CN110501064A - A kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor - Google Patents
A kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor Download PDFInfo
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- CN110501064A CN110501064A CN201910836999.6A CN201910836999A CN110501064A CN 110501064 A CN110501064 A CN 110501064A CN 201910836999 A CN201910836999 A CN 201910836999A CN 110501064 A CN110501064 A CN 110501064A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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Abstract
A kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor, including shell, shell left and right ends are equipped with a pair of coaxial through-hole A, through-hole B, and reflection cavity for focusing is equipped between through-hole A and through-hole B；The axis of through-hole A and through-hole B and the focal length of the interior parabolic surface of reflection cavity for focusing are coaxial, for no diaphragm-vibrating type optics sonic sensor provide it is a kind of can focused sound waves energy reflective focus device, the focal position that sound wave is converged to reflection cavity for focusing, is modulated to by the light beam region air refraction of cavity to a greater extent.And devise with transmission-type, it is reflective and with other devices integrate structure, be suitable for a variety of no vibrating diaphragm sound wave sensing solutions.
Description
Technical field
The invention belongs to sensor technical fields, are related to a kind of reflective sound wave focus device, and in particular to one kind is used for
Reflective sound wave focus device in optics sonic sensor of the no diaphragm-vibrating type based on air refraction dynamic measurement.
Background technique
Sound wave is that there is the minute-pressure of frequency and amplitude attribute dynamic to believe as a kind of mechanical wave propagated in certain medium
Number, sonic sensor is to be converted to detectable physical quantity, then pass through these using by this Dynamic Signal of sound in medium
Physical quantity restores a kind of device of voice signal at that time.
Currently, sonic sensor is roughly divided into following a few classes: one, piezo-electric type sonic sensor according to measuring principle.It utilizes
The piezoelectric effect of piezo-electric crystal can be made into piezoelectric acoustic transducer, and wherein piezo-electric crystal a pole-face is connected with diaphragm.When
Acoustic pressure acts on diaphragm when making its vibration, and diaphragm drives piezo-electric crystal to generate mechanical oscillation, so that piezo-electric crystal is generated with sound
The voltage pressing size variation and changing, thus completion sound --- electric signal conversion.Two, condenser type sonic sensor.By metal film
The compositions such as piece, shell and fixed electrode.Diaphragm forms a spacing as electrode a piece of light and that elasticity is good, with fixed electrode
The variable condenser of very little.When diaphragm vibrates under sound wave effect, change with the interelectrode distance of fixation, so as to cause
The variation of capacitance.Three, electromagnetism transform type sonic sensor.Magnetic circuit is formed by magnet and soft iron, magnetic field concentration is in magnet stem
In the air gap formed with soft iron.Vibrating diaphragm is housed in the front of soft iron, has coil thereon, coil covers upper in magnet stem
In high-intensity magnetic field.When vibrating diaphragm insonates, coil cutting magnetic line is driven, induced electromotive force is generated, thus by sound
Signal is changed into electric signal output.Four, optical fiber interference type sonic sensor.This device is mostly optical fiber extrinsic type Fabry-
Perot cavity configuration.The inner surface of the fiber end face and diaphragm that cut flat with constitutes interference cavity, when extraneous acoustical signal acts on diaphragm,
It will cause the vibration of diaphragm, so as to cause change of cavity length.It is realized by the detection to interference light intensity caused by change of cavity length to sound
The demodulation of wave signal.
Above-mentioned a few class sonic sensors depend on mechanical membrane structure more, and the Hz-KHz of diaphragm, the linearity, sensitivity are determined
The performance of sonic sensor is determined, therefore sensor performance is limited to the selection of diaphragm material.Sensor performance is improved at present
Mode can only be realized by using new material and new process, and diaphragm type sonic sensor has long-term practical diaphragm machinery
Performance decline, the risk that sensor performance is degenerated.
No diaphragm-vibrating type optics sound wave sensing technology overcomes the technology that above-mentioned acoustic wave sensor structure relies on mechanical diaphragm more
Difficult point, working sensor mechanism are to monitor air refraction caused by sound wave acoustic pressure using optical means to change, eventually by
The detection to sound wave is realized in optical detection, and frequency response is not only restricted to the mechanical structure and material property of diaphragm, therefore responds
It is flat and have the characteristics that wide band.Such as 2016, Austrian XARION laser acoustic company had developed micromation high-performance
Fabry-Perot type optical fiber sonic transducer.Product frequency response range 10 Hz~1 MHz in air at present, dynamic model
The dB of 50 dB~180 is enclosed, maximum probe acoustic pressure is up to 100 kPa.
Summary of the invention
In order to promote the sensitivity of no diaphragm-vibrating type optics sonic sensor, the object of the present invention is to provide one kind for no vibration
The reflective sound wave focus device of membrane type optics sonic sensor, solve in the prior art sensors with auxiliary electrode due to sound cause reflect
Rate changes the smaller problem for causing transducer sensitivity lower, which can be improved the sensitive of no diaphragm-vibrating type optics sonic sensor
Degree.
To achieve the goals above, the technical solution adopted by the present invention is that:
A kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor, including shell, shell left and right ends
Reflection cavity for focusing is equipped with equipped with a pair of coaxial through-hole A, through-hole B, between through-hole A and through-hole B；The axis of through-hole A and through-hole B with
The focal length for reflecting the interior parabolic surface of cavity for focusing is coaxial；
It is curved surface inside the reflection cavity for focusing；
Depending on the through-hole A and through-hole B dimensional standard are according to optical fiber collimator apparent size, through-hole diameter 3.4mm, be for
The transmitted light of optical fiber collimator can efficient coupling can be considered because optical fiber collimator transmitted light beam diameter and the angle of divergence are minimum
The through-bore axis is that light beam is online by institute；
The reflection cavity for focusing focal length be overlapped online with through-hole A with the light beam of through-hole B by line, reflect the focal length of cavity for focusing
For 3.4mm.
The right side of the reflection cavity for focusing is using polishing process or plating high reflection film.
The shell left and right ends are equipped with a pair of coaxial through-hole A, through-hole B, and reflection is equipped between through-hole A and through-hole B
Cavity for focusing；The axis of through-hole A and through-hole B and the focal length of the interior parabolic surface of reflection cavity for focusing are coaxial, and reflection cavity for focusing is equipped with
Air gap etalon keyway, through-hole A and through-hole B are the focal position that axis is reflection cavity for focusing, and are air gap etalon key
Groove center axial location.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment of the present invention 1.
Fig. 2 is the structural schematic diagram of the embodiment of the present invention 4.
Wherein, 1 is shell；2 be through-hole A；3 be reflection cavity for focusing；4 be through-hole B；5 be air gap etalon keyway.
Fig. 3 is the section simulation drawing that the embodiment of the present invention 1 reflects cavity for focusing focal plane at 20 kHz.
Fig. 4 be in the embodiment of the present invention 1 sound source away from 5 mm of focal plane at, cavity for focusing central axis is reflected under different frequency
Total acoustic pressure field pattern.
Specific embodiment
The present invention is further discussed below with reference to the accompanying drawings and embodiments, but the present invention is not limited to following embodiment.
As shown in Figure 1, a kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor, including shell
1, which is characterized in that 1 left and right ends of shell are equipped with a pair of coaxial through-hole A2, through-hole B4, are equipped between through-hole A2 and through-hole B4
Reflect cavity for focusing 3；The axis of through-hole A2 and through-hole B4 and the focal length of the interior parabolic surface of reflection cavity for focusing 3 are coaxial；
It is curved surface inside the reflection cavity for focusing 3；
Depending on the through-hole A2 and through-hole B4 dimensional standard is according to optical fiber collimator apparent size, through-hole diameter 3.4mm is
For optical fiber collimator transmitted light can efficient coupling, because optical fiber collimator transmitted light beam diameter and the angle of divergence are minimum, visually
It is that light beam is online by institute for the through-bore axis；
Reflection 3 focal length of cavity for focusing be overlapped online with through-hole A2 with the light beam of through-hole B4 by line, reflect cavity for focusing
Focal length is 3.4mm.
The right side of the reflection cavity for focusing 3 is using polishing process or plating high reflection film.
As shown in Fig. 2, 1 left and right ends of shell are equipped with a pair of coaxial through-hole A2, through-hole B4, through-hole A2 and through-hole
Reflection cavity for focusing 3 is equipped between B4；The axis of through-hole A2 and through-hole B4 and the focal length of the interior parabolic surface of reflection cavity for focusing 3 are same
Axis, reflection cavity for focusing 3 are equipped with air gap etalon keyway 5, and through-hole A2 and through-hole B4 are that axis is the focal length for reflecting cavity for focusing 3
Position, and be 5 axial centerline of air gap etalon keyway.
Embodiment 1
In Fig. 1, the reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor of the present embodiment by shell 1,
Through-hole A2, reflection cavity for focusing 3, through-hole B4 are constituted.
The 1 overall appearance shape of shell of the present embodiment is cuboid, to avoid sound wave that from may bringing vibration to sensor
It influences, using rigid stainless steel material.It is a pair of alignment device (model that collocation uses at the both ends of shell 1；Thorlabs 50-
1550A-APC), according to a pair of coaxial through-hole A2 of collimator official size design, 4, diameter is that 3.4mm. defines this to coaxial
The axis of through-hole is the focal position for reflecting cavity for focusing 3, when according to a pair of alignment device, operating distance is 15mm in use,
Coupling efficiency highest, design the cavity length be 15mm, width 13.6mm, focal length 3.4mm, i.e., focal length chamber radius be 6.8mm.
Due to improving sound wave focusing capability present invention employs this cavity focused with the reflection of paraboloid formula.Have in this kind
Transmittance structure without in vibrating diaphragm optics sonic sensor, transducer sensitivity can get a promotion.
Embodiment 2
In the present embodiment, Fabry-Perot-type cavity catoptric arrangement is constructed using single collimator.Cancel setting for right end wall through-hole B4
Meter, is changed to solid.Polishing process is used to the right side of reflection cavity for focusing 3, to reach high reflectance.Other components and zero
The matching relationship of component is same as Example 1.
Through-hole A2 and collimator cooperate, and collimator light exit facet is the first reflecting surface of Fabry-Perot-type cavity, use polishing
3 right side of cavity for focusing of technique is second reflecting surface.The Fabry-Perot-type cavity knot with sound reflecting focusing function is constituted with this
Structure.Since the present embodiment uses this cavity focused with the reflection of paraboloid formula, sound wave focusing capability is improved, so that base
It is improved in the catoptric arrangement of Fabry-Perot interference principle without diaphragm-vibrating type photo-acoustic sound transducer sensitivity.
Embodiment 3
In the present embodiment, the right side processing technology for changing reflection cavity for focusing 3 is gold-plated film, which has high reflectance.Its
The matching relationship of his components and components is same as Example 2.
Embodiment 4
In the present embodiment, be realize based on Fabry-Perot air gap etalon without vibrating diaphragm optics sonic sensor.Design
Parabolic reflector formula sound focusing device with sound focusing effect as shown in Figure 2.By shell 1, through-hole A2, reflection cavity for focusing 3,
Air gap etalon keyway 5 and through-hole B4 are constituted.
Wherein, 1 overall appearance of shell, shape, size of the present embodiment and material are same as Example 1.Its a pair of of through-hole
A2,4 are through-hole designed by collimator in cooperation embodiment 1.Its dimensional fits information is in the same manner as in Example 1: through-hole diameter
For 3.4mm, it is the focal length for reflecting cavity for focusing 3 that the operating distance 15mm. axis to coaxial through-hole A2,4 is divided between two collimators
Position, while also 5 axial centerline of air gap etalon keyway thus.With air gap etalon having a size of 8mm × 6mm ×
Air gap etalon keyway designed by 3mm and the etalon are matching relationship.It is designed and is reflected according to each element size as a result,
3 focal length of cavity for focusing is 2.2mm, i.e., focal length chamber radius is that 4.4mm. the present embodiment will reflect cavity for focusing and air gap etalon designs
In a device, no diaphragm-vibrating type optics sonic sensor ensure that while improving sensitivity, sensor structure is also reachable
To compact and integrated feature.
In order to verify beneficial effects of the present invention, inventor simulates embodiment 1 to the work of sound field using finite element software
With.It is carried out using the reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor of design processing in embodiment 1
Software simulation, simulation emphasis is to probe into the reflection cavity for focusing to the ability of sound focusing.Its analog case is as follows:
Simulation of acoustic field software: COMSOL multiple physical field simulation software, software version 5.3a.
In a model, the point sound source that power is 0.5W is fixed on to the one side that cavity for focusing is reflected relative to the embodiment of the present invention 1, position
In on the extended line of reflection cavity for focusing central symmetry axes.Control input sound source distance is that 5mm is constant, and setting frequency step is
1000Hz, frequency rise to 20000Hz by 10000Hz, simulate reflection cavity for focusing focal length online total acoustic pressure field distribution.Fig. 3
It show reflection cavity for focusing COMSOL software to simulate the sonic pressure field of integral device, it is seen that be all device cavity in entire sound field
Interior sound pressure level is maximum.Comparative analysis numerically is carried out to the analog result, under different frequency of source, by axis, that is, focal length position
After setting place's acoustic pressure numerical value acquisition, acoustic pressure distributing line at cavity for focusing focal position can must be reflected, as shown in Figure 4.For different sound sources
Frequency is all that acoustic pressure is maximum within the scope of reflection cavity for focusing.The reflective sound wave cavity for focusing is demonstrated to the focusing energy of sound wave
Power.
Claims (4)
1. a kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor, including shell (1), feature exists
Be equipped with a pair of coaxial through-hole A(2 in, shell (1) left and right ends), through-hole B(4), through-hole A(2) and through-hole B(4) between be equipped with
It reflects cavity for focusing (3)；Through-hole A(2) it is coaxial with the focal length of the axis and the interior parabolic surface of reflection cavity for focusing (3) of through-hole B(4)；
It is curved surface inside the reflection cavity for focusing (3):
The through-hole A(2) with through-hole B(4) dimensional standard according to optical fiber collimator apparent size depending on, through-hole diameter is
3.4mm, be for optical fiber collimator transmitted light can efficient coupling, because of optical fiber collimator transmitted light beam diameter and angle of divergence pole
It is small, it can be considered that the through-bore axis is that light beam is online by institute.
2. a kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor according to claim 1,
It is characterized in that, described reflection cavity for focusing (3) focal length be overlapped online with through-hole A(2) with the light beam of through-hole B(4) by line,
The focal length for reflecting cavity for focusing is 3.4mm.
3. a kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor according to claim 1,
It is characterized in that, another implementation structure are as follows: cancel through-hole B(4) design, be changed to it is solid, the reflection cavity for focusing (3) of Yu Suoshu
Right side reflectivity is improved using polishing process or metal-coated films.
4. a kind of reflective sound wave focus device for no diaphragm-vibrating type optics sonic sensor according to claim 1,
It is characterized in that, another implementation structure are as follows: shell (1) left and right ends are equipped with a pair of coaxial through-hole A(2), through-hole B
(4), through-hole A(2) and through-hole B(4) between be equipped with reflection cavity for focusing (3)；Through-hole A(2) it is poly- with the axis of through-hole B(4) and reflection
The focal length of the interior parabolic surface of burnt chamber (3) is coaxial, and reflection cavity for focusing (3) is equipped with air gap etalon keyway (5), through-hole A(2)
It is the focal position that axis is reflection cavity for focusing (3) with through-hole B(4), and is air gap etalon keyway (5) central axis position
It sets.
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Cited By (1)
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|---|---|---|---|---|
| CN113029217A (en) * | 2021-03-05 | 2021-06-25 | 上海科技大学 | Optical fiber acoustic sensing system based on Fabry-Perot etalon and optical microphone |
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Application publication date: 20191126 |