CN110497533A - Cube reflecting mirror precision turning processing method with on-line checking function - Google Patents
Cube reflecting mirror precision turning processing method with on-line checking function Download PDFInfo
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- CN110497533A CN110497533A CN201910665874.1A CN201910665874A CN110497533A CN 110497533 A CN110497533 A CN 110497533A CN 201910665874 A CN201910665874 A CN 201910665874A CN 110497533 A CN110497533 A CN 110497533A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/16—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by turning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/005—Devices for the automatic drive or the program control of the machines
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mining & Mineral Resources (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Abstract
The present invention relates to a kind of cube reflecting mirror precision turning processing method with on-line checking function, this method comprises: successively each surface of turnery processing workpiece to be processed under the auxiliary of right-angle prism and substrate tooling, utilizes the thickness deviation and vertical angle deviation of optical probe on-line checking workpiece to be processed in process.Compared with prior art, the present invention has fast processing efficiency, low manufacture cost, machining accuracy and high reliability.
Description
Technical field
The present invention relates to a kind of cube reflecting mirror method for turning, have the function of on-line checking more particularly, to one kind
Cube reflecting mirror precision turning processing method.
Background technique
Cube reflecting mirror is built as optical path and is used with the reference mirror in system debug, it is possible to provide accurate angle positioning
Benchmark.Cube reflecting mirror under traditional handicraft is to be produced using the eyeglass of glass material by cold machining process after disk in gluing
's.The cube reflecting mirror of traditional Cold-forming process production needs successive ignition grinding and polishing, promotes the verticality and control of adjacent surface
The thickness value of opposite face processed.Also, tradition cold working has to that thickness and verticality will be carried out again after cube reflecting mirror lower wall
Test, this extends period process time to a certain extent.In addition, processing in cube reflecting mirror multiple faces mutually it
Between precision positioning it is very difficult, need to guarantee the depth of parallelism and verticality between face and face.The purpose of the present invention is to provide one
Kind has the cube reflecting mirror precision turning processing method of on-line checking function, solves multi-angle positioning surface difficulty of processing
Big problem has customizable contour structures, low cost and processing suitable for the cube reflecting mirror turnery processing of metal material
The advantages that period is short.
Summary of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide one kind to have on-line checking
The cube reflecting mirror precision turning processing method of function.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of cube reflecting mirror precision turning processing method with on-line checking function, this method comprises: straight
Successively each surface of turnery processing workpiece to be processed under the auxiliary of angle prism and substrate tooling is visited using optics in process
The thickness deviation and vertical angle deviation of needle on-line checking workpiece to be processed.
Further, this method specific steps are as follows:
S1: workpiece to be processed is cube structure, and each surface is respectively the first face, the second face, third face, fourth face,
Five faces and the 6th face, wherein the first face and the second face opposite each other, third face and fourth face opposite each other, the 5th face and the 6th face
Opposite each other assists workpiece to be processed orientation angle with the first right-angle prism and the second right-angle prism, in conjunction with substrate tooling turning
First face and the second face;
S2: will be to be added after the completion of detection with the thickness deviation in optical probe on-line checking workpiece the first face and the second face
Work workpiece lower wall is stand-by;
S3: the first right-angle prism is used, by body, right-angle surface to be bonded with substrate tooling, by workpiece to be processed as angle
First face is bonded with right-angle surface;
S4: in conjunction with the third face of substrate tooling turnery processing workpiece to be processed;
S5: with optical probe along the vertical angle deviation in planning path on-line checking third face and the second face, detection is completed
Afterwards, workpiece to be processed lower wall is stand-by;
S6: in conjunction with the fourth face of substrate tooling turnery processing workpiece to be processed;
S7: will be to be added after the completion of detection with the thickness deviation in optical probe on-line checking workpiece third face and fourth face
Work workpiece lower wall is stand-by;
S8: use the first right-angle prism and the second right-angle prism as angle by body, by the second face and third face and right angle
Prism fitting;
S9: in conjunction with the 5th face of substrate tooling turnery processing workpiece to be processed;
S10: with optical probe along the vertical angle deviation in planning path on-line checking the 5th face and the first face, detection is completed
Afterwards, workpiece to be processed lower wall is stand-by;
S11: in conjunction with the 6th face of substrate tooling turnery processing workpiece to be processed;
S12: to be added after the completion of detection with the thickness deviation in the 5th face and the 6th face of optical probe on-line checking workpiece
Work work pieces process is completed.
Further, specific steps when each surface of workpiece to be processed described in turning are as follows: stick to the opposite in face to be processed
In substrate tooling, substrate tooling and workpiece to be processed one are then same as above disk, turning face to be processed.
Further, the adhesive used when the opposite in the face to be processed being pasted onto substrate tooling is glue or bee
Wax.
Further, the substrate tooling is the metal cartridge for having an opposite parallel.
Further, the surface figure accuracy on the parallel opposite of the substrate tooling is better than 0.5 μm.
Further, the detection of the thickness deviation is carried out at a distance from face to be processed by test substrate face.
Further, when each surface of workpiece to be processed described in turning, the surface figure accuracy of each machined surface 0.2 μm with
Interior, roughness is within 4nm.
When further, using first right-angle prism and the second right-angle prism auxiliary positioning angle, positioning accuracy exists
Within 15 rads.
Compared with prior art, the present invention has the advantage that
(1) in the way of the present invention is in the way of ultra-precise cutting processing instead of traditional polishing, it can get and be used for
The cube reflecting mirror of sizes in different optical system debugging, improves processing efficiency, reduces the production cost;
(2) present invention sequentially in either order processes each surface of workpiece to be processed, and right in process
Thickness deviation and vertical angle deviation are adjusted in real time, effectively increase machining accuracy;
(3) machining benchmark plane and two groups of right-angle prism auxiliary positioning angles are combined, realize high-precision cube reflecting mirror
Rapid processing;
(4) it is fed back using optical probe on-line checking, improves the precision and reliability of ultra-precise cutting processing.
Detailed description of the invention
Fig. 1 is a kind of flow chart of cube reflecting mirror precision turning processing method with on-line checking function;
Fig. 2 is the schematic diagram based on ultra-precise cutting processing and on-line checking cube reflecting mirror;
Fig. 3 is each face label schematic diagram of cube reflecting mirror to be processed;
Fig. 4 is that cube reflecting mirror uses angle when the first right-angle prism to position schematic diagram;
Fig. 5 is that cube reflecting mirror uses angle when the first right-angle prism and the second right-angle prism to position schematic diagram;
Fig. 6 is the vertical angle deviation schematic diagram of optical probe on-line checking cube reflecting mirror;
Wherein, 1, substrate tooling, 2, workpiece to be processed, the 201, first face, the 202, second face, 203, third face, 204,
On four sides, the 205, the 5th face, the 206, the 6th face, the 3, first right-angle prism, the 4, second right-angle prism, 5, optical probe.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.Note that the following embodiments and the accompanying drawings is said
Bright is substantial illustration, and the present invention is not intended to be applicable in it object or its purposes is defined, and the present invention does not limit
In the following embodiments and the accompanying drawings.
Embodiment
The present embodiment provides a kind of cube reflecting mirror precision turning processing method with on-line checking function is such as schemed
Shown in 2, the process equipment that this method uses includes lathe and the turning knife and optical probe 5 that are fixedly installed on lathe, vehicle
Bed is equipped with the mobile base for driving workpiece to move horizontally in the X-axis direction.Single-point diamond is used when the present embodiment is processed
Vehicle carries out turnery processing.Mobile base is equipped with substrate tooling 1, and substrate tooling 1 is the cylindrical body that basal diameter is 50mm, substrate
Tooling 1 uses 6061 material of aluminium alloy, and the surface figure accuracy of two planes of substrate tooling 1 is better than 0.5 μm.Workpiece to be processed 2 is put
It is placed in substrate tooling 1, workpiece to be processed 2 is aluminium alloy RSA905 material, and workpiece to be processed 2 is the machine tooling of general precision
Good cube blank, but do not have the performance of optics cube reflecting mirror.
As shown in figure 3, the surface for setting workpiece to be processed 2 is respectively the first face 201, the second face 202, third face the 203, the 4th
Face 204, the 5th face 205, the 6th face 206, wherein the first face 201 and the second face 202 opposite each other, third face 203 and fourth face
204 opposites each other, the 5th face 205 and the 6th face 206 opposite each other.
As shown in Figure 1, the specific steps of this method are as follows:
S1: use the first right-angle prism 3 and the second right-angle prism 4 as angle by body, a right-angle side of right-angle prism
It is bonded with right-angle prism, by face 203,205, another right-angle side is bonded with right-angle prism, workpiece to be processed orientation angle is assisted,
Positioning accuracy is within 15 rads.
By the second face 202 of workpiece to be processed 2 with being glued in substrate tooling 1, by substrate tooling 1 and workpiece to be processed 2
One ibid disk, and the first face of turnery processing 201, it is after processing is completed that 2 lower wall of workpiece to be processed is stand-by, by workpiece to be processed 2
First face 201 is same as above disk, and turnery processing second with being glued in substrate tooling 1, by substrate tooling 1 and workpiece to be processed 2 one
Face 202.
As shown in figure 5, the first right-angle prism 3 and the second right-angle prism 4 use K9 material, the first right-angle prism 3 and second
The angle precision at the right angle of right-angle prism 4 is 2 rads.Right-angle prism can be seen as the frame of reference, will be to be added under free state
Work workpiece is bonded with right-angle prism, and the Plane Angle position for needing to process is oriented in the upper surface of workpiece to be processed.
S2: with the thickness deviation in 5 on-line checking workpiece the first face 201 and the second face 202 of optical probe, in thickness deviation
When being greater than the set value, return step S1 re-starts turning.It is after the completion of detection, 2 lower wall of workpiece to be processed is stand-by.
S3: using the first right-angle prism 3, by body, right-angle surface 301 to be bonded with substrate tooling 1 as angle, will be to be processed
First face 201 of workpiece 2 is bonded with right-angle surface 302.
S4: by the fourth face 204 of workpiece to be processed 2 with being glued in substrate tooling 1, by substrate tooling 1 and work to be processed
Part 2 one is same as above disk, and turnery processing third face 203.
S5: turning the position of right-angle prism, as shown in fig. 6, pasting the right-angle surface 301 of right-angle prism and workpiece to be processed
It closes, right-angle surface 302 is separate and is parallel to substrate tooling 1, with optical probe 5 along planning path on-line checking face 203 and face 202
Vertical angle deviation, when vertical angle deviation is greater than the set value, return step S3 re-starts turning.It, will after the completion of detection
2 lower wall of workpiece to be processed is stand-by.
When optical probe is detected along planning path, along a cube reflecting mirror finished surface on-line checking, lathe with
Cube reflecting mirror moves horizontally in the X-axis direction, and optical probe then carries out a data test relative to cube reflecting mirror is mobile.
S6: by the third face 203 of workpiece to be processed 2 with being glued in substrate tooling 1, by substrate tooling 1 and work to be processed
Part 2 one is same as above disk, and turnery processing fourth face 204.
S7: with the thickness deviation in 5 on-line checking workpiece third face 203 and fourth face 204 of optical probe, detection is completed
Afterwards, 2 lower wall of workpiece to be processed is stand-by.
S8: use the first right-angle prism 3 and the second right-angle prism 4 as angle by body, by the second face 202 and third face
203 are bonded with right-angle prism.
S9: by the 6th face 206 of workpiece to be processed 2 with being glued in substrate tooling 1, by substrate tooling 1 and work to be processed
Part 2 one is same as above disk, and the 5th face 205 of turnery processing.
S10: if step S5 turns the position of right-angle prism, with optical probe 5 along the 5th face 205 of planning path on-line checking
It is after the completion of detection, 2 lower wall of workpiece to be processed is stand-by with the vertical angle deviation in the first face 201.
S11: by the 5th face 205 of workpiece to be processed 2 with being glued in substrate tooling 1, by substrate tooling 1 and work to be processed
Part 2 one is same as above disk, and the 6th face 206 of turnery processing.
S12: the thickness deviation in 5 on-line checking workpiece of optical probe the 5th face 205 and the 6th face 206, after the completion of detection,
Workpiece to be processed 2 completes the process.
In this method, when measuring the thickness deviation, test value is basal surface at a distance from face to be processed, to be processed
When 2 surface of workpiece is turned on processing, the surface figure accuracy of each machined surface is within 0.2 μm, and roughness is within 4nm.
In the present embodiment, the adhesive used when opposite to be processed is pasted onto substrate tooling 1 can also be beeswax.
Above embodiment is only to enumerate, and does not indicate limiting the scope of the invention.These embodiments can also be with other
Various modes are implemented, and can make in the range of not departing from technical thought of the invention it is various omit, displacement, change.
Claims (9)
1. a kind of cube reflecting mirror precision turning processing method with on-line checking function, which is characterized in that this method
Include: successively each surface of turnery processing workpiece to be processed (2) under the auxiliary of right-angle prism and substrate tooling (1), is processing
The thickness deviation and vertical angle deviation of optical probe (5) on-line checking workpiece to be processed (2) are utilized in the process.
2. a kind of cube reflecting mirror ultra-precise cutting processing side with on-line checking function according to claim 1
Method, which is characterized in that this method specific steps are as follows:
S1: workpiece to be processed (2) is cube structure, and each surface is respectively the first face (201), the second face (202), third face
(203), fourth face (204), the 5th face (205) and the 6th face (206), wherein the first face (201) and the second face (202) are right each other
Face, third face (203) and fourth face (204) opposite each other, the 5th face (205) and the 6th face (206) opposite each other, it is straight with first
Angle prism (3) and the second right-angle prism (4) assist workpiece to be processed (2) orientation angle, in conjunction with substrate tooling (1) the first face of turning
(201) and the second face (202);
S2: using the thickness deviation in optical probe (5) the first face of on-line checking workpiece (201) and the second face (202), and detection is completed
Afterwards, workpiece to be processed (2) lower wall is stand-by;
S3: using the first right-angle prism (3), by body, right-angle surface (301) to be bonded with substrate tooling (1) as angle, will be to be added
The first face (201) of work workpiece (2) is bonded with right-angle surface (302);
S4: in conjunction with the third face (203) of substrate tooling (1) turnery processing workpiece to be processed (2);
S5: with optical probe (5) along planning path on-line checking third face (203) and the second face (202) vertical angle deviation,
It is after the completion of detection, workpiece to be processed (2) lower wall is stand-by;
S6: in conjunction with the fourth face (204) of substrate tooling (1) turnery processing workpiece to be processed (2);
S7: using the thickness deviation in optical probe (5) on-line checking workpiece third face (203) and fourth face (204), and detection is completed
Afterwards, workpiece to be processed (2) lower wall is stand-by;
S8: use the first right-angle prism (3) and the second right-angle prism (4) as angle by body, by the second face (202) and third face
(203) it is bonded with right-angle prism;
S9: in conjunction with the 5th face (205) of substrate tooling (1) turnery processing workpiece to be processed (2);
S10: inclined with the vertical angle of optical probe (5) along the 5th face (205) of planning path on-line checking and the first face (201)
Difference, it is after the completion of detection, workpiece to be processed (2) lower wall is stand-by;
S11: in conjunction with the 6th face (206) of substrate tooling (1) turnery processing workpiece to be processed (2);
S12: the thickness deviation in optical probe (5) on-line checking workpiece the 5th face (205) and the 6th face (206) is used, has been detected
Cheng Hou, workpiece to be processed (2) complete the process.
3. a kind of cube reflecting mirror ultra-precise cutting processing with on-line checking function according to claim 1 or 2
Method, which is characterized in that specific steps when each surface of workpiece to be processed described in turning (2) are as follows: glue the opposite in face to be processed
To on substrate tooling (1), substrate tooling (1) and workpiece to be processed (2) one are then same as above disk, turning face to be processed.
4. a kind of cube reflecting mirror ultra-precise cutting processing side with on-line checking function according to claim 3
Method, which is characterized in that the adhesive used when the opposite in the face to be processed is pasted on substrate tooling (1) is glue or bee
Wax.
5. a kind of cube reflecting mirror ultra-precise cutting processing side with on-line checking function according to claim 1
Method, which is characterized in that the substrate tooling (1) is the metal cartridge for having an opposite parallel.
6. a kind of cube reflecting mirror ultra-precise cutting processing side with on-line checking function according to claim 5
Method, which is characterized in that the surface figure accuracy on the parallel opposite of the substrate tooling (1) is better than 0.5 μm.
7. a kind of cube reflecting mirror ultra-precise cutting processing with on-line checking function according to claim 1 or 2
Method, which is characterized in that carry out the detection of the thickness deviation at a distance from face to be processed by test substrate face.
8. a kind of cube reflecting mirror ultra-precise cutting with on-line checking function according to claim 1 or 2 or 3 adds
Work method, which is characterized in that when each surface of workpiece to be processed described in turning (2), the surface figure accuracy of each machined surface is 0.2
Within μm, roughness is within 4nm.
9. a kind of cube reflecting mirror ultra-precise cutting processing side with on-line checking function according to claim 2
Method, which is characterized in that when using first right-angle prism (3) and the second right-angle prism (4) auxiliary positioning angle, positioning accuracy
Within 15 rads.
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Cited By (4)
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CN112985299A (en) * | 2021-02-19 | 2021-06-18 | 同济大学 | Optical probe on-line detection device and method based on path planning |
CN113510567A (en) * | 2021-05-07 | 2021-10-19 | 江苏集萃精凯高端装备技术有限公司 | Turning method of high-flatness annular large-caliber reflecting mirror |
CN116520768A (en) * | 2023-06-30 | 2023-08-01 | 采埃孚汽车科技(张家港)有限公司 | Processing path debugging method and device, electronic equipment and storage medium |
CN117124483A (en) * | 2023-07-13 | 2023-11-28 | 同济大学 | Free-form surface prism high-precision compensation processing method based on online and offline detection |
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CN117124483B (en) * | 2023-07-13 | 2024-03-08 | 同济大学 | Free-form surface prism high-precision compensation processing method based on online and offline detection |
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