CN110536534A - 一种匹配箱的阻抗调节方法、装置及射频电源*** - Google Patents
一种匹配箱的阻抗调节方法、装置及射频电源*** Download PDFInfo
- Publication number
- CN110536534A CN110536534A CN201910844116.6A CN201910844116A CN110536534A CN 110536534 A CN110536534 A CN 110536534A CN 201910844116 A CN201910844116 A CN 201910844116A CN 110536534 A CN110536534 A CN 110536534A
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- capacitor
- inductance
- impedance
- capacitance
- simplified model
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 239000003990 capacitor Substances 0.000 claims abstract description 212
- 238000005259 measurement Methods 0.000 claims description 37
- 230000005611 electricity Effects 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000004590 computer program Methods 0.000 claims description 3
- 241000208340 Araliaceae Species 0.000 claims description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 claims description 2
- 235000008434 ginseng Nutrition 0.000 claims description 2
- 238000005457 optimization Methods 0.000 abstract description 8
- 238000004364 calculation method Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 7
- 238000004422 calculation algorithm Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Transmitters (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN201910844116.6A CN110536534B (zh) | 2019-09-06 | 2019-09-06 | 一种匹配箱的阻抗调节方法、装置及射频电源*** |
Applications Claiming Priority (1)
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CN201910844116.6A CN110536534B (zh) | 2019-09-06 | 2019-09-06 | 一种匹配箱的阻抗调节方法、装置及射频电源*** |
Publications (2)
Publication Number | Publication Date |
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CN110536534A true CN110536534A (zh) | 2019-12-03 |
CN110536534B CN110536534B (zh) | 2024-03-26 |
Family
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CN201910844116.6A Active CN110536534B (zh) | 2019-09-06 | 2019-09-06 | 一种匹配箱的阻抗调节方法、装置及射频电源*** |
Country Status (1)
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CN (1) | CN110536534B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112380797A (zh) * | 2020-11-05 | 2021-02-19 | 中国第一汽车股份有限公司 | 电机建模方法、装置、设备和介质 |
CN114448387A (zh) * | 2021-12-28 | 2022-05-06 | 深圳市恒运昌真空技术有限公司 | 阻抗匹配的调节的方法及阻抗匹配电路 |
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JP2010504042A (ja) * | 2006-09-13 | 2010-02-04 | アドバンスド エナジー インダストリーズ, インコーポレイテッド | 整合インピーダンス間の切り換えのための装置および方法 |
CN101795120A (zh) * | 2009-01-30 | 2010-08-04 | 株式会社Ntt都科摩 | 多频带匹配电路、以及多频带功率放大器 |
CN103377869A (zh) * | 2012-04-16 | 2013-10-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 阻抗匹配方法、阻抗匹配***及等离子体加工设备 |
US20140104132A1 (en) * | 2012-10-12 | 2014-04-17 | Infineon Technologies Ag | Impedance Matching Network with Improved Quality Factor and Method for Matching an Impedance |
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CN105069235A (zh) * | 2015-08-13 | 2015-11-18 | 西安电子科技大学 | 提取双频带频率选择表面等效电路参数的方法 |
CN105304444A (zh) * | 2014-07-25 | 2016-02-03 | 细美事有限公司 | 等离子体产生单元和包括该等离子体产生单元的基板处理装置 |
CN107305831A (zh) * | 2016-04-22 | 2017-10-31 | 北京北方华创微电子装备有限公司 | 一种阻抗匹配装置和等离子体处理设备 |
CN108012401A (zh) * | 2016-10-28 | 2018-05-08 | 北京北方华创微电子装备有限公司 | 射频阻抗匹配方法、匹配器和半导体处理装置 |
CN109148250A (zh) * | 2017-06-15 | 2019-01-04 | 北京北方华创微电子装备有限公司 | 阻抗匹配装置和阻抗匹配方法 |
CN109861654A (zh) * | 2017-12-20 | 2019-06-07 | 恩智浦美国有限公司 | 具有阻抗匹配电路的rf功率晶体管及其制造方法 |
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2019
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JP2010504042A (ja) * | 2006-09-13 | 2010-02-04 | アドバンスド エナジー インダストリーズ, インコーポレイテッド | 整合インピーダンス間の切り換えのための装置および方法 |
CN101795120A (zh) * | 2009-01-30 | 2010-08-04 | 株式会社Ntt都科摩 | 多频带匹配电路、以及多频带功率放大器 |
CN103377869A (zh) * | 2012-04-16 | 2013-10-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 阻抗匹配方法、阻抗匹配***及等离子体加工设备 |
US20140104132A1 (en) * | 2012-10-12 | 2014-04-17 | Infineon Technologies Ag | Impedance Matching Network with Improved Quality Factor and Method for Matching an Impedance |
CN103873102A (zh) * | 2012-12-10 | 2014-06-18 | 联想(北京)有限公司 | 射频芯片、射频电路以及电子设备 |
CN105304444A (zh) * | 2014-07-25 | 2016-02-03 | 细美事有限公司 | 等离子体产生单元和包括该等离子体产生单元的基板处理装置 |
CN105069235A (zh) * | 2015-08-13 | 2015-11-18 | 西安电子科技大学 | 提取双频带频率选择表面等效电路参数的方法 |
CN107305831A (zh) * | 2016-04-22 | 2017-10-31 | 北京北方华创微电子装备有限公司 | 一种阻抗匹配装置和等离子体处理设备 |
CN108012401A (zh) * | 2016-10-28 | 2018-05-08 | 北京北方华创微电子装备有限公司 | 射频阻抗匹配方法、匹配器和半导体处理装置 |
CN109148250A (zh) * | 2017-06-15 | 2019-01-04 | 北京北方华创微电子装备有限公司 | 阻抗匹配装置和阻抗匹配方法 |
CN109861654A (zh) * | 2017-12-20 | 2019-06-07 | 恩智浦美国有限公司 | 具有阻抗匹配电路的rf功率晶体管及其制造方法 |
EP3503387A1 (en) * | 2017-12-20 | 2019-06-26 | NXP USA, Inc. | Rf power transistors with impedance matching circuits, and methods of manufacture thereof |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112380797A (zh) * | 2020-11-05 | 2021-02-19 | 中国第一汽车股份有限公司 | 电机建模方法、装置、设备和介质 |
CN112380797B (zh) * | 2020-11-05 | 2023-03-14 | 中国第一汽车股份有限公司 | 电机建模方法、装置、设备和介质 |
CN114448387A (zh) * | 2021-12-28 | 2022-05-06 | 深圳市恒运昌真空技术有限公司 | 阻抗匹配的调节的方法及阻抗匹配电路 |
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CN110536534B (zh) | 2024-03-26 |
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Effective date of registration: 20211210 Address after: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Applicant after: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. Address before: 518102 13D, block D, Central Avenue, intersection of Xixiang Avenue and Baoyuan Road, Laodong community, Xixiang street, Bao'an District, Shenzhen, Guangdong Applicant before: Shenzhen BAISHIDA Semiconductor Equipment Co.,Ltd. |
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Inventor after: Lin Weiqun Inventor after: Yue Weiping Inventor after: Yao Zhiyi Inventor before: Lin Weiqun Inventor before: Yue Weiping Inventor before: Zhang Guidong Inventor before: Yao Zhiyi |
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Country or region after: China Address after: 518102 Room 101, 201, 301, Building B, Functional Support Area, Taohuayuan Zhichuang Town, Tiegang Community, Xixiang Street, Baoan District, Shenzhen, Guangdong Province Applicant after: Shenzhen Hengyunchang Vacuum Technology Co.,Ltd. Address before: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Applicant before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. Country or region before: China |
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