CN110441559A - A kind of the micro-nano probe device for automatically molding and control method of power real-time, tunable - Google Patents
A kind of the micro-nano probe device for automatically molding and control method of power real-time, tunable Download PDFInfo
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- CN110441559A CN110441559A CN201910791610.0A CN201910791610A CN110441559A CN 110441559 A CN110441559 A CN 110441559A CN 201910791610 A CN201910791610 A CN 201910791610A CN 110441559 A CN110441559 A CN 110441559A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
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Abstract
It is electrical integrated that the present invention relates to microcomputers, the micro-nano probe device for automatically molding and control method of specifically a kind of power real-time, tunable, apply the real-time adjusting of active force when by processing to probe, and vision-based detection module carries out real time imagery to probe, information is touched in the perception of bonding force detection module, the multi-mode servo feedback being combined into, the automatic moulding production of Lai Shixian micro-nano probe have many advantages, such as that automatic forming, power real-time, tunable, structure are simple and easily realize.
Description
Technical field
The present invention relates to micro & nano technology field more particularly to microcomputer are electrical integrated, specifically a kind of power real-time, tunable it is micro-
Receive probe device for automatically molding and control method.
Background technique
As microcosmicization is gradually come into scientific research, the world of micro/nano level has gradually spread out the eye in researcher
In, currently, common tool of the micro-nano probe as micro/nano level research field, have structure is single, preparation method is relatively easy,
The advantages such as low in cost, micro-nano operation and in terms of with apparent economy and Practical Benefit.It under normal conditions, can root
According to the needs of scientific research task, micro-nano probe production is become into the various shapes met the requirements, in order to task it is smooth into
Row, and for ease of obtaining simple probe shape structure, generally made of traditional manual processing work method.Although manually
Processing method production can satisfy the most basic requirement of probe simple shape processing, but producing efficiency is low, and molding effect is poor, produce
Product yields is low, and processing precision of products is low, it is difficult to meet efficient task needs, Yi Zengjia cost of manufacture.In addition, manual processing side
The micro-nano probe structure that legal system makees machine-shaping is single, is unable to satisfy demand of the complicated Task to probe special shape.
Summary of the invention
In order to solve the deficiencies in the prior art, the present invention proposes a kind of micro-nano probe device for automatically molding of power real-time, tunable
And control method, solve single molding structure existing for existing hand-made micro-nano probe, low efficiency, molding effect difference and essence
The problems such as low is spent, while can realize the functions such as active force real-time, tunable, the calculating of power dynamic, multi-mode servo feedback, is had automatic
Chemical conversion type, power real-time, tunable, structure are simple and the features such as easily realization.
The technical problem to be solved by the present invention is to what is be achieved through the following technical solutions:
A kind of micro-nano probe device for automatically molding of power real-time, tunable, including bottom plate, bottom plate by first support bar be fixed on
On the parallel basic platform of bottom plate, executing agency and moveable probe rides mechanism, the probe rides are fixed on bottom plate
Mechanism includes the fixation guide rail being fixed on bottom plate and two movable sliding rail parts sliding on fixed guide rail, on movable sliding rail part
Interchangeable probe rides pedestal is supported by second support bar, the interchangeable probe rides pedestal being arranged on two movable sliding rail parts is total
It is same to support a probe；The executing agency includes that discoid rotate in a circumferential direction and is fixed on the module circumference that rotates in a circumferential direction at module
The bending actuator at place, bending actuator are fixed on the circumference for the module that rotates in a circumferential direction by the first intermediate connector, and bending is held
Row device is arc-shaped, is provided with interchangeable flexible connector on the inside of the circular arc of bending actuator, the circular arc back side of bending actuator is set
It is equipped with power adjustable module；Cantilever beam is vertically fixed on the basic platform, one end of the power adjustable module is fixed on first
The junction of intermediate connector and bending actuator, the other end are fixed to the top of cantilever beam by the second intermediate connector；Institute
The module that rotates in a circumferential direction is stated to be driven by the micro motor being arranged on bottom plate.
In the present invention, strong detection module is set above the fixed guide rail, power detection module is scalable by first
Connector setting is located at below probe on fixed guide rail.
In the present invention, semicircle connector is provided on the inside of the circular arc of the bending actuator, the interchangeable elasticity is even
One end of fitting is connected to the top of bending actuator, and the other end is connected with one end of semicircle connector, the semicircle
The other end of connector is hinged to the middle part of bending actuator.
In the present invention, it is symmetrically installed electromagnetism at the medium position of the power adjustable module and rotates forward fastener and electromagnetism reversion
The endurance of power adjustable module is adjusted in fastener.
In the present invention, sensor is provided at the top and bottom of the cantilever beam, two sensor cooperations come real-time
Detect the deformation quantity of cantilever beam.
In the present invention, rotate in a circumferential direction module and the micro motor axial direction arrangement, are attached by bearing and shaft coupling,
The micro motor is mounted on bottom plate by micro motor pedestal, and bearing is mounted on bottom plate by bearing base.
Further, the shaft of the micro motor and probe are arranged in parallel.
In the present invention, interchangeable probe fixed cover part is hinged on the interchangeable probe rides pedestal, interchangeable probe is solid
Surely upper cover piece realizes clamping and the fixation of different size micro-nano probes from interchangeable probe rides base engagement.
In the present invention, vision-based detection module is additionally provided on the bottom plate, vision-based detection module is scalable by second
Connector is fixed on bottom plate, is identified to the fixed position of the clamping of probe and Working position.
Based on above-mentioned construction, a kind of micro-nano probe device for automatically molding control method of power real-time, tunable, concrete operations step
It is rapid as follows:
1) Data Discretization processing is carried out to micro-nano probe target shape using computer, analysis micro-nano probe target shape
Main characteristic parameters；
2) by adjusting the first scalable connector and the second scalable connector, accurate control force detection module and view respectively
Detection module lifting is felt, so that it is determined that their proper height L1 and L2；
3) according to micro-nano probe target shape needs, the relative position spacing of adjust automatically two movable sliding rail parts；
4) micro-nano probe is placed on interchangeable probe rides pedestal, using interchangeable probe fixed cover part to micro-nano probe into
Luggage is pressed from both sides and is fixed；
5) apply different clamping forces by replacing interchangeable flexible connector, and drive the block motion that rotates in a circumferential direction using micro motor；
6) vision-based detection module real time imagery probe shape is utilized, probe shape actual deviation amount is calculated, is automatically controlling electromagnetism just
Turn fastener and electromagnetism reversion fastener teamwork, dynamic regulation applies active force size, to reach power real-time, tunable
Purpose；
7) deformation quantity is perceived using two sensors, dynamic, which calculates, applies active force size；
8) probe generates deformation and moves down, and touches with power detection module, perception information is transmitted to computer system；
9) when touching information of probe is perceived when computer system receives power detection module, it is real-time using vision-based detection module
The true form for obtaining probe judges automatically probe true form and target shape main characteristic parameters using template matching method
The degree of approach is matched, determines that micro-nano probe true form reaches molded target if meeting sets requirement, otherwise repeats above-mentioned power
The micro-nano probe device for automatically molding control method of real-time, tunable.
Compared with prior art, the present invention solve molding structure existing for existing hand-made micro-nano probe it is single, effect
The problems such as rate is low, molding effect is poor and precision is low；The automatic linkage control of fastener and electromagnetism reversion fastener is rotated forward using electromagnetism
System realizes the real-time, tunable for applying active force to probe；Placement sensor perceives deformation quantity on device cantilever beam, with this dynamic
Active force is calculated, achievees the purpose that in real time effectively control flexible connector rigidity；Probe is carried out by vision-based detection module real
When be imaged, information is touched in the perception of bonding force detection module, to realize multi-mode servo feedback, with this realize micro-nano probe from
Dynamic molding making；Have many advantages, such as that automatic forming, power real-time, tunable, structure are simple and easily realize.
Detailed description of the invention
Fig. 1 is the micro-nano probe device for automatically molding control method flow chart of power real-time, tunable of the invention；
Fig. 2 is the micro-nano probe device for automatically molding structural schematic diagram of power real-time, tunable of the invention；
Fig. 3 is the right side view of Fig. 2.
In figure: basic platform 1, cantilever beam 2, bearing base 3, the module that rotates in a circumferential direction 4, the first intermediate connector 5, sensor
6, the second intermediate connector 7, power adjustable module 8, electromagnetism main story fastener 9, electromagnetism invert fastener 10, semicircular connecting piece
11, bending actuator 12, interchangeable flexible connector 13, interchangeable probe fixed cover part 14, interchangeable probe rides pedestal 15, second
Support rod 16, vision-based detection module 17, movable sliding rail part 18, the second scalable connector 19, fixed guide rail 20, bottom plate 21, the
One support rod 22, micro motor pedestal 23, micro motor 24, shaft coupling 25, bearing 26, power detection module 27, the first scalable connection
Part 28.
Specific embodiment
Below in conjunction with Figure of description and specific preferred embodiment, the invention will be further described, but not therefore and
It limits the scope of the invention.
Referring to fig. 2 with 3 shown in power real-time, tunable micro-nano probe device for automatically molding, including bottom plate 21, bottom plate 21 is logical
It crosses first support bar 22 to be fixed on the basic platform 1 parallel with bottom plate 21, executing agency is fixed on bottom plate 21 and moves
Probe rides mechanism.
The probe rides mechanism includes the fixation guide rail 20 being fixed on bottom plate 21 and slides on fixed guide rail 20
Two movable sliding rail parts 18 support interchangeable probe rides pedestal 15 by second support bar 16 on movable sliding rail part 18, and two
The interchangeable probe rides pedestal 15 being arranged on movable sliding rail part 18 supports a probe jointly, on interchangeable probe rides pedestal 15
It is hinged with interchangeable probe fixed cover part 14, interchangeable probe fixed cover part 14 comes with the cooperation of interchangeable probe rides pedestal 15 to not
Clamping and fixation are carried out with size micro-nano probe；Strong detection module 27, power detection module are set above the fixed guide rail 20
27 are arranged on fixed guide rail 20 by the first scalable connector 28, are located at below probe.
The executing agency includes that discoid rotate in a circumferential direction and is fixed on curved at 4 circumference of module that rotates in a circumferential direction module 4
Shape actuator 12, bending actuator 12 are fixed on the circumference for the module 4 that rotates in a circumferential direction by the first intermediate connector 5, and bending is held
Row device 12 is arc-shaped, and interchangeable flexible connector 13 and semicircle connector 11 are provided on the inside of the circular arc of bending actuator 12,
One end of interchangeable flexible connector 13 is connected to the top of bending actuator 12, one end phase of the other end and semicircle connector 11
The other end of connection, the semicircle connector 11 is hinged to the middle part of bending actuator 12；The circle of the bending actuator 12
Strong adjustable module 8 is arranged in arc back side, and electromagnetism is symmetrically installed at the medium position of power adjustable module 8 and rotates forward fastener 9 and electromagnetism
Invert fastener 10.
Cantilever beam 2 is vertically fixed on the basic platform 1, one end of the power adjustable module 8 is fixed among first
The junction of connector 5 and bending actuator 12, the other end are fixed to the top of cantilever beam 2 by the second intermediate connector 7, hang
The top and bottom of arm beam 2 are provided with sensor 6, and two cooperations of sensor 6 carry out the deformation quantity of real-time detection cantilever beam 2.
The module 4 that rotates in a circumferential direction is driven by the micro motor 24 being arranged on bottom plate 21, the module that rotates in a circumferential direction 4 and micro motor
24 is coaxially arranged, is attached by bearing 26 and shaft coupling 25, and the micro motor 24 is mounted on bottom by micro motor pedestal 23
On plate 21, bearing 26 is mounted on bottom plate 21 by bearing base 3, and the shaft and probe of the micro motor 24 are arranged in parallel.
In the present invention, vision-based detection module 17 is additionally provided on the bottom plate 21, vision-based detection module 17 passes through second
Scalable connector 19 is fixed on bottom plate 21, is identified to the fixed position of the clamping of probe and Working position.
Based on above-mentioned construction, a kind of micro-nano probe device for automatically molding control method of power real-time, tunable, as shown in Figure 1,
Specific steps are as follows:
1) Data Discretization processing is carried out to micro-nano probe target shape using computer, analysis micro-nano probe target shape
Main characteristic parameters；
2) by adjusting the first scalable connector 28 and the second scalable connector 19, accurate control force detection module 8 respectively
It is gone up and down with vision-based detection module 17, so that it is determined that their proper height L1 and L2；
3) according to micro-nano probe target shape needs, the relative position spacing of adjust automatically two movable sliding rail parts 18；
4) micro-nano probe is placed on interchangeable probe rides pedestal 15, micro-nano is visited using interchangeable probe fixed cover part 14
Needle carries out clamping and fixation；
5) apply different clamping forces by replacing interchangeable flexible connector 13, and drive the module 4 that rotates in a circumferential direction using micro motor 24
Movement；
6) 17 real time imagery probe shape of vision-based detection module is utilized, probe shape actual deviation amount is calculated, automatically controls electromagnetism
It rotates forward fastener 9 and electromagnetism inverts 10 teamwork of fastener, dynamic regulation applies active force size, to reach power adjustable die
The purpose that block 8 is adjusted in real time；
7) deformation quantity is perceived using two sensors 6, dynamic, which calculates, applies active force size；
8) probe generates deformation and moves down, and touches with power detection module 27, perception information is transmitted to department of computer science
System；
9) when touching information of probe is perceived when computer system receives power detection module 27, using vision-based detection module 17
The true form for obtaining probe in real time judges automatically probe true form using template matching method and target shape main feature is joined
Several matching degrees of approach determines micro-nano probe true form if the matching degree of approach for meeting main characteristic parameters is greater than 99.5%
Reach molded target, micro-nano probe device for automatically molding control method that is on the contrary then repeating above-mentioned power real-time, tunable.
Therefore, in conjunction with above-mentioned construction and step it can be found that the micro-nano probe of power real-time, tunable of the present invention is automatic
Molding machine and control method are controlled using the automatic linkage that electromagnetism rotates forward fastener and electromagnetism reversion fastener, are realized to spy
The real-time, tunable of needle application active force；Placement sensor perceives deformation quantity on device cantilever beam, calculates active force with this dynamic, reaches
To the purpose for effectively controlling flexible connector rigidity in real time；Real time imagery, bonding force are carried out to probe by vision-based detection module
Information is touched in detection module perception, to realize multi-mode servo feedback, the automatic moulding production of micro-nano probe is realized with this；Tool
Have the advantages that automatic forming, power real-time, tunable, structure are simple and easily realize.
Claims (10)
1. a kind of micro-nano probe device for automatically molding of power real-time, tunable, it is characterised in that: including bottom plate, bottom plate passes through first
Strut is fixed on basic platform parallel to the base plate, and executing agency and moveable probe rides mechanism are fixed on bottom plate,
The probe rides mechanism includes the fixation guide rail being fixed on bottom plate and two movable sliding rail parts sliding on fixed guide rail,
Interchangeable probe rides pedestal, the interchangeable spy being arranged on two movable sliding rail parts are supported by second support bar on movable sliding rail part
Needle support base supports a probe jointly；The executing agency includes that discoid rotate in a circumferential direction and is fixed on circumferential direction at module
Bending actuator at rotary module circumference, bending actuator are fixed on the circle for the module that rotates in a circumferential direction by the first intermediate connector
Zhou Shang, bending actuator are arc-shaped, are provided with interchangeable flexible connector on the inside of the circular arc of bending actuator, bending actuator
Strong adjustable module is arranged in circular arc back side；Cantilever beam, one end of the power adjustable module are vertically fixed on the basic platform
It is fixed on the junction of the first intermediate connector Yu bending actuator, the other end is fixed to cantilever beam by the second intermediate connector
Top；The module that rotates in a circumferential direction is driven by the micro motor being arranged on bottom plate.
2. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 1, it is characterised in that: the fixation
Strong detection module is set above guide rail, and power detection module on fixed guide rail, is located at by the first scalable connector setting
Below probe.
3. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 1, it is characterised in that: the bending
It is provided with semicircle connector on the inside of the circular arc of actuator, one end of the interchangeable flexible connector is connected to bending actuator
Top, the other end are connected with one end of semicircle connector, and the other end of the semicircle connector is hinged to bending execution
The middle part of device.
4. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 1, it is characterised in that: the power can
It is symmetrically installed electromagnetism at the medium position of mode transfer block and rotates forward fastener and electromagnetism reversion fastener.
5. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 1, it is characterised in that: the cantilever
Sensor is provided at the top and bottom of beam, two sensor cooperations carry out the deformation quantity of real-time detection cantilever beam.
6. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 1, it is characterised in that: the circumferential direction
Rotary module and micro motor are axially arranged, are attached by bearing and shaft coupling, the micro motor is pacified by micro motor pedestal
On bottom plate, bearing is mounted on bottom plate by bearing base.
7. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 6, it is characterised in that: micro- horse
The shaft and probe reached is arranged in parallel.
8. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 1, it is characterised in that: described interchangeable
Interchangeable probe fixed cover part is hinged on probe rides pedestal.
9. the micro-nano probe device for automatically molding of power real-time, tunable according to claim 1, it is characterised in that: the bottom plate
On be additionally provided with vision-based detection module, vision-based detection module is fixed on bottom plate by the second scalable connector.
10. the micro-nano probe device for automatically molding control method of a kind of power real-time, tunable, using any institute of the claims 1-9
The micro-nano probe device for automatically molding for the power real-time, tunable stated, which is characterized in that including following operating procedure:
1) Data Discretization processing is carried out to micro-nano probe target shape using computer, analysis micro-nano probe target shape
Main characteristic parameters；
2) by adjusting the first scalable connector and the second scalable connector, accurate control force detection module and view respectively
Detection module lifting is felt, so that it is determined that their proper height L1 and L2；
3) according to micro-nano probe target shape needs, the relative position spacing of adjust automatically two movable sliding rail parts；
4) micro-nano probe is placed on interchangeable probe rides pedestal, using interchangeable probe fixed cover part to micro-nano probe into
Luggage is pressed from both sides and is fixed；
5) apply different clamping forces by replacing interchangeable flexible connector, and drive the block motion that rotates in a circumferential direction using micro motor；
6) vision-based detection module real time imagery probe shape is utilized, probe shape actual deviation amount is calculated, is automatically controlling electromagnetism just
Turn fastener and electromagnetism reversion fastener teamwork, dynamic regulation applies active force size, to reach power real-time, tunable
Purpose；
7) deformation quantity is perceived using two sensors, dynamic, which calculates, applies active force size；
8) probe generates deformation and moves down, and touches with power detection module, perception information is transmitted to computer system；
9) when touching information of probe is perceived when computer system receives power detection module, it is real-time using vision-based detection module
The true form for obtaining probe judges automatically probe true form and target shape main characteristic parameters using template matching method
The degree of approach is matched, determines that micro-nano probe true form reaches molded target if meeting sets requirement, otherwise repeats above-mentioned power
The micro-nano probe device for automatically molding control method of real-time, tunable.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910791610.0A CN110441559B (en) | 2019-08-26 | 2019-08-26 | Force real-time adjustable micro-nano probe automatic forming device and control method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910791610.0A CN110441559B (en) | 2019-08-26 | 2019-08-26 | Force real-time adjustable micro-nano probe automatic forming device and control method |
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| CN110441559B CN110441559B (en) | 2020-07-28 |
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Cited By (1)
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| CN114966142A (en) * | 2022-06-13 | 2022-08-30 | 法特迪精密科技（苏州）有限公司 | Matching method of electromagnetic drive rotary probe and fixed socket |
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| Publication number | Publication date |
|---|---|
| CN110441559B (en) | 2020-07-28 |
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