CN110411953A - A kind of high-resolution micro spectrometer - Google Patents
A kind of high-resolution micro spectrometer Download PDFInfo
- Publication number
- CN110411953A CN110411953A CN201810404548.0A CN201810404548A CN110411953A CN 110411953 A CN110411953 A CN 110411953A CN 201810404548 A CN201810404548 A CN 201810404548A CN 110411953 A CN110411953 A CN 110411953A
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- dimensional
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- resolution micro
- micro spectrometer
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- 239000000758 substrate Substances 0.000 claims abstract description 17
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000007747 plating Methods 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims abstract description 5
- 239000013307 optical fiber Substances 0.000 claims abstract description 4
- 238000003754 machining Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention discloses a kind of high-resolution micro spectrometers, including input optical fibre, collimation lens, etalon array, grating, plus lens and the recipient being set in sequence along optical path, by setting one-dimensional or two-dimensional stepped as substrate in the plating of etalon array surface, so that the resolution ratio of spectrometer corresponds to numbers of steps and improves and promoted, and the step that processing criterion has array surface is carried out by optically coated form, machining high-precision can not only be reached, processing cost and difficulty can also be reduced, keep its cost more cheap, more conducively promotes.
Description
Technical field
The invention belongs to optical technology devices field, especially a kind of high-resolution micro spectrometer.
Background technique
Existing high-resolution spectrometer has that structure is complicated, volume is big or with high costs mostly, not only bad for
Portable use, and expense is high, it is difficult to and high-volume configures.
With the progress in epoch and the raising of living standard, the requirement of food-safe, Environmental security of people etc. is got over
Come higher, the standard of the detection of substance is also increasingly stringenter, high-resolution is convenient for carrying, the demand of the spectrometer of small size
Increasingly urgent.Since high-resolution spectrometer equipment mostly uses greatly mechanical system to be scanned acquisition substance currently on the market
Spectral information, the disadvantage in its large volume, quality increasingly displays, and the resolution of the spectrometer of small size in the market
Rate is very low, is unable to satisfy the needs of people substantially.
Summary of the invention
The case where for the prior art, the purpose of the present invention is to provide it is a kind of implement it is reliable, compact-sized simple and point
The high high-resolution micro spectrometer of resolution.
In order to realize above-mentioned technical purpose, the technical solution adopted by the present invention are as follows:
A kind of high-resolution micro spectrometer comprising the input optical fibre that is set in sequence along optical path, collimation lens, etalon array,
Grating, plus lens and recipient.
Further, the recipient is CMOS recipient.
Further, etalon array surface plating is equipped with one-dimensional step substrate or two-dimensional stepped substrate.
One of embodiment as etalon array, it is preferred that the one-dimensional step substrate is the one of ten grades
Grade step, every layer of difference 1nm~10nm height of the step substrate.
Using above-mentioned technical solution, the invention has the benefit that by etalon array surface plating set it is one-dimensional or
Two-dimensional stepped is as substrate, so that the resolution ratio of spectrometer of the present invention corresponds to numbers of steps and improves and promoted, in addition, by mark
The transformation of quasi- tool array improves so that the output of multiple centre of homology wavelength can be realized in the direction without changing incident light
The construction compressible of spectrometer enables it that can miniaturise, and carries out processing criterion tool by optically coated form
The step of array surface can not only reach machining high-precision, additionally it is possible to reduce processing cost and difficulty, keep its cost more low
It is honest and clean, more conducively promote.
Detailed description of the invention
The present invention is further elaborated with reference to the accompanying drawings and detailed description:
Fig. 1 is the brief configuration schematic diagram of spectrometer of the present invention；
Fig. 2 is one of the implementation structure of etalon array of spectrometer of the present invention schematic diagram.
Specific embodiment
As shown in the figures 1 and 2, the present invention includes the input optical fibre 1, collimation lens 2, etalon array being set in sequence along optical path
3, grating 4, plus lens 5 and recipient 6, wherein the recipient is CMOS recipient.
In addition, in order to improve the resolution ratio of spectrometer of the present invention, 3 surface of the etalon array plating is equipped with one-dimensional step
Substrate or two-dimensional stepped substrate 31, such as the spectroscopic optics system that 1nm is differentiated, using FSR=1nm, then being distinguished as 0.01nm
When, 1nm can be divided into 100 parts by 100 steps, the resolution ratio of spectrometer can be improved 100 times in this way, realize two
The promotion of the order of magnitude.
One of embodiment as etalon array, it is preferred that the one-dimensional step substrate is the one of ten grades
Grade step, more preferably, every layer of difference 1nm~10nm height of the step substrate.
The present invention uses above-mentioned technical solution, sets one-dimensional or two-dimensional stepped conduct by the plating on 3 surface of etalon array
Substrate 31, so that the resolution ratio of spectrometer of the present invention corresponds to numbers of steps and improves and promoted, in addition, by etalon array
Transformation improves the knot of spectrometer so that the output of multiple centre of homology wavelength can be realized in the direction without changing incident light
Structure compressibility enables it that can miniaturise, and carries out processing criterion by optically coated form and have array surface
Step can not only reach machining high-precision, additionally it is possible to reduce processing cost and difficulty, keep its cost more cheap, more conducively
It promotes.
The above is the embodiment of the present invention, for the ordinary skill in the art, religion according to the present invention
Lead, without departing from the principles and spirit of the present invention all equivalent changes done according to scope of the present invention patent, repair
Change, replacement and variant, is all covered by the present invention.
Claims (6)
1. a kind of high-resolution micro spectrometer, it is characterised in that: it includes the input optical fibre being set in sequence along optical path, collimates thoroughly
Mirror, etalon array, grating, plus lens and recipient.
2. a kind of high-resolution micro spectrometer according to claim 1, it is characterised in that: the recipient connects for CMOS
Receiver.
3. a kind of high-resolution micro spectrometer according to claim 1, it is characterised in that: the etalon array surface
Plating is equipped with one-dimensional step substrate or two-dimensional stepped substrate.
4. a kind of high-resolution micro spectrometer according to claim 3, it is characterised in that: the one-dimensional step substrate is
Ten grades of level-one step.
5. a kind of high-resolution micro spectrometer according to claim 3, it is characterised in that: the two-dimensional stepped substrate is
10X10 grades of two stage steps substrate.
6. a kind of high-resolution micro spectrometer according to claim 3 or 4 or 5, it is characterised in that: the step substrate is every
Layer difference 1nm~10nm height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810404548.0A CN110411953A (en) | 2018-04-28 | 2018-04-28 | A kind of high-resolution micro spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810404548.0A CN110411953A (en) | 2018-04-28 | 2018-04-28 | A kind of high-resolution micro spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110411953A true CN110411953A (en) | 2019-11-05 |
Family
ID=68357213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810404548.0A Pending CN110411953A (en) | 2018-04-28 | 2018-04-28 | A kind of high-resolution micro spectrometer |
Country Status (1)
| Country | Link |
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| CN (1) | CN110411953A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021196744A1 (en) * | 2020-03-31 | 2021-10-07 | 北京科益虹源光电技术有限公司 | Laser spectrum online measurement device and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020101589A1 (en) * | 2001-01-29 | 2002-08-01 | Sandstrom Richard L. | High resolution etalon-grating spectrometer |
| US20020101588A1 (en) * | 2001-01-29 | 2002-08-01 | Sandstrom Richard L. | High resolution etalon-grating monochromator |
| US20020121608A1 (en) * | 2001-01-29 | 2002-09-05 | Sandstrom Richard L. | High resolution spectral measurement device |
| US20060001882A1 (en) * | 2004-06-30 | 2006-01-05 | Digital Optics Corporation | Spectrally diverse spectrometer and associated methods |
| US20060232781A1 (en) * | 2004-11-18 | 2006-10-19 | Morgan Research Corporation | Miniature fourier transform spectrophotometer |
| CN101363754A (en) * | 2008-10-06 | 2009-02-11 | 福州高意光学有限公司 | Simple spectrometer |
| CN103017904A (en) * | 2012-12-19 | 2013-04-03 | 福州高意光学有限公司 | Miniature spectrometer with adjustable resolution ratio |
| US20150253189A1 (en) * | 2013-05-21 | 2015-09-10 | Michael K. Yetzbacher | Method and apparatus for multiplexed fabry-perot spectroscopy |
-
2018
- 2018-04-28 CN CN201810404548.0A patent/CN110411953A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020101589A1 (en) * | 2001-01-29 | 2002-08-01 | Sandstrom Richard L. | High resolution etalon-grating spectrometer |
| US20020101588A1 (en) * | 2001-01-29 | 2002-08-01 | Sandstrom Richard L. | High resolution etalon-grating monochromator |
| US20020121608A1 (en) * | 2001-01-29 | 2002-09-05 | Sandstrom Richard L. | High resolution spectral measurement device |
| US20060001882A1 (en) * | 2004-06-30 | 2006-01-05 | Digital Optics Corporation | Spectrally diverse spectrometer and associated methods |
| US20060232781A1 (en) * | 2004-11-18 | 2006-10-19 | Morgan Research Corporation | Miniature fourier transform spectrophotometer |
| CN101363754A (en) * | 2008-10-06 | 2009-02-11 | 福州高意光学有限公司 | Simple spectrometer |
| CN103017904A (en) * | 2012-12-19 | 2013-04-03 | 福州高意光学有限公司 | Miniature spectrometer with adjustable resolution ratio |
| US20150253189A1 (en) * | 2013-05-21 | 2015-09-10 | Michael K. Yetzbacher | Method and apparatus for multiplexed fabry-perot spectroscopy |
Non-Patent Citations (4)
| Title |
|---|
| ANATOLIY MANUILSKIY, HENRIK ANDERSSON, GÖRAN THUNGSTRÖM: "Compact multichannel optical Fourier spectrometer", 《PROCEEDINGS OF SPIE》 * |
| 孔延梅等: "调制光谱仪的微型化研究进展", 《半导体光电》 * |
| 王永清等: "基于微电子机械***微型光谱仪的研究与进展", 《冶金分析》 * |
| 鞠挥等: "微型光谱仪的发展", 《微纳电子技术》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021196744A1 (en) * | 2020-03-31 | 2021-10-07 | 北京科益虹源光电技术有限公司 | Laser spectrum online measurement device and method |
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Application publication date: 20191105 |