CN110480187A - A kind of double-station cantilevered micro Process equipment - Google Patents
A kind of double-station cantilevered micro Process equipment Download PDFInfo
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- CN110480187A CN110480187A CN201910784407.0A CN201910784407A CN110480187A CN 110480187 A CN110480187 A CN 110480187A CN 201910784407 A CN201910784407 A CN 201910784407A CN 110480187 A CN110480187 A CN 110480187A
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- 238000000034 method Methods 0.000 title claims abstract description 41
- 230000008569 process Effects 0.000 title claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 230000009467 reduction Effects 0.000 claims abstract description 19
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000003754 machining Methods 0.000 abstract description 5
- 230000003287 optical effect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 229910001069 Ti alloy Inorganic materials 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 241000403354 Microplus Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
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- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- 238000003672 processing method Methods 0.000 description 1
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- 238000004080 punching Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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- 239000007921 spray Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of double-station cantilevered micro Process equipment, including processing platform and bearing plate, positioning mechanism and optically focused mechanism are respectively arranged on the processing platform and bearing plate, the positioning mechanism includes pedestal and push rod, the slide over side walls of the pedestal is provided with slide, the upper surface of the pedestal is equipped with drag reduction plate, and the telescopic end of drag reduction plate and push rod is supported by plummer jointly.Structure of the invention is ingenious in design, workbench is set to realize any movement in plane by the way that positioning mechanism is arranged, in process, optically focused mechanism is located at fixed, stable state, optical path will not be disturbed, keep machining accuracy higher, and it can satisfy the micro-machined demand of high-precision for a long time, after work pieces process at a station is good, at the uniform velocity sliding can be such that laser processing device reaches at another station to bearing plate on cross bar, it realizes the purpose that an equipment processes duplexing bit interleaving, improves processing efficiency.
Description
Technical field
The present invention relates to micro Process equipment technical field more particularly to a kind of double-station cantilevered micro Process equipment.
Background technique
Micro-processing technology is the processing that very high-precision size and shape are obtained with small resection, refer mainly to laser it is micro- plus
Work technology laser machines more accurate, more acurrate, rapider technology and utilizes laser beam and object compared with conventional machining
The characteristic of matter interaction to including that metal is processed with nonmetallic a variety of materials, be related to welding, cutting, mark,
Punching, a variety of processing technologys, the unique characteristics of laser such as heat treatment, molding make the ideal tools of micro process, mesh
Before be widely used in microelectronics, micromechanics and micro-optics process three big fields.
The processing method of Laser Micro-Machining is broadly divided into two kinds at present, and one is hot-working, that is, infrared laser is used, by material
The substance on material surface heats and it is made to vaporize (evaporation), and to remove material, another kind is cold working, that is, uses ultraviolet laser, high
The ultraviolet photon of energy directly destroys the molecular link of many non-metal material surfaces, so that molecule is detached from object, no matter which kind of is processed
Technology has a very high requirement to the accuracy of optical path, but existing process equipment usually make to laser machine component rotation or
Inclination processes workpiece different location to realize, laser optical path will receive small sample perturbations in moving process, be unable to satisfy high-precision
Density requirements, therefore, it is proposed that a kind of double-station cantilevered micro Process equipment.
Summary of the invention
The purpose of the present invention is to solve disadvantages existing in the prior art, and a kind of double-station cantilever proposed declines
Process equipment.
To achieve the goals above, present invention employs following technical solutions:
A kind of double-station cantilevered micro Process equipment, including processing platform and bearing plate, the processing platform and bearing plate
On be respectively arranged with positioning mechanism and optically focused mechanism, the positioning mechanism includes pedestal and push rod, is opened on the side wall of the pedestal
Equipped with sliding slot, and in sliding slot, sliding is provided with slide, and the upper surface of the pedestal is equipped with drag reduction plate, and drag reduction plate by bolt
It is supported by plummer jointly with the telescopic end of push rod, is symmetrically opened up on the plummer there are two Horizontal limiting slot, and two limits
It is equipped with the tractor of same specification in the slot of position, is fixedly installed with crawler belt on the side wall of the plummer, and the end of crawler belt is fixed on
It is flush between two tractors and with the upper surface of tractor, the installation for opening up direction Yu drag reduction plate of the Horizontal limiting slot
Direction is mutually perpendicular to.
Preferably, the optically focused mechanism includes guard box, and controller is equipped in the guard box, laser generator, is expanded
Mirror and fixed cylinder, the fixed cylinder runs through bearing plate, and nozzle is installed in the inside of fixed cylinder, and it is saturating that focusing is provided in the nozzle
Mirror is equipped with catcher and reflecting mirror on the roof of the guard box, and reflecting mirror and condenser lens are located at same vertical straight line
On, gas generator is welded on the bearing plate, the output end of the gas generator is connected with pump machine by hose, described
The gas outlet of pump machine is connected with nozzle and is located at the lower section of condenser lens.
Preferably, the crawler belt includes multiple chain links, is rotatablely connected between multiple chain links by shaft, and each chain
Lightening hole is offered on ring, each chain link is made of high-strength titanium alloy.
Preferably, the upper surface of the drag reduction plate is arranged in parallel with multiple mounting plates, and uniformly installs on each mounting plate
There are multiple balls, and ball rolls with the lower surface of plummer and is connected.
Preferably, it is symmetrically welded on the side wall of the slide there are two support column, is welded on each support column
Fixed block is fixedly installed with lower supporting plate between two support columns, is fixedly installed with branch between two fixed blocks
Fagging, and upper backup pad is parallel to each other with lower supporting plate, the crawler belt is in U-shape, and the underlying part of crawler belt and is located at upper
The part of side is individually positioned on lower supporting plate and upper backup pad.
Preferably, it is fixedly installed with workbench on the crawler belt and tractor, and the central axis of workbench and nozzle
Axis coincides, and the contact area of the workbench and crawler belt is greater than the half of the area of workbench.
Preferably, be symmetrically welded with four support rods on the processing platform, the corresponding support rod in every two positions it
Between cross bar is equipped with by bolt, the bearing plate is slidably arranged between two cross bars.
Beneficial effects of the present invention:
1, it can will be sprayed when using laser process equipment by moving parts such as setting crawler belt, tractor, plummers
The distance between mouth and workbench first regulate, and then fix bearing plate, and in process, push rod pushes plummer mobile,
Tractor drives crawler belt to move on plummer, and two kinds of moving directions are mutually perpendicular to, and realizes workbench not by the synthesis of movement
Equidirectional movement, to make laser to processing at workpiece different location, optically focused mechanism is located at stationary state, light when processing
Road will not be disturbed, is monitored by the particle that catcher captures to process, does not need frequent calibration optical path,
It can satisfy successional high-precision micro Process requirement.
2, it by setting bearing plate and cross bar, after the completion of the work pieces process at one on workbench, is transmitted in workpiece
Or when replacement, bearing plate can move on cross bar, until reach at another station, it is same in extensive or batch machining
Often processing request is identical for batch device, so not needing the height for adjusting bearing plate again, while bearing plate is only in same level
Same linear motion in face, movement is steady, and the inclination compared to optically focused mechanism in common micro Process equipment even rotates, this dress
Optically focused mechanism work in setting is more stable, and double-station micro Process may be implemented, improve processing efficiency.
3, the ball arranged by the way that parallelly distribute on is arranged on drag reduction plate, it is possible to reduce rubbing between plummer and pedestal
It wipes, friction bring energy loss is reduced when driving movable workbench, and the retardance of plummer movement can be reduced, mentioned
High processing efficiency and precision.
4, crawler belt is fixed by using lower supporting plate and upper backup pad, while engages support column with crawler belt, works as traction
When device moves, upper backup pad and lower supporting plate play the position-limiting action to crawler belt, reduce the influence that chain link swings, and make
It replaces telescopic rod or other devices to drive movable workbench with crawler belt, increases contact area, when improving working table movement
Smoothness.
In conclusion structure of the invention is ingenious in design, realize workbench by setting positioning mechanism any in plane
Mobile, in process, optically focused mechanism is located at fixed, stable state, and optical path will not be disturbed, and makes machining accuracy more
Height, and can satisfy the micro-machined demand of high-precision for a long time, after the work pieces process at a station is good, bearing plate is in cross
At the uniform velocity sliding can be such that laser processing device reaches at another station on bar, realize the mesh that an equipment processes duplexing bit interleaving
, improve processing efficiency.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of double-station cantilevered micro Process equipment proposed by the present invention；
Fig. 2 is the structure of support column and crawler belt junction in a kind of double-station cantilevered micro Process equipment proposed by the present invention
Schematic diagram；
Fig. 3 is the vertical view of push rod and plummer part in a kind of double-station cantilevered micro Process equipment proposed by the present invention
Figure；
Fig. 4 is the structural schematic diagram of drag reduction plate part in a kind of double-station cantilevered micro Process equipment proposed by the present invention；
Fig. 5 is the partial structure diagram of crawler belt in a kind of double-station cantilevered micro Process equipment proposed by the present invention；
Fig. 6 is the structure of support column and fixed block part in a kind of double-station cantilevered micro Process equipment proposed by the present invention
Schematic diagram.
In figure: 1 guard box, 2 laser generators, 3 beam expanding lens, 4 catchers, 5 reflecting mirrors, 6 condenser lenses, 7 pump machines, 8 gas
Body generator, 9 fixed cylinders, 10 nozzles, 11 controllers, 12 cross bars, 13 workbench, 14 tractors, 15 support rods, 16 plummers,
17 fixed blocks, 19 support columns, 20 slides, 21 pedestals, 22 drag reduction plates, 23 push rods, 24 lower supporting plates, support on 25 18 crawler belts
Plate, 26 chain links, 27 lightening holes, 28 mounting plates, 29 balls, 30 bearing plates, 31 processing platforms.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.
Referring to Fig.1-6, a kind of double-station cantilevered micro Process equipment, including processing platform 31 and bearing plate 30, processing are flat
Positioning mechanism and optically focused mechanism are respectively arranged on platform 31 and bearing plate 30, positioning mechanism includes pedestal 21 and push rod 23, pedestal
Sliding slot is offered on 21 side wall, and sliding is provided with slide 20 in sliding slot, the upper surface of pedestal 21 is equipped with by bolt to be subtracted
Baffle-wall 22, and the telescopic end of drag reduction plate 22 and push rod 23 is supported by plummer 16 jointly, symmetrically opened up on plummer 16 there are two
Horizontal limiting slot, and the tractor 14 of same specification is equipped in two limiting slots, crawler belt is fixedly installed on the side wall of plummer 16
18, and the end of crawler belt 18 is fixed between two tractors 14 and is flush with the upper surface of tractor 14, Horizontal limiting slot
Open up direction and the installation direction of drag reduction plate 22 is mutually perpendicular to.
In the present invention, optically focused mechanism includes guard box 1, is equipped with controller 11, laser generator 2, beam expanding lens in guard box 1
3 and fixed cylinder 9, fixed cylinder 9 runs through bearing plate 30, and nozzle 10 is installed in the inside of fixed cylinder 9, and it is saturating that focusing is provided in nozzle 10
Mirror 6, is equipped with catcher 4 and reflecting mirror 5 on the roof of guard box 1, and reflecting mirror 5 and condenser lens 6 be located at it is same vertical straight
On line, gas generator 8 is welded on bearing plate 30, the output end of gas generator 8 is connected with pump machine 7, pump machine by hose
7 gas outlet is connected with nozzle 10 and is located at the lower section of condenser lens 6, and when cutting, coaxial inert gas is by spraying with light beam
Mouth 10 sprays, and the material of fusing or gasification is blown out from the bottom of notch, air-flow also acts as cooling cut surface, reduces hot shadow
It rings area and guarantees the not contaminated effect of focus lamp.
In the present invention, crawler belt 18 includes multiple chain links 26, is rotatablely connected between multiple chain links 26 by shaft, and each chain
Lightening hole 27 is offered on ring 26, each chain link 26 is made of high-strength titanium alloy, and titanium alloy is not only slim and graceful, but also rigidity
It is good, it will not both influence to cause the inertia of workbench 13 larger because of own wt, it will not be during the work time because frequent
It moves and causes to wear.
In the present invention, the upper surface of drag reduction plate 22 is arranged in parallel with multiple mounting plates 28, and on each mounting plate 28 uniformly
Multiple balls 29 are installed, and ball 29 rolls with the lower surface of plummer 16 and is connected, it will be between plummer 16 and drag reduction plate 22
Sliding friction become rolling friction, reduce resistance.
It in the present invention, is symmetrically welded on the side wall of slide 20 there are two support column 19, is welded on each support column 19
Fixed block 17 is fixedly installed with lower supporting plate 24 between two support columns 19, is fixedly installed with branch between two fixed blocks 17
Fagging 25, and upper backup pad 24 is parallel to each other with lower supporting plate 25, crawler belt 18 is in U-shape, and the underlying part of crawler belt 18 and
The part being located above is individually positioned on lower supporting plate 24 and upper backup pad 25, and support plate both plays carrying crawler belt 18 and keeps it
Horizontal effect, and play the role of the transmitting of power, the position of crawler belt 18 can be fixed, makes slide 20 with the movement of plummer 16
And it moves.
In the present invention, workbench 13, and the central axis of workbench 13 are fixedly installed on crawler belt 18 and tractor 14 jointly
The axis of line and nozzle 10 coincides, and the contact area of workbench 13 and crawler belt 18 is greater than the half of the area of workbench 13, makes
It replaces telescopic rod or other devices driving workbench 13 mobile with crawler belt 18, the smoothness of workbench 13 can be increased.
In the present invention, it is symmetrically welded with four support rods 15 on processing platform 31, the corresponding support rod in every two positions
Cross bar 12 is equipped with by bolt between 15, bearing plate 30 is slidably arranged between two cross bars 12, when on workbench 13
Workpiece is processed when being transmitted or being reloaded, and bearing plate 30 can be moved at another station, make laser on another station
Workpiece processed, and bearing plate 30 is only moved in same level, and working light path not will receive rotation, inclination
Etc. factors influence, keep machining accuracy higher.
For the present invention in use, workpiece is fixed on workbench 13, regulating bearing plate 30 will behind the position of workpiece
Bearing plate 30 is fixed, and beam expanding lens 3, reflecting mirror 5 and the specification and installation site of condenser lens 6 are successively chosen according to processing request
And after installing, laser generator 2 is opened, laser successively passes through beam expanding lens 3, reflecting mirror 5, condenser lens 6 and is transmitted to workpiece table
On face, workpiece is processed using the high-energy of laser, meanwhile, gas generator 8 generates inert gas, such as nitrogen, argon gas
Pressurizeed Deng, inert gas by pump machine 7, reach workpiece surface with laser, by the impact force of gas by after cutting gas and
Heat is taken away, meanwhile, inert gas also acts as protective effect to nozzle 10, and 6 surface of condenser lens for avoiding it internal is upper
Material gasification after institute's band particulate wear in gas；
In travelling workpiece, push rod 23 pushes plummer 16 fixed thereon to move, and plummer 16 is sliding on drag reduction plate 22
Dynamic, the ball being arranged on drag reduction plate 22 can significantly lower friction between the two, prop up drag reduction plate 22 to plummer 16
Not because the excessive influence plummer 16 that rubs moves while support, the crawler belt 18 being connected with plummer 16 passes through the card of support column 19
Cooperation is used, and moves slide 20 in the sliding slot on pedestal 21, and why slide 20 is slidably arranged on pedestal 21 rather than consolidates
Dingan County mounted in plummer 16 side wall on be because, when tractor 14 moves to the left end of the limiting slot on plummer 16,
The weight that 16 left end of plummer is born is much larger than the weight of its right end, therefore the push rod 23 being connected with 16 right end of plummer is being answered
It is easy to be damaged under power effect, and slide 20 is slidably arranged on pedestal 21 it is possible to prevente effectively from this problem；
When tractor 14 drives 13 side-to-side movement of workbench, lower half portion crawler belt 18 will not under the action of support column 19
Mobile, top half moves back and forth, and upper backup pad 25 supports, and 18 phase mutual friction of two parts crawler belt up and down is avoided to produce
Raw abrasion, while crawler belt 18 is hingedly formed by chain link 26, chain link 26 is equipped with lightening hole 27, can reduce positioning mechanism as far as possible
Inertia, make positioning mechanism movement it is more flexible, by the collective effect of tractor 14 and push rod 23, workbench 13 can be realized
The movement of any direction in the horizontal plane, when the workpiece on workbench 13, which is processed, to be transmitted or reloaded, bearing plate 30
It can be moved at another station, process laser to the workpiece on another station, realize double-station processing purpose.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (5)
1. a kind of double-station cantilevered micro Process equipment, including processing platform (31) and bearing plate (30), which is characterized in that described
It is respectively arranged with positioning mechanism and optically focused mechanism on processing platform (31) and bearing plate (30), the positioning mechanism includes pedestal
(21) it is provided with slide (20) with push rod (23), the slide over side walls of the pedestal (21), the upper surface peace of the pedestal (21)
Equipped with drag reduction plate (22), and drag reduction plate (22) and the telescopic end of push rod (23) are supported by plummer (16), the plummer jointly
(16) it is symmetrically arranged with the tractor (14) of same specification on, is fixedly installed with crawler belt (18) on the side wall of the plummer (16), and
The end of crawler belt (18) is fixed between two tractors (14).
2. a kind of double-station cantilevered micro Process equipment according to claim 1, which is characterized in that optically focused mechanism packet
It includes guard box (1), controller (11), laser generator (2), beam expanding lens (3) and nozzle (10) is equipped in the guard box (1),
Be equipped with reflecting mirror (5) on the roof of the guard box (1), and reflecting mirror (5) and horizontal plane angle at 45 ° and with nozzle (10) position
In in same vertical straight line, it is welded with gas generator (8) on the bearing plate (30), and gas generator (8) passes through pump machine
(7) it is connected with nozzle (10).
3. a kind of double-station cantilevered micro Process equipment according to claim 1, which is characterized in that crawler belt (18) packet
It includes multiple chain links (26), is rotatablely connected between multiple chain links (26) by shaft, and offered on each chain link (26)
Lightening hole (27).
4. a kind of double-station cantilevered micro Process equipment according to claim 1, which is characterized in that the drag reduction plate (22)
Upper surface be arranged in parallel with multiple mounting plates (28), and multiple balls (29) are uniformly installed on each mounting plate (28).
5. a kind of double-station cantilevered micro Process equipment according to claim 2, which is characterized in that the crawler belt (18) and
It is fixedly installed on tractor (14) workbench (13), and the central axis of workbench (13) is mutually be overlapped with the axis of nozzle (10)
It closes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910784407.0A CN110480187A (en) | 2019-08-23 | 2019-08-23 | A kind of double-station cantilevered micro Process equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910784407.0A CN110480187A (en) | 2019-08-23 | 2019-08-23 | A kind of double-station cantilevered micro Process equipment |
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| CN110480187A true CN110480187A (en) | 2019-11-22 |
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| CN210703133U (en) * | 2019-07-15 | 2020-06-09 | 广东华奕激光技术有限公司 | Double-station laser cutting equipment |
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Effective date of registration: 20211022 Address after: 231100 Dongsun formation, Chenzhuang village, Zhuxiang Town, Changfeng County, Hefei City, Anhui Province Applicant after: Geng Yanhua Address before: 224700 No. 160, Qiubei group, Yufeng village, Jinhu sub district office, Jianhu County, Yancheng City, Jiangsu Province Applicant before: Zuo Huiling |
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Application publication date: 20191122 |