CN110518829A - A kind of piezoelectric bimorph charge driving circuit - Google Patents
A kind of piezoelectric bimorph charge driving circuit Download PDFInfo
- Publication number
- CN110518829A CN110518829A CN201910856104.5A CN201910856104A CN110518829A CN 110518829 A CN110518829 A CN 110518829A CN 201910856104 A CN201910856104 A CN 201910856104A CN 110518829 A CN110518829 A CN 110518829A
- Authority
- CN
- China
- Prior art keywords
- piezoelectric bimorph
- piezoelectric
- amplifier
- charge
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 5
- 239000004793 Polystyrene Substances 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 229920002223 polystyrene Polymers 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 8
- 238000005452 bending Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 description 4
- 241000446313 Lamella Species 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of piezoelectric bimorph charge driving circuits, it is related to Precision Piezoelectric drive control field, the upper and lower voltage piece of piezoelectric bimorph is arranged in series between high voltage direct current positive-negative power respectively with sensing capacitance, the intermediate public electrode of the output end connection piezoelectric bimorph of high-voltage amplifier, sensing capacitance accurately perceives the charge on upper layer and lower layer's piezoelectric patches, and after being handled by isolated amplifier and differential amplifier compared with controlling signal source, the charge difference of feedback control piezoelectric bimorph.The present invention simplifies the driving circuit of piezoelectric bimorph, reduces control system cost, avoids backward voltage from driving, greatly improve the control precision of piezoelectric bimorph bending displacement using charge driving method.
Description
Technical field
The present invention relates to Precision Piezoelectric drive control fields, and in particular to a kind of piezoelectric bimorph charge driving circuit.
Background technique
Piezoelectric actuator utilizes the inverse piezoelectric effect of piezoelectric material, and the electric field by being applied to material internal causes in material
The strain in portion or stress, to form the deformational displacement or driving force of piezoelectric actuator macroscopic view.Piezoelectric actuator has displacement point
Resolution is high, driving force is big, fast response time, not by electromagnetic interference the advantages that, be widely used in biologic medical, materials chemistry, object
Manage the application of the fields nanometer positionings such as electronics operation.
Piezoelectric bimorph is the most common Piezoelectric Driving structure, utilizes the non-equilibrium flexible strain of the upper and lower piezoelectric patches
(layer piezoelectric patches elongation as above, lower layer's piezoelectric patches shorten), the Bending Deformation for forming piezoelectric bimorph is displaced, simple with structure,
The features such as deformational displacement is big.Since piezoelectric bimorph includes at least two piezoelectric patches, and the internal electric intensity applied is different, on
Layer and lower layer's piezoelectric patches need two high-voltage amplifiers to respectively drive, and control difficulty and system cost is higher.In order to reduce driving
The complexity of circuit, patent No. US5233256 propose to drive jointly by the single high-voltage amplifier of optimization electrode connection realization, but
Since piezoelectric actuator need to avoid excessive reverse drive voltages, effective drive voltage range of this method is restricted.In order to
Expand the range of driving voltage, patent No. CN108258931A proposes to change the upper and lower pressure by diode and parallel resistance
The driving voltage ratio of electric piece, but due to the impedance operator of parallel resistance and capacitor, effective driving frequency range of this method by
To limitation.
In addition, there is the non-linear relations such as sluggishness, creep, piezoelectricity between the driving voltage and deformational displacement of piezoelectric actuator
Restriction of the Bit andits control precision of driver by voltage control method.Due between the charge and deformational displacement of piezoelectric actuator
There are preferable linear relationships, and the displacement of piezoelectric actuator is greatly improved using charge driving circuit substitution Voltag driving circuit
Control precision.However, being suitable for piezoelectric bimorph since there are structure and characteristic differences for Voltag driving circuit and charge driving circuit
The Voltag driving circuit of piece cannot be simply converted to charge driving circuit, and existing Voltag driving circuit is asked there is also many
Topic.The characteristics of therefore, it is necessary to further combined with piezoelectric bimorph and charge driving circuit, proposes simpler, accurate, effective
Piezoelectric bimorph charge driving circuit and control method.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of piezoelectric bimorph charge driving circuit,
To solve the technical problems such as piezoelectric bimorph driving circuit structure complexity, low precision in the prior art.
