CN110501328A - Grating drive module and control method for single-channel scanning ICP spectrometer - Google Patents
Grating drive module and control method for single-channel scanning ICP spectrometer Download PDFInfo
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- CN110501328A CN110501328A CN201910941444.8A CN201910941444A CN110501328A CN 110501328 A CN110501328 A CN 110501328A CN 201910941444 A CN201910941444 A CN 201910941444A CN 110501328 A CN110501328 A CN 110501328A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
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Abstract
The present invention relates to a kind of grating drive modules and control method for single-channel scanning ICP spectrometer, including fixed shell and control unit, torque motor is set in set casing body, plane grating and Circular gratings are set on torque motor, reading head is set on fixed shell；Control method, S1, control unit obtain the target position of plane grating；Its physical location is sent to control unit by S2, plane grating；S3, control unit cook up optimal path；S4, control unit staring torque motor are simultaneously rotated according to optimal path；S5, torque motor are shut down.By the way that original Mechanical Driven to be replaced with to the driving of torque motor, mechanical wear is reduced to influence rotation precision；And the characteristics of torque motor itself, it can be realized the quick response and quickly analysis of machine, improve the rotation precision of ICP spectrometer, promote its service life.
Description
Technical field
The present invention relates to ICP spectrometer manufacturing technology field, more particularly, to a kind of for single-channel scanning ICP spectrometer
Grating drive module and control method.
Background technique
The optical system of sweep type ICP emission spectrometer has Ebert-Fastic and two kinds of Czerny-Turner, and most
Plane grating sweep type ICP emission spectrometer all uses Czerny-Turner optical system.According to Czerny-Turner optics
The principle of system, in order to reach the analysis spectral line after looking for light splitting, it is necessary to grating angle be made to make corresponding accurate variation.In order to mention
The precision of high grating turntable rotation, there are two types of common grating rotating platform rotating manners: thread screw transmission mechanism mode
With worm and gear driving method.Although the positioning accuracy of both grating driving mechanisms is attained by being not more than for instrument demand
0.001nm, but they belong to conventional mechanical driving device, are to sacrifice velocity of rotation to reach rotation precision, Er Qiechang
Phase using the influence of mechanical wear is also suffered from, limit the analysis speed of instrument, especially analytical element it is excessive in the case where.
In order to improve the analysis speed of instrument, needs in the case where guaranteeing grating rotational positioning precision, find a kind of new
Be capable of quickly rotating grating driving mechanism, it is desirable to do not use conventional mechanical driving device, eliminate mechanical wear
It influences.
Summary of the invention
Technical problem to be solved by the invention is to provide one kind can eliminate mechanical wear and can quick response be used for
The grating drive module and control method of single-channel scanning ICP spectrometer.
The technical scheme adopted by the invention to solve the technical problem is that: a kind of light for single-channel scanning ICP spectrometer
Grid drive module, including fixed shell and control unit, are arranged torque motor, the torque in the set casing body
Plane grating and Circular gratings are set on motor, the reading head with Circular gratings cooperation is set on the fixation shell, it is described
Torque motor driving plane grating and Circular gratings rotate synchronously；Reading head reads the angle feed-back of Circular gratings rotation to controlling list
Member, the start and stop of control unit control moment motor.
Further specifically, the torque motor uses rimless torque motor, the plane grating and Circular gratings are equal
It is set on the rotor of rimless torque motor, the stator of the rimless torque motor is fixed on fixed shell.
Further specifically, the plane grating is fixed on the rotor of rimless torque motor by grating fixed station.
Further specifically, the blind flange that the fixation shell includes shell ontology, is set in shell bodies top, in institute
Through-hole is opened up in the middle part of the blind flange stated, the grating fixed station forms gap across through-hole and through-hole.
Further specifically, the shell ontology includes the big cylindrical body of bottom, the small column being set on big cylindrical body
Body and the cavity being set to inside big cylindrical body and small cylinder, the rimless torque motor, plane grating, Circular gratings with
And in reading head setting cavity, step is formed between the big cylindrical body and small cylinder, is arranged on the step
Fixation hole, the fixation hole are bolt-connected on ICP spectrometer.
Further specifically, an annular groove is arranged in the cavity, the stator card of the rimless torque motor is set
In a ring groove.
Further specifically, the rotor of the rimless torque motor is annular in shape, start screw thread on the inside of the rotor,
Fixing piece is set on screw thread, and the grating fixed station is fixed on fixing piece top, and the Circular gratings are fixed on fixing piece
Bottom end.
A kind of control method based on the above-mentioned grating drive module for single-channel scanning ICP spectrometer,
S1, external command are input to control unit, and control unit analyzes command adapted thereto, obtain the mesh of plane grating
Cursor position；
Its physical location is sent to control unit by S2, plane grating；
The physical location and target position of S3, control unit according to plane grating cook up torque motor rotation most
Shortest path；
S4, control unit issue command signal to torque motor, and staring torque motor is simultaneously rotated according to optimal path；
S5, after torque motor turns to target position, control unit control moment motor stopping.
Further specifically, the path cooked up in step s3 is two, control unit selects rotation time least
For optimal path.
Further specifically, reading head reads the turned position of Circular gratings and feeds back to the location information in step s 5
Control unit, control unit judge whether the location information is target position, stop if target position, that is, control moment motor
Movement, if not target position control unit is failure to actuate.
The beneficial effects of the present invention are: by the driving that original Mechanical Driven is replaced with to the torque motor in this case,
Mechanical wear is reduced to influence rotation precision；And there is torque motor itself quick start/stopping and high acceleration to provide height
Torque ratio of inertias, low-speed running precision are high and the features such as without deceleration system bring gash spacing error, can be realized the quick of machine
Response and quickly analysis, improve the rotation precision of ICP spectrometer, promote its service life.
Detailed description of the invention
Fig. 1 is schematic cross-sectional view of the invention；
Fig. 2 is control method block diagram of the present invention.
In figure: 1, fixed shell；2, torque motor；3, Circular gratings；4, reading head；5, grating fixed station；6, fixing piece；7,
Bearing；11, shell ontology；12, blind flange；21, stator；22, rotor；111, big cylinder；112, small column.
Specific embodiment
The present invention is explained in detail with reference to the accompanying drawing.
A kind of grating drive module for single-channel scanning ICP spectrometer as shown in Figure 1, including fixed shell 1 and collection
At in the control unit (not shown) in ICP spectrometer, which is a part of ICP spectrometer control system, in institute
Torque motor 2 is set in the fixation shell 1 stated, plane grating and Circular gratings 3 are set on the torque motor 2, described
Fixation shell 1 on the reading head 4 that cooperates with Circular gratings 3 of setting, the torque motor 2 drives plane grating and Circular gratings 3
It rotates synchronously；Reading head 4 reads the angle feed-back of the rotation of Circular gratings 3 to control unit, and control unit control moment motor 2 opens
Dynamic and stopping.
Based on above structure, when driving plane grating rotation, control unit is realized by control moment motor 2, such as Fig. 2
Its shown rate-determining steps are as follows:
S1, external command are input to control unit, and control unit analyzes command adapted thereto, obtain the mesh of plane grating
Cursor position；External command input can be carried out by keyboard, mouse and touch screen, and according to the external command of input, control is single
Member is analyzed by embedded software, obtains the final position i.e. target position of plane grating.
S2, carry out target position determine while, its physical location is sent to control unit, actual bit by plane grating
The confirmation set can be by two ways, the first judges that this needs to control by the angle relatively rotated to torque motor 2
The specific value that unit storage inside torque motor 2 processed rotates every time, by the way that relative position is calculated；Pass through reading second
First 4 cooperate with Circular gratings 3, and reading head 4 directly reads the specific location of Circular gratings 3 and feed back to control unit, and reading head 4 can be with
Real-time reading position can also be excited by control unit and read 3 relative position of Circular gratings.
The physical location and target position of S3, control unit according to plane grating cook up the rotation of torque motor 2 most
Shortest path；The rotation of torque motor 2 has two paths, rotates clockwise and rotates counterclockwise, and control unit calculates two paths
The specific time of rotation, according to the resulting specific time is calculated, there are two types of routing forms, is started according to torque motor 2
The minimum time is spent to determine to stopping, the first calculates the resulting specific time greater than the starting of torque motor 2 when two paths
To when stopping spending the minimum time, the two paths specific time is selected to spend least path for optimal path, and when two roads
When diameter takes time the same, control unit judges that two paths are optimal path and randomly select an implementation；Second, when
Wherein one when calculating resulting specific time and being less than torque motor 2 and start to stopping and spend the minimum time in two paths, control
Unit selection processed takes time most paths as optimal path.
S4, after selecting optimal path, control unit issue command signal to torque motor 2, staring torque motor 2 is simultaneously
It is rotated according to optimal path；
S5, after torque motor 2 turns to target position, control unit control moment motor 2 shut down；According in step S2
The mode of two kinds of control moment motors 2, it is corresponding there are two types of the mode that control torque motor 2 rotates, in the first control unit
The angle that portion's storage torque motor 2 rotates is controlled；Second reading head 4 reads the turned position of Circular gratings 3 and by the position
Confidence breath feeds back to control unit, and control unit judges whether the location information is target position, controls if target position
2 stop motion of torque motor, if not target position control unit is failure to actuate.
Further, torque motor 2 described above uses rimless torque motor, can be provided more using rimless torque motor
More device spaces, the convenient utilization to equipment inner space, the plane grating and Circular gratings 3 are fixed on rimless torque electricity
On the rotor 22 of machine, the stator 21 of the rimless torque motor is fixed on fixed shell 1；Meanwhile for convenience to rimless
The output of torque motor stator 21 fixed and facilitate rotation, the fixation shell 1 include shell ontology 11, are set to shell ontology
Blind flange 12 on 11 tops, opens up through-hole in the middle part of the blind flange 12, the grating fixed station 5 pass through through-hole and with
Gap is formed between through-hole, the rotor driving rotation of grating fixed station 5 will not collide with gap, rotate smooth；It is basic herein
The upper shell ontology 11 includes the big cylindrical body 111 of bottom, the small cylinder 112 being set on big cylindrical body 111 and sets
Be placed in big cylindrical body 111 and the cavity inside small cylinder 112, the rimless torque motor 2, plane grating, Circular gratings 3 with
And reading head 4 is arranged in cavity, while the hole passed through for cable is opened up on shell ontology 11, for determining to rimless torque motor
Son 21 powers and reading head 4 is detected that 3 location information of Circular gratings is exported to control unit, in the big cylindrical body 111
Step is formed between small cylinder 112, fixation hole is set on the step, the fixation hole is bolt-connected to
On ICP spectrometer, conveniently it is fixed.
Further, in order to which rimless torque motor 2 to be fastened in the cavity, therefore one annular of setting in the cavity
The stator 21 of slot, the rimless torque motor is fastened in annular groove, and the through-hole of blind flange 12, which is less than at the top of cavity, to be limited
Rotor 22 processed is run out of out of cavity.The rotor 22 of the rimless torque motor is annular in shape, starts on the inside of the rotor 22
Fixing piece 6 is arranged in screw thread on screw thread, and the grating fixed station 5 is fixed on 6 top of fixing piece, and the Circular gratings 3 are fixed
In the bottom end of fixing piece 6, it is supported by bearing 7 between fixing piece 6 and shell ontology 11 and guarantees its spin stabilization.
To sum up, original mechanical structure is substituted by the setting of above structure, reduces machinery by using torque motor 2
Friction improves its service life while improving rotation precision；The automatic control realized on the basis of this structure by system,
Its optimal path is selected by embedded software, realizes and quickly moves to target position, rotation is reduced and is taken time, set
It is standby it is stable on the basis of improve efficiency.
It is emphasized that: the above is only presently preferred embodiments of the present invention, not make in any form to the present invention
Limitation, any simple modification, equivalent change and modification to the above embodiments according to the technical essence of the invention,
All of which are still within the scope of the technical scheme of the invention.
Claims (10)
1. a kind of grating drive module for single-channel scanning ICP spectrometer, including fixed shell (1) and control unit,
It is characterized in that, torque motor (2) are arranged in the fixation shell (1), and plane grating is arranged on (2) in the torque motor
And Circular gratings (3), the reading head (4) with Circular gratings (3) cooperation, the torque are set on the fixation shell (1)
Motor (2) drives plane grating and Circular gratings (3) to rotate synchronously；Reading head (4) reads the angle feed-back of Circular gratings (3) rotation extremely
Control unit, the start and stop of control unit control moment motor (2).
2. the grating drive module according to claim 1 for single-channel scanning ICP spectrometer, which is characterized in that described
Torque motor (2) use rimless torque motor, the plane grating and Circular gratings (3) are all set in rimless torque motor
On rotor (22), the stator (21) of the rimless torque motor is fixed on fixed shell (1).
3. the grating drive module according to claim 2 for single-channel scanning ICP spectrometer, which is characterized in that described
Plane grating be fixed on the rotor (22) of rimless torque motor by grating fixed station (5).
4. the grating drive module according to claim 3 for single-channel scanning ICP spectrometer, which is characterized in that described
Fixation shell (1) include shell ontology (11), the blind flange (12) that is set on shell ontology (11) top, in the blind flange
(12) middle part opens up through-hole, and the grating fixed station (5) forms gap across through-hole and through-hole.
5. the grating drive module according to claim 4 for single-channel scanning ICP spectrometer, which is characterized in that described
Shell ontology (11) include the big cylindrical body (111) of bottom, the small cylinder (112) being set on big cylindrical body (111) and
It is set to big cylindrical body (111) and small cylinder (112) internal cavity, the rimless torque motor, plane grating, circle light
In grid (3) and reading head (4) setting cavity, platform is formed between the big cylindrical body (111) and small cylinder (112)
Rank, is arranged fixation hole on the step, and the fixation hole is bolt-connected on ICP spectrometer.
6. the grating drive module according to claim 5 for single-channel scanning ICP spectrometer, which is characterized in that in institute
One annular groove is set in the cavity stated, and the stator (21) of the rimless torque motor is fastened in annular groove.
7. the grating drive module according to claim 2 for single-channel scanning ICP spectrometer, which is characterized in that described
Rimless torque motor rotor (22) annularly, start screw thread on the inside of the rotor (22), be arranged on screw thread and fix
Part (6), the grating fixed station (5) are fixed on fixing piece (6) top, and the Circular gratings (3) are fixed on fixing piece (6)
Bottom end.
8. a kind of based on the grating drive module for being used for single-channel scanning ICP spectrometer described in any one of claim 1~7
Control method, which is characterized in that
S1, external command are input to control unit, and control unit analyzes command adapted thereto, obtain the target position of plane grating
It sets；
Its physical location is sent to control unit by S2, plane grating；
The physical location and target position of S3, control unit according to plane grating cook up the optimal of torque motor (2) rotation
Path；
S4, control unit issue command signal to torque motor, and staring torque motor (2) is simultaneously rotated according to optimal path；
S5, after torque motor (2) turns to target position, control unit control moment motor (2) shut down.
9. the control method of the grating drive module according to claim 8 for single-channel scanning ICP spectrometer, feature
It is, the path cooked up in step s3 is two, and control unit selects rotation time least for optimal path.
10. the control method of the grating drive module according to claim 8 for single-channel scanning ICP spectrometer, special
Sign is that reading head (4) reads the turned position of Circular gratings (3) and the location information is fed back to control list in step s 5
Member, control unit judge whether the location information is target position, stop fortune if target position, that is, control moment motor (2)
It is dynamic, if not target position control unit is failure to actuate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910941444.8A CN110501328B (en) | 2019-09-30 | 2019-09-30 | Grating driving module for single-channel scanning ICP spectrometer and control method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910941444.8A CN110501328B (en) | 2019-09-30 | 2019-09-30 | Grating driving module for single-channel scanning ICP spectrometer and control method |
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| CN110501328A true CN110501328A (en) | 2019-11-26 |
| CN110501328B CN110501328B (en) | 2024-07-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114603369A (en) * | 2022-01-28 | 2022-06-10 | 西门子（中国）有限公司 | Numerical control machine tool rotary table system control method, numerical control system and computer program product |
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| CN203509913U (en) * | 2013-10-25 | 2014-04-02 | 成都与俱科技有限公司 | Numerical control grinder workpiece main shaft |
| CN109506560A (en) * | 2018-12-12 | 2019-03-22 | 上海卫星装备研究所 | Round induction synchrometer dynamic testing angle precision caliberating device and its scaling method |
| CN109724636A (en) * | 2018-12-26 | 2019-05-07 | 中国科学院长春光学精密机械与物理研究所 | One-dimensional turntable |
| CN210923483U (en) * | 2019-09-30 | 2020-07-03 | 江苏天瑞仪器股份有限公司 | Grating driving module for single-channel scanning ICP spectrometer |
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2019
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| CN102416566A (en) * | 2010-09-28 | 2012-04-18 | 北方工业大学 | Static pressure air suspension direct drive turntable |
| CN103048071A (en) * | 2012-12-12 | 2013-04-17 | 北方工业大学 | Device and method for monitoring dynamic torque of frameless torque motor in suspension state |
| CN203509913U (en) * | 2013-10-25 | 2014-04-02 | 成都与俱科技有限公司 | Numerical control grinder workpiece main shaft |
| CN109506560A (en) * | 2018-12-12 | 2019-03-22 | 上海卫星装备研究所 | Round induction synchrometer dynamic testing angle precision caliberating device and its scaling method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114603369A (en) * | 2022-01-28 | 2022-06-10 | 西门子（中国）有限公司 | Numerical control machine tool rotary table system control method, numerical control system and computer program product |
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