CN110577372A - Microscope detection and laser cutting repair module, method and device - Google Patents
Microscope detection and laser cutting repair module, method and device Download PDFInfo
- Publication number
- CN110577372A CN110577372A CN201910930166.6A CN201910930166A CN110577372A CN 110577372 A CN110577372 A CN 110577372A CN 201910930166 A CN201910930166 A CN 201910930166A CN 110577372 A CN110577372 A CN 110577372A
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- CN
- China
- Prior art keywords
- microscope
- fixedly arranged
- plate
- bearing plate
- base plate
- Prior art date
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- 238000001514 detection method Methods 0.000 title claims abstract description 36
- 230000008439 repair process Effects 0.000 title claims abstract description 25
- 238000003698 laser cutting Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims description 10
- 238000003384 imaging method Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 2
- 238000000386 microscopy Methods 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract description 2
- 230000007547 defect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a microscope detection and laser cutting repair module, which comprises a base plate, a sliding plate, a bearing plate, a microscope, a camera, a laser cutter and a driving device, wherein the sliding plate is arranged on the base plate; a linear rail is arranged on one side of the base plate, and the sliding plate is in sliding connection with the base plate along a straight line through the linear rail; the bearing plate is fixedly arranged on the sliding plate, the driving device is fixedly arranged on the base plate, and the driving part of the driving device is fixedly connected with the bearing plate; the microscope, the camera and the laser cutter are all fixedly arranged on the bearing plate, and the axis of an objective lens of the microscope and the axis of an emitting head of the laser cutter can be parallel to the moving direction of the bearing plate; the objective lens of the microscope and the input end of the camera establish a light channel for imaging of an imaging chip of the camera. The invention has the following beneficial effects: the system integration is carried out by combining detection and repair, so that the purpose of simultaneous operation of the same equipment is realized, and the operation efficiency and the operation precision are obviously improved.
Description
Technical Field
The invention belongs to the technical field of product detection, and particularly relates to a module, a method and a device for microscope detection and laser cutting repair.
Background
When the existing product is detected, for example, liquid crystal glass products are detected, a microscope is usually adopted to amplify a detection surface for more comprehensively detecting product flaws, so that bad phenomena such as broken lines, roughness, distribution density and size of conductive particles are effectively detected, timely and effective repair is facilitated, and the product yield is improved. The repairing process is usually completed by adopting a laser device with higher precision, and the system repairs according to the detection result and a corresponding repairing program.
However, the existing detection system and the existing repair system are two independent systems, so that the two processes cannot be well matched, and the problem of low efficiency exists.
Disclosure of Invention
the invention aims to overcome the defects in the prior art, and provides a module, a method and a device for microscope detection and laser cutting repair.
in order to solve the prior art problem, the invention discloses a microscope detection and laser cutting repair module, which comprises a base plate, a sliding plate, a bearing plate, a microscope, a camera, a laser cutter and a driving device, wherein the base plate is provided with a sliding plate; a linear rail is arranged on one side of the base plate, and the sliding plate is in linear sliding connection with the base plate through the linear rail; the bearing plate is fixedly arranged on the sliding plate, the driving device is fixedly arranged on the base plate, and the driving part of the driving device is fixedly connected with the bearing plate; the microscope, the camera and the laser cutter are all fixedly arranged on the bearing plate, and the axis of an objective lens of the microscope and the axis of an emitting head of the laser cutter can be parallel to the moving direction of the bearing plate; and a light channel is established between the objective lens of the microscope and the input end of the camera so as to be imaged by an imaging chip of the camera.
Further, the air conditioner is provided with a fan,
The driving device comprises a motor, a lead screw nut and a coupler, the motor is fixedly arranged on the substrate, and a main shaft of the motor is connected with the end part of the lead screw through the coupler; the other end of the lead screw is rotatably arranged on the base plate, the lead screw nut is fixedly arranged on the bearing plate, and the lead screw is in threaded fit with a central hole of the lead screw nut.
further, the air conditioner is provided with a fan,
the upper and lower limiters are fixedly arranged on the base plate and used for limiting the moving stroke of the sliding plate or the bearing plate.
Further, the air conditioner is provided with a fan,
The upper limiter and the lower limiter are provided with trigger ends which can generate signals for controlling the driving device under the action of external force.
Further, the air conditioner is provided with a fan,
the microscope is fixedly arranged on the bearing plate through a microscope fixing seat, and the laser cutter is fixedly arranged on the bearing plate through a laser fixing seat.
The invention also provides a microscope detection and laser cutting repair method, which comprises the following steps:
fixing the product to a detection station;
aligning an objective lens of a moving microscope to a product, adjusting to a proper magnification to detect flaws of the product, and generating a corresponding detection image through a camera;
controlling the transmitting head of the movable laser cutter to cut and repair the product according to the detection result;
and detecting the cut and repaired product through a microscope to judge whether the product is qualified.
the invention also provides a device for detecting the microscope and repairing the laser cutting, which comprises a two-shaft portal frame and the module for detecting the microscope and repairing the laser cutting; the base plate of the microscope detection and laser cutting repair module is fixedly arranged at the moving end of the two-shaft portal frame, so that the microscope detection and laser cutting repair device can move in a three-shaft mode.
