CN110601594B - Multi-foot coupling actuated micro-nano linear driver and excitation method thereof - Google Patents
Multi-foot coupling actuated micro-nano linear driver and excitation method thereof Download PDFInfo
- Publication number
- CN110601594B CN110601594B CN201910922403.4A CN201910922403A CN110601594B CN 110601594 B CN110601594 B CN 110601594B CN 201910922403 A CN201910922403 A CN 201910922403A CN 110601594 B CN110601594 B CN 110601594B
- Authority
- CN
- China
- Prior art keywords
- guide rail
- positioning
- fixed guide
- stator
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000008878 coupling Effects 0.000 title claims abstract description 104
- 238000010168 coupling process Methods 0.000 title claims abstract description 104
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 104
- 230000005284 excitation Effects 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title claims abstract description 29
- 230000033001 locomotion Effects 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims abstract description 15
- 238000006243 chemical reaction Methods 0.000 claims description 24
- 229910003460 diamond Inorganic materials 0.000 claims description 11
- 239000010432 diamond Substances 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 6
- 230000000630 rising effect Effects 0.000 claims description 6
- 238000004026 adhesive bonding Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 2
- 240000007594 Oryza sativa Species 0.000 claims 1
- 235000007164 Oryza sativa Nutrition 0.000 claims 1
- 235000009566 rice Nutrition 0.000 claims 1
- 230000002457 bidirectional effect Effects 0.000 abstract description 13
- 238000012545 processing Methods 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 15
- 238000005516 engineering process Methods 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 4
- BULVZWIRKLYCBC-UHFFFAOYSA-N phorate Chemical compound CCOP(=S)(OCC)SCSCC BULVZWIRKLYCBC-UHFFFAOYSA-N 0.000 description 3
- 241000256247 Spodoptera exigua Species 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
A multi-foot coupling actuated micro-nano linear driver and an excitation method thereof are provided, which are used for solving the problems of poor output performance, complex structure and the like caused by structural interference of the bidirectional output performance of the current linear driver. The invention consists of a base component, a fixed guide rail unit, a sliding guide rail unit, a driving guide rail unit, an upper cover component and an adjusting component. The invention adopts the mutual cooperation of the stators of the multiple driving feet to solve the interference problem existing in the bidirectional movement process of the current piezoelectric stick-slip driver and improve the forward and reverse output performance and the positioning precision of the driver; the driving foot wedge surface of the driving foot is better contacted with the motion unit, so that the driving capability of the driver is improved; meanwhile, the invention adopts a pretightening force adjusting mechanism, and can explore the motion output performance of the prototype under different pretightening forces. The invention has the advantages of good bidirectional output performance, high positioning precision, simple structure, easy adjustment and the like, and has wide application prospect in the fields of optical precision instruments, semiconductor processing and the like.
Description
Technical Field
The invention relates to a multi-foot coupling actuated micro-nano linear driver and an excitation method thereof, belonging to the technical field of micro-nano precise driving and positioning.
Background
The piezoelectric driving technology is a novel driving technology for converting electric energy into mechanical energy by utilizing the inverse piezoelectric effect of a piezoelectric material, a piezoelectric driver is driven by adopting the principle, and most of precision positioning and micro-nano operation are realized by the piezoelectric driver at present. The piezoelectric driver has the remarkable advantages of high output precision, high response speed, strong anti-electromagnetic interference capability and the like. Has been developed into one of the mainstream techniques for high precision positioning and material micro-nano mechanical property testing. At present, a piezoelectric driving and manipulating technology is rapidly developed, and with the gradual maturity of the technology, the technology is widely applied to the fields of micro-nano processing, semiconductor manufacturing, precise optical systems, in-situ test instruments and the like and shows important scientific significance and wide application prospects.
The current precision drivers can be mainly divided into electromagnetic motor driven precision drivers and piezoelectric driven precision drivers according to the driving mode. At present, most of adopted drivers adopt an electromagnetic motor as a main driving mode, although the electromagnetic driving motor can realize the output performance of large stroke and high speed, the electromagnetic driving motor is difficult to meet the positioning precision of nanometer level along with the improvement of the positioning precision, and meanwhile, no electromagnetic interference is required in some micro-operation processes, so that the piezoelectric driving technology is generated due to operation. Drivers adopting a piezoelectric driving mode are mainly classified into the following modes: direct drive type piezoelectric drivers, ultrasonic type piezoelectric drivers, inchworm type piezoelectric drivers and stick-slip type piezoelectric drivers. The direct-drive piezoelectric actuator can realize large output force and ultrahigh positioning accuracy, but the stroke of the direct-drive piezoelectric actuator is only a few micrometers, so that the application range of the direct-drive piezoelectric actuator is severely limited; the ultrasonic piezoelectric driver needs to work under high-voltage and resonance frequency driving signals, and although high-speed performance output can be realized, the abrasion is serious; the inchworm type driver needs a plurality of piezoelectric stacks to complete the work, the structure is relatively complex, and a large amount of control is needed as assistance; the piezoelectric stick-slip driver has the advantages of simple and compact structure, high positioning precision, large stroke, no electromagnetic interference, convenient control and the like, and is widely applied. However, as the application field of the piezoelectric stick-slip driver is gradually increased, the bidirectional output requirement of the piezoelectric stick-slip driver is gradually increased, but due to structural limitation, the piezoelectric stick-slip driver is difficult to realize bidirectional motion at present, and even the piezoelectric stick-slip driver with the bidirectional motion characteristic has the defects of large structural size, poor forward and reverse output performance caused by structural interference, inconsistent output performance and the like, so that the piezoelectric stick-slip driver becomes a bottleneck problem which restricts the further development of the piezoelectric stick-slip driver.
Therefore, based on the bottleneck problem, it is very important to actively search and design a piezoelectric stick-slip driver with a large stroke and small interference in the driving process.
Disclosure of Invention
The invention discloses a multi-foot coupling actuating type micro-nano linear driver and an excitation method thereof, aiming at solving the problems of small stroke, mutual interference in the driving process and the like of the conventional bidirectional driver.