The present invention is achieved by the following technical solutions:
The present invention provides a kind of piezoelectric bimorph charge driving circuits, including piezoelectric bimorph, sensing capacitance A, sensing
Capacitor B, it high voltage direct current positive supply, high voltage direct current negative supply, high-voltage amplifier, isolated amplifier A, isolated amplifier B, differential puts
Big device and control signal source；
The upper layer piezoelectric patches of the piezoelectric bimorph is connecting high voltage direct current just after connecting by its top electrode with sensing capacitance A
Power supply, lower layer's piezoelectric patches of the piezoelectric bimorph connect high voltage direct current negative electricity after connecting by its lower electrode with sensing capacitance B
The intermediate public electrode of source, upper layer piezoelectric patches and lower layer piezoelectric patches connects the output end of high-voltage amplifier；
The input terminal of the isolated amplifier A is connect with sensing capacitance A, the input terminal and sensing of the isolated amplifier B
Capacitor B connection；
The input terminal of the differential amplifier is connect with the output end of isolated amplifier A and isolated amplifier B respectively；
The input terminal of the high-voltage amplifier is connect with the output end of control signal source and differential amplifier respectively.
Further, the piezoelectric bimorph is using polarization direction from the top down.
Further, the polystyrene capacitor of high-precision High Linear is respectively adopted in the sensing capacitance A and sensing capacitance B,
Its capacitance of the two is 10~100 times of piezoelectric bimorph capacitance.
The present invention has the advantage that compared with prior art
(1) the upper and lower voltage piece of piezoelectric bimorph is arranged in series in the positive negative electricity of high voltage direct current with sensing capacitance respectively
Between source, it is only necessary to which the intermediate public electrode of a high-voltage amplifier connection piezoelectric bimorph passes through the electricity of intermediate public electrode
Pressure adjusts the charge difference of the upper and lower piezoelectric patches, simplifies driving circuit, reduces control system cost, while avoiding reversely driving
The influence of dynamic voltage.
(2) sensing capacitance of high-precision High Linear is used, and sets suitable capacitance ratio between piezoelectric patches, smaller
The lower accurate perception upper layer and lower layer's piezoelectric patches of partial pressure loss charge, and then handled by isolated amplifier and differential amplifier
Afterwards compared with controlling signal source, the charge difference of feedback control piezoelectric bimorph, to improve bending displacement control precision.Together
When, avoid the charge of sensing capacitance by the influence of subsequent process circuit using isolated amplifier.
Detailed description of the invention
Fig. 1 is the schematic illustration of piezoelectric bimorph charge driving circuit of the present invention；
Fig. 2 is the structural schematic diagram of piezoelectric bimorph of the present invention；
Fig. 3 is the relational graph of piezoelectric bimorph charge and voltage of the present invention；
Fig. 4 is the relational graph of piezoelectric bimorph charge and displacement of the present invention；
Fig. 5 is the waveform diagram of present invention control signal source voltage and piezoelectric bimorph charge；
Fig. 6 is lagging characteristics figure of the piezoelectric bimorph of the present invention under charge and voltage driving.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
As shown in Figs. 1-2, a kind of piezoelectric bimorph charge driving circuit, including piezoelectric bimorph 1, sensing capacitance A2-1,
Sensing capacitance B2-2, high voltage direct current positive supply 3, high voltage direct current negative supply 4, high-voltage amplifier 5, isolated amplifier A6-1, isolation
Amplifier B6-2, differential amplifier 7 and control signal source 8；
The upper layer piezoelectric patches 1-1 of the piezoelectric bimorph 1 connects high after being connected by its top electrode a with sensing capacitance A2-1
After pressing DC positive power 3, the lower layer piezoelectric patches 1-2 of the piezoelectric bimorph 1 to connect by its lower electrode b with sensing capacitance B2-2
High voltage direct current negative supply 4 is connected, upper layer piezoelectric patches 1-1 connects high-voltage amplifier with the intermediate public electrode c of lower layer piezoelectric patches 1-2
