CN110568224A - Composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution and preparation method thereof - Google Patents

Composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution and preparation method thereof Download PDF

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Publication number
CN110568224A
CN110568224A CN201810569072.6A CN201810569072A CN110568224A CN 110568224 A CN110568224 A CN 110568224A CN 201810569072 A CN201810569072 A CN 201810569072A CN 110568224 A CN110568224 A CN 110568224A
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optical
probe
optical fiber
field
optical signal
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黄杰涛
王大鹏
黄金英
吕凯旋
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Changchun Institute of Applied Chemistry of CAS
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Changchun Institute of Applied Chemistry of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22Probes, their manufacture, or their related instrumentation, e.g. holders

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

the invention belongs to the field of optical devices, and relates to a composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution and a preparation method thereof. The optical fiber type near-field optical probe solves the technical problems that an optical signal is weak and the optical resolution depends on the aperture size of the probe in the conventional optical fiber type near-field optical probe. The core part of the composite near-field optical probe is that a nano-sized micro lens is adhered to the light outlet hole part of the probe tip of the optical fiber by using an adhesive. The composite near-field optical probe is used as a probe part of a near-field scanning microscope and applied to near-field imaging. The laser beams are converged by the micro lens after being emitted from the light outlet of the optical fiber probe, so that the spatial resolution is improved while the optical signal flux is improved. The composite near-field optical probe prepared by the invention can simultaneously improve the spatial resolution and the optical signal flux of the near-field microscope on the premise of not increasing the operation complexity. The method is low in cost, easy to implement, high in controllability and capable of realizing batch production.