The technical scheme adopted by the invention is as follows:
the multi-foot coupling actuated micro-nano linear driver comprises a base component, a fixed guide rail unit, a sliding guide rail unit, a driving unit, an upper cover component and an adjusting component; the fixed guide rail unit is connected with the base component through a screw; the sliding guide rail unit is contacted with the fixed guide rail unit; the driving unit and the upper cover component are fixed through screws; the adjusting component is connected with the upper cover component through threads.
The base component is provided with a base, a locking plate and a locking screw. The locking plate is connected and fixed to the base through a locking screw. The base is provided with a base countersunk hole, a base upper surface, a dovetail groove sliding block, a hook I, a tool withdrawal groove I and a fixed guide rail bracket positioning threaded hole; the base counter bore is used for fixing the multi-foot coupling actuated micro-nano linear driver; the dovetail groove sliding block is fixedly connected with the fixed upper cover component; the hook I is used for connecting the upper cover assembly; a tool withdrawal groove I is formed in the base; the pre-tightening plate is provided with a pre-tightening plate surface and a pre-tightening screw through hole; the locking screw penetrates through the locking screw through hole to press the surface of the locking plate, so that the locking plate is contacted with the base.
The fixed guide rail unit is provided with a fixed guide rail bracket, a crossed guide rail roller bracket, a fixed guide rail bracket positioning screw, a fixed guide rail and a fixed guide rail positioning screw; the fixed guide rail bracket is fixedly connected with the fixed guide rail through a fixed guide rail positioning screw; the fixed guide rail bracket is provided with a fixed guide rail positioning groove, a fixed guide rail positioning hole, a fixed guide rail positioning surface I, a fixed guide rail bracket boss, a support frame positioning hole and a fixed guide rail bracket bottom surface; a fixed guide rail bracket boss on the fixed guide rail bracket is contacted with the upper surface of the base; the fixed guide rail bracket positioning screw penetrates through the support frame positioning hole to be in threaded connection with the fixed guide rail bracket positioning threaded hole; the fixed guide rail positioning groove is used for placing a fixed guide rail; the fixed guide rail is provided with a fixed guide rail surface, a fixed guide rail threaded hole and a fixed guide rail crossed roller bracket mounting groove; the fixed guide rail surface is contacted with a fixed guide rail positioning surface I; the fixed guide rail threaded hole is connected with a fixed guide rail positioning screw; the fixed guide rail cross roller support mounting groove is used for placing a cross guide rail roller support.
The sliding guide rail unit is provided with a sliding guide rail retainer, a sliding guide rail positioning screw and a sliding guide rail; the sliding guide rail retainer is fixedly connected with the sliding guide rail through a sliding guide rail positioning screw; the sliding guide rail retainer is provided with a sliding guide rail positioning hole, a sliding guide rail positioning groove, a sliding guide rail positioning surface and a wedge-shaped driving contact surface; the sliding guide rail positioning hole is used for placing a sliding guide rail positioning screw, and the sliding guide rail positioning groove is used for placing a sliding guide rail; the sliding guide rail is provided with a sliding guide rail surface, a sliding guide rail threaded hole and a sliding guide rail crossed roller bracket mounting groove; the sliding guide rail surface is contacted with the sliding guide rail positioning surface; the cross roller bracket mounting groove of the sliding guide rail is used for mounting a cross guide rail roller bracket.
The driving unit is provided with a coupling adjustment conversion base meter screw I, a multi-driving-foot coupling type stator, a gasket I, a piezoelectric stack II, a gasket II and a coupling adjustment conversion base meter screw II; the coupling adjustment conversion base Mi screw I is connected with the multi-driving-foot coupling type stator through threads, and the pre-tightening force between the piezoelectric stack I and the multi-driving-foot coupling type stator can be adjusted through rotating the coupling adjustment conversion base Mi screw I; the gasket I is extruded by a coupling adjusting conversion base meter screw I to be in contact with the piezoelectric stack I; the coupling adjustment and conversion base Mi screw II is connected with the multi-driving-foot coupling type stator through threads, and the pre-tightening force between the piezoelectric stack II and the multi-driving-foot coupling type stator can be adjusted through rotating the coupling adjustment and conversion base Mi screw II; the gasket II is extruded by a coupling adjusting conversion base meter screw II to be in contact with the piezoelectric stack II; the multi-driving-foot coupling type stator is provided with a base meter screw threaded hole I, a stator positioning threaded hole I, a driving foot wedge surface I, a hinge front beam I, a stacking pressure regulation hinge rectangular groove I, a stator positioning threaded hole II, a hinge coupling joint cross beam, a hinge coupling joint straight round hinge, a hinge coupling transition rectangular groove I, a stacking pressure regulation hinge cross beam I, a driving foot I, a straight round flexible hinge I, a diamond groove I, a straight round hinge II, a driving foot wedge surface II, a driving foot II, a stator positioning threaded hole III, a stator positioning plane III, a base meter screw threaded hole II, a diamond cross beam II, a diamond groove II, a hinge front beam II, a stacking pressure regulation hinge rectangular groove II, a stator positioning plane II, a stacking pressure regulation hinge cross beam II, a stator positioning plane I and a diamond cross beam I; the base meter screw threaded hole I is in threaded connection with the coupling adjustment conversion base meter screw I, and the stator positioning threaded hole I, the stator positioning threaded hole II and the stator positioning threaded hole III are used for fixing the multi-driving-foot coupling type stator; the driving foot wedge surface I and the driving foot wedge surface II are in contact with the wedge-shaped driving contact surface, and friction force between the driving foot wedge surface I and the driving foot wedge surface II can provide power for the fixing unit; the hinge front beam I, the stacking pressure regulating hinge cross beam I, the straight circular flexible hinge I and the diamond cross beam I form an asymmetric diamond hinge together; the multi-driving-foot coupling type stator is provided with a stacking pressure regulating hinge rectangular groove I and a stacking pressure regulating hinge rectangular groove II; the stator positioning plane III, the stator positioning plane II and the stator positioning plane I are in close contact with the upper cover assembly, and the piezoelectric stack I and the piezoelectric stack II are respectively installed in the diamond-shaped groove I and the diamond-shaped groove II.
The upper cover assembly is provided with an adjustable upper cover, an upper precise adjusting nut, a stator positioning screw and a pre-tightening spring; the adjustable upper cover is connected with the multi-driving-foot coupling type stator through threads; the upper precise adjusting nut is fixed with the adjustable upper cover through gluing. The adjustable upper cover is provided with a tool withdrawal groove II, a stator positioning counter sink hole III, an upper precise adjusting nut counter sink hole, a stator positioning counter sink hole I, a hook II, a dovetail groove and the back of the upper cover; the tool withdrawal groove II; the stator positioning screws respectively penetrate through the stator positioning counter sink I, the stator positioning counter sink II and the stator positioning counter sink III to be in threaded connection with the stator positioning threaded hole I, the stator positioning threaded hole II and the stator positioning threaded hole III; the upper precise adjusting nut counter sink is used for placing an upper precise adjusting nut; the pre-tightening spring is respectively connected with the hook I and the hook II, and the back of the upper cover is fixedly contacted with the stator positioning plane III, the stator positioning plane II and the stator positioning plane I; the dovetail groove is connected with the dovetail groove sliding block in an embedded mode.
In the excitation method, a double-excitation electric signal group is adopted, an excitation electric signal A is a positive sawtooth wave electric signal, an excitation electric signal B is a negative sawtooth wave electric signal, and when the excitation electric signal A and the excitation electric signal B are respectively introduced into a piezoelectric stack I and a piezoelectric stack II: t is t 1 ~t 2 Stage (2): the excitation electric signal A is in a slow rising stage, so that the piezoelectric stack I is slowly extended; the excitation electric signal B is in a slow descending stage, so that the piezoelectric stack II is slowly shortened to form hinge interlocking, and the movement effect of the piezoelectric stick-slip driving device is enhanced; t is t 2 ~t 3 Stage (2): the excitation electric signal A is in a rapid descending stage, so that the piezoelectric stack I is rapidly shortened and recovered to deform; the excitation electric signal B is in a rapid rising stage, so that the piezoelectric stack II is rapidly extended and restored to deform to form hinge interlocking, and the displacement backspacing of the piezoelectric stick-slip driving device is reduced; repeating the excitation process to realize continuous stepping motion of the piezoelectric stick-slip driving device; similarly, the reverse motion is to respectively introduce the excitation electric signal A and the excitation electric signal B into the piezoelectric stack II and the piezoelectric stack I; wherein the A period of the excitation electric signal is T 1 Excitation voltage amplitude of V 1 The B period of the excitation electrical signal is T 2 Excitation voltage amplitude of V 2 The periodic ratio of the excitation electrical signal A to the excitation electrical signal B is T 1 /T 2 =1, excitation voltage amplitude absolute value ratio is | V 1 |/|V 2 And | is greater than 2.
The invention has the beneficial effects that: the invention relates to a multi-foot coupling actuating type micro-nano linear driver and an excitation method thereof.A driver driving unit is provided with a plurality of driving feet which are matched with each other under the composite excitation method of sawtooth wave electric signals, the defect of poor forward and reverse output performance of a prototype due to interference problem is reduced as much as possible on the premise of ensuring that the driver can realize bidirectional motion, the problems of complex structure, large bidirectional driving interference and the like of the current bidirectional piezoelectric stick-slip driver can be obviously solved, and meanwhile, the driver can reach the nano-scale positioning precision.
Drawings
Fig. 1 is a schematic structural diagram of a multi-foot coupling actuated micro-nano linear driver provided by the invention;
fig. 2 is a schematic structural diagram of a base assembly of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 3 is a schematic view of a base structure of a multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 4 is a schematic diagram of a locking plate structure of a multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 5 is a schematic view of a fixed guide rail unit structure of the multi-foot coupling actuated micro-nano linear driver provided by the invention;
fig. 6 is a schematic structural diagram i of a fixed guide rail bracket of the multi-foot coupling actuated micro-nano linear driver provided by the invention;
fig. 7 is a schematic structural diagram ii of a fixed guide rail bracket of the multi-foot coupling actuated micro-nano linear driver according to the present invention;
fig. 8 is a schematic view of a fixed guide rail structure of the multi-foot coupling actuated micro-nano linear driver provided by the invention;
fig. 9 is a schematic view ii of a fixed guide rail structure of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 10 is a schematic structural diagram of a cross roller support of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 11 is a schematic structural view of a sliding guide rail unit of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 12 is a schematic structural view of a sliding guide rail retainer of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 13 is a schematic structural diagram i of a sliding guide rail of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 14 is a schematic structural diagram ii of a sliding guide rail of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 15 is a schematic structural diagram of a driving unit of the multi-foot coupling actuated micro-nano linear driver according to the present invention;
fig. 16 is a schematic structural diagram i of a multi-driving-foot coupled stator of the multi-foot coupled actuated micro-nano linear driver according to the present invention;
fig. 17 is a schematic structural diagram ii of a multi-driving-foot coupled stator of the multi-foot coupled actuated micro-nano linear driver according to the present invention;
fig. 18 is a schematic structural view of an upper cover assembly of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 19 is a schematic structural diagram i of an adjustable upper cover of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 20 is a schematic diagram ii of an adjustable upper cover structure of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 21 is a schematic structural view of an upper precise adjustment nut of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 22 is a schematic structural diagram of an adjusting assembly of the multi-foot coupling actuated micro-nano linear actuator according to the present invention;
fig. 23 is a schematic diagram of an excitation signal waveform of the multi-foot coupling actuated micro-nano linear driver according to the present invention.
Detailed Description
The first embodiment is as follows: the present embodiment will be described with reference to fig. 1 to 22. The embodiment provides a specific implementation scheme of a multi-foot coupling actuated micro-nano linear driver. The multi-foot coupling actuated micro-nano linear driver comprises a base component 1, a fixed guide rail unit 2, a sliding guide rail unit 3, a driving unit 4, an upper cover component 5 and an adjusting component 6. The fixed guide rail unit 2 is connected with the base component 1 through a screw; the sliding guide unit 3 is in contact with the fixed guide unit 2; the driving unit 4 and the upper cover assembly 5 are fixed through screws; the adjusting assembly 6 is connected with the upper cover assembly 5 through threads.
The base component 1 is provided with a base 1-1, a locking plate 1-2 and a locking screw 1-3. The locking plate 1-2 is fixed on the base 1-1 through locking screw connection. The base 1-1 is provided with a base counter bore 1-1-1, a base upper surface 1-1-2, a dovetail groove sliding block 1-1-3, a hook I1-1-4, a tool withdrawal groove I1-1-5 and a fixed guide rail bracket positioning threaded hole 1-1-6; the base counter sink 1-1-1 is used for fixing the multi-foot coupling actuated micro-nano linear driver; the dovetail groove sliding blocks 1-1-3 are connected with a fixed upper cover component 5; the hooks I1-1-4 are used for connecting an upper cover assembly; the tool withdrawal groove I1-1-5 formed in the base 1-1 is beneficial to processing the base 1-1; the locking plate 1-2 is provided with a locking plate surface 1-2-1 and a locking screw through hole 1-2-2; the locking screw 1-3 penetrates through the locking screw through hole 1-2-2 to extrude the surface 1-2-1 of the locking plate to enable the locking plate 1-2 to be in contact with the base 1-1.
The fixed guide rail unit 2 is provided with a fixed guide rail bracket 2-1, a cross guide rail roller bracket 2-2, a fixed guide rail bracket positioning screw 2-3, a fixed guide rail 2-4 and a fixed guide rail positioning screw 2-5. The fixed guide rail bracket 2-1 is fixedly connected with the fixed guide rail 2-4 through a fixed guide rail positioning screw 2-5. The cross guide roller support 2-2 is placed in contact with the fixed guide 2-4.
The fixed guide rail bracket 2-1 is provided with a fixed guide rail positioning groove 2-1-1, a fixed guide rail positioning hole 2-1-2, a fixed guide rail positioning surface I2-1-3, a fixed guide rail bracket boss 2-1-4, a support frame positioning hole 2-1-5 and a fixed guide rail bracket bottom surface 2-1-6; a fixed guide rail bracket boss 2-1-4 on the fixed guide rail bracket 2-1 is contacted with the upper surface 1-1-2 of the base; a fixed guide rail bracket positioning screw 2-3 penetrates through a support frame positioning hole 2-1-5 to be in threaded connection with a fixed guide rail bracket positioning threaded hole 1-1-6; the fixed guide rail positioning groove 2-1-1 is used for placing the fixed guide rail 2-4.
The fixed guide rail 2-4 is provided with a fixed guide rail surface 2-4-1, a fixed guide rail threaded hole 2-4-2 and a fixed guide rail cross roller bracket mounting groove 2-4-3; the fixed guide rail surface 2-4-1 is contacted with the fixed guide rail positioning surface I2-1-3; the fixed guide rail threaded hole 2-4-2 is connected with a fixed guide rail positioning screw 2-5; the installation groove 2-4-3 of the cross roller bracket of the fixed guide rail is used for placing the cross roller bracket 2-2 of the cross guide rail.
The sliding guide rail unit 3 is provided with a sliding guide rail retainer 3-1, a sliding guide rail positioning screw 3-2 and a sliding guide rail 3-3; the sliding guide rail retainer 3-1 is fixedly connected with the sliding guide rail 3-3 through a sliding guide rail positioning screw 3-2.
The sliding guide rail retainer 3-1 is provided with a sliding guide rail positioning hole 3-1-1, a sliding guide rail positioning groove 3-1-2, a sliding guide rail positioning surface 3-1-3 and a wedge-shaped driving contact surface 3-1-4; the sliding guide rail positioning hole 3-1-1 is used for placing a sliding guide rail positioning screw 3-1-2, and the sliding guide rail positioning groove 3-1-2 is used for placing a sliding guide rail 3-3.
The sliding guide rail 3-3 is provided with a sliding guide rail surface 3-3-1, a sliding guide rail threaded hole 3-3-2 and a sliding guide rail cross roller bracket mounting groove 3-3-3; the sliding guide rail surface 3-3-1 is contacted with the sliding guide rail positioning surface 3-1-3; the cross roller bracket mounting groove 3-3-3 of the sliding guide rail is used for mounting the cross roller bracket 2-2 of the cross guide rail.
The driving unit 4 is provided with a coupling adjustment conversion base meter screw I4-1, a multi-driving-foot coupling type stator 4-2, a gasket I4-3, a piezoelectric stack I4-4, a piezoelectric stack II 4-5, a gasket II 4-6 and a coupling adjustment conversion base meter screw II 4-7; the coupling adjustment conversion base Mi screw I4-1 is connected with the multi-driving-foot coupling type stator 4-2 through threads, and the pre-tightening force between the piezoelectric stack I4-4 and the multi-driving-foot coupling type stator 4-2 can be adjusted through rotating the coupling adjustment conversion base Mi screw I4-1; the gasket I4-3 is extruded by a coupling adjustment conversion base meter screw I4-1 to be in contact with the piezoelectric stack I4-4; the coupling adjustment and conversion base Mi screw II 4-7 is in threaded connection with the multi-driving-foot coupling type stator 4-2, and the pre-tightening force between the piezoelectric stack II 4-5 and the multi-driving-foot coupling type stator 4-2 can be adjusted by rotating the coupling adjustment and conversion base Mi screw II 4-7; and the gasket II 4-6 is pressed by a coupling adjustment conversion base meter screw II 4-7 to be in contact with the piezoelectric stack II 4-5.