The invention has the following beneficial effects: the system integration is carried out by combining detection and repair, so that the purpose of simultaneous operation of the same equipment is realized, and the operation efficiency and the operation precision are obviously improved.
Drawings
FIG. 1 is a perspective view of a module according to one embodiment of the present invention;
FIG. 2 is a front view of the structure of the module shown in FIG. 1;
Fig. 3 is a left side view of the structure of the module shown in fig. 1.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
as shown in fig. 1 to 3, an embodiment of the invention provides a microscope inspection and laser cutting repair module, which includes a substrate 6, a sliding plate 5, a bearing plate 3, a microscope 1, a CCD camera, a laser cutter 2, and a driving device. The plate surface on one side of the base plate 6 is provided with a linear rail 6.1, and the sliding plate 5 and the base plate 6 form a sliding connection along a straight line through the linear rail 6.1. In use, the base plate 6 is preferably vertically disposed, so that the sliding plate 5, the carrier plate 3, and the fixture have a degree of freedom in the Z-axis by sliding connection, i.e., constitute Z-axis motion among three-axis motion. The bearing plate 3 is fixedly arranged on the sliding plate 5, the driving device is fixedly arranged on the base plate 6, and a driving part of the driving device is fixedly connected with the bearing plate 3. The microscope 1, the camera and the laser cutter 2 are all fixedly arranged on the bearing plate 3, and the axis I of the objective lens 1.2 of the microscope 1 and the axis II of the emitting head 2.1 of the laser cutter 2 can be parallel to the moving direction III of the bearing plate 3. The eyepiece 1.1 of the microscope 1 can also acquire an image of the detection surface for a user to observe flaws, the number of the objective lenses 1.2 is multiple, so that the magnification can be adjusted from 5X to 100X, and the switching of the objective lenses 1.2 is realized through the turntable 1.3. An objective lens 1.2 of the microscope 1 and an input end of the camera establish a light channel for imaging by an imaging chip of the camera.
in one embodiment, the driving device comprises a motor 10, a lead screw nut and a coupler 7, wherein the motor 10 is fixedly arranged on the top of the base plate 6 through a motor base 8, and a main shaft of the motor is connected with the end part of the lead screw through the coupler 7. The motor base 8 is a hollow frame structure, and the coupler 7 can be accommodated in the motor base 8 to be protected. The other end of the screw rod is rotatably arranged on the base plate 6, the screw rod nut is fixedly arranged on the bearing plate 3, and the screw rod and a central hole of the screw rod nut form threaded fit.
In one embodiment, the device further comprises upper and lower limiters 9 and 11, wherein the upper and lower limiters 9 and 11 are fixedly arranged on the base plate 6 and used for limiting the moving stroke of the sliding plate 5 or the bearing plate 3.
In one embodiment, the upper and lower limiters 9, 11 have an activation terminal capable of being acted upon by an external force to generate a signal for controlling the driving device. Preferably, the upper and lower limiters 9, 11 are both limit switches.
In one embodiment, the microscope 1 is fixed on the carrier plate 3 through a microscope fixing base 4, and the laser cutter 2 is fixed on the carrier plate 3 through a laser fixing base 12.
Based on the same inventive concept, the embodiment also provides a microscope detection and laser cutting repair method, which comprises the following steps:
And S01, fixing the product to the detection station.
S02, the objective lens 1.2 of the moving microscope 1 is aligned with the product, and then adjusted to a suitable magnification, for example, 100 times, to detect the flaws of the product, and simultaneously, a corresponding detection image is generated by the camera. The defects shown in the detection image have some undesirable phenomena such as broken lines, roughness, distribution density and size of conductive particles and the like.
And S03, matching a corresponding program according to the detection result to control the emission head 2.1 of the movable laser cutter 2 to emit laser to cut and repair the product.
And S04, detecting the cut and repaired product through the microscope 1, and judging whether the product is qualified.
The invention also provides a device for detecting the microscope and repairing the laser cutting, which comprises a two-shaft portal frame and the module for detecting the microscope and repairing the laser cutting; the substrate 6 of the microscope detection and laser cutting repair module is fixedly arranged at the moving end of the two-axis portal frame, so that the microscope detection and laser cutting repair device can move in a three-axis mode. It should be noted that the two-axis gantry has two degrees of freedom in the X-axis and the Y-axis, so that the whole machine becomes a three-axis device after the module is installed, thereby realizing three-axis movement of the microscope 1 and the laser cutter 2. Meanwhile, in the embodiment, the effective detection stroke of the device is 2300mm, and compared with the 1200mm stroke of the existing detection equipment, the stroke is greatly improved, so that the detection range is enlarged.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (7)
1. the utility model provides a microscope detects and restores module with laser cutting which characterized in that:
Comprises a base plate (6), a sliding plate (5), a bearing plate (3), a microscope (1), a camera, a laser cutter (2) and a driving device; a linear rail (6.1) is arranged on one side of the base plate (6), and the sliding plate (5) is in sliding connection with the base plate (6) along a straight line through the linear rail (6.1); the bearing plate (3) is fixedly arranged on the sliding plate (5), the driving device is fixedly arranged on the base plate (6), and a driving part of the driving device is fixedly connected with the bearing plate (3); the microscope (1), the camera and the laser cutter (2) are fixedly arranged on the bearing plate (3), and the axis (I) of an objective lens (1.2) of the microscope (1) and the axis (II) of an emitting head (2.1) of the laser cutter (2) can be parallel to the moving direction (III) of the bearing plate (3); an objective lens (1.2) of the microscope (1) and an input end of the camera establish a light ray channel for imaging of an imaging chip of the camera.
2. the module of claim 1, wherein the module comprises:
The driving device comprises a motor (10), a lead screw nut and a coupler (7), the motor (10) is fixedly arranged on the substrate (6), and a main shaft of the motor is connected with the end part of the lead screw through the coupler (7); the other end of the lead screw is rotatably arranged on the base plate (6), the lead screw nut is fixedly arranged on the bearing plate (3), and the lead screw and a central hole of the lead screw nut form threaded fit.
3. the module of claim 1, wherein the module comprises:
the device is characterized by further comprising upper and lower limiters (9 and 11), wherein the upper and lower limiters (9 and 11) are fixedly arranged on the base plate (6) and used for limiting the moving stroke of the sliding plate (5) or the bearing plate (3).
4. The module of claim 3, wherein the module comprises:
the upper and lower limiters (9, 11) have trigger ends capable of generating signals for controlling the driving device under the action of external force.
5. The module of claim 1, wherein the module comprises:
The microscope (1) is fixedly arranged on the bearing plate (3) through a microscope fixing seat (4), and the laser cutter (2) is fixedly arranged on the bearing plate (3) through a laser fixing seat (12).
6. A microscope detection and laser cutting repair method is characterized in that: the method comprises the following steps:
Fixing the product to a detection station;
An objective lens (1.2) of a moving microscope (1) is aligned to a product, then the magnification is adjusted to be proper to detect the flaws of the product, and meanwhile, a corresponding detection image is generated through a camera;
controlling the emission head (2.1) of the movable laser cutter (2) to cut and repair the product according to the detection result;
And detecting the cut and repaired product through a microscope (1) to judge whether the product is qualified.
7. The utility model provides a microscope detects and laser cutting prosthetic devices which characterized in that: comprising a two-axis gantry and a microscopy detection and laser cutting repair module according to any one of claims 1 to 5; the base plate (6) of the microscope detection and laser cutting repair module is fixedly arranged at the moving end of the two-axis portal frame, so that the microscope detection and laser cutting repair device can move in a three-axis mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910930166.6A CN110577372A (en) | 2019-09-29 | 2019-09-29 | Microscope detection and laser cutting repair module, method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910930166.6A CN110577372A (en) | 2019-09-29 | 2019-09-29 | Microscope detection and laser cutting repair module, method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110577372A true CN110577372A (en) | 2019-12-17 |
Family
ID=68814169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910930166.6A Pending CN110577372A (en) | 2019-09-29 | 2019-09-29 | Microscope detection and laser cutting repair module, method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110577372A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020046998A1 (en) * | 2000-10-23 | 2002-04-25 | The Regents Of The University Of California | Method for producing damage resistant optics |
| US20080011724A1 (en) * | 2006-07-14 | 2008-01-17 | Jenoptik Automatisierungstechnik Gmbh | Method for generating optically perceptible laser-induced cracks in brittle material |
| CN106646944A (en) * | 2016-11-30 | 2017-05-10 | 深圳市卓茂科技有限公司 | Liquid crystal display panel repair equipment |
| EP3333136A1 (en) * | 2016-12-08 | 2018-06-13 | SCHOTT Solar AG | Method of processing a semifinished glass tube |
| DE102017121140A1 (en) * | 2017-09-01 | 2019-03-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Laser processing of a transparent workpiece |
| CN211035707U (en) * | 2019-09-29 | 2020-07-17 | 江苏才道精密仪器有限公司 | Module and device are restoreed in microscope detection and laser cutting |
-
2019
- 2019-09-29 CN CN201910930166.6A patent/CN110577372A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020046998A1 (en) * | 2000-10-23 | 2002-04-25 | The Regents Of The University Of California | Method for producing damage resistant optics |
| US20080011724A1 (en) * | 2006-07-14 | 2008-01-17 | Jenoptik Automatisierungstechnik Gmbh | Method for generating optically perceptible laser-induced cracks in brittle material |
| CN106646944A (en) * | 2016-11-30 | 2017-05-10 | 深圳市卓茂科技有限公司 | Liquid crystal display panel repair equipment |
| EP3333136A1 (en) * | 2016-12-08 | 2018-06-13 | SCHOTT Solar AG | Method of processing a semifinished glass tube |
| DE102017121140A1 (en) * | 2017-09-01 | 2019-03-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Laser processing of a transparent workpiece |
| CN211035707U (en) * | 2019-09-29 | 2020-07-17 | 江苏才道精密仪器有限公司 | Module and device are restoreed in microscope detection and laser cutting |
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