5 output end；
The input terminal of the isolated amplifier A6-1 is connect with sensing capacitance A2-1, and the charge of upper layer piezoelectric patches 1-1 is believed
Number amplification output, the input terminal of the isolated amplifier B6-2 is connect with sensing capacitance B2-2, by the charge of lower layer piezoelectric patches 1-2
Signal amplification output；
The input terminal of the differential amplifier 7 connects with the output end of isolated amplifier A6-1 and isolated amplifier B6-2 respectively
It connects, the charge difference signal of upper layer piezoelectric patches 1-1 and lower layer piezoelectric patches 1-2 is amplified and exported；
The input terminal of the high-voltage amplifier 5 is connect with the output end of control signal source 8 and differential amplifier 7 respectively, structure
At negative feedback control loop, the error signal for controlling signal source 8 and differential amplifier 7 is amplified into output；
The piezoelectric bimorph 1 is using polarization direction from the top down；
The sensing capacitance A2-1 and sensing capacitance B2-2 is respectively adopted the polystyrene capacitor of high-precision High Linear, and two
Its capacitance of person is 10~100 times of 1 capacitance of piezoelectric bimorph.
In the present embodiment, piezoelectric patches 1-1 in upper layer is identical with the specification of lower layer piezoelectric patches 1-2, sensing capacitance A2-1 and biography
The specification that electrification holds B2-2 is identical, and isolated amplifier A6-1 is identical with the specification of isolated amplifier B6-2.
Specific work process and principle:
As shown in figure 3, in the actual application of piezoelectric bimorph, due to the nonlinear characteristic of voltage driving, piezoelectricity
The actual capacitance of each piezoelectric patches changes with driving voltage in twin lamella 1, the voltage U of each piezoelectric patchesP, reference capacitance CPAnd electricity
Lotus QPBetween relationship may be expressed as:
QP=UP(1+δ)CP (1)
Wherein δ is the variable for describing piezoelectric patches lagging characteristics.
As shown in figure 4, between the charge and deformational displacement of piezoelectric actuator, there are preferable linear relationship, piezoelectric bimorphs
1 Bending Deformation displacement xPWith the quantity of electric charge Q of upper layer piezoelectric patches 1-11With the quantity of electric charge Q of lower layer piezoelectric patches 1-22Difference Q2-Q1It
Between relationship are as follows:
xP=α (Q2-Q1) (2)
Wherein α is constant.
As shown in Figs. 1-2, the capacitor of sensing capacitance A2-1 and sensing capacitance B2-2 are constant CS, upper layer piezoelectric patches 1-1
Voltage be UP1, the voltage of upper layer sensing capacitance A2-1 is US1, the voltage of lower layer piezoelectric patches 1-2 is UP2, lower layer's sensing capacitance
The voltage of B2-2 is US2, then the charge Q of upper layer piezoelectric patches 1-11With the charge Q of lower layer piezoelectric patches 1-22It respectively indicates are as follows:
Wherein δ1And δ2The variable of upper layer piezoelectric patches 1-1 and lower layer's piezoelectric patches 1-2 lagging characteristics are respectively described.
The voltage of high voltage direct current positive supply 3 and high voltage direct current negative supply 4 is respectively VCCAnd VSS, the output of high-voltage amplifier 5
Voltage is Uo, voltage VCC、VSSAnd UoMeet relational expression:
It can be obtained by formula 4, the output voltage U of high-voltage amplifier 5oIt indicates are as follows:
If the gain of isolated amplifier A6-1 and isolated amplifier B6-2 are 1, the gain of differential amplifier 7 is constant
KS, then the output voltage △ U of differential amplifier 7SIt indicates are as follows:
The open-loop gain of high-voltage amplifier 5 is K, and the voltage of control signal source 8 is Ui, then the output of high-voltage amplifier 5 is electric
Press UoIt is also denoted as:
Uo=K (Ui-△US) (7)
It can be obtained by formula 5 and 7, the charge difference of piezoelectric bimorph 1 may be expressed as:
When parameter meets:
The charge difference of piezoelectric bimorph 1 is about are as follows:
It can be obtained by formula 2 and 10, the Bending Deformation displacement x of piezoelectric bimorph 1PIt may be expressed as:
Wherein α, CSAnd KSFor constant, i.e. the Bending Deformation displacement x of piezoelectric bimorph 1PWith the voltage U of control signal source 8i
Meet linear relationship.
