CN110515059A - Lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature - Google Patents

Lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature Download PDF

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Publication number
CN110515059A
CN110515059A CN201910683466.9A CN201910683466A CN110515059A CN 110515059 A CN110515059 A CN 110515059A CN 201910683466 A CN201910683466 A CN 201910683466A CN 110515059 A CN110515059 A CN 110515059A
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China
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low temperature
optical axis
vacuum
parallel light
heavy caliber
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CN201910683466.9A
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Inventor
陈刚义
陈丽
张世一
彭光东
孙永雪
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Shanghai Institute of Satellite Equipment
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Shanghai Institute of Satellite Equipment
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Priority to CN201910683466.9A priority Critical patent/CN110515059A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497Means for monitoring or calibrating

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  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The present invention provides lidar transmit-receive optical axises under a kind of vacuum and low temperature to match system safety testing device, including vacuum tank (1), focal plane beam quality analysis device (2), heavy caliber vacuum and low temperature parallel light tube (3), standard flat mirror (4), optical axis translatable mirror group (5), calibration vehicle (6), laser radar (7).It is consistent the invention is characterized in that the optical axis of heavy caliber vacuum and low temperature parallel light tube receives systematic optical axis with laser radar, and two transmitting laser apertures are within the scope of the effective aperture of heavy caliber vacuum and low temperature parallel light tube, two emission systems emit laser respectively and are imaged by optical axis translatable mirror group and heavy caliber vacuum and low temperature parallel light tube to focal plane beam quality analysis device, the present invention is especially suitable for laser radars under cryogenic conditions to carry out transmitting-receiving optical axis matching test, has the characteristics that measuring accuracy is high, vacuum and low temperature is adaptable.