<xnotran> 4-2 Ⅰ 4-2-1, Ⅰ 4-2-1, Ⅰ 4-2-3, Ⅰ 4-2-4, Ⅰ 4-2-5, Ⅱ 4-2-6, 4-2-7, 4-2-8, Ⅰ 4-2-9, Ⅰ 4-2-10, Ⅰ 4-2-11, Ⅰ 4-2-12, Ⅰ 4-2-13, Ⅱ 4-2-14, Ⅱ 4-2-15, Ⅱ 4-2-16, Ⅲ 4-2-17, Ⅲ 4-2-18, Ⅱ 4-2-19, Ⅱ 4-2-20, Ⅱ 4-2-21, Ⅱ 4-2-22, Ⅱ 4-2-23, Ⅱ 4-2-24, Ⅱ 4-2-25, Ⅰ 4-2-26, Ⅰ 4-2-27; </xnotran> The base meter screw threaded hole I4-2-1 is in threaded connection with the coupling adjustment conversion base meter screw I4-1, and the stator positioning threaded hole I4-2-2, the stator positioning threaded hole II 4-2-6 and the stator positioning threaded hole III 4-2-17 are used for fixing the multi-drive-foot coupling type stator 4-2; the driving foot wedge surface I4-2-3 and the driving foot wedge surface II 4-2-15 are in contact with the wedge-shaped driving contact surface 3-1-4, and friction force between the driving foot wedge surface I4-2-3 and the driving foot wedge surface II 4-2-15 can provide power for the fixing unit 2; the hinge front beam I4-2-4, the stacking pressure regulation hinge cross beam I4-2-10, the straight-round flexible hinge I4-2-12 and the diamond cross beam I4-2-27 form an asymmetric diamond hinge together; the stacking pressure regulating hinge rectangular groove I4-2-5 and the stacking pressure regulating hinge rectangular groove II 4-2-23 which are arranged on the multi-driving-foot coupling type stator 4-2 are beneficial to the stator to deform; the stator positioning plane III 4-2-18, the stator positioning plane II 4-2-24 and the stator positioning plane I4-2-26 are in close contact with the upper cover assembly 5, and the piezoelectric stack I4-4 and the piezoelectric stack II 4-5 are respectively installed in the diamond-shaped groove I4-2-13 and the diamond-shaped groove II 4-2-21.
The upper cover assembly 5 is provided with an adjustable upper cover 5-1, an upper precise adjusting nut 5-2, a stator positioning screw 5-3 and a pre-tightening spring 5-4; the adjustable upper cover 5-1 is connected with the multi-driving-foot coupling type stator 4-2 through threads; the upper precise adjusting nut 5-2 and the adjustable upper cover 5-1 are fixed by gluing; the stator positioning screw 5-3 is used for fixedly connecting the driving unit 4.
The adjustable upper cover 5-1 is provided with a tool withdrawal groove II 5-1-1, a stator positioning counter sink II 5-1-2, a stator positioning counter sink III 5-1-3, an upper precise adjusting nut counter sink 5-1-4, a stator positioning counter sink I5-1-5, a hook II 5-1-6, a dovetail groove 5-1-7 and an upper cover back 5-1-8; the tool withdrawal groove II 5-1-1 is beneficial to processing; the stator positioning screws 5-3 respectively penetrate through the stator positioning counter sink holes I5-1-5, the stator positioning counter sink holes II 5-1-2, the stator positioning counter sink holes III 5-1-3, the stator positioning threaded holes I4-2-2, the stator positioning threaded holes II 4-2-6 and the stator positioning threaded holes III 4-2-17 to be in threaded connection; the tool withdrawal groove II 5-1-1 is convenient to machine, and the overhead precise adjusting nut counter sink 5-1-4 is used for placing the overhead precise adjusting nut 5-2; the pre-tightening springs 5-4 are respectively connected with the hooks I1-1-4 and the hooks II 5-1-6, and the back surfaces 5-1-8 of the upper covers are fixedly contacted with the stator positioning planes III 4-2-18, the stator positioning planes II 4-2-24 and the stator positioning planes I4-2-26; the dovetail grooves 5-1-7 are connected with the dovetail groove sliding blocks 1-1-3 in an embedded mode.
The adjusting component 6 is provided with a precise thread pair adjusting screw 6-1 and a precise thread pair adjusting screw 6-2; the precise thread pair adjusting screw 6-1 is in threaded connection with the upper precise adjusting nut 5-2.
The second embodiment is as follows: the present embodiment is described with reference to fig. 23, and provides a specific embodiment of a method for exciting a multi-foot coupling actuated micro-nano linear actuator, which is as follows.
According to the excitation method, a double-excitation electric signal group is adopted, an excitation electric signal A is a positive sawtooth wave electric signal, an excitation electric signal B is a negative sawtooth wave electric signal, and when the excitation electric signal A and the excitation electric signal B are respectively introduced into a piezoelectric stack I4-4 and a piezoelectric stack II 4-5: t is t 1 ~t 2 Stage (2): the excitation electric signal A is in a slow rising stage, so that the piezoelectric stack I4-4 is slowly extended; the excitation electric signal B is in a slow descending stage, so that the piezoelectric stack II 4-5 is slowly shortened to form a hingeThe chains are interlocked, so that the movement effect of the piezoelectric stick-slip driving device is enhanced; t is t 2 ~t 3 Stage (2): the excitation electric signal A is in a rapid descending stage, so that the piezoelectric stack I4-4 is rapidly shortened and restored to deform; the excitation electric signal B is in a rapid rising stage, so that the piezoelectric stacks II 4-5 are rapidly extended and restored to deform to form hinge interlocking, and the displacement backspacing of the piezoelectric stick-slip driving device is reduced; and repeating the excitation process to realize the continuous stepping motion of the piezoelectric stick-slip driving device. Similarly, the reverse motion is to pass the excitation electrical signal A and the excitation electrical signal B into the piezoelectric stacks II 4-5 and I4-4, respectively. Wherein the period of the excitation electrical signal A is T 1 Excitation voltage amplitude of V 1 The excitation electrical signal has a B period of T 2 Excitation voltage amplitude of V 2 The period ratio of the excitation electrical signal A to the excitation electrical signal B is T 1 /T 2 =1, excitation voltage amplitude absolute value ratio is | V 1 |/|V 2 And | is greater than 2.
The working principle is as follows:
the micro-nano linear driver is driven by adopting a multi-foot coupling actuating type double-clamping stator, the hinge structure of the micro-nano linear driver utilizes the characteristic that rhombus is easy to deform to further enable a driving unit to move, a coupling excitation electric signal A is introduced into a piezoelectric stack I and a coupling excitation electric signal B is introduced into a piezoelectric stack II in the working process, and the coupling excitation electric signal A and the coupling excitation electric signal B are introduced into a piezoelectric stack II at certain timet 0 Time of arrivalt 1 At the moment, the piezoelectric stack I is positively charged, the piezoelectric stack slowly extends due to the inverse piezoelectric effect, so that the hinge extends in the direction of the rectangular groove with the stacking pressure regulating hinge in the middle, and the driving foot wedge surface I clamps and displaces in the direction of the rectangular groove with the stacking pressure regulating hinge in the middle; meanwhile, in order to prevent the micro-nano linear driver from driving foot wedge surface interference in the operation process, the time is sett 0 Arrival timet 1 At the moment, the piezoelectric stack II is negatively charged, and the driving foot wedge surface II is expanded due to the slow shortening of the piezoelectric stack caused by the inverse piezoelectric effect; by the above-mentioned time of flightt 0 Time of arrivalt 1 The piezoelectric stacks I and II are excited at any moment, the driving unit runs a large step along the extension direction of the driving foot wedge surface I under the action of static friction force, and the movement is carried outThe process is a 'sticky' motion process; at the time oft 1 Arrival timet 2 At any moment, the piezoelectric stack I and the piezoelectric stack II are quickly restored to the initial length, the driving unit moves backwards for a small step under the action of sliding friction force, the motion process is a 'sliding' motion process, and the driving unit is used for repeating the process to generate a stepping motion process along the forward direction. Based on the movement principle, if the coupling excitation electrical signal B is introduced into the piezoelectric stack I and the coupling excitation electrical signal A is introduced into the piezoelectric stack II, the driving unit generates stepping movement along the reverse direction.