Description

Composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution and preparation method thereof
Technical Field
The invention relates to the field of optical devices, in particular to a composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution and a preparation method thereof.
background
The optical microscope plays an important role in human exploration for the mysterious activities in the micro world by virtue of the advantages of non-contact, no damage, in-situ real-time observation and the like. With the development of modern science, people hope to reveal the microscopic mechanism of life process and the relation between material microstructure and performance from molecular level. However, optical microscopy is limited by the diffraction effects of light and has a resolution limit, also known as the abbe limit. The abbe limit means that an ideal object point is imaged by an optical system, and due to the limitation of diffraction, an ideal image point cannot be obtained, but a fraunhofer diffraction image is obtained. Therefore, when the two point objects are in a short distance, diffraction images formed by the two point objects after passing through the imaging system are overlapped together and cannot be resolved, and the distance which can be resolved by the two object points is the limit resolution distance. For optical microscopy, the resolution limit of the diffraction image is between 200 and 400 nanometers. While intracellular organelles and biomolecules are in the range of about 5-100 nanometers. It is difficult for conventional optical microscopes to accurately image intracellular structures and biomolecules. The ability to break this limitation is one of the major challenges recognized in the optical arts today.
Many "super-resolution" microscopy techniques have been invented in recent years to overcome diffraction effect limitations, including stimulated emission depletion (STED) microscopy techniques that exploit nonlinear effects to reduce the excitation range, localized random optical reconstruction (STORM) and optically activated localization techniques (PALM) based on single fluorescent molecules, and the like. These techniques bypass the diffraction limit of light by a smart approach, enabling accurate imaging of molecules or organelles above 30 nanometers in size. However, these super-resolution technologies still have certain limitations, such as long imaging time, the need of subsequent complex image operation processing, and complex optical path. This limits the application of these techniques in cell biology.
The limitation of the diffraction effect on the resolution of the optical microscope is not essential. When a sub-wavelength tiny light source irradiates an object in the near field range of the object, the area of an irradiation light spot is only related to the aperture size and is not related to the wavelength, so that the sub-wavelength size structure information of the object is carried in reflected light or transmitted light, and a sample near field image with the resolution ratio smaller than half wavelength can be obtained by collecting signal light of each point of a sample. This idea led to the birth of a near-field scanning optical microscope.
The structure of the near-field optical microscope can correspond to that of the traditional far-field optical microscope one by one, and comprises a local light source formed by a laser and an optical fiber probe, a sample stage with an ultramicro scanning device, an optical amplification system formed by a microscope objective and the like. The core component is a probe for providing near-field local illumination for a sample, and the size of a light transmission aperture of the probe has a decisive influence on the resolution of a near-field optical microscope. For near-field optical microscopes, in order to achieve higher resolution, on the one hand, the light beam passing through the optical probe needs to be limited as much as possible in the lateral direction; on the other hand, the light flux through the confinement region is also made as large as possible to improve the signal-to-noise ratio. However, the two are contradictory, the aperture size of the optical fiber probe is reduced, the light transmission efficiency is reduced sharply, and the application of the probes is severely limited. Therefore, preparing a probe that can simultaneously achieve high luminous flux and high resolution will greatly expand the applications of near-field microscopes.
disclosure of Invention
the invention aims to solve the technical problems that an optical fiber type near-field optical probe in the prior art is weak in optical signal and optical resolution depends on the aperture size of the probe, and provides a composite near-field optical probe capable of achieving high optical signal flux and high resolution and a preparation method thereof.
In order to solve the technical problems, the technical scheme of the invention is as follows:
A can realize the high optical signal flux and high-resolution combined type near field optical probe at the same time, it is made up of optical fiber probe and microlens two parts;
The optical fiber probe is a light-transmitting optical fiber with a conical head, the tip is provided with a light outlet with the aperture of 20-200 nanometers, and the outer layer of the tip is coated with a light-tight metal film;
The micro lens is fixed at the light outlet hole of the optical fiber probe;
the diameter or the long axis diameter of the micro lens is 20-500 nanometers;
When the laser is emitted from the light outlet of the optical fiber probe and is converged by the micro lens to reach the sample area, the optical resolution is improved, and meanwhile, the optical signal flux is improved.
In the above technical solution, the material of the optical fiber probe is optical glass, germanium dioxide, silicon dioxide, optical material or optical waveguide.
In the above technical solution, the optical fiber probe is a bare optical fiber.
In the above technical solution, the optical fiber probe is of a cantilever type, an optical fiber guide type or a hybrid optical type.
In the above technical solution, the micro lens is ellipsoidal or spherical.