Description

Lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature
Technical field
The present invention relates to lidar transmit-receive optical axis matching testing fields, and in particular to laser radar is received under vacuum and low temperature Light-emitting axis matches system safety testing device, matches system safety testing device more particularly, to high-precision optical axis under a kind of vacuum and low temperature, is applied to Atmospheric Survey laser radar carries out performance parameter test under the conditions of vacuum and low temperature.
Background technique
Laser radar is the production of conventional radar technology, modern laser and the coupling of advanced information data processing technique Object, basic principle is exactly the scattering light characteristic that object is detected using the source-collector of laser transmitting system transmitting, by comparing receipts Phase, frequency and the polarization characteristic otherness of wave of shining obtains the related physical information of testee.In terms of Atmospheric Survey, There can be " active " detection means to realize complete to atmosphere with cloud, aerosol and the trace gas characteristic in precise measurement atmosphere Weather monitoring, meteorological observation.
Laser radar be used as " active " detecting devices, exoatmosphere transmitting known parameters laser source reach cloud, The surface reflections such as aerosol to laser radar receives system.In order to ensure laser radar transmitting light source can be received system detection, The transmitting-receiving optical axis strict conformance of detecting devices is needed, so laser radar is carried out using plain shaft parallelism detection device before transmission The test of optical axis matching is received and dispatched, needs to carry out the research for receiving and dispatching optical axis matching test method under laser radar vacuum and low temperature, it is real In the case of existing normal operation, laser radar performance test, the solution and application of these technologies, for realizing laser thunder are carried out There is conclusive effect up to the application in terms of Atmospheric Survey.
The prior art relevant to the application is patent document CN108983199A, discloses a kind of performance of laser radar Verification method includes the following steps: S1: carrying out the safety verification of product, S2: to the laser for meeting corresponding security level requirement Radar carries out performance verification, and performance verification includes that spatial resolution is verified, the detection range verifying under the conditions of different weather, walks boat Monitoring function verifying, the verifying of high/low temperature operating condition and environmental reliability verifying.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide lidar transmit-receive optical axises under a kind of vacuum and low temperature Match system safety testing device.
Lidar transmit-receive optical axis matches system safety testing device, including vacuum under a kind of vacuum and low temperature provided according to the present invention Tank, focal plane beam quality analysis device, heavy caliber vacuum and low temperature parallel light tube, standard flat mirror, optical axis translatable mirror group, calibration Vehicle, laser radar;
The focal plane beam quality analysis device, heavy caliber vacuum and low temperature parallel light tube, standard flat mirror, optical axis translation reflection Microscope group, laser radar are laid out in vacuum tank;
Focal plane beam quality analysis device is located at heavy caliber vacuum and low temperature parallel light tube focal plane;
Focal plane beam quality analysis device, heavy caliber vacuum and low temperature parallel light tube, standard flat mirror, optical axis translatable mirror Group, laser radar are installed by testing process to calibration vehicle.
Preferably, two transmitting unthreaded holes of laser radar are in the bore range of heavy caliber vacuum and low temperature parallel light tube (3) It is interior, and Radar Receiver System bore have with the clear aperture of heavy caliber vacuum and low temperature parallel light tube it is overlapping.
Preferably, the bore of heavy caliber vacuum and low temperature parallel light tube is D1, spectral coverage δ, focal length f, rear cut-off distance Lf, wave picture Difference is RMS, then has D1 >=Φ 600mm, δ ∈ [400nm~1700nm], f >=10000mm, Lf >=300mm, RMS≤1/10 λ, λ =0.6328 μm, and heavy caliber vacuum and low temperature parallel light tube can active temperature control, work temperature ∈ [20 DEG C, 25 DEG C].
Preferably, the bore of standard flat mirror is D2, wave aberration RMS ', then has D2 >=Φ 600mm, optical wavefront RMS ' ≤λ/15。
Preferably, before testing, Radar Receiver System optical axis is completed by standard flat mirror and heavy caliber vacuum and low temperature is flat The calibration of row light pipe system light axis consistency.
Preferably, before testing, heavy caliber vacuum and low temperature parallel light tube system focal plane mark is completed by standard flat mirror It is fixed, and by focal plane beam quality analysis device location and installation to the calibration position.
Preferably, optical axis translatable mirror group transfers the light source of two transmitting unthreaded hole transmittings of laser radar to heavy caliber Vacuum and low temperature parallel light tube light inlet converges on focal plane beam quality analysis device.
Preferably, optical axis translatable mirror group includes semi-permeable and semi-reflecting mirror and plane mirror, wherein the first reflecting mirror, Second reflecting mirror, third reflecting mirror, the 4th reflecting mirror, the 5th reflecting mirror are semi-permeable and semi-reflecting mirror and light shaft coaxle, and the 6th is anti- Penetrating mirror is plane mirror.
Preferably, focal plane beam quality analysis device, optical axis translatable mirror group, calibration vehicle, laser radar can be autonomous Temperature control, work temperature ' ∈ [20 DEG C, 25 DEG C];
Preferably, response spectrum 400nm -1700nm of focal plane beam quality analysis device, sensitive area size be greater than 15mm × 15mm, 20 μm of pixel size, and there is Back end data processing analysis, display function.
Compared with prior art, the present invention have it is following the utility model has the advantages that
1, device simply easily uses, high reliablity.
2, it can be realized and receive and dispatch the test of optical axis matching under laser radar vacuum and low temperature, there is high-precision, low temperature adaptability The features such as strong, solves the problems, such as that laser radar carries out high-precision transmitting-receiving optical axis matching test under vacuum and low temperature.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention, Objects and advantages will become more apparent upon:
Fig. 1 is the structure composition schematic layout pattern of device;
Fig. 2 is lidar transmit-receive system aperture and test device system aperture location schematic diagram.
Shown in figure: vacuum tank -- 1;Focal plane beam quality analysis device -- 2;Heavy caliber vacuum and low temperature parallel light tube -- 3;Mark Directrix plane mirror -- 4;Optical axis translatable mirror group -- 5;Calibration vehicle -- 6;Laser radar -- 7;Laser radar receiving aperture -- 81;Greatly Bore vacuum and low temperature parallel light tube incidence hole diameter -- 82;Laser radar transmitting aperture O--83;Laser radar transmitting aperture O ' -- 84。
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention Protection scope.
Lidar transmit-receive optical axis matching system safety testing device includes vacuum under a kind of vacuum and low temperature provided according to the present invention Tank 1, focal plane beam quality analysis device 2, heavy caliber vacuum and low temperature parallel light tube 3, standard flat mirror 4, optical axis translatable mirror group 5, calibration vehicle 6, laser radar 7;The focal plane beam quality analysis device 2 is located at the coke of heavy caliber vacuum and low temperature parallel light tube 3 At plane;Focal plane beam quality analysis device 2, heavy caliber vacuum and low temperature parallel light tube 3, standard flat mirror 4, optical axis translatable mirror Group 5, laser radar 7 are installed by testing process to calibration vehicle 6;Focal plane beam quality analysis device 2, heavy caliber vacuum and low temperature are parallel Light pipe 3, calibration vehicle 6, optical axis translatable mirror group 5, laser radar 7 are in vacuum tank.
Specifically, before testing, the reception systematic optical axis and heavy caliber vacuum of laser radar 7 are completed with standard flat mirror 4 The systematic optical axis consistency of low temperature parallel light pipe 3 is calibrated, and realizes the strictly parallel of test macro optical axis;Before testing, standard is flat Face mirror 4 completes the system focal plane calibration of heavy caliber vacuum and low temperature parallel light tube 3, and focal plane beam quality analysis device 2 is positioned It installs to the calibration position;
Specifically, in optical axis translatable mirror group, the 6th reflecting mirror A is semi-permeable and semi-reflecting mirror, the first reflecting mirror A ', second Reflecting mirror B, third reflecting mirror B ', the 4th reflecting mirror C, the 5th reflecting mirror C ' are plane mirror, and the 6th reflecting mirror A, One reflecting mirror A ', the second reflecting mirror B, third reflecting mirror B ' and the 4th reflecting mirror C light shaft coaxle, by two of laser radar 7 The light source of transmitting unthreaded hole transmitting, which is transferred, converges to focal plane beam quality analysis device to 3 light inlet of heavy caliber vacuum and low temperature parallel light tube On 2;
Specifically, two transmitting unthreaded holes of laser radar 7 are within the scope of heavy caliber vacuum and low temperature parallel light tube bore, and Reception system bore has overlapping, realization system under test (SUT) optical axis and test with the clear aperture of heavy caliber vacuum and low temperature parallel light tube 3 Equipment optical axis converges to focal plane beam quality analysis device 2 and carries out the dress school variance analysis of system under test (SUT) optical axis.
Specifically, the heavy caliber vacuum and low temperature parallel light tube bore D1 >=Φ 600mm, spectral coverage δ ∈ [400nm~ 1700nm], focal length f >=10000mm, rear cut-off distance Lf >=300mm, the λ of wave aberration RMS≤1/10, λ=0.6328 μm, and there is master Dynamic temperature control ability, work temperature ∈ [20 DEG C, 25 DEG C];
The bore of the standard flat mirror is D2 >=Φ 600mm, wave aberration RMS '≤λ/15;The focal plane light beam Mass analyzer, optical axis translatable mirror group, calibration vehicle, laser radar all have autonomous temperature control ability, work temperature ' ∈ [20 DEG C, 25 DEG C], avoid the difference variation acutely influence to test equipment precision under vacuum low-temperature environment;
Response spectrum 400nm~1700nm of focal plane beam quality analysis device, sensitive area size are greater than 15mm × 15mm, as 20 μm of vegetarian refreshments size, and there is Back end data processing analysis, display function.
Lidar transmit-receive optical axis matching system safety testing device under a kind of vacuum and low temperature of the invention is made below with reference to Fig. 1 It is described in further detail.
As shown in Figure 1, the embodiment of the invention provides lidar transmit-receive optical axis matchings under a kind of vacuum and low temperature to test Device, the device can meet laser radar to transmitting-receiving optical axis matching testing requirement under vacuum and low temperature, specifically include vacuum tank 1, focal plane beam quality analysis device 2, heavy caliber vacuum and low temperature parallel light tube 3, standard flat mirror 4, optical axis translatable mirror group 5, Calibration vehicle 6, laser radar 7.Wherein, focal plane beam quality analysis device 2 is located at 3 focal plane of heavy caliber vacuum and low temperature parallel light tube Place;Focal plane beam quality analysis device 2, heavy caliber vacuum and low temperature parallel light tube 3, standard flat mirror 4, optical axis translatable mirror group 5, Laser radar 7 is installed by testing process to calibration vehicle 6;Focal plane beam quality analysis device 2, heavy caliber vacuum and low temperature parallel light tube 3, calibration vehicle 6, optical axis translatable mirror group 5, laser radar 7 are in vacuum tank 1.
First calibration vehicle 6 is adjusted to horizontality outside tank on transfer cart, then laser radar 7 is placed on calibration vehicle 6 It is adjusted to horizontality, then standard flat mirror 4 is installed to calibration vehicle and is adjusted to horizontality, optical axis connects with laser radar 7 It is parallel to receive systematic optical axis;Horizontality, optical axis and standard are adjusted in the installation to calibration vehicle of heavy caliber vacuum and low temperature parallel light tube 3 The light shaft coaxle of plane mirror 4;4 auto-collimation of standard flat mirror is recycled to realize the focal plane of heavy caliber vacuum and low temperature parallel light tube 3 Position determines, and focal plane beam quality analysis device 2 is installed to the position and is adjusted to horizontality.Then, optical axis is translated anti- A, A penetrated in microscope group 5 ', B, B ', C be adjusted to horizontality, for by the light source of two of laser radar 7 transmitting unthreaded hole transmittings It is converged on focal plane beam quality analysis device 2 at turnover to 3 light inlet of heavy caliber vacuum and low temperature parallel light tube.
The light source of transmitting unthreaded hole O ' transmitting passes through A ', A, B, B ', C, C ' turnover to big after the booting of 7 emission system of laser radar At the incidence hole of bore vacuum and low temperature parallel light tube 3, focal plane beam quality is converged to by parallel light tube off-axis reflection system Light spot image is formed on the CCD photosurface of analyzer 2, after CCD detection unit collects image, the hot spot of acquisition is in X, Y-direction Gray scale maximum and minimum value pixel coordinate Xmin, Xmax, Ymin, Ymax, it is possible thereby to determine hot spot centroid (XCentroid, YCentroid) be
XCentroid=(Xmin+Xmax)/2
YCentroid=(Ymin+Ymax)/2
Because the digital image information of Image Acquisition is that light distribution corresponding with the power density distribution of Laser emission is close Cut phase is closed, and the gray value of each pixel discrete in image, the spot center coordinate (x of laser transmitting system O ' are shown as0,y0) Are as follows:
Wherein, x is the horizontal coordinate of pixel, Ix(x, y) is the gray value of the pixel, and y is vertical coordinate, Iy(x, y) is should The gray value of pixel.
Use the spot center position (x that emission system O ' can be obtained with upper type0,y0), and then calculated by rear end program The deviation of emission system O ' and reception systematic optical axis out.
Using above-mentioned similar method, after the booting of 7 emission system of laser radar the light source of transmitting unthreaded hole O transmitting by A, B, At B ', C, C ' turnover to the incidence hole of heavy caliber vacuum and low temperature parallel light tube 3, assembled by parallel light tube off-axis reflection system Light spot image is formed on to the CCD photosurface of focal plane beam quality analysis device 2, after CCD detection unit collects image, through later Platform data processing system obtains the spot center position of emission system O, calculates emission system O and receives the deviation of systematic optical axis Value.
As shown in Fig. 2, two transmitting unthreaded holes of laser radar are within the scope of heavy caliber vacuum and low temperature parallel light tube bore, And receive system bore have with the clear aperture of heavy caliber vacuum and low temperature parallel light tube it is overlapping.
In the present invention, optical axis matching measuring accuracy is received and dispatched up to 2 in order to realize ", heavy caliber vacuum and low temperature directional light 3 focal plane beam quality analysis device 2 of pipe, optical axis translatable mirror group 5, calibration vehicle 6, laser radar 7 all have autonomous temperature control ability, Operating temperature avoids the difference variation acutely influence to test equipment precision under vacuum low-temperature environment between 20 DEG C to 25 DEG C; Focal length f >=10000mm of heavy caliber vacuum and low temperature parallel light tube 3,20 μm of the pixel size of focal plane beam quality analysis device 2.
It is kept the invention is characterized in that the optical axis of heavy caliber vacuum and low temperature parallel light tube and laser radar receive systematic optical axis Unanimously, and two transmitting laser apertures are within the scope of the effective aperture of heavy caliber vacuum and low temperature parallel light tube, two transmitting systems Transmitting laser is imaged by optical axis translatable mirror group and heavy caliber vacuum and low temperature parallel light tube to focal plane beam quality system respectively On analyzer, the present invention is especially suitable for laser radars under cryogenic conditions to carry out transmitting-receiving optical axis matching test, has test essence The feature that degree is high, vacuum and low temperature is adaptable.
In the description of the present application, it is to be understood that term " on ", "front", "rear", "left", "right", " is erected at "lower" Directly ", the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside" is orientation based on the figure or position Relationship is set, description the application is merely for convenience of and simplifies description, rather than the device or element of indication or suggestion meaning are necessary It with specific orientation, is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned Particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, this not shadow Ring substantive content of the invention.In the absence of conflict, the feature in embodiments herein and embodiment can any phase Mutually combination.

Claims (10)

1. under a kind of vacuum and low temperature lidar transmit-receive optical axis match system safety testing device, which is characterized in that including vacuum tank (1), Focal plane beam quality analysis device (2), heavy caliber vacuum and low temperature parallel light tube (3), standard flat mirror (4), optical axis translatable mirror Group (5), calibration vehicle (6), laser radar (7);
The focal plane beam quality analysis device (2), heavy caliber vacuum and low temperature parallel light tube (3), standard flat mirror (4), optical axis are flat Move reflection microscope group (5), laser radar (7) is laid out in vacuum tank (1);
Focal plane beam quality analysis device (2) is located at heavy caliber vacuum and low temperature parallel light tube (3) focal plane;
Focal plane beam quality analysis device (2), heavy caliber vacuum and low temperature parallel light tube (3), standard flat mirror (4), optical axis translation are anti- Penetrate microscope group (5), laser radar (7) is installed by testing process on calibration vehicle (6).
2. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 1, which is characterized in that Two transmitting unthreaded holes of laser radar (7) are within the scope of the bore of heavy caliber vacuum and low temperature parallel light tube (3), and radar receives System bore has overlapping with the clear aperture of heavy caliber vacuum and low temperature parallel light tube (3).
3. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 1, which is characterized in that The bore of heavy caliber vacuum and low temperature parallel light tube (3) is D1, spectral coverage δ, focal length f, and rear cut-off distance Lf, wave aberration RMS then have D1 >=Φ 600mm, δ ∈ [400nm~1700nm], f >=10000mm, Lf >=300mm, the λ of RMS≤1/10, λ=0.6328 μm, and Heavy caliber vacuum and low temperature parallel light tube (3) can active temperature control, work temperature ∈ [20 DEG C, 25 DEG C].
4. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 1, which is characterized in that The bore of standard flat mirror (4) is D2, wave aberration RMS ', then has D2 >=Φ 600mm, optical wavefront RMS '≤λ/15.
5. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 3, which is characterized in that Before testing, Radar Receiver System optical axis and heavy caliber vacuum and low temperature parallel light tube (3) system are completed by standard flat mirror (4) Light axis consistency calibration.
6. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 3, which is characterized in that Before testing, the calibration of heavy caliber vacuum and low temperature parallel light tube (3) system focal plane is completed by standard flat mirror (4), and will be burnt Face beam quality analysis device (2) location and installation is to the calibration position.
7. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 1, which is characterized in that Optical axis translatable mirror group (5) transfers the light source of two transmitting unthreaded hole transmittings of laser radar (7) to heavy caliber vacuum and low temperature Parallel light tube (3) light inlet converges on focal plane beam quality analysis device (2).
8. matching system safety testing device according to lidar transmit-receive optical axis under claim 7 vacuum and low temperature, which is characterized in that optical axis is flat Moving reflection microscope group (5) includes semi-permeable and semi-reflecting mirror and plane mirror, wherein the first reflecting mirror, the second reflecting mirror, third reflection Mirror, the 4th reflecting mirror, the 5th reflecting mirror are semi-permeable and semi-reflecting mirror and light shaft coaxle, and the 6th reflecting mirror is plane mirror.
9. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 1, which is characterized in that Focal plane beam quality analysis device (2), optical axis translatable mirror group (5), calibration vehicle (6), laser radar (7) can be from master controls Temperature, work temperature ' ∈ [20 DEG C, 25 DEG C].
10. lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature according to claim 1, feature exists In response spectrum 400nm -1700nm of focal plane beam quality analysis device (2), sensitive area size is greater than 15mm × 15mm, pixel 20 μm of size of point, and there is Back end data processing analysis, display function.
CN201910683466.9A 2019-07-26 2019-07-26 Lidar transmit-receive optical axis matches system safety testing device under vacuum and low temperature Pending CN110515059A (en)

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CN111398937A (en) * 2020-04-07 2020-07-10 广东博智林机器人有限公司 Optical performance adjusting device and optical performance adjusting method
CN113296083A (en) * 2021-06-18 2021-08-24 上海机动车检测认证技术研究中心有限公司 Laser radar target simulation test system
WO2023220415A1 (en) * 2022-05-13 2023-11-16 The University Of Chicago Optical cavity array

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WO2023220415A1 (en) * 2022-05-13 2023-11-16 The University Of Chicago Optical cavity array

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Application publication date: 20191129