In summary, the following steps: the invention designs a multi-foot coupling actuating type micro-nano linear actuator and an excitation method thereof, which can obviously solve the problems of complex structure, poor bidirectional output performance, large bidirectional output interference and the like of the current bidirectional piezoelectric stick-slip actuator, and meanwhile, the actuator can achieve the purposes of nano-scale positioning precision, novel structure, convenient control, obvious improvement of output performance and good application prospect in the fields of ultra-precision machining, precision driving, optical systems and the like.
Claims (6)
1. A multi-foot coupling actuated micro-nano linear driver is characterized in that: the micro-nano linear driver comprises a base component (1), a fixed guide rail unit (2), a sliding guide rail unit (3), a driving unit (4), an upper cover component (5) and an adjusting component (6); the fixed guide rail unit (2) is connected with the base component (1) through a screw; the sliding guide rail unit (3) is in contact with the fixed guide rail unit (2); the driving unit (4) and the upper cover component (5) are fixed through screws; the adjusting component (6) is connected with the upper cover component (5) through threads; the base component (1) is provided with a base (1-1), a locking plate (1-2) and a locking screw (1-3); the locking plate (1-2) is fixedly connected to the base (1-1) through a locking screw; the base (1-1) is provided with a base counter bore (1-1-1), a base upper surface (1-1-2), a dovetail groove sliding block (1-1-3), a hook I (1-1-4), a tool withdrawal groove I (1-1-5) and a fixed guide rail support positioning threaded hole (1-1-6); the base countersunk hole (1-1-1) is used for fixing the multi-foot coupling actuated micro-nano linear driver; the dovetail groove sliding blocks (1-1-3) are fixedly connected with the fixed upper cover component (5); the hook I (1-1-4) is used for connecting an upper cover assembly; a tool withdrawal groove I (1-1-5) is arranged on the base (1-1); the locking plate (1-2) is provided with a locking plate surface (1-2-1) and a locking screw through hole (1-2-2); the locking screw (1-3) penetrates through the locking screw through hole (1-2-2) to press the surface (1-2-1) of the locking plate so that the locking plate (1-2) is contacted with the base (1-1).
2. The multi-foot coupling actuated micro-nano linear driver according to claim 1, characterized in that: the fixed guide rail unit (2) is provided with a fixed guide rail bracket (2-1), a cross guide rail roller bracket (2-2), a fixed guide rail bracket positioning screw (2-3), a fixed guide rail (2-4) and a fixed guide rail positioning screw (2-5); the fixed guide rail bracket (2-1) is fixedly connected with the fixed guide rail (2-4) through a fixed guide rail positioning screw (2-5); the fixed guide rail bracket (2-1) is provided with a fixed guide rail positioning groove (2-1-1), a fixed guide rail positioning hole (2-1-2), a fixed guide rail positioning surface I (2-1-3), a fixed guide rail bracket boss (2-1-4), a support bracket positioning hole (2-1-5) and a fixed guide rail bracket bottom surface (2-1-6); a fixed guide rail bracket boss (2-1-4) on the fixed guide rail bracket (2-1) is contacted with the upper surface (1-1-2) of the base; a fixed guide rail bracket positioning screw (2-3) penetrates through a support frame positioning hole (2-1-5) to be in threaded connection with a fixed guide rail bracket positioning threaded hole (1-1-6); the fixed guide rail positioning groove (2-1-1) is used for placing a fixed guide rail (2-4); the fixed guide rail (2-4) is provided with a fixed guide rail surface (2-4-1), a fixed guide rail threaded hole (2-4-2) and a fixed guide rail cross roller bracket mounting groove (2-4-3); the fixed guide rail surface (2-4-1) is contacted with the fixed guide rail positioning surface I (2-1-3); the fixed guide rail threaded hole (2-4-2) is connected with a fixed guide rail positioning screw (2-5); the cross roller bracket mounting groove (2-4-3) of the fixed guide rail is used for placing the cross roller bracket (2-2) of the cross guide rail.
3. The multi-foot coupling actuated micro-nano linear driver according to claim 1, wherein: the sliding guide rail unit (3) is provided with a sliding guide rail retainer (3-1), a sliding guide rail positioning screw (3-2) and a sliding guide rail (3-3); the sliding guide rail retainer (3-1) is fixedly connected with the sliding guide rail (3-3) through a sliding guide rail positioning screw (3-2); a sliding guide rail positioning hole (3-1-1), a sliding guide rail positioning groove (3-1-2), a sliding guide rail positioning surface (3-1-3) and a wedge-shaped driving contact surface (3-1-4) are arranged on the sliding guide rail retainer (3-1); the sliding guide rail positioning hole (3-1-1) is used for placing a sliding guide rail positioning screw (3-2), and the sliding guide rail positioning groove (3-1-2) is used for placing the sliding guide rail (3-3); the sliding guide rail (3-3) is provided with a sliding guide rail surface (3-3-1), a sliding guide rail threaded hole (3-3-2) and a sliding guide rail cross roller bracket mounting groove (3-3-3); the sliding guide rail surface (3-3-1) is contacted with the sliding guide rail positioning surface (3-1-3); the cross roller bracket mounting groove (3-3-3) of the sliding guide rail is used for mounting the cross roller bracket (2-2) of the cross guide rail.
