CN110610886A - Quartz boat structure - Google Patents
Quartz boat structure Download PDFInfo
- Publication number
- CN110610886A CN110610886A CN201910986749.0A CN201910986749A CN110610886A CN 110610886 A CN110610886 A CN 110610886A CN 201910986749 A CN201910986749 A CN 201910986749A CN 110610886 A CN110610886 A CN 110610886A
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- CN
- China
- Prior art keywords
- strip
- grooves
- vertical plates
- transverse
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a quartz boat structure, which comprises two vertical plates and two bearing rods arranged between the two vertical plates; the two vertical plates are respectively provided with a transverse through groove, the heights of the two transverse through grooves are consistent, the opposite side surfaces of the two vertical plates are respectively provided with a strip-shaped bulge, the strip-shaped bulge is positioned below the transverse through groove, the length direction of the strip-shaped bulge is parallel to the length direction of the transverse through groove, and the top surface of the strip-shaped bulge is provided with a plurality of limiting grooves; two bearing rods are parallel to each other, the two ends of each bearing rod extend into the transverse through grooves of the two vertical plates respectively, vertical strip-shaped limiting holes are formed in the end faces of the two ends of each bearing rod respectively, positioning blocks corresponding to the end portions of the bearing rods are arranged on the outer sides of the vertical plates, limiting pins extending into the vertical strip-shaped limiting holes are arranged on the positioning blocks and can vertically move in the vertical strip-shaped limiting holes, and fixture blocks embedded into the limiting grooves are arranged at the bottoms of the positioning blocks. The quartz boat structure can bear silicon wafers with different sizes and specifications.
Description
Technical Field
The invention relates to a quartz boat structure.
Background
The quartz material has good physical and chemical stability, and is widely applied to the manufacture of various high-temperature resistant and corrosion resistant appliances in the semiconductor manufacturing and processing industry. Quartz boats have become the conventional choice for solar diffusion processes as carriers for silicon wafers. The quartz boat in the prior art is customized according to the size of a silicon wafer required to be borne, the customized quartz boat can only adapt to the silicon wafer of one specification, and when the specifications of the silicon wafers are different, the quartz boat needs to be replaced to bear the silicon wafer, so that the cost is improved.
Disclosure of Invention
The invention aims to provide a quartz boat structure which is reasonable in structure and can bear silicon wafers with different sizes and specifications.
In order to achieve the purpose, the technical scheme of the invention is to design a quartz boat structure, which comprises an underframe, two vertical plates arranged on the underframe, and two bearing rods arranged between the two vertical plates;
the two vertical plates are parallel to each other, transverse through grooves are respectively formed in the two vertical plates, the heights of the two transverse through grooves are consistent, strip-shaped bulges are respectively arranged on the opposite side surfaces of the two vertical plates, the strip-shaped bulges are positioned below the transverse through grooves, the length directions of the strip-shaped bulges are parallel to the length directions of the transverse through grooves, and a plurality of limiting grooves are formed in the top surfaces of the strip-shaped bulges;
the two bearing rods are parallel to each other, each bearing rod is provided with two ends extending into the transverse through grooves of the two vertical plates respectively, each bearing rod is provided with vertical strip-shaped limiting holes on the end faces of the two ends respectively, the outer sides of the vertical plates are provided with positioning blocks corresponding to the end portions of the bearing rods, limiting pins extending into the vertical strip-shaped limiting holes are arranged on the positioning blocks and can vertically move in the vertical strip-shaped limiting holes, and fixture blocks embedded into the limiting grooves are arranged at the bottoms of the positioning blocks.
Preferably, the cross-sectional shapes of the two bearing rods are rectangular, inclined planes are respectively arranged at the tops of the opposite side surfaces of the two bearing rods, the two inclined planes are distributed in a V shape, and each inclined plane is provided with a plurality of bearing clamping grooves.
Preferably, the bottom of the fixture block is provided with an iron sheet, the bottom of the limiting groove is provided with a mounting groove, and a magnet used for adsorbing the iron sheet is arranged in the mounting groove.
Preferably, the end faces of the two ends of the bearing rod are respectively flush with the back side faces of the two vertical plates.
Preferably, the plurality of bearing clamping grooves are arranged at equal intervals along the length direction of the bearing rod.
Preferably, the plurality of limiting grooves are arranged at equal intervals along the length direction of the strip-shaped protrusion.
The working principle of the invention is as follows: when the silicon wafer bearing device is used, the two bearing rods are arranged between the two vertical plates, and the two ends of each bearing rod extend into the transverse through grooves of the two vertical plates respectively, so that the bearing rods cannot move vertically and can only move transversely, and the distance between the two bearing rods can be adjusted by moving the bearing rods transversely to adapt to the size of a silicon wafer to be borne; after the completion, the locating piece is installed at the two ends of the bearing rod respectively, during installation, the limiting pin on the locating piece is inserted into the vertical strip-shaped limiting hole of the bearing rod, then the locating piece is moved downwards, until the clamping block at the bottom of the locating piece is embedded into the limiting groove of the strip-shaped protrusion, and the iron sheet is adsorbed by the magnet, so that the clamping block is not separated from the limiting groove, the bearing rod at the moment can not move transversely, therefore, the position of the bearing rod is limited, and finally, the silicon wafer is placed between the two corresponding bearing clamping grooves of the bearing rod.
The invention has the beneficial effects that: the quartz boat structure is reasonable in structure and capable of bearing silicon wafers of different sizes and specifications.
Drawings
FIG. 1 is a schematic of the present invention.
Fig. 2 is an enlarged view at a in fig. 1.
Fig. 3 is a schematic view of a riser in the present invention.
FIG. 4 is a schematic view of a locating block of the present invention.
Fig. 5 is a schematic view of the stripe-shaped projection of the present invention.
Fig. 6 is a schematic view of two carrier bars according to the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
The technical scheme of the specific implementation of the invention is as follows:
as shown in fig. 1 to 6, a quartz boat structure comprises a base frame 1, two vertical plates 2 arranged on the base frame 1, and two bearing rods 3 arranged between the two vertical plates 2;
the two vertical plates 2 are parallel to each other, the two vertical plates 2 are respectively provided with a transverse through groove 21, the heights of the two transverse through grooves 21 are consistent, the opposite side surfaces of the two vertical plates 2 are respectively provided with a strip-shaped bulge 22, the strip-shaped bulge 22 is positioned below the transverse through groove 21, the length direction of the strip-shaped bulge 22 is parallel to the length direction of the transverse through groove 21, and the top surface of the strip-shaped bulge 22 is provided with a plurality of limiting grooves 221;
the two bearing rods 3 are parallel to each other, each bearing rod 3 has two ends extending into the transverse through grooves 21 of the two vertical plates 2, each bearing rod 3 is provided with vertical strip-shaped limiting holes 31 on the end faces of the two ends, the outer sides of the vertical plates 2 are provided with positioning blocks 4 corresponding to the end portions of the bearing rods 3, the positioning blocks 4 are provided with limiting pins 41 extending into the vertical strip-shaped limiting holes 31, the limiting pins 41 can vertically move in the vertical strip-shaped limiting holes 31, and the bottoms of the positioning blocks 4 are provided with clamping blocks 42 embedded into the limiting grooves 221.
The cross-sectional shapes of the two bearing rods 3 are rectangular, the tops of the opposite side surfaces of the two bearing rods 3 are respectively provided with an inclined surface 32, the two inclined surfaces 32 are distributed in a V shape, and each inclined surface 32 is provided with a plurality of bearing clamping grooves 321.
The bottom of the latch 42 is provided with an iron sheet 5, and the bottom of the limit groove 221 is provided with an installation groove in which a magnet 6 for adsorbing the iron sheet 5 is arranged.
The end faces of the two ends of the bearing rod 3 are respectively flush with the back side faces of the two vertical plates 2.
The plurality of bearing slots 321 are arranged at equal intervals along the length direction of the bearing rod 3.
The plurality of stopper grooves 221 are arranged at equal intervals along the length direction of the bar-shaped protrusion 22.
The working principle of the invention is as follows: when the silicon wafer bearing device is used, the two bearing rods 3 are firstly installed between the two vertical plates 2, and because the two ends of the bearing rods 3 respectively extend into the transverse through grooves 21 of the two vertical plates 2, the bearing rods 3 cannot vertically move and only can transversely move the bearing rods 3, and the distance between the two bearing rods 3 can be adjusted by transversely moving the bearing rods 3 so as to adapt to the size of a silicon wafer to be borne; after the completion, the locating blocks 4 are respectively installed at two ends of the bearing rod 3, during installation, the limiting pin 41 on the locating block 4 is firstly inserted into the vertical strip-shaped limiting hole 31 of the bearing rod 3, then the locating block 4 is moved downwards until the clamping block 42 at the bottom of the locating block 4 is embedded into the limiting groove 221 of the strip-shaped protrusion 22, and the iron sheet 5 is adsorbed by the magnet 6, so that the clamping block 42 is prevented from being separated from the limiting groove 221, the bearing rod 3 at the moment can not move transversely, therefore, the position of the bearing rod 3 is limited, and finally, a silicon wafer is placed between the two corresponding bearing clamping grooves 321 of the bearing rod 3.
The invention has the beneficial effects that: the quartz boat structure is reasonable in structure and capable of bearing silicon wafers of different sizes and specifications.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the technical principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (6)
1. A quartz boat structure is characterized by comprising an underframe, two vertical plates arranged on the underframe and two bearing rods arranged between the two vertical plates;
the two vertical plates are parallel to each other, transverse through grooves are respectively formed in the two vertical plates, the heights of the two transverse through grooves are consistent, strip-shaped bulges are respectively arranged on the opposite side surfaces of the two vertical plates, the strip-shaped bulges are positioned below the transverse through grooves, the length directions of the strip-shaped bulges are parallel to the length directions of the transverse through grooves, and a plurality of limiting grooves are formed in the top surfaces of the strip-shaped bulges;
the two bearing rods are parallel to each other, each bearing rod is provided with two ends extending into the transverse through grooves of the two vertical plates respectively, each bearing rod is provided with vertical strip-shaped limiting holes on the end faces of the two ends respectively, the outer sides of the vertical plates are provided with positioning blocks corresponding to the end portions of the bearing rods, limiting pins extending into the vertical strip-shaped limiting holes are arranged on the positioning blocks and can vertically move in the vertical strip-shaped limiting holes, and fixture blocks embedded into the limiting grooves are arranged at the bottoms of the positioning blocks.
2. The quartz boat structure of claim 1, wherein the cross-sectional shapes of the two support rods are rectangular, the tops of the opposite sides of the two support rods are respectively provided with an inclined surface, the two inclined surfaces are distributed in a V shape, and each inclined surface is provided with a plurality of support slots.
3. The quartz boat structure of claim 2, wherein the bottom of the clamping block is provided with an iron plate, the bottom of the limiting groove is provided with an installation groove, and the installation groove is internally provided with a magnet for adsorbing the iron plate.
4. The quartz boat structure of claim 3, wherein the end surfaces of the support rods are flush with the opposite sides of the risers.
5. The quartz boat structure of claim 4, wherein the plurality of bearing slots are equally spaced along the length of the bearing rods.
6. The quartz boat structure of claim 5, wherein the plurality of retaining grooves are equally spaced along the length of the bar-shaped protrusion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910986749.0A CN110610886A (en) | 2019-10-17 | 2019-10-17 | Quartz boat structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910986749.0A CN110610886A (en) | 2019-10-17 | 2019-10-17 | Quartz boat structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110610886A true CN110610886A (en) | 2019-12-24 |
Family
ID=68894811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910986749.0A Pending CN110610886A (en) | 2019-10-17 | 2019-10-17 | Quartz boat structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110610886A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111892419A (en) * | 2020-08-03 | 2020-11-06 | 福赛特(唐山)新材料有限公司 | High-shock-resistance silicon carbide boat and preparation method thereof |
| WO2023240811A1 (en) * | 2022-06-15 | 2023-12-21 | 拉普拉斯新能源科技股份有限公司 | Quartz boat |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0612869A1 (en) * | 1993-02-24 | 1994-08-31 | STMicroelectronics S.A. | Waferbasket for silicon wafers |
| CN202940219U (en) * | 2012-10-31 | 2013-05-15 | 广东爱康太阳能科技有限公司 | Quartz boat |
| CN209328861U (en) * | 2019-01-23 | 2019-08-30 | 扬州美和光电科技有限公司 | A kind of adjustable section formula quartz boat of carrying |
| CN209328868U (en) * | 2019-02-18 | 2019-08-30 | 扬州美和光电科技有限公司 | Universal high capacity quartz boat |
| CN210575875U (en) * | 2019-10-17 | 2020-05-19 | 苏州博莱特石英有限公司 | Quartz carrier |
-
2019
- 2019-10-17 CN CN201910986749.0A patent/CN110610886A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0612869A1 (en) * | 1993-02-24 | 1994-08-31 | STMicroelectronics S.A. | Waferbasket for silicon wafers |
| CN202940219U (en) * | 2012-10-31 | 2013-05-15 | 广东爱康太阳能科技有限公司 | Quartz boat |
| CN209328861U (en) * | 2019-01-23 | 2019-08-30 | 扬州美和光电科技有限公司 | A kind of adjustable section formula quartz boat of carrying |
| CN209328868U (en) * | 2019-02-18 | 2019-08-30 | 扬州美和光电科技有限公司 | Universal high capacity quartz boat |
| CN210575875U (en) * | 2019-10-17 | 2020-05-19 | 苏州博莱特石英有限公司 | Quartz carrier |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111892419A (en) * | 2020-08-03 | 2020-11-06 | 福赛特(唐山)新材料有限公司 | High-shock-resistance silicon carbide boat and preparation method thereof |
| WO2023240811A1 (en) * | 2022-06-15 | 2023-12-21 | 拉普拉斯新能源科技股份有限公司 | Quartz boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191224 |
|
| RJ01 | Rejection of invention patent application after publication |