CN110542401B - Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive - Google Patents

Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive Download PDF

Info

Publication number
CN110542401B
CN110542401B CN201910951218.8A CN201910951218A CN110542401B CN 110542401 B CN110542401 B CN 110542401B CN 201910951218 A CN201910951218 A CN 201910951218A CN 110542401 B CN110542401 B CN 110542401B
Authority
CN
China
Prior art keywords
strain
vibration table
piezoelectric vibration
sinusoidal
fork type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910951218.8A
Other languages
Chinese (zh)
Other versions
CN110542401A (en
Inventor
梁志国
尹肖
孙浩琳
吴娅辉
张大治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Changcheng Institute of Metrology and Measurement AVIC
Original Assignee
Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Changcheng Institute of Metrology and Measurement AVIC filed Critical Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority to CN201910951218.8A priority Critical patent/CN110542401B/en
Publication of CN110542401A publication Critical patent/CN110542401A/en
Application granted granted Critical
Publication of CN110542401B publication Critical patent/CN110542401B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/32Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention relates to a sinusoidal strain generating device based on double piezoelectric ceramic push-pull driving, and belongs to the technical field of strain measurement and testing. The device comprises a fork type strain beam, a first piezoelectric vibration table, a second piezoelectric vibration table, a sinusoidal signal generator, a power amplifier, an inductance box, a measured strain gauge and a strain measuring instrument. Aiming at the generation of sinusoidal strain signal waveforms, the invention uses a mode of push-pull driving strain beams based on a double PZT piezoelectric vibration table to generate sinusoidal strain so as to solve the problem that the pulling force of the piezoelectric vibration table is far smaller than the pushing force; the double-fork strain beam is used for loading, so that the problem that compression displacement and extension displacement of different piezoelectric vibration tables are inconsistent is solved, and finally, a high-frequency sinusoidal strain excitation waveform is obtained and is used for metering and calibrating dynamic strain values.

Description

Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive
Technical Field
The invention relates to a sinusoidal strain generating device based on double piezoelectric ceramic push-pull driving, and belongs to the technical field of strain measurement and testing.
Background
The strain refers to the deformation behavior of the solid and the structure caused by the load such as bearing force, moment, pressure and the like, and the deformation behavior of expansion with heat and contraction with cold caused by the environmental change such as temperature and the like. In the normal temperature strain measurement, the deformation refers to elastic deformation, namely, the deformation degree and the change of the load are in a monotonous corresponding relation, and when the load disappears, the deformation disappears. The strain is a physical quantity for quantitatively measuring the strain. For strain measurement, there are various principles and methods, ranging from classical resistive strain measurement, capacitive strain measurement, inductive strain measurement, magnetostrictive strain measurement, to semiconductor strain measurement, suspended wire strain measurement, fiber grating strain measurement, and the like.
In the measurement and calibration of the strain amount, a strain generating device is a necessary link, and particularly an excitation device capable of generating a sinusoidal strain waveform is not available for replacing the position in the strain measurement and dynamic calibration. The driving of the strain beam by the electromagnetic vibration table can generate sinusoidal strain waveform signals, but is limited by the frequency range of the electromagnetic vibration table, and the frequency range of the generated sinusoidal strain is not wide enough. The piezoelectric vibration table formed by stacking the piezoelectric ceramics (PZT) can generate sinusoidal vibration with higher frequency, and is expected to be used for driving the strain beam to generate high-frequency sinusoidal strain signal waveform. However, piezoelectric vibration tables made of stacks of piezoelectric ceramics PZT have their inherent disadvantages: 1) the thrust generated by expansion is very large, but the tension generated by contraction is very small, so that the load capacity in the vibration process is unbalanced; 2) the displacement caused by expansion and the displacement caused by contraction are not completely equal, so that the displacement capacity in the vibration process is unbalanced. Thereby limiting its engineering application in strain stimulation.
Disclosure of Invention
The invention provides a sinusoidal strain generating device based on double piezoelectric ceramic push-pull driving, which is used for generating high-frequency sinusoidal strain, aiming at the defects and limitations of a piezoelectric vibration table formed by stacking piezoelectric ceramics PZT in the process of driving a strain beam.
The purpose of the invention is realized by the following technical scheme.
1. A sinusoidal strain generating device based on double piezoelectric ceramic push-pull driving comprises a fork type strain beam, a first piezoelectric vibration table, a second piezoelectric vibration table, a sinusoidal signal generator, a power amplifier, an inductance box, a measured strain gauge and a strain measuring instrument.
The cantilever end point of the axial line of the fork type strain beam is a point B, a fork type structure is arranged between the two points B, D, and the cantilever end point is used for loading displacement driving of the fork type strain beam by the first piezoelectric vibration table and the second piezoelectric vibration table. The sinusoidal signal generator is used for generating a sinusoidal signal waveform required by displacement driving; the power amplifier amplifies the power of the signal of the sine signal generator; the inductance box is used for adjusting the inductance in the circuit so that the power amplifier for driving is in a matching resonance state; the measured strain gauge is attached to the strain beam, the intersection point of the axis passing through the center of the measured strain gauge and the axis of the fork-type strain beam is a point C, and the constraint end point of the axis of the fork-type strain beam is a point O; the signal connecting end of the strain gauge to be measured is connected with the corresponding connecting end of the strain gauge.
2. The double piezoelectric vibration table is in a push-pull working state, and always keeps thrust to drive the strain beam to vibrate; the electric drive terminals of the piezoelectric vibration table formed by the piezoelectric ceramic PZT stack have polarity, and comprise a positive terminal and a negative terminal, and the voltage polarity of the positive terminal and the negative terminal controls the telescopic state of the vibration table. The piezoelectric polarities of the first piezoelectric vibration table and the second piezoelectric vibration table are just opposite, so that the first piezoelectric vibration table and the second piezoelectric vibration table are always driven by signals with just opposite phases, the first piezoelectric vibration table and the second piezoelectric vibration table are always in a push-pull working state, one is in an expansion state, and the other is in a contraction state, so that the strain beams are always under the action of sinusoidal driving forces of the first piezoelectric vibration table and the second piezoelectric vibration table, the tensile force action of the strain beams is less used, and the strain beams can have larger load capacity;
3. the fork type structure strain beam allows the difference of the displacement of the double piezoelectric vibration table in a push-pull state in a tension-compression state; the fork structure of the fork type strain beam allows the displacement generated by the first piezoelectric vibration table and the second piezoelectric vibration table to be slightly different between points B, D when the two piezoelectric vibration tables are in a push-pull working state, and finally the displacement and the vibration which are the same and consistent are combined to act on the strain beam between points O, B.
4. The reactance in the circuit is adjusted by using the inductance box, so that the power amplifier, the inductance box, the first piezoelectric vibration table and the second piezoelectric vibration table are in a circuit resonance state on the frequency of the loaded sinusoidal signal; the impedance of the output end of the power amplifier is adjusted to be in a matching state so as to obtain the maximum driving power and finally obtain the maximum vibration amplitude.
5. Exciting: sinusoidal signals with set frequency generated by a sinusoidal signal generator are amplified by a power amplifier, and then are loaded on a first piezoelectric vibration table and a second piezoelectric vibration table through an inductance box, so that a fork type strain beam generates push-pull sinusoidal vibration. Sinusoidal strain is generated at the point C of the fork type strain beam, is sensed by the strain gauge to be measured, and is measured by the strain gauge to obtain an actually measured strain value.
Advantageous effects
1. The invention has the characteristics of simple method and easy realization. The sinusoidal strain generated by driving the strain beam by the PZT piezoelectric vibration table can realize a higher frequency range than that of the electromagnetic vibration table. The technical means is provided for the dynamic calibration of the high-frequency range strain value.
2. The sinusoidal strain generating device based on double PZT push-pull driving mainly uses the push-pull working state of a double piezoelectric vibration table, and always keeps the push force to drive a strain beam to vibrate; the strain beam with the fork structure is used, so that the difference of the displacement of the pull state and the pressure state of the double-piezoelectric vibration table in the push-pull state is allowed; the inductance box is used for adjusting reactance in the circuit, so that the circuit is in a resonance state, and the maximum sinusoidal strain amplitude can be generated. The load capacity in the vibration process is balanced; the displacement capability in the vibration process is balanced.
Drawings
FIG. 1 is a schematic block diagram of a sinusoidal strain generating device based on double PZT push-pull drive;
fig. 2 is a typical graph of the difference in displacement between the voltage increase and the voltage decrease of the piezoelectric ceramic.
The device comprises a fork-type strain beam 1, a first piezoelectric vibration table 2, a second piezoelectric vibration table 3, a sinusoidal signal generator 4, a power amplifier 5, an inductance box 6, a strain gauge 7 to be measured and a strain measuring instrument 8.
The cantilever end point of the axial line of the fork type strain beam is a point B, a fork type structure is arranged between the two points B, D, and the cantilever end point is used for loading strain driving on the fork type strain beam by the first piezoelectric vibration table and the second piezoelectric vibration table. The sine signal generator is used for generating a sine signal waveform required by driving; the power amplifier amplifies the power of the signal of the sine signal generator; the inductance box is used for adjusting the inductance in the circuit so that the output circuit of the power amplifier used for driving is in a matching resonance state; the measured strain gauge is attached to the fork type strain beam, the intersection point of the axis passing through the center of the measured strain gauge and the axis of the fork type strain beam is a point C, and the constraint end point of the axis of the fork type strain beam is a point O; the signal connecting end of the strain gauge to be measured is connected with the corresponding connecting end of the strain gauge.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
Example 1
1. A sinusoidal strain generating device based on double PZT push-pull drive is shown in figure 1; the device comprises a fork type strain beam 1, a first piezoelectric vibration table 2, a second piezoelectric vibration table 3, a sinusoidal signal generator 4, a power amplifier 5, an inductance box 6, a measured strain gauge 7 and a strain measuring instrument 8.
The cantilever end point of the axial line of the fork type strain beam 1 is a point B, a fork type structure is arranged between the two points B, D, and the cantilever end point is used for loading displacement driving on the fork type strain beam 1 by the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3. The sinusoidal signal generator 4 is used for generating a sinusoidal signal waveform required by displacement driving; the power amplifier 5 amplifies the power of the signal of the sinusoidal signal generator 4; the inductance box 6 is used for adjusting the inductance in the circuit to enable the driven power amplifier 5 to be in a matching resonance state; the measured strain gage 7 is attached to the fork type strain beam 1, the intersection point of the axis passing through the center of the measured strain gage 7 and the axis of the fork type strain beam 1 is a point C, and the constraint end point of the axis of the fork type strain beam 1 is a point O; the signal connecting end of the measured strain gage 7 is connected with the corresponding connecting end of the strain gauge 8.
2. The double piezoelectric vibration table is in a push-pull working state, and always keeps thrust to drive the strain beam to vibrate; the electric drive terminals of the piezoelectric vibration table formed by the piezoelectric ceramic PZT stack have polarity, and comprise a positive terminal and a negative terminal, and the voltage polarity of the positive terminal and the negative terminal controls the telescopic state of the vibration table. The piezoelectric polarities of the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3 are just opposite, so that the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3 are always driven by signals with just opposite phases, one of the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3 is in an expansion state, and the other one of the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3 is always in a contraction state, so that the fork type strain beam 1 is always under the action of sinusoidal pushing force of the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3, the pulling force action of the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3 is used less, and the load capacity is higher;
3. the fork type structure strain beam allows the difference of the displacement of the double piezoelectric vibration table in a push-pull state in a tension-compression state; the fork structure of the fork type strain beam 1 allows the displacement generated by the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3 to be slightly different between the points B, D when the two tables are in a push-pull working state, and finally the two tables act together on the fork type strain beam 1 to synthesize the same consistent displacement and vibration between the points O, B.
4. Using the inductance box to adjust the reactance in the circuit, so that the power amplifier 5, the inductance box 6 and the first piezoelectric vibrating table 2 and the second piezoelectric vibrating table 3 are in a circuit resonance state at the frequency of the loaded sinusoidal signal; the impedance of the output end of the power amplifier 5 is adjusted to be in a matching state so as to obtain the maximum driving power and finally obtain the maximum vibration amplitude.
The method for generating the sinusoidal strain by adopting the device comprises the following steps: sinusoidal signals with set frequency generated by the sinusoidal signal generator 4 are amplified by the power amplifier 5, and then are loaded on the first piezoelectric vibration table 2 and the second piezoelectric vibration table 3 through the inductance box 6, so that the fork type strain beam 1 generates push-pull sinusoidal vibration. Sinusoidal strain is generated at the point C of the fork type strain beam 1, is sensed by the strain gauge 7 to be measured, and is measured by the strain gauge 8 to obtain a measured strain value.
Wherein:
the fork type strain beam 1 is made of stainless steel and has the following geometrical dimensions:
between OB: length x width x thickness 350mm x 15mm x 5mm
The double difference size is: length x width x thickness 50mm x 15mm x 5mm
Distance between AB: 15mm
Distance between AD: 50mm
Vibration frequency is 1kHz, and strain peak value is 964 mu epsilon
1) Aiming at the problems that a single piezoelectric ceramic vibration table is large in thrust amplitude, strong in load capacity, small in tension amplitude and weak in load capacity caused by the fact that a multilayer stacking structure is adopted, and therefore the problem that the load capacity in the vibration process is unbalanced when the single piezoelectric ceramic vibration table is directly applied to vibration displacement driving and the problem that the large load capacity cannot be realized in a tension state (the stacking is easy to break glue, crack and break), the double piezoelectric ceramic vibration table works in a push-pull mode, and the large load capacity problem and the load capacity unbalance problem are solved simultaneously by a generated pressure and tension complementary mode;
2) the displacement capability imbalance in the vibration process caused by the problem that the displacement amplitudes are inconsistent due to the same lifting amplitude in the voltage lifting and lowering processes caused by the hysteresis effect of the piezoelectric ceramic vibration table is shown in fig. 2. The invention uses the fork beam structure, and absorbs the tiny difference between the displacements caused by the rise and the fall of the push-pull voltage when the double piezoelectric ceramic vibration table works in a push-pull mode.
Experiments on an actual verification system show that the fork type strain beam can effectively solve the problem and obtain a uniform strain excitation result.
While the foregoing is directed to the preferred embodiment of the present invention, it is not intended that the invention be limited to the embodiment and the drawings disclosed herein. Equivalents and modifications may be made without departing from the spirit of the disclosure, which is to be considered as within the scope of the invention.

Claims (3)

1. The utility model provides a sinusoidal strain generating device based on two piezoceramics push-pull drives which characterized in that: the device comprises a fork type strain beam (1), a first piezoelectric vibration table (2), a second piezoelectric vibration table (3), a sinusoidal signal generator (4), a power amplifier (5), an inductance box (6), a strain gauge to be measured (7) and a strain measuring instrument (8);
the fork type strain beam (1) is of a fork type structure, the fork type end is a cantilever end, and the non-fork type end is a fixed end; the part between the cantilever end and the fixed end is a strain beam OB; the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are driven by sinusoidal signals transmitted by a power amplifier (5) and an inductance box (6) to load strain driving on a strain beam; the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are respectively connected at a fork end; a sinusoidal signal generator (4) generates a sinusoidal signal required by driving, the sinusoidal signal is amplified through a power amplifier (5), and then an inductance in a circuit is adjusted through an inductance box (6), so that the resonance frequency of the circuit for driving and the frequency of the loaded sinusoidal signal are in a matching resonance state; the measured strain gage (7) is fixed on the fork type strain beam (1), and the signal connection end of the measured strain gage (7) is connected with the corresponding connection end of the strain measuring instrument (8);
the piezoelectric polarities of the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are just opposite, so that the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are always driven by signals with just opposite phases, the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are always in a push-pull working state, one is in an expansion state, and the other is always in a contraction state, so that the fork type strain beam (1) is always under the action of sine driving force of the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3), the pulling force action of the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) is used less, and the load bearing capacity is higher.
2. A sinusoidal strain generating device based on a bimorph ceramic push-pull drive according to claim 1, wherein: using the inductance box to adjust reactance in the circuit, so that the power amplifier (5), the inductance box (6) and the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are in a circuit resonance state at the loaded sinusoidal signal frequency; the impedance of the output end of the power amplifier (5) is adjusted to be in a matching state so as to obtain the maximum driving power and finally obtain the maximum vibration amplitude.
3. A method of producing sinusoidal strain using the apparatus of claim 1, wherein:
sinusoidal signals with set frequency generated by a sinusoidal signal generator (4) are amplified by a power amplifier (5), and then are loaded on a first piezoelectric vibration table (2) and a second piezoelectric vibration table (3) through an inductance box (6) at the same time, so that a fork type strain beam (1) generates push-pull sinusoidal vibration; sinusoidal strain is generated on the fork type strain beam (1), and is sensed by the strain gauge (7), and a strain value is measured by the strain measuring instrument (8) to obtain an actual measurement strain value;
the piezoelectric polarities of the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are opposite, so that the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are always driven by signals with opposite phases, and therefore the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3) are in a push-pull working state, namely one is in an expansion state, and the other is in a contraction state, so that the fork type strain beam (1) is always under the action of sinusoidal thrust force of the first piezoelectric vibration table (2) and the second piezoelectric vibration table (3), and the strain beams OB have the same displacement and vibration.
CN201910951218.8A 2019-10-08 2019-10-08 Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive Active CN110542401B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910951218.8A CN110542401B (en) 2019-10-08 2019-10-08 Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910951218.8A CN110542401B (en) 2019-10-08 2019-10-08 Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive

Publications (2)

Publication Number Publication Date
CN110542401A CN110542401A (en) 2019-12-06
CN110542401B true CN110542401B (en) 2021-04-13

Family

ID=68715640

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910951218.8A Active CN110542401B (en) 2019-10-08 2019-10-08 Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive

Country Status (1)

Country Link
CN (1) CN110542401B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111122320B (en) * 2019-12-20 2021-09-07 清华大学 Dynamic material measuring method
CN112197692B (en) * 2020-10-14 2022-03-29 中国航空工业集团公司北京长城计量测试技术研究所 Dynamic strain excitation method and device
CN112271951B (en) * 2020-10-14 2022-07-05 中国航空工业集团公司北京长城计量测试技术研究所 High-frequency strain excitation method and device
CN112254911B (en) * 2020-10-14 2022-03-29 中国航空工业集团公司北京长城计量测试技术研究所 Prestress controllable vibration excitation method and device
CN114001661B (en) * 2021-11-04 2022-07-12 北方工业大学 Optical interference type integrated micro-displacement sensing structure and detection method thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5386726A (en) * 1989-10-03 1995-02-07 Akai Electric Co., Ltd. Vibratory gyroscope
CN101776436A (en) * 2010-03-10 2010-07-14 合肥工业大学 Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method
CN202274866U (en) * 2011-10-14 2012-06-13 合肥工业大学 Three-dimensional resonance trigger measuring head based on quartz tuning fork
CN102662086B (en) * 2012-04-20 2014-04-23 中国科学院半导体研究所 Multiple-degree-of-freedom near-field optical microscope based on micro-nano motion arm
CN102935309B (en) * 2012-10-30 2015-05-13 苏州市职业大学 Closed loop control system of ultrasonic separator
CN104748930A (en) * 2015-04-13 2015-07-01 东北大学 Piezoelectric high-frequency vibration system used for high-order vibration fatigue testing of small-size components
CN105226994A (en) * 2015-10-27 2016-01-06 张文明 Multifrequency coupled vibrations energy capture device
CN106160575B (en) * 2016-08-04 2017-11-24 国网江西省电力公司电力科学研究院 A kind of low frequency magnetic field energy collecting device using Piezoelectric anisotropy tuning fork
CN110094329B (en) * 2019-04-16 2021-04-09 合肥工业大学 Resonant piezoelectric pump working at power frequency

Also Published As

Publication number Publication date
CN110542401A (en) 2019-12-06

Similar Documents

Publication Publication Date Title
CN110542401B (en) Sinusoidal strain generating device based on double piezoelectric ceramic push-pull drive
Lin et al. Modeling and testing of PZT and PVDF piezoelectric wafer active sensors
JP4480640B2 (en) Ultrasonic fatigue test apparatus and ultrasonic fatigue test method
JP5453617B2 (en) Acceleration sensor and force sensor calibration method and apparatus
Calkins et al. Effect of prestress on the dynamic performace of a Terfenol-D transducer
Chaudhry et al. Monitoring the integrity of composite patch structural repair via piezoelectric actuators/sensors
CN101476970B (en) Seat excitation apparatus used for MEMS dynamic characteristics test
RU2511629C2 (en) Method and device for pressure measurement with use of filling pipe
CN104142167B (en) Vibrate limit switch
CN208254930U (en) Cantilever type piezoelectric fatigue tester
CN113295359B (en) Simulation test device for inhibiting ejector supporting plate vibration and vibration inhibition method
Wang et al. Dynamic modeling of thickness-mode piezoelectric transducer using the block diagram approach
Zhou et al. Ring-shaped traveling wave ultrasonic motor for high-output power density with suspension stator
Zhang et al. A linear piezoelectric actuator using “A-Shaped” structure
Jiang et al. Determining the optimal pre-tightening force of a sandwich transducer by measuring resonance resistance
Paralı et al. A digital measurement system based on laser displacement sensor for piezoelectric ceramic discs vibration characterization
CN112271951B (en) High-frequency strain excitation method and device
CN202285002U (en) Sheet ultrasonic bending vibration fatigue accelerating test device
Dubus et al. Characterization of multilayered piezoelectric ceramics for high power transducers
Reissman et al. Piezoelectric resonance shifting using tunable nonlinear stiffness
CN112113732B (en) Axial-fixed type prestress controllable vibration excitation method and device
CN1235027C (en) Pressure sensor of piezoelectric excitation vibrating cylinder
Zhao et al. A novel heat shrinkable ultrasonic transducer for rotary ultrasonic micro-nano precision manufacturing
CN112082886B (en) Small high-low cycle compound fatigue in-situ testing machine providing orthogonal loading
CN110095210B (en) Silicon-based quartz MEMS resonant torque sensor for micro-nano scale material

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant