CN110677007A

CN110677007A - Voice coil motor and motion device

Info

Publication number: CN110677007A
Application number: CN201911077074.4A
Authority: CN
Inventors: 吴火亮; 孟辉; 瞿晓晨; 王越
Original assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Current assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Priority date: 2019-11-06
Filing date: 2019-11-06
Publication date: 2020-01-10

Abstract

The invention discloses a voice coil motor and a moving device with the same, wherein the voice coil motor comprises a motor rotor and a motor stator, an axial channel is arranged in the motor rotor, a telescopic pipe is accommodated in the axial channel, two ends of the telescopic pipe are respectively connected with a joint, and the two joints are respectively and fixedly arranged on the opposite ends of the motor rotor and the motor stator. The voice coil motor is internally provided with the air supply pipeline, so that the design of the air supply pipeline of related parts is eliminated, and the design complexity and the processing difficulty of the parts are greatly reduced.

Description

Voice coil motor and motion device

Technical Field

The invention relates to the field of integrated circuit equipment manufacturing, in particular to a voice coil motor with a vacuum pipeline and a motion device with the voice coil motor.

Background

In recent years, with the increasing integration of large-scale integrated circuit devices, the precision requirement of the workpiece stage, especially the motion precision requirement of the vertical module thereof, is increasing, for example, in the fields of lithography equipment, film thickness detection equipment and the like. The voice coil motor has the characteristics of simple structure, convenience in maintenance, high reliability, high energy conversion efficiency, fixed stroke, direct drive characteristic, smooth output characteristic, linear control and the like, so that the voice coil motor is frequently used in vertical motion modules of workpiece tables such as photoetching equipment or film thickness detection equipment and the like which require quick and high-precision positioning. The photolithography equipment and the film thickness detection equipment usually involve vacuum adsorption of a silicon wafer or a substrate, but voice coil motor products provided by the existing well-known voice coil motor suppliers, such as BEI and Akribis in the United states, only provide a motion function and do not have a vacuum pipeline. This makes it necessary to design the vacuum lines on the relevant parts in the design of the vacuum lines of the vertical module, which increases the design complexity and the processing difficulty of the relevant parts.

For another example, in chinese patent CN201710827822.0, the magnet of the voice coil motor of the present invention is solid, and when the magnet is vertically moved and applied to a moving device requiring an adsorption function, a pipeline can only be added from the outside.

Furthermore, in the invention of the vertical module, in US6779278B1, the vertical module is driven by a voice coil motor, but the piping for supplying vacuum to the suction device is realized by designing and machining a complicated air passage on the support of the voice coil motor. This has improved the design complexity and the processing degree of difficulty of voice coil motor support piece greatly.

Disclosure of Invention

The invention aims to provide a voice coil motor with a vacuum pipeline and a moving device with the voice coil motor, so as to solve the technical problems.

In order to achieve the above object, according to an aspect of the present invention, there is provided a voice coil motor, including a motor rotor and a motor stator, wherein an axial passage is formed in the motor rotor, a telescopic tube is accommodated in the axial passage, two ends of the telescopic tube are respectively connected to a joint, and the two joints are respectively and fixedly mounted on opposite ends of the motor rotor and the motor stator.

In an embodiment, the motor rotor is composed of a motor housing, a magnet and a back iron, the top end of the magnet is fixed on the inner end face of the motor housing, the bottom end of the magnet is fixedly assembled with the back iron, the axial channel is arranged in the magnet and the back iron, the motor stator is composed of a cylindrical coil support and a coil wound on the coil support, the coil support is provided with a middle cavity, the middle cavity is used for inserting an assembly body of the magnet and the back iron, and the two connectors are respectively installed on the inner end face of the motor housing and the bottom end face of the coil support.

In one embodiment, the magnet and the back iron have central through holes aligned with each other, the axial passage being comprised of the central through holes.

In an embodiment, the inner end surface of the motor housing and the bottom end surface of the coil support are respectively provided with a threaded hole for mounting the two connectors, and the threaded holes are internally provided with a sealing groove for mounting an O-ring.

In one embodiment, the extension tube is a helically coiled hose.

In one embodiment, the bellows is a bellows.

In one embodiment, the extension tube is a telescopic tube.

According to another aspect of the present invention, there is provided a motion device comprising a suction cup and a voice coil motor, the voice coil motor being a voice coil motor as described above, the suction cup being provided with a suction hole in fluid communication with the joint on the motor mover.

In one embodiment, the moving device further includes a rotating base, a vertical base, a rotating motor, a horizontal base and a horizontal motor, the suction cup is fixed to a rotor of the rotating motor, a stator of the rotating motor is fixedly connected with the rotating base, the suction cup is connected with the rotating base through a rotating bearing, a stator of the voice coil motor is fixedly installed on the vertical base, a rotor of the voice coil motor is fixedly connected with the rotating base, and the stator of the voice coil motor is fixedly connected with the vertical base; the rotor of the horizontal motor is fixedly connected with the vertical base, and the vacuum pipeline is communicated with the telescopic pipe of the voice coil motor to provide vacuum for the sucker.

By adopting the technical scheme, the voice coil motor has the advantages that the vacuum pipeline is designed in the voice coil motor, the design of the vacuum pipeline of related parts of the voice coil motor is cancelled, and the design complexity and the processing difficulty of the parts are greatly reduced.

Drawings

Fig. 1 is an exploded view of a voice coil motor according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of a mechanism having the voice coil motor shown in FIG. 1;

FIG. 3 is an isometric view of a motor housing of the voice coil motor shown in FIG. 1;

FIG. 4 is an isometric view of a coil carrier of the voice coil motor shown in FIG. 1;

fig. 5 is a sectional perspective view of the moving device having the voice coil motor shown in fig. 1.

Detailed Description

The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings in order to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.

In the following description, for the purposes of illustrating various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that the embodiments may be practiced without one or more of the specific details. In other instances, well-known devices, structures and techniques associated with this application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

Throughout the specification and claims, the word "comprise" and variations thereof, such as "comprises" and "comprising," are to be understood as an open, inclusive meaning, i.e., as being interpreted to mean "including, but not limited to," unless the context requires otherwise.

Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the context clearly dictates otherwise.

In the following description, for the purposes of clearly illustrating the structure and operation of the present invention, directional terms will be used, but terms such as "front", "rear", "left", "right", "outer", "inner", "outer", "inward", "upper", "lower", etc. should be construed as words of convenience and should not be construed as limiting terms.

It is to be noted that in the claims and the description of the present application, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions

As shown in fig. 1 and 2, the voice coil motor 1 according to an embodiment of the present invention may include a motor housing 11, a magnet 12, a spiral hose 13, a back iron 14,

joints

15a and 15b, a coil 16, and a coil support 17. Wherein, the back iron 14 and the magnet 12 are both in a substantially cylindrical shape and have a central through hole with a larger diameter, and when the back iron 14 and the magnet 12 are axially connected to each other, the central through holes communicate with each other to form an axial passage for accommodating the spiral hose 13, that is, the axial passage serves as a pipe running space for the spiral hose 13. It should be understood that the axial passage need not be centrally located. The motor housing 11 is cylindrical with a top end plate, and after the back iron 14 is fixedly assembled with the magnet 12 (e.g., by gluing), the magnet 12 is fixed in the motor housing 11 (e.g., by screwing or gluing). Specifically, the end (top end) of the magnet 12 is fixed on the inner end surface of the motor housing 11, and the bottom end is fixedly connected with the back iron 14 to form a motor mover. The coil 16 is wound on a cylindrical coil support 17 to constitute a motor stator. The coil support 17 has an internal cavity for receiving the assembly of the magnet 12 and back iron 14 and a bottom end plate. A motor stator accommodating the magnet 12 and the back iron 14 may be mounted into the motor housing 11, thereby fixing the magnet 12 to the motor housing 11. When mounted, an annular gap for accommodating a coil holder 17 around which a coil 16 is wound is formed between the outer peripheral surface of the assembly of the magnet 12 and the back iron 14 and the inner peripheral surface of the motor housing 11.

Two ends of the spiral hose 13 are respectively fixedly connected with a joint 15a and a joint 15 b; the

connectors

15a and 15b are fixedly mounted on the coil support 17 and the motor housing 11, respectively, and specifically, the

connectors

15a and 15b are fixedly mounted on the coil support 17 and an end plate of the motor housing 11, respectively, thereby constituting a voice coil motor with an air supply line (also commonly referred to as a vacuum line).

It will be appreciated that the coiled hose 13 may be replaced by other telescopic tubes of varying length, such as flexible bellows, telescopic tubes, etc.

As shown in fig. 3, the motor housing 11 of the present embodiment has a seal groove 111, a joint screw hole 112, and a mounting screw hole 113 formed in the distal end surface thereof. The seal groove 111 surrounds a joint screw hole 112 and serves to receive an O-ring (as indicated by reference numeral 4c in fig. 2), the joint screw hole 112 serves to fix the joint 15b, and the mounting screw hole 113 serves to fixedly couple the motor housing 11 (i.e., the motor mover) and a moving member (e.g., the motor coupling 2 in fig. 2) together. In the illustrated preferred embodiment, the joint screw holes 112 are located at the center of the top end plate of the motor housing 11, and 4 mounting screw holes 113 are uniformly distributed on the outer periphery of the joint screw holes 112. It should be understood that the connector screw holes 112 and the mounting screw holes 113 may be distributed in other ways.

As shown in fig. 4, the coil support 17 of the present embodiment has a bottom end plate, the bottom end face of which is formed with a seal groove 171, a connector screw hole 172, and a mounting screw hole 173. The sealing groove 171 surrounds a joint screw hole 172 and is used for accommodating an O-ring (as shown by reference numeral 4a in fig. 2), the joint screw hole 172 is used for fixing the mounting joint 15a, and the mounting screw hole 173 is used for fixedly connecting the coil support 17 (i.e., the motor stator) and other components (e.g., the motor base 3 in fig. 2). In the illustrated preferred embodiment, the terminal screw holes 172 are located at the center of the bottom end plate of the coil support 17, and 4 mounting screw holes 173 are uniformly distributed at the outer periphery of the terminal screw holes 172. It should be understood that the connector screw holes 172 and the mounting screw holes 173 may be otherwise distributed.

With the above structure, a vacuum passage sealed from the outside is formed between the two

mount fittings

15a and 15 b.

Fig. 2 shows a specific structure of the voice coil motor 1 to which the present embodiment is applied. The motor case 11 (i.e., the voice coil mover) of the voice coil motor 1 is fixedly coupled to the motor connecting member 2 through the mounting screw hole 113, and the O-ring 4c is fitted into the sealing groove 111 to prevent leakage of vacuum through the voice coil motor. The coil support 17 (i.e., the voice coil stator) of the voice coil motor 1 is further fixedly connected to the motor base 3 through the mounting screw hole 173, and the O-ring 4a is fitted into the sealing groove 171 to prevent the vacuum generated by the voice coil motor from leaking. The suction device (e.g., suction cup) 5 is fixedly connected to the motor connector 2, and is sealed therebetween by an O-ring 4 b. Thus, vacuum can be supplied to the adsorption device 5 without leakage. The mechanism cancels the design of an air supply pipeline (a vacuum pipeline) of the motor connecting piece 2, and greatly reduces the design complexity and the processing difficulty of the motor connecting piece 2.

Fig. 5 is a moving apparatus to which the voice coil motor 1 of the present embodiment is applied, according to an embodiment of the present invention, and mainly includes: the voice coil motor 1, a suction cup 501, a rotary base 502, a vertical base 503, a rotary motor 504, a horizontal base 505, a horizontal motor 506, and the like. The suction cup 501 is fixed to a rotor of a rotary motor 504, a stator of the rotary motor 504 is fixedly connected to a rotary base 502, and the suction cup 501 is connected to the rotary base 502 through a rotary bearing (not shown) so as to be rotatable with respect to the rotary base 502, thereby providing a driving force and a guiding support for the rotation of the suction cup 501 about a vertical axis. The rotary electric machine 504 is commercially available, and its specific structure will not be described here. Voice coil motor 1 (specifically, motor stator) fixed mounting is on vertical base 503, and voice coil motor 1's motor active cell and rotating base fixed connection to provide drive power for the vertical motion of sucking disc 501. The motor stator of the voice coil motor 1 is fixedly connected with the vertical base 503. The rotor of the horizontal motor 506 is fixedly connected with the vertical base 503, and the stator is fixed on the horizontal base 505, so as to provide horizontal driving force for the sucker 501. The vertical base 503 is designed with a vacuum pipeline, which is communicated with the pipeline of the voice coil motor 1 to provide vacuum for the sucker 501 and absorb the silicon wafer. By adopting the moving device of the voice coil motor, the design of the gas path pipeline of the rotating base 502 is cancelled, and the design complexity and the processing difficulty of the rotating base 502 are greatly reduced.

It should be understood that the above-described motion device is only one application example of the voice coil motor of the present invention, and the specific structure thereof is not limited to the illustrated embodiment. For example, there may be no horizontal motion unit.

While the preferred embodiments of the present invention have been illustrated and described in detail, it should be understood that various changes and modifications of the invention can be effected therein by those skilled in the art after reading the above teachings of the invention. Such equivalents are intended to fall within the scope of the claims appended hereto.

Claims

1. The utility model provides a voice coil motor, voice coil motor includes motor active cell and motor stator, its characterized in that, be equipped with the axial passageway in the motor active cell, hold a flexible pipe in the axial passageway, flexible pipe both ends are connected with a joint respectively, and two joints are fixed mounting respectively motor active cell with motor stator's opposite end is served.

2. The voice coil motor of claim 1, wherein the motor mover is composed of a motor housing, a magnet and a back iron, the top end of the magnet is fixed on the inner end surface of the motor housing, the bottom end of the magnet is fixedly assembled with the back iron, the axial channel is disposed in the magnet and the back iron, the motor stator is composed of a cylindrical coil support and a coil wound on the coil support, the coil support has a middle cavity, the middle cavity is used for inserting the assembly body of the magnet and the back iron, and the two connectors are respectively mounted on the inner end surface of the motor housing and the bottom end surface of the coil support.

3. The voice coil motor of claim 2, wherein the magnet and the back iron have central through holes aligned with each other, the axial channel being comprised of the central through holes.

4. The voice coil motor of claim 2, wherein the inner end surface of the motor housing and the bottom end surface of the coil support are respectively provided with a threaded hole for mounting the two connectors, and the threaded holes are provided with a sealing groove for mounting an O-ring.

5. The voice coil motor of claim 1, wherein the bellows is a helically wound hose.

6. The voice coil motor of claim 1, wherein the bellows is a bellows.

7. The voice coil motor of claim 1, wherein the bellows is a telescoping tube.

8. A movement device, characterized in that the movement device comprises a suction cup and a voice coil motor, the voice coil motor being as claimed in any one of claims 1 to 6, the suction cup being provided with a suction aperture in fluid communication with the joint on the motor mover.

9. The exercise device of claim 8, further comprising a rotating base, a vertical base, a rotating motor, a horizontal base, and a horizontal motor, wherein the suction cup is fixed to a rotor of the rotating motor, a stator of the rotating motor is fixedly connected to the rotating base, the suction cup is connected to the rotating base through a rotating bearing, a stator of the voice coil motor is fixedly mounted on the vertical base, a rotor of the voice coil motor is fixedly connected to the rotating base, and the stator of the voice coil motor is fixedly connected to the vertical base; the vertical base is provided with a vacuum pipeline, and the vacuum pipeline is communicated with the telescopic pipe of the voice coil motor to provide vacuum for the sucker.