4. The multi-foot coupling actuated micro-nano linear driver according to claim 1, wherein: the driving unit (4) is provided with a coupling adjustment conversion base meter screw I (4-1), a multi-driving-foot coupling type stator (4-2), a gasket I (4-3), a piezoelectric stack I (4-4), a piezoelectric stack II (4-5), a gasket II (4-6) and a coupling adjustment conversion base meter screw II (4-7); the coupling adjusting and converting base meter screw I (4-1) is in threaded connection with the multi-driving-foot coupling type stator (4-2); the gasket I (4-3) is extruded by a coupling adjustment conversion base meter screw I (4-1) to be in contact with the piezoelectric stack I (4-4); the coupling adjustment conversion base Mi screw II (4-7) is in threaded connection with the multi-drive-foot coupling type stator (4-2); the gasket II (4-6) is extruded by a coupling adjustment conversion base meter screw II (4-7) to be in contact with the piezoelectric stack II (4-5); the multi-drive-foot coupling type stator (4-2) is provided with a screw thread hole I (4-2-1) of a screw of a base meter, a positioning screw hole I (4-2-1) of the stator, a wedge surface I (4-2-3) of a drive foot, a front hinge beam I (4-2-4), a rectangular stacking pressure regulating hinge groove I (4-2-5), a positioning screw hole II (4-2-6) of the stator, a cross beam (4-2-7) of a hinge coupling joint, a straight and circular hinge (4-2-8) of the hinge coupling joint, a transition rectangular hinge coupling groove I (4-2-9) the stacking pressure regulation and control hinge comprises a hinge cross beam I (4-2-10), a driving foot I (4-2-11), a straight-round flexible hinge I (4-2-12), a diamond-shaped groove I (4-2-13), a straight-round hinge II (4-2-14), a driving foot wedge surface II (4-2-15), a driving foot II (4-2-16), a stator positioning threaded hole III (4-2-17), a stator positioning plane III (4-2-18), a base rice screw threaded hole (4-2-19), a diamond-shaped cross beam II (4-2-20), a diamond-shaped groove II (4-2-21), a hinge front beam II (4-2-22), the stacking pressure regulation hinge comprises a stacking pressure regulation hinge rectangular groove II (4-2-23), a stator positioning plane II (4-2-24), a stacking pressure regulation hinge beam II (4-2-25), a stator positioning plane I (4-2-26) and a diamond beam I (4-2-27); the base meter screw threaded hole I (4-2-1) is in threaded connection with the coupling adjustment conversion base meter screw I (4-1), and the stator positioning threaded hole I (4-2-2), the stator positioning threaded hole II (4-2-6) and the stator positioning threaded hole III (4-2-17) are used for fixing the multi-drive-foot coupling type stator (4-2); the driving foot wedge surface I (4-2-3) and the driving foot wedge surface II (4-2-15) are in contact with the wedge-shaped driving contact surface (3-1-4); the hinge front beam I (4-2-4), the stacking pressure regulation hinge cross beam I (4-2-10), the straight-round flexible hinge I (4-2-12) and the diamond cross beam I (4-2-27) jointly form an asymmetric diamond hinge; a stacking pressure regulation hinge rectangular groove I (4-2-5) and a stacking pressure regulation hinge rectangular groove II (4-2-23) are formed in the multi-driving-foot coupling type stator (4-2); the stator positioning plane III (4-2-18), the stator positioning plane II (4-2-24) and the stator positioning plane I (4-2-26) are in close contact with the upper cover assembly (5), and the piezoelectric stack I (4-4) and the piezoelectric stack II (4-5) are respectively installed in the diamond-shaped groove I (4-2-13) and the diamond-shaped groove II (4-2-21).
5. The multi-foot coupling actuated micro-nano linear driver according to claim 1, characterized in that: the upper cover assembly (5) is provided with an adjustable upper cover (5-1), an upper precise adjusting nut (5-2), a stator positioning screw (5-3) and a pre-tightening spring (5-4); the adjustable upper cover (5-1) is connected with the multi-driving-foot coupling type stator (4-2) through threads; the upper precise adjusting nut (5-2) is fixed with the adjustable upper cover (5-1) through gluing; the adjustable upper cover (5-1) is provided with a tool withdrawal groove II (5-1-1), a stator positioning counter sink II (5-1-2), a stator positioning counter sink III (5-1-3), an upper precise adjusting nut counter sink (5-1-4), a stator positioning counter sink I (5-1-5), a hook II (5-1-6), a dovetail groove (5-1-7) and an upper cover back (5-1-8); the stator positioning screws (5-3) respectively penetrate through the stator positioning counter sink I (5-1-5), the stator positioning counter sink II (5-1-2) and the stator positioning counter sink III (5-1-3) and are in threaded connection with the stator positioning threaded holes I (4-2-2), the stator positioning threaded holes II (4-2-6) and the stator positioning threaded holes III (4-2-17); the upper precise adjusting nut counter sink (5-1-4) is used for placing the upper precise adjusting nut (5-2); the pre-tightening springs (5-4) are respectively connected with the hooks I (1-1-4) and the hooks II (5-1-6), and the back surfaces (5-1-8) of the upper covers are fixedly contacted with the stator positioning planes III (4-2-18), the stator positioning planes II (4-2-24) and the stator positioning planes I (4-2-26); the dovetail grooves (5-1-7) are connected with the dovetail groove sliding blocks (1-1-3) in an embedded mode.
6. A multi-foot coupling actuated micro-nano linear driver excitation method is realized based on the multi-foot coupling actuated micro-nano linear driver of claim 1, a double excitation electric signal group is adopted in the excitation method, an excitation electric signal A is a positive sawtooth wave electric signal, an excitation electric signal B is a negative sawtooth wave electric signal, and when the excitation electric signal A and the excitation electric signal B are respectively introduced into a piezoelectric stack I (4-4) and a piezoelectric stack II (4-5): t is t 1 ~t 2 Stage (2): the excitation electric signal A is in a slow rising stage, so that the piezoelectric stack I (4-4) is slowly extended; the excitation electrical signal B is in a slow-down stage, so that the piezoelectric stack II (4-5)The length is slowly shortened to form hinge interlocking, so that the motion effect of the piezoelectric stick-slip driving device is enhanced; t is t 2 ~t 3 Stage (2): the excitation electric signal A is in a rapid descending stage, so that the piezoelectric stack I (4-4) is rapidly shortened and recovered to deform; the excitation electric signal B is in a rapid rising stage, so that the piezoelectric stack II (4-5) is rapidly extended and restored to deform to form hinge interlocking, and the displacement backspacing of the piezoelectric stick-slip driving device is reduced; repeating the excitation process to realize continuous stepping motion of the piezoelectric stick-slip driving device; similarly, the reverse motion is to introduce an excitation electric signal A and an excitation electric signal B into the piezoelectric stack II (4-5) and the piezoelectric stack I (4-4) respectively; wherein the period of the excitation electrical signal A is T 1 Excitation voltage amplitude of V 1 The B period of the excitation electrical signal is T 2 Excitation voltage amplitude of V 2 The period ratio of the excitation electrical signal A to the excitation electrical signal B is T 1 /T 2 =1, excitation voltage amplitude absolute value ratio is | V 1 |/|V 2 And | is greater than 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910922403.4A CN110601594B (en) | 2019-09-27 | 2019-09-27 | Multi-foot coupling actuated micro-nano linear driver and excitation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910922403.4A CN110601594B (en) | 2019-09-27 | 2019-09-27 | Multi-foot coupling actuated micro-nano linear driver and excitation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110601594A CN110601594A (en) | 2019-12-20 |
| CN110601594B true CN110601594B (en) | 2022-12-02 |
Family
ID=68864033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910922403.4A Active CN110601594B (en) | 2019-09-27 | 2019-09-27 | Multi-foot coupling actuated micro-nano linear driver and excitation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110601594B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111451791B (en) * | 2020-03-24 | 2021-09-24 | 天津大学 | Two-degree-of-freedom swing platform based on stick-slip principle |
| CN112468013A (en) * | 2020-11-18 | 2021-03-09 | 哈尔滨工程大学 | Double-diamond topological structure non-resonant inchworm type piezoelectric driver |
| CN114257124A (en) * | 2022-01-04 | 2022-03-29 | 长春工业大学 | Coupling type piezoelectric driving platform of bionic frog leg and driving method thereof |
| CN114759827A (en) * | 2022-05-17 | 2022-07-15 | 山东理工大学 | Clamping type large-amplitude ultrasonic motor stator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104868781A (en) * | 2015-06-10 | 2015-08-26 | 苏州大学 | Upper part pretightening stick-slip driving multi-scale precision motion platform |
| CN205596034U (en) * | 2016-04-18 | 2016-09-21 | 南京理工大学 | Electric drive device is pressed to accurate adjustable impacted style of frictional force |
| CN205883083U (en) * | 2016-06-14 | 2017-01-11 | 长春工业大学 | Accurate piezoelectricity that adopts inclined ladder shape conversion of motion glues smooth orthoscopic drive arrangement |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10187037B2 (en) * | 2015-08-21 | 2019-01-22 | New Scale Technologies, Inc. | Stick-slip stage device and methods of use thereof |
-
2019
- 2019-09-27 CN CN201910922403.4A patent/CN110601594B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104868781A (en) * | 2015-06-10 | 2015-08-26 | 苏州大学 | Upper part pretightening stick-slip driving multi-scale precision motion platform |
| CN205596034U (en) * | 2016-04-18 | 2016-09-21 | 南京理工大学 | Electric drive device is pressed to accurate adjustable impacted style of frictional force |
| CN205883083U (en) * | 2016-06-14 | 2017-01-11 | 长春工业大学 | Accurate piezoelectricity that adopts inclined ladder shape conversion of motion glues smooth orthoscopic drive arrangement |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110601594A (en) | 2019-12-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110601594B (en) | Multi-foot coupling actuated micro-nano linear driver and excitation method thereof | |
| CN108696179B (en) | Auxiliary pressurizing type piezoelectric stick-slip linear motor and excitation method thereof | |
| CN105827142A (en) | Precise piezoelectric stick-slip linear motor with asymmetric structure and driving method thereof | |
| CN102291040B (en) | Multi-degree-of-freedom micronano-level bionic precision rotary driver | |
| CN109586612B (en) | Alternate stepping piezoelectric stick-slip driver with bionic wheat-awn friction surface | |
| CN108199613B (en) | Double-stator fixed type precise piezoelectric stick-slip linear motor and driving method thereof | |
| CN109586611B (en) | Alternate stepping piezoelectric stick-slip driver with anisotropic friction surface | |
| CN105932902A (en) | J-type structure precise piezoelectric stick-slip linear motor and drive method thereof | |
| CN111711381B (en) | Stick-slip piezoelectric driver for realizing bidirectional driving and control method | |
| CN105897042A (en) | Asymmetrical diamond-shaped hinge quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof | |
| CN107834896B (en) | Device and method for regulating output performance of parasitic principle piezoelectric driver by pre-friction force | |
| CN110601591A (en) | Linkage adjustable precise piezoelectric stick-slip driving device and control method thereof | |
| CN105897044A (en) | Wedge type diamond-shaped amplification mechanism piezoelectric stick-slip linear motor and excitation method thereof | |
| CN108111052A (en) | Couple the bionical piezoelectricity locating platform and control method with parasitic motion principle of looper | |
| CN105897043B (en) | Rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method | |
| CN105827144A (en) | Oblique-trapezoid orthogonal driving type piezoelectric stick-slip linear motor and compound excitation method thereof | |
| CN209389958U (en) | The device of active suppression parasitic motion principle piezoelectric actuator rollback movement | |
| CN207853785U (en) | Couple the bionical piezoelectricity locating platform with parasitic motion principle of looper | |
| CN210490748U (en) | Piezoelectric stick-slip driver based on L-shaped flexible hinge | |
| CN112865593B (en) | Bionic impact piezoelectric driver with high output performance and control method thereof | |
| CN104864230B (en) | Driving unit modularization stick-slip driving positioning platform | |
| CN209313746U (en) | A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface | |
| CN111193435A (en) | Rotary actuator | |
| CN110829882A (en) | T-shaped piezoelectric driving device | |
| CN105932901A (en) | Slanted-slot type diamond amplification mechanism piezoelectric stick-slip linear motor and excitation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |