CN110590139A - Laser annealing process production line optimization method - Google Patents
Laser annealing process production line optimization method Download PDFInfo
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- CN110590139A CN110590139A CN201910842831.6A CN201910842831A CN110590139A CN 110590139 A CN110590139 A CN 110590139A CN 201910842831 A CN201910842831 A CN 201910842831A CN 110590139 A CN110590139 A CN 110590139A
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- laser annealing
- panel
- machine
- mechanical arm
- production line
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Cleaning In General (AREA)
- General Factory Administration (AREA)
Abstract
The invention discloses a laser annealing process production line optimization method, which comprises the steps of arranging a transmission platform to connect two laser annealing process production lines; the BC system monitors the working state of the cleaning machines on the two laser annealing process production lines, the two laser annealing process production lines are respectively a production line I and a production line II, the production line I comprises a cleaning machine I, a laser annealing machine I and a mechanical arm group I, the production line II comprises a cleaning machine II, the laser annealing machine II and the mechanical arm group II, when the cleaning machine I/cleaning machine II goes down, the BC system controls the mechanical arm group I/mechanical arm group II to transfer a panel sent into the cleaning machine I/cleaning machine II to the production line II/production line I for cleaning, and the cleaned mechanical arm group II/mechanical arm group I sends the panel back to the production line I/production line II for laser annealing. The invention relates to a laser annealing process production line optimization method, which reduces the influence of downtime of a cleaning machine on the capacity of the whole production line and improves the utilization rate of the cleaning machine.
Description
Technical Field
The invention relates to the technical field of glass substrate production and manufacturing, in particular to a production line optimization method for a laser annealing process.
Background
The laser annealing machine in the LTPS/AMOLED is a key manufacturing process, the time of the laser annealing machine is long, the capacity of a cleaning machine matched with the laser annealing machine cannot be completely released, and the problem that the laser annealing machine is synchronously shut down once the cleaning machine is shut down is solved.
In the production process of the existing laser annealing machine, the production line of the laser annealing machine consists of a panel transplanting machine, a mechanical arm group, a cleaning machine and two laser annealing machines, wherein the process is that the panel is cleaned from the transplanting machine to the cleaning machine through the mechanical arm group, then the mechanical arm group sends the panel to the laser annealing machine for laser annealing, and finally the mechanical arm sends the panel back to the transplanting machine. The control logic of the manipulator is controlled by the BC system.
When the cleaning machine goes down, the panel needs to be cleaned in advance to enter the laser annealing machine, so that the laser annealing process production line goes down, the two laser annealing machines go down, and the capacity of the machine table of the laser annealing machine is wasted.
Therefore, the optimization design of the production line layout and the system control of the laser annealing machine is the key to improve the comprehensive efficiency value of the laser annealing machine and reduce the capacity of the laser annealing machine affected by the abnormity of the cleaning machine.
Disclosure of Invention
The invention aims to provide a solution for reducing the influence of the abnormality of a cleaning machine on the capacity and the comprehensive efficiency value of a laser annealing machine, so that the capacity loss of the laser annealing machine is reduced as much as possible when the cleaning machine is abnormally shut down, and the production efficiency of the laser annealing machine is improved.
In order to achieve the above object, the present disclosure provides a laser annealing process production line optimization method, the laser annealing process production line includes a cleaning machine, a laser annealing machine, a panel transplanting machine and a manipulator group, the panel transplanting machine, the cleaning machine and the laser annealing machine on the production line are sequentially connected through the manipulator group, a panel is returned to the panel transplanting machine through the manipulator group after the laser annealing machine completes a laser annealing process, the BC system controls the manipulator group, the optimization method includes the following steps:
s1, arranging a transmission platform to connect two laser annealing process production lines;
s2, the BC system monitors the working states of cleaning machines on two laser annealing process production lines, wherein the two laser annealing process production lines are respectively a production line I and a production line II, the production line I comprises a cleaning machine I, a laser annealing machine I and a mechanical arm group I, and the production line II comprises a cleaning machine II, a laser annealing machine II and a mechanical arm group II;
when the cleaning machine I is down, the BC system controls the mechanical arm group I to transfer the panel sent into the cleaning machine I to the conveying platform, then the BC system controls the mechanical arm group II to take out the panel and send the panel to the cleaning machine II for cleaning, after the cleaning is finished, the mechanical arm group II sends the panel back to the conveying platform, and then the mechanical arm group I sends the cleaned panel to the laser annealing machine I for laser annealing;
when the cleaning machine II is down, the BC system controls the mechanical arm group II to transfer the panel sent into the cleaning machine II to the conveying platform, then the BC system controls the mechanical arm group I to take out the panel and send the panel to the cleaning machine I for cleaning, after the cleaning is finished, the mechanical arm group I sends the panel back to the conveying platform, and then the mechanical arm group II sends the cleaned panel to the laser annealing machine II for laser annealing.
The invention has the beneficial effects that:
according to the optimization method of the laser annealing process production line, the transmission platform is arranged to connect the two laser annealing process production lines, the control logic of the system is improved and optimized, the influence of downtime of a cleaning machine on the capacity of the whole production line is reduced, and the utilization rate of the cleaning machine is improved, so that the requirements of a factory on efficient and flexible use of the laser annealing process production line are met, and the production efficiency of the factory is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure without limiting the disclosure. In the drawings:
FIG. 1 is a schematic view of a laser annealing process line layout according to the present invention.
Description of the reference numerals
1-laser annealing machine I, 2-mechanical arm set I, 3-panel transplanter, 4-cleaning machine I, 5-cleaning machine II, 6-laser annealing machine II, 7-mechanical arm set II, 8-conveying platform.
Detailed Description
The following detailed description of specific embodiments of the present disclosure is provided in connection with the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present disclosure, are given by way of illustration and explanation only, not limitation.
In the present disclosure, unless otherwise specified, the use of the directional terms such as "upper and lower" is generally defined based on the orientation or positional relationship shown in the drawings.
As shown in fig. 1, the laser annealing process production line optimization method related by the present invention includes a cleaning machine, a laser annealing machine, a panel transplanter 3 and a manipulator group, wherein the panel transplanter 3, the cleaning machine and the laser annealing machine on the production line are sequentially connected by the manipulator group, a panel is returned to the panel transplanter 3 by the manipulator group after the laser annealing process is completed by the laser annealing machine, and the manipulator group is controlled by a BC system, and the optimization method includes the following steps:
s1, arranging a transmission platform 8 to connect two laser annealing process production lines, and mounting the transmission platform 8 on the panel transplanter 3 on any one of the two laser annealing process production lines.
Conveying platform 8 includes upper platform and lower floor's platform, and the panel before upper platform transfer was washd, panel after lower floor's platform transfer was washd to avoid particulate matters such as dust on the panel before wasing to drop, be infected with on the panel that has washd, thereby influence laser annealing machine's production yield.
S2, the BC system monitors the working state of the cleaning machine on the two laser annealing process production lines.
And S3, setting a function switch on the panel transplanter 3, controlling the state switching of the function switch by the BC system, and linking the function switch with the conveying platform 8 through the PLC communication module.
The two laser annealing process production lines are respectively a production line I and a production line II, the production line I comprises a cleaning machine I4, a laser annealing machine I1 and a mechanical arm group I2, and the production line II comprises a cleaning machine II5, a laser annealing machine II6 and a mechanical arm group II 7.
When the BC system monitors that the cleaning machine I4 and the cleaning machine II5 work normally, the function switch is closed, the conveying platform 8 is retracted to disconnect the connection of the two laser annealing process production lines, and the two production lines respectively run normally.
When the cleaning machine I4 crashes, the BC system monitors that the cleaning machine I4 crashes, the functional switch is turned on, the conveying platform 8 is connected with two laser annealing process production lines, the BC system controls the mechanical arm group I2 to transfer the panel sent into the cleaning machine I4 to the upper platform of the conveying platform 8, then the BC system controls the mechanical arm group II7 to take out the panel and send the panel into the cleaning machine II5 for cleaning, the mechanical arm group II7 sends the panel back to the lower platform of the conveying platform 8 after cleaning is finished, and then the mechanical arm group I2 sends the cleaned panel to the laser annealing machine I1 for laser annealing.
When the cleaning machine II5 crashes, the BC system monitors that the cleaning machine II5 crashes, the functional switch is turned on, the conveying platform 8 is connected with two laser annealing process production lines, the BC system controls the mechanical arm group II7 to transfer the panel sent into the cleaning machine II5 to the upper platform of the conveying platform 8, then the BC system controls the mechanical arm group I2 to take out the panel and send the panel to the cleaning machine I4 for cleaning, the mechanical arm group I2 sends the panel back to the lower platform of the conveying platform 8 after cleaning is finished, and then the mechanical arm group II7 sends the cleaned panel to the laser annealing machine II6 for laser annealing.
Further, the laser annealing machine according to the present invention converts the original a-Si thin film layer into a p-Si thin film layer.
The invention provides a software and hardware combined optimization method, which reduces the influence of downtime of a cleaning machine on the production capacity of a production line and optimizes the efficiency of a laser annealing process production line, so that the method meets the requirements of a factory on efficient and flexible use of the laser annealing process production line, and realizes improvement of the production efficiency of the factory.
The preferred embodiments of the present disclosure are described in detail with reference to the accompanying drawings, however, the present disclosure is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present disclosure within the technical idea of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.
It should be noted that, in the foregoing embodiments, various features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various combinations that are possible in the present disclosure are not described again.
In addition, any combination of various embodiments of the present disclosure may be made, and the same should be considered as the disclosure of the present disclosure, as long as it does not depart from the spirit of the present disclosure.
Claims (3)
1. A laser annealing process production line optimization method is characterized in that the laser annealing process production line comprises a cleaning machine, a laser annealing machine, a panel transplanting machine and a mechanical arm set, the panel transplanting machine, the cleaning machine and the laser annealing machine on the production line are sequentially connected through the mechanical arm set, a panel is returned to the panel transplanting machine through the mechanical arm set after the laser annealing process is completed by the laser annealing machine, and the mechanical arm set is controlled by a BC system, and the optimization method comprises the following steps:
s1, arranging a transmission platform to connect two laser annealing process production lines;
s2, the BC system monitors the working states of cleaning machines on two laser annealing process production lines, wherein the two laser annealing process production lines are respectively a production line I and a production line II, the production line I comprises a cleaning machine I, a laser annealing machine I and a mechanical arm group I, and the production line II comprises a cleaning machine II, a laser annealing machine II and a mechanical arm group II;
when the cleaning machine I is down, the BC system controls the mechanical arm group I to transfer the panel sent into the cleaning machine I to the conveying platform, then the BC system controls the mechanical arm group II to take out the panel and send the panel to the cleaning machine II for cleaning, after the cleaning is finished, the mechanical arm group II sends the panel back to the conveying platform, and then the mechanical arm group I sends the cleaned panel to the laser annealing machine I for laser annealing;
when the cleaning machine II is down, the BC system controls the mechanical arm group II to transfer the panel sent into the cleaning machine II to the conveying platform, then the BC system controls the mechanical arm group I to take out the panel and send the panel to the cleaning machine I for cleaning, after the cleaning is finished, the mechanical arm group I sends the panel back to the conveying platform, and then the mechanical arm group II sends the cleaned panel to the laser annealing machine II for laser annealing.
2. The method for optimizing the production line of the laser annealing process as claimed in claim 1, wherein the transmission platform is mounted on a panel transplanter on any one of the two production lines of the laser annealing process, a function switch is arranged on the panel transplanter, the BC system controls the state switching of the function switch, the function switch is linked with the transmission platform through a PLC communication module, the BC system monitors that the cleaning machine I and the cleaning machine II work normally, the function switch is turned off, the transmission platform is retracted to disconnect the two production lines of the laser annealing process, the BC system monitors that the cleaning machine I/the cleaning machine II are down, the function switch is turned on, and the transmission platform connects the two production lines of the laser annealing process.
3. The method of claim 2, wherein the transfer platform comprises an upper platform and a lower platform, the upper platform transfers the panel before cleaning, and the lower platform transfers the panel after cleaning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910842831.6A CN110590139A (en) | 2019-09-06 | 2019-09-06 | Laser annealing process production line optimization method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910842831.6A CN110590139A (en) | 2019-09-06 | 2019-09-06 | Laser annealing process production line optimization method |
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| CN110590139A true CN110590139A (en) | 2019-12-20 |
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| CN201910842831.6A Pending CN110590139A (en) | 2019-09-06 | 2019-09-06 | Laser annealing process production line optimization method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2785420C1 (en) * | 2022-05-12 | 2022-12-07 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт автоматики им. Н.Л. Духова" (ФГУП "ВНИИА") | Method for laser annealing of non-metallic materials |
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| EP1471039A1 (en) * | 2003-04-21 | 2004-10-27 | Heraeus Quarzglas GmbH & Co. KG | Method for producing quartz glass jig and quartz glass jig |
| TW200632605A (en) * | 2005-03-03 | 2006-09-16 | Inventec Corp | System and method for preventing production line from shutdown |
| CN101605710A (en) * | 2007-05-16 | 2009-12-16 | 夏普株式会社 | The base material treatment method of substrate processing apparatus and this substrate processing apparatus of use |
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| RU2785420C1 (en) * | 2022-05-12 | 2022-12-07 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт автоматики им. Н.Л. Духова" (ФГУП "ВНИИА") | Method for laser annealing of non-metallic materials |
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Application publication date: 20191220 |
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