As shown in figure 5, as the voltage U for controlling signal source 8 in initial situationiWhen being zero, the charge Q of upper layer piezoelectric patches 1-11
With the charge Q of lower layer piezoelectric patches 1-22Equal, upper layer piezoelectric patches 1-1 and lower layer bi-morph piezo-electric twin lamella 1-2 generate balance and answer
Become, piezoelectric bimorph 1 does not bend；With voltage UiIncrease, upper layer piezoelectric patches 1-1 is because of charge Q1Increase and shortens, lower layer
Piezoelectric patches 1-2 is because of charge Q2Reduce and extend, piezoelectric bimorph 1 is bent upwards deformation；With voltage UiReduction, upper layer piezoelectricity
Piece 1-1 is because of charge Q1Reduce and extend, lower layer piezoelectric patches 1-2 is because of charge Q2Increase and shorten, piezoelectric bimorph 1 is turned under curved
Become.
As shown in fig. 6, the charge difference Q of piezoelectric bimorph 12-Q1With the voltage U of control signal source 8iVariation and holding
Linear relationship, to accurately control the Bending Deformation displacement x of piezoelectric bimorph 1P, test result show charge driving under sluggishness
Sluggishness under comparison with voltage driving improves significantly.
Claims (3)
1. a kind of piezoelectric bimorph charge driving circuit, it is characterised in that: including piezoelectric bimorph, sensing capacitance A, sensing capacitance
B, high voltage direct current positive supply, high voltage direct current negative supply, high-voltage amplifier, isolated amplifier A, isolated amplifier B, differential amplifier
With control signal source；
The upper layer piezoelectric patches of the piezoelectric bimorph connects high voltage direct current positive electricity after connecting by its top electrode with sensing capacitance A
Source, lower layer's piezoelectric patches of the piezoelectric bimorph connect high voltage direct current negative supply after connecting by its lower electrode with sensing capacitance B,
Upper layer piezoelectric patches connects the output end of high-voltage amplifier with the intermediate public electrode of lower layer piezoelectric patches；
The input terminal of the isolated amplifier A is connect with sensing capacitance A, the input terminal and sensing capacitance B of the isolated amplifier B
Connection；
The input terminal of the differential amplifier is connect with the output end of isolated amplifier A and isolated amplifier B respectively；
The input terminal of the high-voltage amplifier is connect with the output end of control signal source and differential amplifier respectively.
2. a kind of piezoelectric bimorph charge driving circuit according to claim 1, it is characterised in that: the piezoelectric bimorph
Using polarization direction from the top down.
