stannate trihydrate is 0.018mol/L, and the molar ratio of the carbon microspheres to the urea is controlled to be 1: 1.
(2) And (2) moving the mixed solution obtained in the step (1) to a hydrothermal reaction kettle with a polytetrafluoroethylene lining, carrying out hydrothermal reaction for 36 hours at the temperature of 170 ℃, carrying out solid-liquid separation on a product after the hydrothermal reaction by using a centrifugal machine, washing the obtained solid product for multiple times by using deionized water and ethanol, placing the obtained solid product in a drying box, drying at the temperature of 60 ℃, placing the dried solid product in an alumina crucible, placing the alumina crucible in a muffle furnace, and carrying out heat treatment for 3 hours at the temperature of 500 ℃ to obtain tin dioxide powder.
(3) Dispersing the tin dioxide powder obtained in the step (2) in 50mL of absolute ethyl alcohol, respectively dropwise adding ammonia water and tetrabutyl titanate into the solution, and stirring the solution at room temperature for 24 hours. Wherein the concentration of tin dioxide is controlled to be 0.0015mol/L, the concentration of ammonia water is controlled to be 0.005mol/L, the concentration of tetrabutyl titanate is controlled to be 0.002mol/L, the molar ratio of ammonia water to tetrabutyl titanate is controlled to be 2.5:1, and the molar ratio of ammonia water to tin dioxide is controlled to be 3.33: 1.
(4) Carrying out heat treatment on the solid product obtained in the step (3) at 500 ℃ for 2h to obtain TiO2/SnO2A nanocomposite material.
(5) Adding TiO into the mixture2/SnO2Grinding the nano composite material into powder, and grinding the ground TiO2/SnO2Dispersing the nano composite material powder into deionized water, carrying out ultrasonic treatment to obtain dispersion liquid of 8-10 mg/ml, coating the dispersion liquid on the surface of the interdigital electrode plate, placing the interdigital electrode plate in a drying box, drying for 6 hours at the temperature of 60 ℃, and naturally cooling to room temperature to obtain TiO2/SnO2A nanocomposite gas sensor.
In the step (5), the ultrasonic power is 260W, and the ultrasonic time is 1 min;
example 4
TiO based on ultraviolet light wave band2/SnO2The nano composite material gas sensor consists of a gas sensitive material and a heating substrate, and consists of an ultraviolet light source, the gas sensitive material and an interdigital electrode plate, wherein the gas sensitive material is coated on the surface of the interdigital electrode plate, and the coating thickness is 100 micrometers. The preparation method comprises the following steps:
(1) weighing a certain amount of carbon microspheres, and dispersing into an alcohol-water mixed solution; and weighing a certain amount of urea and sodium stannate trihydrate, dissolving the urea and the sodium stannate trihydrate in the solution, wherein the concentration of the urea is 55mol/L, the concentration of the sodium stannate trihydrate is 0.02mol/L, and the molar ratio of the carbon microspheres to the urea is controlled to be 1: 2.
(2) And (2) moving the mixed solution obtained in the step (1) to a hydrothermal reaction kettle with a polytetrafluoroethylene lining, carrying out hydrothermal reaction for 36 hours at the temperature of 170 ℃, carrying out solid-liquid separation on a product after the hydrothermal reaction by using a centrifugal machine, washing the obtained solid product for multiple times by using deionized water and ethanol, placing the obtained solid product in a drying box, drying at the temperature of 60 ℃, placing the dried solid product in an alumina crucible, placing the alumina crucible in a muffle furnace, and carrying out heat treatment for 3 hours at the temperature of 500 ℃ to obtain tin dioxide powder.
(3) Dispersing the tin dioxide powder obtained in the step (2) in 50mL of absolute ethyl alcohol, respectively dropwise adding ammonia water and tetrabutyl titanate into the solution, and stirring the solution at room temperature for 24 hours. Wherein the concentration of the tin dioxide is controlled to be 0.002mol/L, the concentration of the ammonia water is controlled to be 0.005mol/L, the concentration of the tetrabutyl titanate is controlled to be 0.002mol/L, the molar ratio of the ammonia water to the tetrabutyl titanate is controlled to be 2.5:1, and the molar ratio of the ammonia water to the tin dioxide is controlled to be 2.5: 1.
(4) Carrying out heat treatment on the solid product obtained in the step (3) at 500 ℃ for 2h to obtain TiO2/SnO2A nanocomposite material.
(5) Adding TiO into the mixture2/SnO2Grinding the nano composite material into powder, and grinding the ground TiO2/SnO2Dispersing the nano composite material powder into deionized water, carrying out ultrasonic treatment to obtain dispersion liquid of 8-10 mg/ml, coating the dispersion liquid on the surface of the interdigital electrode plate, placing the interdigital electrode plate in a drying box, drying for 6 hours at the temperature of 60 ℃, and naturally cooling to room temperature to obtain TiO2/SnO2A nanocomposite gas sensor.
In the step (5), the ultrasonic power is 260W, and the ultrasonic time is 1 min;
example 5
TiO based on ultraviolet light wave band2/SnO2The gas sensor is composed of gas-sensitive material and heating substrate, and is composed of ultraviolet light sourceThe gas sensitive material is coated on the surface of the interdigital electrode plate, and the coating thickness is 100 microns. The preparation method comprises the following steps:
(1) weighing a certain amount of carbon microspheres, and dispersing into an alcohol-water mixed solution; and weighing a certain amount of urea and sodium stannate trihydrate, dissolving the urea and the sodium stannate trihydrate in the solution, wherein the concentration of the urea is 58mol/L, the concentration of the sodium stannate trihydrate is 0.02mol/L, and the molar ratio of the carbon microspheres to the urea is controlled to be 1: 1.
(2) And (2) moving the mixed solution obtained in the step (1) to a hydrothermal reaction kettle with a polytetrafluoroethylene lining, carrying out hydrothermal reaction for 36 hours at the temperature of 170 ℃, carrying out solid-liquid separation on a product after the hydrothermal reaction by using a centrifugal machine, washing the obtained solid product for multiple times by using deionized water and ethanol, placing the obtained solid product in a drying box, drying at the temperature of 60 ℃, placing the dried solid product in an alumina crucible, placing the alumina crucible in a muffle furnace, and carrying out heat treatment for 3 hours at the temperature of 500 ℃ to obtain tin dioxide powder.
(3) Dispersing the tin dioxide powder obtained in the step (2) in 50mL of absolute ethyl alcohol, respectively dropwise adding ammonia water and tetrabutyl titanate into the solution, and stirring the solution at room temperature for 24 hours. Wherein the concentration of the tin dioxide is controlled to be 0.002mol/L, the concentration of the ammonia water is 0.01mol/L, the concentration of the tetrabutyl titanate is 0.002mol/L, the molar ratio of the ammonia water to the tetrabutyl titanate is controlled to be 5:1, and the molar ratio of the ammonia water to the tin dioxide is controlled to be 5: 1.
(4) Carrying out heat treatment on the solid product obtained in the step (3) at 500 ℃ for 2h to obtain TiO2/SnO2A nanocomposite material.
(5) Adding TiO into the mixture2/SnO2Grinding the nano composite material into powder, and grinding the ground TiO2/SnO2Dispersing the nano composite material powder into deionized water, carrying out ultrasonic treatment to obtain dispersion liquid of 8-10 mg/ml, coating the dispersion liquid on the surface of the interdigital electrode plate, placing the interdigital electrode plate in a drying box, drying for 6 hours at the temperature of 60 ℃, and naturally cooling to room temperature to obtain TiO2/SnO2A nanocomposite gas sensor.
In the step (5), the ultrasonic power is 260W, and the ultrasonic time is 1 min.
Claims (8)
1. TiO based on ultraviolet light wave band2/SnO2A formaldehyde gas sensor, characterized in that the TiO2/SnO2The formaldehyde gas sensor mainly comprises an ultraviolet light source, a gas-sensitive material and an interdigital electrode plate, wherein the gas-sensitive material is coated on the surface of the interdigital electrode plate, and the coating thickness is 1-100 mu m; the gas sensitive material comprises a tin dioxide and titanium dioxide heterojunction composite nano material.
2. The TiO of claim 12/SnO2The formaldehyde gas sensor is characterized in that the tin dioxide and titanium dioxide heterojunction composite nano material is formed by growing granular titanium dioxide on the surface of hollow spherical tin dioxide by a water bath method.
3. The TiO of claim 22/SnO2The formaldehyde gas sensor is characterized in that the size of the hollow spherical tin dioxide is 200 nm-500 nm.
4. The TiO compound according to claim 1 to 32/SnO2The formaldehyde gas sensor is characterized in that the interdigital electrode plate is an alumina substrate with a pure gold electrode on the front surface and a heating resistance wire on the back surface, and the heating temperature reaches 350 ℃.
5. The TiO according to any one of claims 1 to 32/SnO2A formaldehyde gas sensor, characterized in that the TiO2/SnO2The working temperature of the formaldehyde gas sensor is room temperature, and the integration of the material and the silicon-based microelectronic is realized.
6. The TiO of claim 42/SnO2A formaldehyde gas sensor, characterized in that the TiO2/SnO2The working temperature of the formaldehyde gas sensor is room temperature, and the integration of the material and the silicon-based microelectronic is realized.
7. TiO based on ultraviolet light wave band2/SnO2The preparation process of the formaldehyde gas sensor is characterized by comprising the following steps of:
(1) dispersing the carbon microspheres into a mixed solution of absolute ethyl alcohol and water, wherein the volume ratio of the absolute ethyl alcohol to the water is 27: 13; adding urea and sodium stannate trihydrate into the mixed solution, wherein the concentration of the urea is 52-58mol/L, the concentration of the sodium stannate trihydrate is 0.01-0.04mol/L, and the molar ratio of the carbon microspheres to the urea is controlled to be 1 (1-2);
(2) transferring the mixed solution obtained in the step (1) to a hydrothermal reaction kettle with a polytetrafluoroethylene lining, carrying out hydrothermal reaction for 18-36h at the temperature of 170-200 ℃, carrying out solid-liquid separation on a product after the hydrothermal reaction by using a centrifugal machine, washing the obtained solid product for multiple times by using deionized water and ethanol, placing the obtained solid product in a drying box, drying at 60 ℃, and then carrying out heat treatment for 3h at the temperature of 500 ℃ to obtain tin dioxide powder;
(3) dispersing the tin dioxide powder obtained in the step (2) in absolute ethyl alcohol, then respectively dropwise adding ammonia water and tetrabutyl titanate, and stirring for 24 hours at room temperature; wherein the concentration of tin dioxide is controlled to be 0.001-0.002mol/L, the concentration of ammonia water is controlled to be 0.005-0.01mol/L, and the concentration of tetrabutyl titanate is controlled to be 0.001-0.002 mol/L;
(4) carrying out heat treatment on the solid product obtained in the step (3) at 500 ℃ for 2h to obtain TiO2/SnO2A nanocomposite;
(5) adding TiO into the mixture2/SnO2Grinding the nano composite material into powder, and grinding the ground TiO2/SnO2Dispersing the nano composite material powder into deionized water, carrying out ultrasonic treatment to obtain dispersion liquid of 8-10 mg/ml, coating the dispersion liquid on the surface of the interdigital electrode plate, placing the interdigital electrode plate in a drying box, drying for 4-6 h at the temperature of 60 ℃, and naturally cooling to room temperature to obtain TiO2/SnO2A nanocomposite gas sensor.
8. The preparation process according to claim 7, wherein in the step (5), the ultrasonic power is 240W-260W, and the ultrasonic time is 1 min.
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Cited By (4)
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| CN112198197A (en) * | 2020-10-13 | 2021-01-08 | 海南聚能科技创新研究院有限公司 | Formaldehyde gas sensor module |
| CN113156059A (en) * | 2021-04-20 | 2021-07-23 | 中国电子科技集团公司第四十九研究所 | Preparation method of tubular structure nano manganese oxide material |
| CN113189151A (en) * | 2021-04-30 | 2021-07-30 | 重庆文理学院 | High-response high-thermal-stability tin dioxide sensor and preparation method thereof |
| CN113189152A (en) * | 2021-04-30 | 2021-07-30 | 重庆文理学院 | Sensing equipment capable of detecting ethanol in high-temperature environment and processing method |
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