CN110436414A - A kind of high-purity hydrogen cleaning equipment - Google Patents

A kind of high-purity hydrogen cleaning equipment Download PDF

Info

Publication number
CN110436414A
CN110436414A CN201910701108.6A CN201910701108A CN110436414A CN 110436414 A CN110436414 A CN 110436414A CN 201910701108 A CN201910701108 A CN 201910701108A CN 110436414 A CN110436414 A CN 110436414A
Authority
CN
China
Prior art keywords
hydrogen
valve
pipe
vacuum
clarifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910701108.6A
Other languages
Chinese (zh)
Inventor
王威
肖海明
曾永龙
袁诚
陈军
姚雷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Iron and Steel Co Ltd
Original Assignee
Wuhan Iron and Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Iron and Steel Co Ltd filed Critical Wuhan Iron and Steel Co Ltd
Priority to CN201910701108.6A priority Critical patent/CN110436414A/en
Publication of CN110436414A publication Critical patent/CN110436414A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/56Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/042Purification by adsorption on solids
    • C01B2203/0425In-situ adsorption process during hydrogen production
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465Composition of the impurity
    • C01B2203/0495Composition of the impurity the impurity being water

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Inorganic Chemistry (AREA)
  • Hydrogen, Water And Hydrids (AREA)

Abstract

The invention discloses a kind of high-purity hydrogen cleaning equipments, the first pipe that is connected to including entrance with protohydrogen supply line, hydrogen filter, molecular sieve drum, clarifier and first go out pneumatic module, hydrogen filter and hydrogen solenoid valve are configured in the first pipe, the outlet of first pipe is connected to through second pipe with the bottom inlet of molecular sieve drum, first outlet of the top exit of molecular sieve drum through reversal valve is connected to the entrance of clarifier, and the entrance that the outlet of clarifier goes out pneumatic module with first is connected to;The clarifier draws sampling conduit, and gas analyzer is equipped on sampling conduit, and gas analyzer is connected by linkage with hydrogen solenoid valve.The invention has the benefit that hydrogen filter, molecular sieve drum and clarifier is arranged in the present invention, the protohydrogen for entering purification system is filtered three times, obtain high-purity hydrogen, high-purity hydrogen is provided for the heat treatment of strip perhydro, avoids not enough leading to belt steel surface state and penalty due to hydrogen purity.

Description

A kind of high-purity hydrogen cleaning equipment
Technical field
The present invention relates to the hazardous gases purification techniques such as hydrogen fields, and in particular to a kind of high-purity hydrogen cleaning equipment.
Background technique
In order to change the metallurgical structure of strip, the residual stress inside strip is eliminated, the corrosion resistance of strip is improved Can and mechanical performance, it is in the manufacturing process of strip to be heat-treated more.Heat treatment under usual conditions can make belt steel surface Oxide layer is generated at high temperature, influences the performance and use value of strip.Therefore, the prior art is (main during heat treatment It is quenching and annealing), using gas shield either vacuum state, avoids or reduces the belt steel surface being heat-treated and connect with oxygen It touches and aoxidizes.
Currently, using perhydro gas as protective gas in the heat treatment process of strip.Hydrogen is mostly with the side of electrolysis water Formula generates.The hydrogen that this mode produces may have the impurity such as following several impurity, including water vapour, oxygen, dust, these are miscellaneous Matter influences the quality of hydrogen, causes cold-strip steel to aoxidize during heat treatment, causes product defects.
Summary of the invention
It is an object of the present invention in view of the deficiencies of the prior art, provide a kind of high-purity hydrogen cleaning equipment, solve existing The problem of in the strip heating process of technology Central Plains due to not caused enough the belt steel surface state of hydrogen purity and penalty.
The technical solution adopted by the present invention are as follows: a kind of high-purity hydrogen cleaning equipment, including entrance and protohydrogen supply line connect Logical first pipe, hydrogen filter, molecular sieve drum, clarifier and first go out pneumatic module, configure hydrogen in the first pipe The outlet of filter and hydrogen solenoid valve, first pipe is connected to through second pipe with the bottom inlet of molecular sieve drum, molecular sieve drum First outlet of the top exit through reversal valve be connected to the entrance of clarifier, the outlet of clarifier with first out pneumatic module enter Mouth connection;The clarifier draws sampling conduit, and gas analyzer is equipped on sampling conduit, and gas analyzer passes through linkage dress It sets and is connected with hydrogen solenoid valve.
According to the above scheme, described first goes out the third pipeline that pneumatic module includes entrance Yu clarifier outlet, Yi Jiyan Gas flow direction is configured in order in hydrogen flowing quantity control instrument A, hydrogen quality flow controller A on third pipeline and high-purity Spend hydrogen air outlet valve.
According to the above scheme, the cleaning equipment is configured with vacuum system, and vacuum system includes vacuum lead and vacuum pump, The vacuum lead is connected to second pipe, and vacuum butterfly valve and vacuum pump are installed on vacuum lead;On vacuum lead also It is communicated with vacuum deflation pipe, vacuum deflation pipe is equipped with vacuum deflation valve.
According to the above scheme, the cleaning equipment is also configured with inert gas emergency system, and inert gas emergency system includes The third pipeline and second that inert gas filter, entrance are connected to inert gas supply equipment go out pneumatic module, the third Inert gas intake valve, inert gas filter and inert gas solenoid valve are configured in order along gas flow direction on pipeline, it is lazy Property gas solenoid valve be connected with gas analyzer by linkage;The outlet of the third pipeline is connected to second pipe;Institute The entrance that second goes out pneumatic module is stated to be connected to the second outlet of reversal valve.
According to the above scheme, described second to go out pneumatic module include the 5th pipeline that entrance is connected to reversal valve second outlet, with And along gas flow direction configure in order on the 5th pipeline hydrogen flowing quantity control instrument B, hydrogen quality flow controller B, Low-purity hydrogen pressure gauge B, check valve B and low-purity hydrogen air outlet valve.
According to the above scheme, fire extinguisher A is additionally provided on the third pipeline.
According to the above scheme, the molecular sieve drum and clarifier are each configured with rupture pressure disc.
The invention has the benefit that
1, present invention setting hydrogen filter, molecular sieve drum and clarifier carry out three times the protohydrogen for entering purification system Filtering, obtains high-purity hydrogen: protohydrogen passes through hydrogen filter first, removes a part of vapor and dust;Pass through molecule again Screen drum has different diffusion rates to gas with various using molecular sieve, removes most oxygen;Finally by clarifier, into One step removes the vapor and dust mixed in hydrogen, provides high-purity hydrogen for the heat treatment of strip perhydro, avoids since hydrogen is pure Degree not enough leads to belt steel surface state and penalty;
2, present invention configuration vacuum subassembly, in certain vacuum degree, in hydrogen filter, molecular sieve and clarifier The absorption foreign gases such as vapor and dust can extract filtration system out by vacuum pump, ensure that each component normal table work Make;
3, the present invention is also configured with inert gas emergency system, dense after gas analyzer on-line checking protohydrogen filters three times When spending not up to standard, solenoid valve A can be controlled by interlock and close first pipe, opened solenoid electric valve B, utilize inert gas Emergency system is passed through High Purity Hydrogen or other inert gases, prevents the oxidation of cold-strip steel;
4, the present invention is equipped with rupture pressure disc on molecular sieve drum and clarifier, ensure that the safety of whole equipment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of a specific embodiment of the invention.
Wherein: 1-hydrogen gas ball valve, 2-hydrogen filters, 3-hydrogen solenoid valves, 4-inert gas air inlet ball valves, 5-inert gas filters, 6-inert gas solenoid valves, 7-first hydrogen pressure gauges, 8-molecular sieves, 9-rupture pressure disc A, 10- Reversal valve, 11-clarifiers, 12-rupture pressure disc B, 13-hydrogen flowing quantity control instrument A, 14-hydrogen quality flow controller A, 15-check valve A, 16-fire extinguisher A, 17-high-purity hydrogen air outlet valves, 18-hydrogen flowing quantity control instrument B, 19-hydrogen matter Measure flow controller B, 20-check valve B, 21-fire extinguisher B, 22-low-purity hydrogen air outlet valves, 23-low-purity hydrogen pressures Table, 24-vacuum deflation valves, 25-vacuum butterfly valves, 26-vacuum pumps, 27-sampling ball valves, 28-gas analyzers.
Specific embodiment
For a better understanding of the present invention, the present invention is further described in the following with reference to the drawings and specific embodiments.
A kind of high-purity hydrogen cleaning equipment as shown in Figure 1, the first pipe being connected to including entrance with protohydrogen supply line, Hydrogen filter 2, molecular sieve drum 8, clarifier 11 and first go out pneumatic module, configure 2 He of hydrogen filter in the first pipe The outlet of hydrogen solenoid valve 3, first pipe is connected to through second pipe with the bottom inlet of molecular sieve drum 8, the top of molecular sieve drum 8 First outlet of the outlet through reversal valve 10 is connected to the entrance of clarifier 11, and the outlet of clarifier 11 goes out entering for pneumatic module with first Mouth connection.In the present embodiment, hydrogen gas ball valve 1, hydrogen mistake are configured in order along gas flow direction in the first pipe Filter 2 and hydrogen solenoid valve 3 are equipped with just hydrogen pressure gauge 7 on second pipe.
Preferably, the clarifier 11 draws sampling conduit, is equipped with gas analyzer 28, gas analysis on sampling conduit Instrument 28 is connected by linkage with hydrogen solenoid valve 3.The sampling of control on-off is additionally provided in the present embodiment, on sampling conduit Ball valve 27.
In the present invention, described first goes out the third pipeline that pneumatic module includes entrance Yu 11 outlet of clarifier, Yi Jiyan Gas flow direction configure in order on third pipeline hydrogen flowing quantity control instrument A13, hydrogen quality flow controller A14 and High-purity hydrogen air outlet valve 17.Preferably, fire extinguisher A16 is additionally provided on the third pipeline.In the present embodiment, flowed along gas Direction configures in order hydrogen flowing quantity control instrument A13 on third pipeline, hydrogen quality flow controller A14, check valve A15, goes out Firearm A16 and high-purity hydrogen air outlet valve 17.
Preferably, the molecular sieve drum 8 and clarifier 11 are each configured with rupture pressure disc, specifically, are set to molecular sieve drum 8 On be rupture pressure disc A9, be rupture pressure disc B12 on clarifier 11.
Preferably, the cleaning equipment is configured with vacuum system, and vacuum system includes vacuum lead and vacuum pump 10, institute It states vacuum lead to be connected to second pipe, vacuum butterfly valve 25 and vacuum pump 26 is installed on vacuum lead;On vacuum lead It is also communicated with vacuum deflation pipe, vacuum deflation pipe is equipped with vacuum deflation valve 24.
Preferably, the cleaning equipment is also configured with inert gas emergency system, and inert gas emergency system includes inertia The third pipeline and second that pneumatic filter 5, entrance are connected to inert gas supply equipment go out pneumatic module, the third pipe Inert gas intake valve 4, inert gas filter 5 and inert gas solenoid valve 6 are configured in order along gas flow direction on road, it is lazy Property gas solenoid valve 6 be connected with gas analyzer 28 by linkage;The outlet of the third pipeline is connected to second pipe; Described second entrance for going out pneumatic module is connected to the second outlet of reversal valve 10.
In the present invention, described second to go out pneumatic module include the 5th pipeline that entrance is connected to 10 second outlet of reversal valve, with And it configures in order along gas flow direction in hydrogen flowing quantity control instrument B18, hydrogen quality flow controller on the 5th pipeline B19, low-purity hydrogen pressure gauge B23, check valve B20 and low-purity hydrogen air outlet valve 22.In the present embodiment, on the 5th pipeline It is additionally provided with fire extinguisher B21, specifically, fire extinguisher B21 is set between check valve B20 and low-purity hydrogen air outlet valve 22.
In the present invention, each element presses national standard chosen material, each valve, solenoid valve, filter, clarifier, molecular sieve Cartridge type number requires to be chosen according to furnace apparatus;Molecular screen material is chosen according to the production method of hydrogen.
The operation principle of the present invention is that:
1, installation and debugging are carried out as requested, leak detection purging is carried out after the completion of debugging: closing hydrogen gas ball valve 1, vacuum Butterfly valve 25, low-purity hydrogen air outlet valve 22 and high-purity hydrogen air outlet valve 17 open inert gas air inlet ball valve and are passed through nitrogen, The pointer variation of pressure gauge is observed, and each pipeline is detected with suds, observes each pipeline valve and each joint location With the presence or absence of air leakage point.
2, after the completion of leak detection purging, hydrogen gas ball valve, hydrogen solenoid valve, high-purity hydrogen air outlet valve 17 and sampling are opened Ball valve, closes vacuum butterfly valve 25 and low-purity hydrogen air outlet valve 22, and protohydrogen passes sequentially through hydrogen filter 2, molecular sieve drum 8 and net Change the filtration, purification three times of device 11, gas analyzer 28 obtains the density of hydrogen data and related impurities gas of clarifier outlet Concentration, when gas analyzer 28 detects density of hydrogen in the reasonable scope, filtered hydrogen is successively through hydrogen three times Mass flow controller A14, check valve A15, fire extinguisher A16 and high-purity hydrogen air outlet valve 17 are discharged, and anneal for strip perhydro It uses;After gas analyzer 28 detects the concentration over-standard of foreign gas in hydrogen, hydrogen electricity can be closed by interlock Magnet valve 3 opens inert gas air inlet ball valve 4 and is passed through emergency inert gas, carries out inspection cleaning to whole equipment each section at once, After having checked, opens hydrogen gas ball valve 1 and be passed through hydrogen, interlock, equipment can be automatically closed after density of hydrogen is normal Into normal operating conditions.
3, it is set using flow of the hydrogen flowing quantity control instrument B18 to hydrogen, it is not up to standard when there is density of hydrogen When situation, after being passed through inert gas completion strip annealing, inspection cleaning is carried out to whole equipment: being first shut off hydrogen gas ball valve 1, vacuum butterfly valve 25, vacuum deflation valve 24 open high-purity hydrogen air outlet valve 17, low-purity hydrogen air outlet valve 22, are passed through inertia After gas purges pipeline, high-purity hydrogen air outlet valve 17, low-purity hydrogen air outlet valve 22, sampling ball valve 27 are closed, is beaten Vacuum butterfly valve 25, vacuum pump 26 are opened, carries out vacuumize process to entire;The pointer variation for observing just hydrogen pressure gauge 7, reaches specified Vacuum pump 26 is closed after pressure value, inert gas is passed through and is purged, and is then passed through protohydrogen filtering again, is opened sampling ball valve 27, the concentration of hydrogen and the concentration of foreign gas are observed whether in the range of requiring by gas analyzer 28, hydrogen Concentration does not conform to repetition aforesaid operations (namely repeating to carry out inspection cleaning to whole equipment).
Through detecting, pass through after improving above in production, the concentration of hydrogen can be increased to 99.997% by 99.8%, gas The dew point of body can be increased to -60 degree by -10 degree, and the water content of gas is greatly reduced, and various gaseous impurities can be by 0.2% drop As low as 30ppm, the surface quality of strip anneal is improved.
Finally it should be noted that these are only the preferred embodiment of the present invention, it is not intended to restrict the invention, although Referring to embodiment, invention is explained in detail, for those skilled in the art, still can be to aforementioned Technical solution documented by each embodiment is modified or equivalent replacement of some of the technical features, but it is all Within the spirit and principles in the present invention, any modification, equivalent replacement, improvement and so on should be included in protection of the invention Within the scope of.

Claims (7)

1. a kind of high-purity hydrogen cleaning equipment, which is characterized in that the first pipe that is connected to including entrance with protohydrogen supply line, hydrogen Air filter, molecular sieve drum, clarifier and first go out pneumatic module, configure hydrogen filter and hydrogen electromagnetism in the first pipe The outlet of valve, first pipe is connected to through second pipe with the bottom inlet of molecular sieve drum, and the top exit of molecular sieve drum is through commutating The first outlet of valve is connected to the entrance of clarifier, and the entrance that the outlet of clarifier goes out pneumatic module with first is connected to;The purification Device draws sampling conduit, and gas analyzer is equipped on sampling conduit, and gas analyzer passes through linkage and hydrogen solenoid valve It is connected.
2. high-purity hydrogen cleaning equipment as described in claim 1, which is characterized in that described first go out pneumatic module include entrance with The third pipeline of clarifier outlet, and configure in order along gas flow direction in the hydrogen flowing quantity control on third pipeline Instrument A, hydrogen quality flow controller A and high-purity hydrogen air outlet valve.
3. high-purity hydrogen cleaning equipment as described in claim 1, which is characterized in that the cleaning equipment is configured with vacuum system System, vacuum system includes vacuum lead and vacuum pump, and the vacuum lead is connected to second pipe, pacifies on vacuum lead Fill vacuum butterfly valve and vacuum pump;Vacuum deflation pipe is also communicated on vacuum lead, vacuum deflation pipe is equipped with vacuum deflation valve.
4. high-purity hydrogen cleaning equipment as described in claim 1, which is characterized in that the cleaning equipment is also configured with indifferent gas Body emergency system, inert gas emergency system include that inert gas filter, entrance are connected to inert gas supply equipment Three pipelines and second go out pneumatic module, configures in order inert gas intake valve, lazy along gas flow direction on the third pipeline Property pneumatic filter and inert gas solenoid valve, inert gas solenoid valve is connected by linkage with gas analyzer;It is described The outlet of third pipeline is connected to second pipe;Described second entrance for going out pneumatic module is connected to the second outlet of reversal valve.
5. high-purity hydrogen cleaning equipment as claimed in claim 4, which is characterized in that described second go out pneumatic module include entrance with 5th pipeline of reversal valve second outlet connection, and configure in order along gas flow direction in the hydrogen flowing quantity on the 5th pipeline Control instrument B, hydrogen quality flow controller B, low-purity hydrogen pressure gauge B, check valve B and low-purity hydrogen air outlet valve.
6. high-purity hydrogen cleaning equipment as claimed in claim 2, which is characterized in that be additionally provided with fire extinguisher on the third pipeline A。
7. high-purity hydrogen cleaning equipment as described in claim 1, which is characterized in that the molecular sieve drum and clarifier are distinguished Configured with rupture pressure disc.
CN201910701108.6A 2019-07-31 2019-07-31 A kind of high-purity hydrogen cleaning equipment Pending CN110436414A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910701108.6A CN110436414A (en) 2019-07-31 2019-07-31 A kind of high-purity hydrogen cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910701108.6A CN110436414A (en) 2019-07-31 2019-07-31 A kind of high-purity hydrogen cleaning equipment

Publications (1)

Publication Number Publication Date
CN110436414A true CN110436414A (en) 2019-11-12

Family

ID=68432512

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910701108.6A Pending CN110436414A (en) 2019-07-31 2019-07-31 A kind of high-purity hydrogen cleaning equipment

Country Status (1)

Country Link
CN (1) CN110436414A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63315503A (en) * 1987-06-18 1988-12-23 Mitsubishi Gas Chem Co Inc Purification of hydrogen
US20120107219A1 (en) * 2010-11-02 2012-05-03 Mitsubishi Materials Corporation Apparatus and method for producing purified hydrogen gas by a pressure swing adsorption processes
CN202246045U (en) * 2011-09-29 2012-05-30 武汉钢铁(集团)公司 Hydrogen-nitrogen replacement device with vacuum pump of high-purity hydrogen purification device
US20140311220A1 (en) * 2011-12-07 2014-10-23 Peter R. Bossard System and Method of Quantifying Impurities Mixed within a Sample of Hydrogen Gas
JP2017087108A (en) * 2015-11-05 2017-05-25 大陽日酸株式会社 Hydrogen gas purification system and hydrogen gas purifying method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63315503A (en) * 1987-06-18 1988-12-23 Mitsubishi Gas Chem Co Inc Purification of hydrogen
US20120107219A1 (en) * 2010-11-02 2012-05-03 Mitsubishi Materials Corporation Apparatus and method for producing purified hydrogen gas by a pressure swing adsorption processes
CN202246045U (en) * 2011-09-29 2012-05-30 武汉钢铁(集团)公司 Hydrogen-nitrogen replacement device with vacuum pump of high-purity hydrogen purification device
US20140311220A1 (en) * 2011-12-07 2014-10-23 Peter R. Bossard System and Method of Quantifying Impurities Mixed within a Sample of Hydrogen Gas
JP2017087108A (en) * 2015-11-05 2017-05-25 大陽日酸株式会社 Hydrogen gas purification system and hydrogen gas purifying method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘京华等: "零排放氢气纯化器的工艺过程和运行分析", 《低温与特气》 *

Similar Documents

Publication Publication Date Title
CN109838686A (en) A kind of steel cylinder processing system and its application method and application
CN106442890A (en) Multichannel rapid air changing double-pump type gas detecting device
CN111593292B (en) Dynamic detection device and detection method for carbon potential of vacuum furnace
WO2023071678A1 (en) Apparatus and method for determining total sulfur content in solid sample
CN104089869B (en) Filtrate corrosion simulated experiment device and method
CN110436414A (en) A kind of high-purity hydrogen cleaning equipment
CN113984958A (en) System for analyzing flammability of gas in containment
CN110631887A (en) Front gas dilution device for precision instrument measurement
CN111855922A (en) Online sampling device
TW201643937A (en) Apparatus and method for detecting pollution location and computer readable recording medium
CN210923164U (en) Sampling pipeline of atmosphere analyzer in furnace
CN209372636U (en) A kind of filter clogging effect verifying attachment
CN217900973U (en) Gas flowmeter's calibrating device
CN212301505U (en) Online sampling device
CN105180644B (en) Muffle furnace and its controling of the pressure of the oven method
CN209069900U (en) Oxygen content on-line detecting system
CN113252529B (en) High-temperature gas-driven penetration testing system and method for metal pipe fitting
CN212505037U (en) Vacuum furnace carbon potential dynamic detection device
CN114778398A (en) Dust filtration testing device for automobile air conditioner filter element and dust recovery method
CN104291284A (en) Ultrapure argon online purification system and method
CN113866281A (en) Device and method for testing adsorption and desorption characteristics of full-pressure material in cross-temperature region
TW201913062A (en) Fluid sampling device
CN209655864U (en) Cooler behind air compressor is used in a kind of production of liquid oxygen liquid nitrogen
JP3614786B2 (en) Pressure swing adsorption gas generator
CN107131923A (en) Protection system and protection method of gas flowmeter

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20191112