In the above technical solution, the material of the micro lens is an optically transparent material.
In the above technical scheme, the micro lens is fixed at the light exit hole of the optical fiber probe by using an adhesive.
In the technical scheme, the adhesive is an ultraviolet curing adhesive, cyanoacrylate, epoxy resin or a silane modified polymer.
in the above technical solution, the micro lens is a circular barium titanate microsphere.
A preparation method of a composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution comprises the following steps:
covering a layer of organic solvent which is insoluble in the hydrofluoric acid etching liquid on the surface of the hydrofluoric acid etching liquid to serve as a protective phase, and then inserting the optical fiber probe with a flat end face into the etching liquid to perform static etching; the temperature is always kept constant in the above process; carrying out vacuum coating treatment on the end part of the optical fiber probe subjected to chemical etching, and forming a light outlet with the aperture size of 20-200 nanometers at the tip of the optical fiber probe; and finally, adhering the micro lens at the light outlet of the optical fiber probe by using an adhesive, and finishing fixation after irradiation under an ultraviolet lamp.
The invention has the beneficial effects that:
The core part of the composite near-field optical probe is that a nano-sized micro lens is adhered to the light outlet hole part of the probe tip of the optical fiber by using an adhesive. The composite near-field optical probe is used as a probe part of a near-field scanning microscope and applied to near-field imaging. The laser beams are converged by the micro lens after being emitted from the light outlet of the optical fiber probe, so that the spatial resolution is improved while the optical signal flux is improved. Compared with the prior art, the composite near-field optical probe prepared according to the invention can simultaneously improve the spatial resolution and the optical signal flux of the near-field microscope on the premise of not increasing the operation complexity, and solves the inherent problem of weak signals of the near-field microscope.
The preparation method of the composite near-field optical probe provided by the invention has the advantages of simple manufacturing process, low cost, easiness in realization, high controllability and easiness in realization of batch production. The optical signal flux and the image space resolution of the probe are simultaneously improved by a simple method.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Fig. 1 is a schematic view of the composite near-field optical probe applied to a near-field optical microscope according to the present invention.
The reference numerals in the figures denote:
The method comprises the following steps of 1-a laser light source, 2-a beam expander, 3-a half glass slide, 4-an optical fiber coupler, 5-an atomic force microscope scanning head, 6-a composite near-field optical probe, 7-a sample area, 8-an objective lens and 9-an avalanche counter.
Detailed Description
The invention provides a composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution, which consists of an optical fiber probe and a micro lens. The optical fiber probe is a light-transmitting optical fiber with a conical head, the tip is provided with a light outlet with the aperture of 20-200 nanometers, and the outer layer of the tip is coated with a light-tight metal film. The micro lens is fixed at the light outlet of the optical fiber probe. The diameter of the micro lens is 20-500 nanometers. When the laser is emitted from the light outlet of the optical fiber probe and is converged by the micro lens to reach the sample area, the optical resolution is improved, and meanwhile, the optical signal flux is improved. The optical fiber probe adopts a common single-mode or multi-mode optical communication optical fiber or a probe of a near-field optical microscope, and is made of optical glass, germanium dioxide, silicon dioxide plastic, optical substances or optical waveguides. Preferably, the optical fiber probe is a bare optical fiber. The fiber optic probe is used for localized illumination, including but not limited to, a cantilever type, a fiber optic type, or a hybrid optical type. The micro lens is in an ellipsoid shape or a spherical shape. The micro lens is fixed at the light outlet hole of the optical fiber probe by using an adhesive, and the adhesive can be simultaneously adhered to the optical fiber probe and the micro lens, and comprises but is not limited to ultraviolet curing glue, cyanoacrylate, epoxy resin or silane modified polymer. The material of the micro lens is an optical transparent material, and barium titanate is preferred. The micro-lenses are preferably round barium titanate microspheres.
The invention also provides a preparation method of the composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution, which comprises the following steps:
covering a layer of organic solvent which is insoluble in the hydrofluoric acid etching liquid on the surface of the hydrofluoric acid etching liquid to serve as a protective phase, and then inserting the optical fiber probe with a flat end face into the etching liquid to perform static etching; the temperature is always kept constant in the above process; carrying out vacuum coating treatment on the end part of the optical fiber probe subjected to chemical etching, and forming an aperture with the size of 20-200 nanometers as a light outlet hole at the tip of the optical fiber probe; and finally, adhering the micro lens at the light outlet of the optical fiber probe by using an adhesive, and finishing fixation after irradiation under an ultraviolet lamp.
In order to make the object and technical solution of the present invention clearer, the following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings.
The present invention is described in detail below with reference to preferred examples, but the present invention is not limited to the following examples. It will be appreciated by those skilled in the art that additions may be made to the features as well as substitutions of equivalent elements in the field without departing from the technical characteristics and scope of the present invention as set forth in the claims.
FIG. 1 is a schematic diagram of a composite near-field optical probe applied to a near-field optical microscope according to the present invention. Referring to fig. 1, the composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution of the present invention is composed of an optical fiber probe and a micro lens. I.e. the compound near-field optical probe 6 in fig. 1.
The composite near-field optical probe 6 of the present invention is prepared as follows:
The preparation of the optical fiber probe of the invention comprises the following steps:
The raw material of the optical fiber probe is bare optical fiber, and the main components of the optical fiber probe are germanium dioxide and silicon dioxide.
Pouring 25mL of hydrofluoric acid etching solution with the mass fraction of 30% into a 100mL beaker, and covering a layer of isooctane with the thickness of 4cm on the surface of the beaker, wherein the isooctane is an organic solvent insoluble in the etching solution and can be used as a protective layer; placing the beaker in a 30 ℃ constant temperature water bath, inserting the bare optical fiber with a flat end face into hydrofluoric acid etching liquid, and performing static etching for 90 min; after the corrosion is finished, placing the tip of the bare optical fiber in deionized water, and cleaning by using ultrasonic waves to remove residual hydrofluoric acid and isooctane; and modifying the tip of the tapered optical fiber probe obtained by the chemical etching method by using a vacuum coating method to obtain a light-transmitting small hole. The method comprises the following specific operations: the evaporation source carries out evaporation coating on the rotating optical fiber probe tip at a certain inclination angle, and because the end face of the optical fiber probe tip is shielded by the evaporation source, the optical fiber probe tip cannot be coated with metal, and a metal-free light-transmitting small hole with the aperture of 20-200 nanometers can be directly formed on the optical fiber probe tip. The metal coating becomes an effective stop for the rest of the fiber probe. In this embodiment, the evaporation angle is adjusted to obtain a light-transmitting small hole with a pore diameter of 100 nm.
The preparation of the composite near-field optical probe 6 of the invention comprises the following steps:
The optical fiber probe is prepared by the method, the tip of the optical fiber probe is provided with a light-transmitting small hole with the aperture of 100 nanometers, and the tip of the optical fiber probe is coated with a proper amount of ultraviolet curing glue. Using barium titanate round microspheres with the diameter of 200 nanometersThe barium titanate round microspheres are micro-lenses, ultraviolet curing glue is used for adhering the barium titanate round microspheres to the light outlet holes of the optical fiber probes, and an ultraviolet lamp (200W/cm)2) And (5) after the next irradiation for 10min, fixing is finished, and the composite near-field optical probe 6 is prepared.
the composite near-field optical probe is applied to the embodiment of the near-field optical microscope:
the prepared composite near-field optical probe 6 is arranged on the atomic force microscope scanning head part 5, the composite near-field optical probe 6 is enabled to be close to the surface of the sample on the sample area 7 under the control of the atomic force microscope controller, and the distance between the composite near-field optical probe and the sample is kept constant through the interaction of the shear force between the composite near-field optical probe and the sample. The combined type near-field optical probe 6 is connected with the laser light source 1 and the optical fiber coupler 4, 325nm laser emitted by the laser light source 1 enters the light outlet of the optical fiber probe of the combined type near-field optical probe 6 through the beam expander 2, the half glass 3 and the optical fiber coupler 4, is converged by the micro lens of the combined type near-field optical probe 6 after being emitted, namely by the barium titanate round microsphere, further converges light beams while keeping high optical signal flux, and the converged light irradiates a tiny area in the sample area 7. The transmitted light carrying the sample information is received by the objective lens 8 and the signal can finally be collected by an avalanche counter 9. And accumulating and imaging the point light source after point-by-point scanning and point-by-point recording on the surface to obtain a near-field imaging graph with high spatial resolution.
in the above examples, the fiber-optic probe used in the present invention may be of other types or materials as defined above, the micro-lens used may be of other shapes, diameters or major-axis diameters, materials as defined above, and the adhesive used may also be of other types as defined above, and the embodiments are not listed here.
the core part of the composite near-field optical probe is that a nano-sized micro lens is adhered to the light outlet hole part of the probe tip of the optical fiber by using an adhesive. The composite near-field optical probe is used as a probe part of a near-field scanning microscope and applied to near-field imaging. The laser beams are converged by the micro lens after being emitted from the light outlet of the optical fiber probe, so that the spatial resolution is improved while the optical signal flux is improved. Compared with the prior art, the composite near-field optical probe prepared according to the invention can simultaneously improve the spatial resolution and the optical signal flux of the near-field microscope on the premise of not increasing the operation complexity, and solves the inherent problem of weak signals of the near-field microscope. The preparation method disclosed by the invention is low in cost, easy to realize, high in controllability and capable of realizing batch production.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.

Claims (10)

1. a can realize the high optical signal flux and high-resolution combined type near field optical probe at the same time, characterized by that, it is made up of optical fiber probe and miniature lens two parts;
the optical fiber probe is a light-transmitting optical fiber with a conical head, the tip is provided with a light outlet with the aperture of 20-200 nanometers, and the outer layer of the tip is coated with a light-tight metal film;
The micro lens is fixed at the light outlet hole of the optical fiber probe;
The diameter or the long axis diameter of the micro lens is 20-500 nanometers;
When the laser is emitted from the light outlet of the optical fiber probe and is converged by the micro lens to reach the sample area, the optical resolution is improved, and meanwhile, the optical signal flux is improved.
2. The composite near-field optical probe capable of achieving both high optical signal flux and high resolution according to claim 1, wherein the material of the optical fiber probe is optical glass, germanium dioxide, silicon dioxide, optical material or optical waveguide.
3. The composite near-field optical probe for achieving both high optical signal throughput and high resolution according to claim 1, wherein the optical fiber probe is a bare optical fiber.
4. The composite near-field optical probe for simultaneously achieving high optical signal throughput and high resolution of claim 1, wherein the optical fiber probe is of a cantilever type, a fiber optic type, or a hybrid optical type.
5. The composite near-field optical probe according to claim 1, wherein the micro-lenses are ellipsoidal or spherical.
6. The composite near-field optical probe capable of achieving both high optical signal throughput and high resolution according to claim 1, wherein the material of the micro-lens is an optically transparent material.
7. the composite near-field optical probe capable of simultaneously achieving high optical signal flux and high resolution according to claim 1, wherein the micro lens is fixed at the light exit hole of the optical fiber probe using an adhesive.
8. The composite near-field optical probe capable of achieving both high optical signal flux and high resolution according to claim 7, wherein the adhesive is an ultraviolet curing adhesive, cyanoacrylate, epoxy, or silane modified polymer.
9. the composite near-field optical probe capable of achieving both high optical signal throughput and high resolution according to any one of claims 1-8, wherein the micro-lenses are round barium titanate microspheres.
10. A method for preparing a composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution according to any one of claims 1 to 8, comprising the steps of:
Covering a layer of organic solvent which is insoluble in the hydrofluoric acid etching liquid on the surface of the hydrofluoric acid etching liquid to serve as a protective phase, and then inserting the optical fiber probe with a flat end face into the etching liquid to perform static etching; the temperature is always kept constant in the above process; carrying out vacuum coating treatment on the end part of the optical fiber probe subjected to chemical etching, and forming a light outlet with the aperture size of 20-200 nanometers at the tip of the optical fiber probe; and finally, adhering the micro lens at the light outlet of the optical fiber probe by using an adhesive, and finishing fixation after irradiation under an ultraviolet lamp.
CN201810569072.6A 2018-06-05 2018-06-05 Composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution and preparation method thereof Pending CN110568224A (en)

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Cited By (2)

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CN111665374A (en) * 2020-06-05 2020-09-15 上海大学 Optical fiber probe based on quantum dots and detection system thereof
WO2022246933A1 (en) * 2021-05-24 2022-12-01 西安交通大学 Multi-mode measurement method and measurement system based on near-field non-porous probe

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CN106898407A (en) * 2017-03-23 2017-06-27 暨南大学 A kind of nanometer optical tweezer device and method of accurate manipulation nano particle and biomolecule

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Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN111665374A (en) * 2020-06-05 2020-09-15 上海大学 Optical fiber probe based on quantum dots and detection system thereof
CN111665374B (en) * 2020-06-05 2023-02-28 上海大学 Optical fiber probe based on quantum dots and detection system thereof
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WO2022246933A1 (en) * 2021-05-24 2022-12-01 西安交通大学 Multi-mode measurement method and measurement system based on near-field non-porous probe

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