3. a kind of piezoelectric bimorph charge driving circuit according to claim 1, it is characterised in that: the sensing capacitance A
The polystyrene capacitor of high-precision High Linear is respectively adopted with sensing capacitance B, its capacitance of the two is piezoelectric bimorph chip capacitor
10~100 times of amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910856104.5A CN110518829B (en) | 2019-09-11 | 2019-09-11 | Piezoelectric bimorph charge driving circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910856104.5A CN110518829B (en) | 2019-09-11 | 2019-09-11 | Piezoelectric bimorph charge driving circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110518829A true CN110518829A (en) | 2019-11-29 |
| CN110518829B CN110518829B (en) | 2021-05-28 |
Family
ID=68630589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910856104.5A Active CN110518829B (en) | 2019-09-11 | 2019-09-11 | Piezoelectric bimorph charge driving circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110518829B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111044579A (en) * | 2020-01-01 | 2020-04-21 | 中国海洋大学 | Self-sensing piezoelectric patch circuit and piezoelectric patch excitation and echo signal calculation method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040084986A1 (en) * | 2002-10-31 | 2004-05-06 | Arbogast Darin J | Electrostrictive compound actuator |
| CN1770615A (en) * | 2005-09-16 | 2006-05-10 | 哈尔滨工业大学 | Piezo-electric ceramic drive power supply based on electric charge control |
| US20120068576A1 (en) * | 2010-09-16 | 2012-03-22 | Electronics And Telecommunications Research Institute | Energy harvesting electric device |
| CN104079203A (en) * | 2014-06-19 | 2014-10-01 | 哈尔滨工程大学 | High-dynamic charge type piezoelectric ceramic drive power supply |
-
2019
- 2019-09-11 CN CN201910856104.5A patent/CN110518829B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040084986A1 (en) * | 2002-10-31 | 2004-05-06 | Arbogast Darin J | Electrostrictive compound actuator |
| CN1770615A (en) * | 2005-09-16 | 2006-05-10 | 哈尔滨工业大学 | Piezo-electric ceramic drive power supply based on electric charge control |
| US20120068576A1 (en) * | 2010-09-16 | 2012-03-22 | Electronics And Telecommunications Research Institute | Energy harvesting electric device |
| CN104079203A (en) * | 2014-06-19 | 2014-10-01 | 哈尔滨工程大学 | High-dynamic charge type piezoelectric ceramic drive power supply |
Non-Patent Citations (1)
| Title |
|---|
| 王硕: "压电陶瓷微位移器驱动电源设计及研究", 《CNKI优秀硕士学位论文全文库》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111044579A (en) * | 2020-01-01 | 2020-04-21 | 中国海洋大学 | Self-sensing piezoelectric patch circuit and piezoelectric patch excitation and echo signal calculation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110518829B (en) | 2021-05-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE1673475B2 (en) | DEVICE FOR CONVERTING AN ELECTRICAL INPUT SIGNAL INTO A CORRESPONDING PRESSURE SIGNAL | |
| CN209103131U (en) | Control system based on the displacement bimorph driver from perception feed circuit | |
| US10356543B2 (en) | Microelectromechanical systems microphone with electrostatic force feedback to measure sound pressure | |
| CN110071658A (en) | Piezoelectric transducer | |
| US20040046484A1 (en) | Interface electronics for piezoelectric devices | |
| CN110518829A (en) | A kind of piezoelectric bimorph charge driving circuit | |
| CN201541243U (en) | Terminal volume adjusting device | |
| WO2018172220A1 (en) | Driver circuit for analyzing and controlling a piezoelectric component, button providing haptic feedback, and operating method | |
| CN106301068A (en) | A kind of digital driving power | |
| US9093925B2 (en) | Switched capacitor charge pump driver for piezoelectric actuator | |
| CN106253741B (en) | Piezoelectric Ceramic device | |
| JPS62156503A (en) | Piezoelectric sensor | |
| CN102049772B (en) | Integral drive power supply and method for miniature piezoelectricity-driven electromagnetic robot | |
| CN111324050A (en) | Control system of piezoelectric displacement driver | |
| JP2590961B2 (en) | Semiconductor pressure sensor | |
| CN101295187B (en) | Pressure-controlled current source and bipolar controllable electric power | |
| CN110138269B (en) | Charge controller for synchronous linear operation of multiple piezoelectric ceramics | |
| CN201003945Y (en) | Online monitoring system capable of adjusting pole pitch of F-P interferometer | |
| JPH10209516A (en) | State detection method for piezoelectric element and piezoelectric element device | |
| JP2590960B2 (en) | Semiconductor pressure sensor | |
| CN112720790A (en) | High-precision press system for ceramic preparation based on piezoelectric structure | |
| Masson et al. | Multi-objective optimisation methodology for self-sensing piezoelectric monomorph benders | |
| JP3807780B2 (en) | Linear drive method for piezoelectric ceramic actuator and linear drive circuit using the same | |
| CN115864892A (en) | Piezoelectric ceramic charge driving-control circuit | |
| CN2252453Y (en) | Piezoelectric ceramic performance device driver |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |