CN110406871A - Article carrying equipment - Google Patents

Article carrying equipment Download PDF

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Publication number
CN110406871A
CN110406871A CN201910344514.1A CN201910344514A CN110406871A CN 110406871 A CN110406871 A CN 110406871A CN 201910344514 A CN201910344514 A CN 201910344514A CN 110406871 A CN110406871 A CN 110406871A
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CN
China
Prior art keywords
aforementioned
article
shifting apparatus
conveyer
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910344514.1A
Other languages
Chinese (zh)
Other versions
CN110406871B (en
Inventor
坂本纯一
吉冈秀郎
森下良治
高原史雄
花木高介
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Daifuku Co Ltd
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Daifuku Co Ltd
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Filing date
Publication date
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Publication of CN110406871A publication Critical patent/CN110406871A/en
Application granted granted Critical
Publication of CN110406871B publication Critical patent/CN110406871B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Control Of Conveyors (AREA)
  • Sewing Machines And Sewing (AREA)

Abstract

Have the 1st handling device (1) and the 2nd handling device (2), 1st handling device (1) has the 1st shifting apparatus (6), 2nd shifting apparatus (7), lifting body, the carrying amount of 1st kind of article (T1) is total more than the carrying amount of the 2nd kind of article (T2) and the carrying amount of the 3rd kind of article (T3), 2nd handling device (2) has the 1st conveyer (21) and the 2nd conveyer (22) for only carrying the 1st kind of article, only carry the 3rd conveyer (23) of the 2nd kind of article and the 3rd kind of article, 1st conveyer (21) and the 2nd conveyer (22) can be performed simultaneously to the transfer of the 1st kind of article based on the 1st shifting apparatus (6), the interval of the transfer of the 1st kind of article based on the 2nd shifting apparatus is arranged, by the 1st conveyer (21) and the 3rd conveyer with The interval setting of the transfer of the 1st kind of article based on the 1st shifting apparatus, the transfer of the 2nd kind of article and the 3rd kind of article based on the 2nd shifting apparatus can be performed simultaneously.

Description

Article carrying equipment
Technical field
The present invention relates to the article carrying equipment for having the 1st handling device and the 2nd handling device.
Background technique
Background technique is illustrated below.In the following description, parenthesized appended drawing reference or entitled first skill Appended drawing reference or title in art document.The existing example of the article carrying equipment is recorded in Japanese Unexamined Patent Publication 2018-039660 Bulletin (patent document 1).The article carrying equipment of patent document 1 has the 1st handling device (the 2nd handling device 3) and the 2nd and carries Device (the 1st handling device 2).1st handling device (the 2nd handling device 3) has the 1st shifting apparatus (lower section transfer portion 34a), The lifting body (the 2nd lifting body 32) of 2 shifting apparatus (top transfer portion 34b), the 1st shifting apparatus of bearing and the 2nd shifting apparatus.The 1 shifting apparatus and the 2nd shifting apparatus are constituted in the same manner, are configured to from below support article.(the 1st carries 2nd handling device Device 2) it is set as carrying the conveyer of article in the horizontal direction.
The article carrying equipment of patent document 1 is configured to by by the 1st shifting apparatus and the carrying of the 2nd shifting apparatus Article carries two articles together, improves the handling efficiency of article.
But although the 1st handling device of patent document 1, the 2nd handling device are using the article of a type as carrying pair As, but the case where carrying different types of article together in need.
For example, in the 1st handling device of patent document 1 and the 2nd handling device, only by front open type wafer feeder (FOUP) as the article of moving object, but it is in need will be with the diverse receiving reticule of the front open type wafer feeder Reticule container, accommodate EUV mask EUV container handling the case where.Front open type wafer transmission is carried in this wise In the case where box, reticule container and EUV container, generally, the carrying amount EUV container of reticule container Adding up to for carrying amount is fewer than the carrying amount of front open type wafer feeder.Such as the example in this way, carrying different types of article In the case of, also there is the carrying amount situation devious for type of goods.
In addition, as described above, being configured to the 1st transfer dress using the article of multiple types as moving object The article for being able to maintain multiple types with the both sides of the 2nd shifting apparatus is set, and is configured to have multiple biographies in the 2nd handling device Send machine and each of these multiple conveyers can be by the article carrying of multiple types, thereby, it is possible to improve the carrying of article Efficiency.But the entirety about the 1st handling device and the 2nd handling device, if being configured to keep multiple kinds as described above The article of class then has the problem of manufacturing cost of article carrying equipment greatly improves.
Summary of the invention
Therefore, it is intended that realizing the handling efficiency for improving article while the rising of manufacturing cost capable of being suppressed to less Article carrying equipment.
Article carrying equipment in view of the foregoing has the 1st handling device and the 2nd handling device, mutually not by outer dimension Identical 1st kind of article, the 2nd kind of article, the 3rd kind of article are as moving object, which is characterized in that aforementioned 1st handling device tool Standby 1st shifting apparatus, the 2nd shifting apparatus, lifting body, aforementioned 2nd shifting apparatus are set to the up and down direction along up and down direction The position Chong Die with aforementioned 1st shifting apparatus when observation, aforementioned lifting body support aforementioned 1st shifting apparatus and aforementioned 2nd transfer Device, and moved along aforementioned up and down direction, aforementioned 1st shifting apparatus is configured to, only can be by aforementioned 1st kind of article, the aforementioned 2nd Aforementioned 1st kind of article in kind of article and aforementioned 3rd kind of article is in itself transfer between aforementioned 2nd handling device, and the aforementioned 2nd Shifting apparatus is configured to, can be by aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article in itself and aforementioned the Transfer between 2 handling devices, carrying amount of the carrying amount than aforementioned 2nd kind of article of aforementioned 1st kind of article and aforementioned 3rd kind of article Carrying amount it is total more, aforementioned 2nd handling device has aforementioned 1st kind of article, aforementioned 2nd kind of article and the aforementioned 3rd only The 1st conveyer and the 2nd conveyer that aforementioned 1st kind of article in kind of article is carried in the horizontal direction, only by aforementioned 1st kind of object Aforementioned 2nd kind of article and aforementioned 3rd kind of article in product, aforementioned 2nd kind of article and aforementioned 3rd kind of article are carried in the horizontal direction The 3rd conveyer, aforementioned 1st shifting apparatus will be provided with the one of aforementioned 2nd shifting apparatus in aforementioned up and down direction Side is set as up and down direction particular side, and aforementioned 2nd conveyer is arranged in aforementioned up and down direction particular side relative to aforementioned 1st conveyer With aforementioned 3rd conveyer, aforementioned 1st conveyer and aforementioned 2nd conveyer are can be performed simultaneously based on aforementioned 1st shifting apparatus The transfer of itself aforementioned 1st kind of article between aforementioned 1st conveyer, itself based on aforementioned 2nd shifting apparatus be with before State the interval setting of the transfer of the aforementioned 1st kind of article between the 2nd conveyer, aforementioned 1st conveyer and aforementioned 3rd conveyer with The shifting of the aforementioned 1st kind of article of itself based on aforementioned 1st shifting apparatus between aforementioned 1st conveyer can be performed simultaneously It carries, the aforementioned 2nd kind of article and aforementioned 3rd kind of article of itself based on aforementioned 2nd shifting apparatus between aforementioned 3rd conveyer Transfer interval setting.
According to the program, the 1st kind of object of itself based on the 1st shifting apparatus between the 1st conveyer can be performed simultaneously The transfer of the 1st kind of article of the transfer of product, itself based on the 2nd shifting apparatus between the 2nd conveyer.Furthermore it is possible to simultaneously Execute the transfer of the 1st kind of article of itself based on the 1st shifting apparatus between the 1st conveyer, based on the 2nd shifting apparatus from The transfer of the 2nd kind of article or the 3rd kind of article between body and the 3rd conveyer.
That is, even if the 2nd shifting apparatus keep the 1st kind of article, the 2nd kind of article, the 3rd kind of article some article feelings Under condition, the transfer based on the 1st shifting apparatus and the transfer based on the 2nd shifting apparatus can be also performed simultaneously.Also, will not It, can be relatively more by carrying amount in the case that the 2nd kind of fewer article is measured in carrying, the 3rd kind of article is held in the 2nd shifting apparatus The 1st kind of article be held in the 2nd shifting apparatus, so can be improved the handling efficiency of article.In addition, the 1st shifting apparatus can The structure for only keeping the 1st kind of article is thought, in addition, the 1st conveyer and the 2nd conveyer can be the knot of only the 1st kind of article of carrying Structure is only configured to the structure that 3 kinds of articles are kept or carried with the 2nd shifting apparatus and the 3rd conveyer, so can will manufacture The rising of cost is suppressed to less.
Therefore, according to the program, the carrying effect of article is improved while the rising of manufacturing cost capable of being suppressed to less Rate.
Detailed description of the invention
Fig. 1 is the main view of article carrying equipment.
Fig. 2 is the side view of apparatus for handling goods.
Fig. 3 is the side view that the 1st maintaining part is in down position and the 1st shifting apparatus in the 1st retracted position.
Fig. 4 is the side view that the 1st maintaining part is in down position and the 1st shifting apparatus in the 1st prominent position.
Fig. 5 is the side view that the 2nd maintaining part is in lifting position and the 2nd shifting apparatus in the 2nd retracted position.
Fig. 6 is the side view that the 2nd maintaining part is in lifting position and the 2nd shifting apparatus in the 2nd retracted position.
Fig. 7 is the side view that the 2nd maintaining part is in lifting position and the 2nd shifting apparatus in the 2nd retracted position.
Fig. 8 be the 2nd maintaining part be in the 1st kind with down position and in the 2nd prominent position the 2nd shifting apparatus side view Figure.
Fig. 9 be the 2nd maintaining part be in the 2nd kind with down position and in the 2nd prominent position the 2nd shifting apparatus side view Figure.
Figure 10 be the 2nd maintaining part be in the 3rd kind with down position and in the 2nd prominent position the 2nd shifting apparatus side View.
Figure 11 is the top view of the 1st conveyer.
Figure 12 is the top view of the 2nd conveyer and the 3rd conveyer.
Figure 13 is the vertical profile main view of the 2nd conveyer and the 3rd conveyer.
Figure 14 is control block diagram.
Figure 15 is the explanatory diagram of move loading action.
Specific embodiment
1. embodiment
Based on attached drawing, illustrate the embodiment for the article carrying equipment for having apparatus for handling goods.
As shown in Figure 1, article carrying equipment has lift handling device 1 (being equivalent to apparatus for handling goods) and conveyer Formula handling device 2.Lift handling device 1 carries article between lower layer D and the upper layer U for being comparably upper layer with lower layer D.It passes It send machine formula handling device 2 to be set to lower layer D and upper layer U, carries article in the horizontal direction.
The moving object of lift handling device 1 and conveyor type handling device 2 is the 1st class article K1 and the 1st class object The diverse 2nd class article K2 of product K1.1st class article K1 is the 1st kind of article T1.2nd class article K2 includes the 2nd kind of article T2 With the 3rd kind of article T3.1st kind of article T1 is different from the 2nd kind of article T2 and the 3rd kind of article T3 both sides' outer dimension.2nd kind of article T2 and the 3rd kind of article T3 outer dimension are different.That is, lift handling device 1 and conveyor type handling device 2 are by shape ruler Very little mutually different 1st kind of article T1, the 2nd kind of article T2, the 3rd kind of article T3 are as moving object.
Also, the carrying amount of the 1st class article K1 is more than the carrying amount of the 2nd class article K2.That is, the carrying of the 1st kind of article T1 It is more to measure adding up to for the carrying amount of the carrying amount and the 3rd kind of article T3 than the 2nd kind of article T2.It in the present embodiment, will be with the 1st kind Article T1 measures less the 2nd kind of article T2 and the 3rd kind of article T3 together as the 2nd class article K2 compared to carrying, by carrying amount compared with The 1st kind of more article T1 classify as the 1st class article K1.
As shown in Figures 3 to 5, the 1st kind of article T1 has the 1st maintained portion F1 on top.As shown in FIG. 6 and 7, the 2nd Kind article T2 has the 2nd maintained portion F2 on top.As shown in FIG. 9 and 10, the 3rd kind of article T3 has the 3rd on top and is protected Hold portion F3.In addition, the 1st maintained portion F1 is equivalent to the 1st class maintained portion R1 that the top of the 1st class article K1 has, the 2nd quilt Maintaining part F2 and the 3rd maintained portion F3 is equivalent to the 2nd class maintained portion R2 that the top of the 2nd class article K2 has.
As shown in Figures 5 to 7, the size of the 2nd kind of article T2 up and down direction Z compared with the 3rd kind of article T3 is larger, and the 1st kind The size of article T1 up and down direction Z compared with the 2nd kind of article T2 and the 3rd kind of article T3 is larger.Therefore, by the 2nd shifting apparatus 7 The 2nd maintaining part 16 keep the 2nd kind of article T2 the 2nd maintained portion F2 the case where the 2nd kind of article T2 lower end height, than 3rd kind of article of the case where keeping the 3rd maintained portion F3 of the 3rd kind of article T3 by the 2nd maintaining part 16 of the 2nd shifting apparatus 7 The height of the lower end of T3 is low.In addition, keeping the 1st of the 1st kind of article T1 to be kept by the 2nd maintaining part 16 of the 2nd shifting apparatus 7 The height of the lower end of the 1st kind of article T1 of the case where portion F1, than being kept for the 2nd kind by the 2nd maintaining part 16 of the 2nd shifting apparatus 7 The height of the lower end of the 2nd kind of article T2 of the case where the 2nd maintained portion F2 of article T2 and by the 2nd of the 2nd shifting apparatus 7 Maintaining part 16 keeps the height of the lower end of the 3rd kind of article T3 of the case where the 3rd maintained portion F3 of the 3rd kind of article T3 low.
In the present embodiment, the 1st kind of article T1 is the wafer container for accommodating semiconductor crystal wafer, and the 2nd kind of article T2 is The EUV container of EUV exposure mask is accommodated, the 3rd kind of article T3 is the reticule container for accommodating reticule.Specifically, the 1st kind Article T1 be front open type wafer feeder (FOUP, Front Opening Unified Pod) and open front transportation box (FOSB, Front Opening Shipping Box).2nd kind of article T2 is the EUV container according to the E152 of SEMI specification.3rd kind Article T3 is the reticule container according to the E111 of SEMI specification.1st maintained portion F1, the 2nd maintained portion F2 and the 3rd quilt Maintaining part F3 is the flange part that the upper surface part of each container has.
In the present embodiment, the position movement of the 2nd shifting apparatus 7 of lift handling device 1 impacted " outer dimension is different " are set as in the case that outer dimension is different.That is, the 2nd shifting apparatus 7 is the knot for keeping the flange part of container Structure, thus the height of the flange part of container be identical height and the flange part the identical situation of shape under be set as " shape ruler It is very little identical ", " outer dimension is different " are set as under the height of the flange part of container is different or the variform situation of the flange part. Although the 2nd shifting apparatus 7 can support the 1st kind of article T1, the 2nd kind of article T2, the 3rd kind of article T3, in the 1st kind of article The bottom surface of T1, the bottom surface of the 2nd kind of article T2, the 3rd kind of article T3 bottom surface be supported in identical height in the case where, these objects The height of the flange part of product is different, so these articles " outer dimension is different ", the 1st kind of article T1, the 2nd kind of article T2, the 3rd kind The movement of the case where transfer of article T3 is different.Therefore, these the 1st kind of article T1, the 2nd kind of article T2, the 3rd kind of article T3 are not Same type.On the other hand, there are front open type wafer feeder and open front transportation box, but their container as the 1st kind of article T1 Flange height it is identical, the shape of flange part is also identical, so they are not " outer dimension different ", but outer dimension phase Same article, the as article of identical type.In addition, in the present embodiment, the 2nd kind of article T2 and the 3rd kind of article T3's is convex The shape of edge is identical.I.e. in the present embodiment, the identical 2nd kind of article T2 of the shape of flange part and the 3rd kind of article T3 quilt It is categorized into the 2nd class article K2, also different the 1st kind of article T1 is divided different from the shape of their flange parts and flange part height Class is at the 1st class article K1.
As shown in Fig. 2, lift handling device 1 has the 1st shifting apparatus 6, the 2nd shifting apparatus 7, lifting body 8, aforementioned 2 shifting apparatus 7 be set to compared with the 1st shifting apparatus 6 against the top and in the up and down direction Z observation along up and down direction Z with The position of 1st shifting apparatus 6 overlapping, aforementioned lifting body 8 supports the 1st shifting apparatus 6 and the 2nd shifting apparatus 7, and is used by lifting Z is mobile along the vertical direction for the driving of motor 9 (referring to Fig.1 3).By being provided with relative to the 1st shifting apparatus 6 on up and down direction Z In the case that the side of 2nd shifting apparatus 7 is set as up and down direction particular side, in the present embodiment, up and down direction particular side is Upside on up and down direction Z.
1st shifting apparatus 6 is configured to, only can be by the 1st class article K1 (the 1st kind of article T1) and the 2nd class article K2 the (the 2nd Kind of article T2 and the 3rd kind of article T3) in the 1st class article K1 (the 1st kind of article T1) itself moved between transfer object position 3 It carries.2nd shifting apparatus 7 is configured to, can be by the 1st class article K1 (the 1st kind of article T1) and the 2nd class article K2 (the 2nd kind of article T2 And the 3rd kind of article T3) both sides in itself transfer between transfer object position 3.
In addition, " can be in itself transfer between transfer object position 3 " indicates, the 1st transfer in the 1st shifting apparatus 6 Device 6 can be from transfer from the 1st shifting apparatus 6 to the 1st class article K1 of 3 transfer of transfer object position, the 1st shifting apparatus 6 Object position 3 is to the 1st class article K1 of 6 transfer of the 1st shifting apparatus.In addition, " at itself and can be moved in the 2nd shifting apparatus 7 Carry transfer between object position 3 " it indicates, the 2nd shifting apparatus 7 can be from the 2nd shifting apparatus 7 to 3 transfer the 1st of transfer object position Class article K1 or the 2nd class article K2, the 2nd shifting apparatus 7 can be from transfer object positions 3 to the 1st class of 7 transfer of the 2nd shifting apparatus Article K1 or the 2nd class article K2.
As shown in FIG. 11 and 12, when Z is observed in above-below direction, has transfer in the mode being located at around lifting body 8 Object position 3.At the transfer object position 3, have the supporting mass 10 of supports articles, a part of conveyor type handling device 2. 1st shifting apparatus 6 the 1st kind of article T1 of transfer between supporting mass 10 at itself, and in itself and conveyor type handling device 2 Between the 1st kind of article T1 of transfer.2nd shifting apparatus 7 the 1st kind of article T1 of transfer, the 2nd kind of article between supporting mass 10 at itself T2 and the 3rd kind of article T3, and at itself between conveyor type handling device 2 the 1st kind of article T1 of transfer, the 2nd kind of article T2 and the 3rd kind of article T3.
As shown in Fig. 2, the 1st shifting apparatus 6 has the 1st maintaining part the 11, the 1st prominent back body 12, the 1st elevating mechanism 13, the 1st rotating mechanism 14, aforementioned 1st maintaining part 11 keep the 1st class article K1 (the 1st kind of article T1), and aforementioned 1st protrusion is retracted Mechanism 12 makes the 1st maintaining part 11 to the 1st retracted position and relative to the 1st retracted position to side existing for transfer object position 3 1st prominent position outstanding is mobile, and aforementioned 1st elevating mechanism 13 makes the 1st maintaining part 11 relative to the 1st prominent 12 edge of back body Up and down direction Z is mobile, and aforementioned 1st rotating mechanism 14 rotates the 1st prominent back body 12 around the axle center of Z along the vertical direction.
In the present embodiment, the 1st prominent back body 12 is made of joint arm (ス カ ラ ー ア ー system).1st is prominent The base portion of back body 12 is rotatably freely linked to lifting body 8 around the axle center of Z along the vertical direction, retracts machine in the 1st protrusion The terminal part of structure 12 is linked with the 1st elevating mechanism 13.1st prominent back body 12 by along it is prominent retract direction X and stretch make 1st maintaining part 11 is retracted direction X along protrusion and is moved.1st elevating mechanism 13 has the main body for being fixed on the 1st prominent back body 12 Portion 13A, main part 13A can be supported on up and down and is fixed on the lifting unit 13B of the 1st maintaining part 11.1st elevating mechanism 13 By making lifting unit 13B relative to main part 13A, mobile to make the 1st maintaining part 11, Z is mobile along the vertical direction by Z along the vertical direction. 1st maintaining part 11 is configured to, and is kept by supporting the bottom surface of the 1st class article K1 from below.
As shown in Figures 3 and 4, the 1st shifting apparatus 6 carry out at itself between transfer object position 3 the 1st class article of transfer The move loading action of K1.1st shifting apparatus 6 is configured to, and carries out (prominent to move back along the direction at connection lifting body 8 and transfer object position 3 Return direction X) protrusion prominent and retract retract movement and along the vertical direction the lifting action of Z lifting as move loading action.
The protrusion of 1st shifting apparatus 6 retracts movement to move back the 1st maintaining part 11 from the 1st by the 1st prominent back body 12 Return, which is set, makes the 1st maintaining part 11 from the 1st to the prominent movement in the 1st prominent position the outstanding 1st, by the 1st prominent back body 12 What prominent position was retracted to the 1st retracted position the 1st retracts movement.In addition, the lifting action of the 1st shifting apparatus 6 is by the 1st liter Descending mechanism 13 makes the 1st maintaining part 11 ramp up the 1st vertical motion of position rising from down position, by the 1st elevating mechanism 13 The 1st lowering action for declining the 1st maintaining part 11 from lifting position to down position.
1st shifting apparatus 6 remains the 1st from itself to 3 the 1st kind of article T1 of transfer of transfer object position The 1st maintaining part 11 of kind article T1 is moved back on the X of direction in the 1st in lifting position from Z in above-below direction and in prominent retract The state that return is set is carried out according to the 1st prominent movement, the 1st lowering action, the 1st sequence for retracting movement.
In addition, the 1st shifting apparatus 6 is not protected from transfer object position 3 to the 1st kind of article T1 of itself transfer The 1st maintaining part 11 for holding the 1st kind of article T1 is on the X of direction in down position from Z in above-below direction and in prominent retract The state of 1st retracted position is carried out according to the 1st prominent movement, the 1st vertical motion, the 1st sequence for retracting movement.
Also, the 1st shifting apparatus 6 is configured to, by revolving the 1st prominent back body 12 around the axle center of Z along the vertical direction Turn, the protrusion that can change the 1st maintaining part 11 when the 1st prominent back body 12 being made to stretch retracts direction X.Thereby, it is possible to The 1st kind of article T1 of transfer between 5 transfer object positions 3 of surrounding arrangement.
As shown in Fig. 5 to Figure 11, the 2nd shifting apparatus 7 has the prominent back body the 17, the 2nd of the 2nd maintaining part the 16, the 2nd and goes up and down Mechanism 18, the 2nd rotating mechanism 19, aforementioned 2nd maintaining part 16 can be by the 1st class article K1 (the 1st kind of article T1) and the 2nd class articles K2 (the 2nd kind of article T2 and the 3rd kind of article T3) is kept, and aforementioned 2nd prominent back body 17 can make the 2nd maintaining part 16 to the 2 retracted positions and mobile to the 2nd prominent position outstanding of side existing for transfer object position 3 relative to the 2nd retracted position, it is preceding State the 2nd elevating mechanism 18 the 2nd maintaining part 16 can be made relative to the 2nd prominent back body 17 Z is mobile along the vertical direction, aforementioned the 2 rotating mechanisms 19 rotate the 2nd prominent back body 17 around the axle center of Z along the vertical direction.
In the present embodiment, the 2nd prominent back body 17 is made of joint arm.The base portion of 2nd prominent back body 17 It is rotatably freely linked to lifting body 8 around the axle center of Z along the vertical direction, in the terminal part connection of the 2nd prominent back body 17 There is the 2nd elevating mechanism 18.2nd prominent back body 17 by along it is prominent retract direction X and stretch make the 2nd maintaining part 16 along protrusion It is mobile to retract direction X.2nd elevating mechanism 18, which has, to be fixed on the main part 18A of the 2nd prominent back body 17, can be gone up and down Ground is supported on main part 18A and is fixed on the lifting unit 18B of the 2nd maintaining part 16.2nd elevating mechanism 18 is by making lifting unit 18B Relative to main part 18A, to make the 2nd maintaining part 16, Z is mobile along the vertical direction for Z movement along the vertical direction.2nd maintaining part 16 is constituted For can have the top for the 1st class maintained portion R1, the 2nd class article K2 that the top of the 1st class article K1 has 2 class maintained portion R2 are kept.
2nd maintaining part 16 is illustrated.2nd maintaining part 16, which has mutual distance in the horizontal direction, to be left and moves freely A pair of of grasping claw 16A.2nd maintaining part 16 is configured to, can be switched to the proximity state for keeping a pair of of grasping claw 16A close to each other, The leave state for leaving a pair of of grasping claw 16A mutually.Under leave state, the interval of a pair of of grasping claw 16A is kept than the 1st Portion F1, the 2nd maintained portion F2, the width of the 3rd maintained portion F3 are wide, and under proximity state, a pair of of grasping claw 16A is protected than the 1st It is all narrow to hold portion F1, the 2nd maintained portion F2, any one width of the 3rd maintained portion F3.Therefore, the 2nd maintaining part 16 is constituted For can have the top for the 1st maintained portion F1, the 2nd kind of article T2 that the top of the 1st kind of article T1 has the 2nd Any one of the 3rd maintained portion F3 that has of top of maintained portion F2, the 3rd kind of article T3 are kept.
2nd shifting apparatus 7 itself moving the 1st class article K1, the 2nd class article K2 between transfer object position 3 The move loading action of load.2nd shifting apparatus 7 is configured to, and in addition to protrusion retracts movement and lifting action, also carries out keeping the 1st class object The holding movement of product K1 or the 2nd class article K2 are used as move loading action.
The protrusion of 2nd shifting apparatus 7 retracts movement and is, makes the 2nd maintaining part 16 from the 2nd by the 2nd prominent back body 17 Retracted position makes the 2nd maintaining part 16 from the to the prominent movement in the 2nd prominent position the outstanding 2nd, by the 2nd prominent back body 17 What 2 prominent positions were retracted to the 2nd retracted position the 2nd retracts movement.In addition, the lifting action of the 2nd shifting apparatus 7 is, by the 2nd Elevating mechanism 18 makes the 2nd maintaining part 16 ramp up the 2nd vertical motion of position rising, makes the 2nd holding by the 2nd elevating mechanism 18 Portion 16 makes the 2nd guarantor with lowering action, by the 2nd elevating mechanism 18 with the 1st kind that down position declines from lifting position to the 1st kind Holding portion 16 makes the 2nd with lowering action, by the 2nd elevating mechanism 18 with the 2nd kind that down position declines from lifting position to the 2nd kind Maintaining part 16 declined from lifting position to the 3rd kind with down position the 3rd kind with lowering action.In addition, the 2nd shifting apparatus 7 Holding movement is makes the 2nd maintaining part 16 switch to the departure motion of leave state from proximity state, makes the 2nd maintaining part 16 from leaving State switch to proximity state close to movement.
The case where 2nd shifting apparatus 7 from itself (the 1st shifting apparatus 6) is to 3 the 1st kind of article T1 of transfer of transfer object position Under, direction X is retracted in lifting position on Z and in protrusion in above-below direction from the 2nd maintaining part 16 of the 1st kind of article T1 is remain The upper state in the 2nd retracted position, according to the 2nd prominent movement, the 1st kind with lowering action, departure motion, the 2nd vertical motion, 2nd sequence for retracting movement carries out.
In addition, the 2nd shifting apparatus 7 is from the 1st kind of article T1 of transfer object position 3 to itself (the 1st shifting apparatus 6) transfer In the case where, from by any one the 2nd maintaining part not kept of the 1st kind of article T1, the 2nd kind of article T2, the 3rd kind of article T3 16 are in the state of the 2nd retracted position in lifting position on Z and in prominent retract in above-below direction on the X of direction, prominent according to the 2nd Out movement, the 1st kind carried out with lowering action, close to movement, the 2nd vertical motion, the 2nd sequence for retracting movement.
2nd shifting apparatus 7 is from itself (the 1st shifting apparatus 6) to the feelings of 3 the 2nd kind of article T2 of transfer of transfer object position Under condition, from remain the 2nd maintaining part 16 of the 2nd kind of article T2 in above-below direction on Z in lifting position and in the prominent side of retracting It is in the state of the 2nd retracted position on X, is risen according to the 2nd prominent movement, the 2nd kind with lowering action, departure motion, the 2nd and is moved Make, the 2nd sequence for retracting movement carries out.
In addition, the 2nd shifting apparatus 7 is from the 2nd kind of article T2 of transfer object position 3 to itself (the 1st shifting apparatus 6) transfer In the case where, from by any one the 2nd maintaining part not kept of the 1st kind of article T1, the 2nd kind of article T2, the 3rd kind of article T3 16 are in the state of the 2nd retracted position in lifting position on Z and in prominent retract in above-below direction on the X of direction, prominent according to the 2nd Out movement, the 2nd kind carried out with lowering action, close to movement, the 2nd vertical motion, the 2nd sequence for retracting movement.
2nd shifting apparatus 7 is from itself (the 1st shifting apparatus 6) to the feelings of 3 the 3rd kind of article T3 of transfer of transfer object position Under condition, from remain the 2nd maintaining part 16 of the 3rd kind of article T3 in above-below direction on Z in lifting position and in the prominent side of retracting It is in the state of the 2nd retracted position on X, is risen according to the 2nd prominent movement, the 3rd kind with lowering action, departure motion, the 2nd and is moved Make, the 2nd sequence for retracting movement carries out.
In addition, the 2nd shifting apparatus 7 is from the 3rd kind of article T3 of transfer object position 3 to itself (the 1st shifting apparatus 6) transfer In the case where, from by any one the 2nd maintaining part not kept of the 1st kind of article T1, the 2nd kind of article T2, the 3rd kind of article T3 16 are in the state of the 2nd retracted position in lifting position on Z and in prominent retract in above-below direction on the X of direction, prominent according to the 2nd Out movement, the 3rd kind carried out with lowering action, close to movement, the 2nd vertical motion, the 2nd sequence for retracting movement.
1st shifting apparatus 6 is configured to, and can move the 1st class article K1 in itself transfer between transfer object position Work is executed compared with the 2nd shifting apparatus 7 with the short period.
That is, the 1st shifting apparatus 6 from itself to 3 the 1st kind of article T1 of transfer of transfer object position needed for when Between (time needed for movement is retracted in the 1st prominent movement, the 1st lowering action, the 1st) compare, the 2nd shifting apparatus 7 is from itself to transfer Needed in the case where the 1st kind of article T1 of 3 transfer of object position time (the 2nd prominent movement, the 1st kind with lowering action, leave it is dynamic Time needed for movement is retracted in work, the 2nd vertical motion, the 2nd) it is short.
In addition, the 1st shifting apparatus 6 from transfer object position 3 to the 1st kind of article T1 of itself transfer in the case where needed for when Between (time needed for movement is retracted in the 1st prominent movement, the 1st vertical motion, the 1st) compare, the 2nd shifting apparatus 7 is from transfer object portion Position 3 to needed in the case where the 1st kind of article T1 of itself transfer time (the 2nd prominent movement, the 1st kind with lowering action, close to moving Time needed for movement is retracted in work, the 2nd vertical motion, the 2nd) it is short.
Also, the 2nd shifting apparatus 7 is configured to, by revolving the 2nd prominent back body 17 around the axle center of Z along the vertical direction Turn, the protrusion that can change the 2nd maintaining part 16 when the 2nd prominent back body 17 being made to stretch retracts direction X.Thereby, it is possible to The 1st kind of article T1 of transfer, the 2nd kind of article T2, the 3rd kind of article T3 between 5 transfer object positions 3 of surrounding arrangement.
Conveyor type handling device 2 has the 1st conveyer 21, the 2nd conveyer 22, the 3rd conveyer 23.1st conveyer 21 And the 2nd conveyer 22 only by the 1st kind of article T1 in the 1st kind of article T1, the 2nd kind of article T2 and the 3rd kind of article T3 along level side To carrying.3rd conveyer 23 only by the 1st kind of article T1, the 2nd kind of article T2 and the 3rd kind of article T3 the 2nd kind of article T2 and 3rd kind of article T3 is carried in the horizontal direction.2nd conveyer 22 and the 3rd conveyer 23 are set against the top than the 1st conveyer 21 It sets.
As the 1st conveyer 21, the 1st conveyer of the 1st kind of article T1 moved in is carried at oriented transfer object position 3 21, the 1st conveyer 21 of the 1st kind of article T1 moved out is carried from transfer object position 3.It, will in the example shown in Figure 11 It moves in the 1st conveyer 21 used and moves out the 1st conveyer 21 used as one group of the 1st conveyer 21, be arranged in identical height There is two group of the 1st conveyer 21.
As the 2nd conveyer 22, the 2nd conveyer of the 1st kind of article T1 moved in is carried at oriented transfer object position 3 22, the 2nd conveyer 22 of the 1st kind of article T1 moved out is carried from transfer object position 3.In addition, as the 3rd conveyer 23, Carry the 3rd conveyer 23 of the 2nd kind of article T2 and the 3rd kind of article T3 moved in, from transfer object in oriented transfer object position 3 The 3rd conveyer 23 of the carrying of position 3 the 2nd kind of article T2 and the 3rd kind of article T3 moved out.It, will in the example shown in Figure 12 It moves in the 2nd conveyer 22 used and moves out the 2nd conveyer 22 used as one group of the 2nd conveyer 22, by the move in the 3rd transmission Machine 23 and the 3rd conveyer 23 used is moved out as one group of the 3rd conveyer 23, identical height is provided with one group of the 2nd conveyer 22 and one group of the 3rd conveyer 23.
The setting height of 2nd conveyer 22 and the 3rd conveyer 23 is illustrated.In the present embodiment, such as Figure 13 institute Show, the 2nd conveyer 22 is arranged to, the height and the 3rd of the 1st maintained portion F1 for the 1st kind of article T1 that the 2nd conveyer 22 is carried The height of the 2nd maintained portion F2 for the 2nd kind of article T2 that conveyer 23 is carried is identical.
1st conveyer 21 and the 2nd conveyer 22 are by can be performed simultaneously itself passing with the 1st based on the 1st shifting apparatus Send the 1st kind between the 2nd conveyer 22 of the transfer of the 1st kind of article T1 between machine 21, itself based on the 2nd shifting apparatus 7 The interval of the transfer of article T1 configures.
In addition, the 1st conveyer 21 and the 3rd conveyer 23 by with can be performed simultaneously based on the 1st shifting apparatus 6 itself and The transfer of the 1st kind of article T1 between 1st conveyer 21, itself based on the 2nd shifting apparatus 7 are between the 3rd conveyer 23 The interval of the transfer of 2nd kind of article T2 and the 3rd kind of article T3 configures.
2nd conveyer 22, which has, to be moved in the horizontal direction to carry the 1st class of the 1st class article K1 (the 1st kind of article T1) and use Trolley 27, relative to the 1st class movement routine of trolley 27 one end be arranged the 1st kind with interior side electrode support 28, relative to The 1st kind of the other end setting of the 1st class movement routine of trolley 27 is with outside supporting part (not shown).1st kind with inside Supporting part 28 is located at transfer object position 3.
Relative to the 1st kind with interior side electrode support 28, the handling of the 1st kind of article T1 are carried out by lift handling device 1.This Outside, relative to the 1st kind with outside supporting part, the 1st kind is carried out by the article carrying vehicle 4 (referring to Fig.1) advanced near ceiling The handling of article T1.Also, by the 1st class trolley 27, supported with interior side electrode support 28 and the 1st kind with outside at the 1st kind The 1st kind of article T1 is carried between portion.
3rd conveyer 23, which has, to be moved in the horizontal direction to carry the 2nd class article K2 (the 2nd kind of article T2 and the 3rd kind of article T3 the 2nd class trolley 31), relative to the 2nd kind of one end setting of movement routine of the 2nd class trolley 31 with interior side bearing Portion 32 and the 3rd kind of the 2nd kind be arranged with interior side electrode support 33, relative to the other end of the movement routine of the 2nd class trolley 31 With outside supporting part (not shown) and the 3rd kind with outside supporting part (not shown).2nd kind with interior side electrode support 32 and the 3rd kind with Interior side electrode support 33 is located at transfer object position 3.
Relative to the 2nd kind with interior side electrode support 32, the handling of the 2nd kind of article T2, phase are carried out by lift handling device 1 For the 3rd kind with interior side electrode support 33, the handling of the 3rd kind of article T3 are carried out by lift handling device 1.Relative to the 2nd kind With outside supporting part, the handling of the 2nd kind of article T2 are carried out by article carrying vehicle 4 (referring to Fig.1), relative to the 3rd kind with outside Supporting part carries out the handling of the 3rd kind of article T3 by article carrying vehicle 4.Also, by the 2nd class trolley 31, the 2nd kind with Interior side electrode support 32 and the 2nd kind are with carrying the 2nd kind of article T2 between the supporting part of outside, and at the 3rd kind with interior side electrode support 33 And the 3rd kind between the supporting part of outside carry the 3rd kind of article T3.
In addition, the 1st conveyer 21 is constituted, so omitting the description identically as the 2nd conveyer 22.
In addition, as shown in Figure 1, conveyor type handling device 2 has the 1st kind of article T1, the 2nd kind of article T2 and the 3rd only The 4th conveyer 24 that the 1st kind of article T1 in kind of article T3 is carried in the horizontal direction, only by the 1st kind of article T1, the 2nd kind of article The 5th conveyer 25 that the 2nd kind of article T2 and the 3rd kind of article T3 in T2 and the 3rd kind of article T3 are carried in the horizontal direction.
4th conveyer 24 and the 5th conveyer 25 are set relative to the 1st conveyer 21, the 2nd conveyer 22 and the 3rd conveyer 23 Near Ground placed below.The end of the side of 4th conveyer 24 and the 5th conveyer 25 is located at transfer object position 3.And And the end of the other side relative to the 4th conveyer 24, operator carry out the handling of the 1st kind of article T1, relative to the 5th transmission The end of the other side of machine 25, operator carry out the handling of the 2nd kind of article T2 or the 3rd kind of article T3.
As shown in figure 14, have the of the movement based on the instruction control lift handling device 1 from host controller H 1 control unit H1, the 2nd control unit H2 based on the movement for instructing control conveyor type handling device 2 from host controller H. 1st control unit H1 is equivalent to the control unit of the movement of the 1st shifting apparatus 6 of control, the 2nd shifting apparatus 7 and lifting body 8.
1st shifting apparatus 6 has the 1st inventory sensor S1, rises sensor S2, decline sensor S3.2nd shifting apparatus 7 have the 2nd inventory sensor S4, the 3rd inventory sensor S5, the 1st alignment sensor S6, the 2nd alignment sensor S7.In addition, the 2nd Inventory sensor S4 is equivalent to the 1st sensor for detecting the 1st kind of article T1, and the 3rd inventory sensor S5 is equivalent to for examining Survey the 2nd sensor of the 2nd kind of article T2 and the 3rd kind of article T3.
As shown in figure 3, the 1st inventory sensor S1 is arranged to, exist to the 1st kind of article T1 for being placed in the 1st maintaining part 11 Region project detection light.Whether 1st control unit H1 judges the 1st maintaining part 11 based on the detection information of the 1st inventory sensor S1 1st kind of article T1 is kept.
Rise sensor S2 to be arranged to, is located at height corresponding with the 1st conveyer 21 and the 1st maintaining part in lifting body 8 11 in lifting position and in the state of the rotation position corresponding with the 1st conveyer 21, to being set to the 1st conveyer 21 1st detected body A1 projects detection light.1st control unit H1 judges the 1st maintaining part 11 based on the detection information for rising sensor S2 Whether in relative to the suitable lifting position in transfer object position 3.In addition, the 2nd conveyer 22 also with 21 phase of the 1st conveyer It is provided with the 1st detected body A1 together.
Decline sensor S3 is arranged to, and is located at height corresponding with the 1st conveyer 21 and the 1st maintaining part in lifting body 8 11 in down position and in the state of the rotation position corresponding with the 1st conveyer 21, to being set to the 1st conveyer 21 1st detected body A1 projects detection light.Detection information of the 1st control unit H1 based on decline sensor S3, judges the 1st maintaining part 11 Whether in relative to the suitable down position in transfer object position 3.
As shown in Fig. 5 ~ Figure 10, the 1st kind of article T1 that the 2nd inventory sensor S4 is arranged at the holding of the 2nd shifting apparatus 7 is deposited The 2nd kind of article T2 keeping of height and the 2nd shifting apparatus 7 and the height that is not present of the 3rd kind of article T3.Also, the 2nd stock Sensor S4 is arranged to, to being held in region existing for the 1st kind of article T1 of the 2nd maintaining part 16 and be held in the 2nd maintaining part 16 The region project detection light that is not present of the 2nd kind of article T2, the 3rd kind of article T3.1st control unit H1 is based on the 2nd inventory sensor The detection information of S4, judges whether the 2nd maintaining part 16 remains the 1st kind of article T1.
3rd inventory sensor S5 is set to the existing height of the 2nd kind of article T2 of the 2nd shifting apparatus 7 holding and the 2nd transfer The existing height of the 3rd kind of article T3 that device 7 is kept.Also, the 3rd inventory sensor S5 is arranged to, to being held in the 2nd maintaining part Region existing for 16 the 2nd kind of article T2 and be held in region project existing for the 3rd kind of article T3 of the 2nd maintaining part 16 detection Light.In addition, in the present embodiment, the 3rd inventory sensor S5 is made of range sensor, it is configured to measurement to being held in the The distance of the article of 2 maintaining parts 16.1st control unit H1 judges the 2nd maintaining part 16 based on the detection information of the 3rd inventory sensor S5 The 2nd kind of article T2 whether is remain, and determines whether the 2nd maintaining part 16 remains the 3rd kind of article T3.
1st alignment sensor S6 is arranged to, and is located at height corresponding with the 2nd conveyer 22 in lifting body 8 and is in and the 2nd In the state of the corresponding rotation position of conveyer 22, detection light is projected to the 2nd detected body A2 for being set to the 2nd conveyer 22. Whether the 1st detection information of the control unit H1 based on the 1st alignment sensor S6 judges the 2nd maintaining part 16 in relative to the 2nd transmission The suitable position of machine 22.In addition, being also uniformly set the 2nd detected body with the 2nd conveyer 22 relative to the 1st conveyer 21 A2。
2nd alignment sensor S7 is arranged to, and is located at height corresponding with the 3rd conveyer 23 in lifting body 8 and is in and the 3rd In the state of the corresponding rotation position of conveyer 23, detection light is projected to the 3rd detected body A3 for being set to the 3rd conveyer 23. Whether the 1st detection information of the control unit H1 based on the 2nd alignment sensor S7 judges the 2nd maintaining part 16 in relative to the 3rd transmission The suitable position of machine 23.
As shown in figure 13, the article that the 3rd conveyer 23 has in judgement carrying is the 2nd kind of article T2 or the 3rd kind of article The judgment means 35 of T3.Judgment means 35 are made of the 4th inventory sensor S8, the 5th inventory sensor S9, the 2nd control unit H2.The 4 inventory sensor S8 are arranged to, and examine to region project existing for the 2nd kind of the 2nd kind of article T2 with interior side electrode support 32 is placed in Survey light.In addition, the 5th inventory sensor S9 is arranged to, exist to the 3rd kind of the 3rd kind of article T3 with interior side electrode support 33 is placed in Region project detection light.Detection information and 5th inventory sensor S9 of the 2nd control unit H2 based on the 4th inventory sensor S8 Detection information, judges whether the 2nd kind carry the 2nd kind of article T2 with interior side electrode support 32, and judge the 3rd kind with interior side bearing Whether portion 33 carries the 3rd kind of article T3.
1st control unit H1 executes the elevating control for going up and down lifting body 8 to position corresponding with transfer object position 3, incites somebody to action The transfer of article transfer between transfer object position 3 controls.1st control unit H1 is executed from the 1st conveyer 21 to the 1st transfer and is filled Set transfer control, the transfer from the 2nd conveyer 22 to the 1st kind of article T1 of 7 transfer of the 2nd shifting apparatus of the 1st kind of article T1 of 6 transfers Control, from the 3rd conveyer 23 to the transfer of the 2nd kind of article T2 of 7 transfer of the 2nd shifting apparatus control, from the 3rd conveyer 23 to the 2nd The transfer of the 3rd kind of article T3 of 7 transfer of shifting apparatus controls, from the 2nd conveyer 22 to the 1st kind of article T1 of 6 transfer of the 1st shifting apparatus Transfer control as transfer control.In turn, the 1st control unit H1 is executed from the 1st shifting apparatus 6 to 21 transfer the 1st of the 1st conveyer The transfer control of kind of article T1, from the 2nd shifting apparatus 7 to the transfer of the 1st kind of article T1 of 22 transfer of the 2nd conveyer control, from the 2nd Shifting apparatus 7 is controlled to the transfer of the 2nd kind of article T2 of 23 transfer of the 3rd conveyer, is moved from the 2nd shifting apparatus 7 to the 3rd conveyer 23 It carries the transfer control of the 3rd kind of article T3, controlled from the 1st shifting apparatus 6 to the transfer of the 1st kind of article T1 of 22 transfer of the 2nd conveyer It is controlled as transfer.
That is, for example, being supported in the 1st kind of the 1st conveyer 21 with interior side electrode support 28, the 2nd kind of object in the 1st kind of article T1 In the case that product T2 is supported in the 2nd shifting apparatus 7, passed with the 1st shifting apparatus 6 to the 1st firstly, the 1st control unit H1 is executed The elevating control that the mode for sending the corresponding position of machine 21 mobile goes up and down lifting body 8.Execute lifting control in this way as a result, System, the 1st shifting apparatus 6 is mobile to position corresponding with the 1st conveyer 21, and the 2nd shifting apparatus 7 is to corresponding with the 2nd conveyer 22 Position it is mobile.Also, the 1st control unit H1 is performed simultaneously from the 1st conveyer 21 to the 1st kind of article T1 of 6 transfer of the 1st shifting apparatus Transfer control, from the 2nd shifting apparatus 7 to the transfer of the 2nd kind of article T2 of 23 transfer of the 3rd conveyer control.
In addition, for example, being supported in the 1st kind of the 2nd conveyer 22 with interior side electrode support 28, the 1st kind in the 1st kind of article T1 Article T1 is not supported in the 1st kind of the 1st conveyer 21 with interior side electrode support 28, the 1st shifting apparatus 6 and the 2nd shifting apparatus 7 In the case that both sides do not maintain article, only transfer is supported on the 1st kind of the 2nd conveyer 22 the 1st kind with interior side electrode support 28 Article T1.In this case, any one of the 1st shifting apparatus 6 and the 2nd shifting apparatus 7 can move the 1st kind of article T1 It carries.That is, being able to carry out from the 2nd conveyer 22 to the transfer of the 1st kind of article T1 of 6 transfer of the 1st shifting apparatus control, being transmitted from the 2nd The both sides that machine 22 is controlled to the transfer of the 1st kind of article T1 of 7 transfer of the 2nd shifting apparatus.Under such circumstances, the 1st control unit H1 is held The elevating control that row goes up and down lifting body 8 in a manner of mobile to position corresponding with the 2nd conveyer 22 by the 1st shifting apparatus 6.It Afterwards, it executes from the 2nd conveyer 22 to the transfer of the 1st kind of article T1 of 6 transfer of the 1st shifting apparatus and controls.In this way, be able to carry out from 2nd conveyer 22 controls, to the transfer of the 1st kind of article T1 of 6 transfer of the 1st shifting apparatus from the 2nd conveyer 22 to the 2nd shifting apparatus In the case where the both sides of the transfer control of the 1st kind of article T1 of 7 transfers, the 1st control unit H1 preferably is carried out from the 2nd conveyer 22 to the The transfer of the 1st kind of article T1 of 1 shifting apparatus, 6 transfer controls.
In addition, control is equivalent to the 1st control from the 1st conveyer 21 to the transfer of the 1st kind of article T1 of 6 transfer of the 1st shifting apparatus System, from the 2nd conveyer 22 to the transfer of the 1st kind of article T1 of 7 transfer of the 2nd shifting apparatus, control is equivalent to the 2nd control, passes from the 3rd Transfer control of the machine 23 to the 2nd kind of article T2 of 7 transfer of the 2nd shifting apparatus or the 3rd kind of article T3 is sent to be equivalent to the 3rd control, from the 2nd Conveyer 22 is equivalent to the 4th control to the transfer of the 1st kind of article T1 of 6 transfer of the 1st shifting apparatus control.
2. other embodiments
Then, the other embodiments of article carrying equipment are illustrated.
(1) in the above-described embodiment, the 1st kind of article T1 is set as front open type wafer feeder and open front transportation box, 2nd kind of article T2 is set as EUV container, the 3rd kind of article T3 is set as reticule container, but the 1st kind of article T1, the 2nd Kind article T2 and the 3rd kind of article T3 can also suitably change.For example, the 1st kind of article T1 front open type wafer feeder can be made With the one party in open front transportation box, the 2nd kind of article T2 and at least one party centre of the 3rd kind of article T3 can also be made to cover Container other than film container and EUV container.In addition, the 1st kind of article T1, the 2nd kind of article T2 and the 3rd kind of article T3 are not limited to These articles carried by semiconductor manufacturing facility, for example, it may be the containers such as container, pallet, are also possible to various products Itself.
(2) in the above-described embodiment, using the 1st kind of article T1 as front open type wafer feeder and open front fortune dress Case, using the 2nd kind of article T2 as EUV container, the 3rd kind of article T3 is different as the purposes of reticule container, content It is illustrated for situation.But not limited to this, for example, it can be by the 1st kind of article T1, the 2nd kind of article T2 and the 3rd kind Article T3 is set as accommodating the different semiconductor crystal wafer etc. of size, holds in the 1st kind of article T1, the 2nd kind of article T2 and the 3rd kind of article T3 Receive object purposes it is identical.
(3) in the above-described embodiment, the 1st control unit H1 is able to carry out the case where both sides of the 2nd control and the 4th control Under, it is preferential to execute the 4th control, but can also preferentially execute the 2nd control.
(4) in the above-described embodiment, the 1st maintaining part is made relative to the 1st prominent back body 12 with the 1st elevating mechanism 13 It is illustrated in case where 11 structures that Z is moved along the vertical direction, but not limited to this, it is also possible to the 1st elevating mechanism 13 Make the 1st maintaining part 11 Z along the vertical direction by making the 1st prominent back body 12 relative to lifting body 8 Z being mobile along the vertical direction Mobile structure.In addition, the 2nd elevating mechanism 18 relative to lifting body 8 by making the 2nd protrusion retract machine it is equally possible that being Z moves to make the 2nd maintaining part 16 Z mobile structure along the vertical direction structure 17 along the vertical direction.
(5) in the above-described embodiment, relative to the 1st shifting apparatus 6, side is provided with the 2nd shifting apparatus 7 above, but The 2nd shifting apparatus 7 can be set in lower side relative to the 1st shifting apparatus 6.
(6) in the above-described embodiment, the 1st shifting apparatus 6 is configured to protrude to retract movement and lifting action conduct Move loading action, the 2nd shifting apparatus 7 are configured to protrude to retract movement, lifting action, holding movement as move loading action, the 1st It is illustrated in case where shifting apparatus 6 is different with the move loading action of the 2nd shifting apparatus 7, but not limited to this, the 1st transfer The move loading action of device 6 and the 2nd shifting apparatus 7 can also be identical.For example, it can be the 1st shifting apparatus 6 and the 2nd transfer dresses It sets 7 both sides to be configured to, carries out protrusion and retract movement and lifting action as move loading action.In this case, being also possible to example Such as, the side in the 1st prominent prominent back body 17 of back body 12 and the 2nd is made of joint arm, by another party by sliding Fork is constituted.In this case, being also configured to, pass through the difference of joint arm and the move loading action of slip yoke, the 1st shifting apparatus 6 Compared with the 2nd shifting apparatus 7 move loading action can be executed with the short period.
(7) in the above-described embodiment, it is configured to, what the 2nd shifting apparatus 7 had for detecting the 1st kind of article T1 the 2nd deposits Goods sensor S4, the 3rd inventory sensor S5 for detecting the 2nd kind of article T2 and the 3rd kind of article T3, but the 2nd shifting apparatus 7 has The position of standby sensor and quantity can suitably change.I.e., it is possible to be configured to, in the 1st kind of article T1, the 2nd kind of article T2 and The existing height of 3rd kind of article T3 has sensor, by a sensor detect the 1st kind of article T1, the 2nd kind of article T2 and 3rd kind of article T3, is also configured to, each relative to the 1st kind of article T1, the 2nd kind of article T2, the 3rd kind of article T3 is divided Not She Zhi sensor, detect the 1st kind of article T1, the 2nd kind of article T2 and the 3rd kind of article T3 by three sensors.
It (8), as long as no contradiction, just also can be with other in addition, about structure disclosed in the respective embodiments described above Structure disclosed in embodiment combines to apply.About other structures, embodiment disclosed in this specification is all Aspect is only to illustrate.Therefore, in the range of not departing from the objective of the application, various changes can suitably be carried out.
3. the summary of above embodiment
Hereinafter, being illustrated to the summary of above explained article carrying equipment.
Article carrying equipment has the 1st handling device and the 2nd handling device, by the mutually different 1st kind of object of outer dimension Product, the 2nd kind of article, the 3rd kind of article are as moving object, which is characterized in that aforementioned 1st handling device have the 1st shifting apparatus, 2nd shifting apparatus, lifting body, with the aforementioned 1st when aforementioned 2nd shifting apparatus is set to the up and down direction observation along up and down direction The position of shifting apparatus overlapping, aforementioned lifting body support aforementioned 1st shifting apparatus and aforementioned 2nd shifting apparatus, and on aforementioned Lower direction is mobile, and aforementioned 1st shifting apparatus is configured to, only can be by aforementioned 1st kind of article, aforementioned 2nd kind of article and the aforementioned 3rd In itself transfer between aforementioned 2nd handling device, aforementioned 2nd shifting apparatus is configured to aforementioned 1st kind of article in kind article, Aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article itself can moved between aforementioned 2nd handling device It carries, the carrying amount of aforementioned 1st kind of article is more total than the carrying amount of aforementioned 2nd kind of article and the carrying amount of aforementioned 3rd kind of article More, aforementioned 2nd handling device has only will be aforementioned in aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article The 1st conveyer and the 2nd conveyer that 1st kind of article is carried in the horizontal direction, only by aforementioned 1st kind of article, aforementioned 2nd kind of article And the 3rd conveyer that aforementioned 2nd kind of article in aforementioned 3rd kind of article and aforementioned 3rd kind of article are carried in the horizontal direction, will before It states the side that aforementioned 1st shifting apparatus is provided with aforementioned 2nd shifting apparatus in up and down direction and is set as up and down direction spy Determine side, aforementioned 2nd conveyer and aforementioned 3rd conveyer be set in aforementioned up and down direction particular side relative to aforementioned 1st conveyer, Aforementioned 1st conveyer and aforementioned 2nd conveyer are can be performed simultaneously itself based on aforementioned 1st shifting apparatus with the aforementioned 1st The transfer of aforementioned 1st kind of article between conveyer, itself based on aforementioned 2nd shifting apparatus are between aforementioned 2nd conveyer Aforementioned 1st kind of article transfer interval setting, aforementioned 1st conveyer and aforementioned 3rd conveyer are can be performed simultaneously base It is moved in the transfer of itself aforementioned 1st kind of article between aforementioned 1st conveyer of aforementioned 1st shifting apparatus, based on the aforementioned 2nd The interval for carrying the transfer of the aforementioned 2nd kind of article and aforementioned 3rd kind of article between itself set and aforementioned 3rd conveyer is set It sets.
According to the program, the 1st kind of object of itself based on the 1st shifting apparatus between the 1st conveyer can be performed simultaneously The transfer of the 1st kind of article of the transfer of product, itself based on the 2nd shifting apparatus between the 2nd conveyer.Furthermore it is possible to simultaneously Execute the transfer of the 1st kind of article of itself based on the 1st shifting apparatus between the 1st conveyer, based on the 2nd shifting apparatus from The transfer of the 2nd kind of article or the 3rd kind of article between body and the 3rd conveyer.
That is, even if the 2nd shifting apparatus keep the 1st kind of article, the 2nd kind of article, the 3rd kind of article some article feelings Under condition, the transfer based on the 1st shifting apparatus and the transfer based on the 2nd shifting apparatus can be also performed simultaneously.Also, will not It, can be relatively more by carrying amount in the case that the 2nd kind of fewer article is measured in carrying, the 3rd kind of article is held in the 2nd shifting apparatus The 1st kind of article be held in the 2nd shifting apparatus, so can be improved the handling efficiency of article.In addition, the 1st shifting apparatus can The structure for only keeping the 1st kind of article is thought, in addition, the 1st conveyer and the 2nd conveyer can be the knot of only the 1st kind of article of carrying Structure is only configured to the structure that 3 kinds of articles are kept or carried with the 2nd shifting apparatus and the 3rd conveyer, so can will manufacture The rising of cost is suppressed to less.
Therefore, according to the program, the carrying effect of article is improved while the rising of manufacturing cost capable of being suppressed to less Rate.
Here it is preferred that aforementioned up and down direction particular side is the upside in aforementioned up and down direction.
According to the program, the 2nd shifting apparatus is set to upside relative to the 1st shifting apparatus.Therefore, the 2nd conveyer and 3rd conveyer is set to upside relative to the 1st conveyer.
Moreover it is preferred that above and below aforementioned 1st kind of article is aforementioned compared with aforementioned 2nd kind of article and aforementioned 3rd kind of article The size in direction is larger, aforementioned 2nd shifting apparatus has the 1st sensor for detecting aforementioned 1st kind of article, for detecting before The 2nd sensor of the 2nd kind of article and aforementioned 3rd kind of article is stated, aforementioned 1st sensor is set to aforementioned 2nd shifting apparatus and keeps The existing height of aforementioned 1st kind of article and aforementioned 2nd the shifting apparatus aforementioned 2nd kind of article and aforementioned 3rd kind of article that keep The height being not present, aforementioned 2nd sensor are set to the existing height of aforementioned 2nd class article that aforementioned 2nd shifting apparatus is kept And the existing height of aforementioned 3rd kind of article that aforementioned 2nd shifting apparatus is kept.
According to the program, the 2nd shifting apparatus remains the 1st sensor and the detection of the 2nd sensor in the case where the 1st kind of article Article.On the other hand, the 2nd shifting apparatus remains the 1st sensor detection article in the case where the 2nd kind of article or the 3rd kind of article, 2nd sensor does not detect article.Therefore, according to the program, can suitably detect article that the 2nd shifting apparatus remains is the 1 kind of article or the 2nd kind of article or the 3rd kind of article.
Moreover it is preferred that aforementioned 1st shifting apparatus has the 1st prominent back body and the 1st elevating mechanism, the aforementioned 1st Prominent back body makes the 1st maintaining part for keeping aforementioned 1st kind of article retract position to the 1st retracted position and relative to the aforementioned 1st It sets to the 1st prominent position movement outstanding of side existing for aforementioned 2nd handling device, aforementioned 1st elevating mechanism makes the aforementioned 1st to protect It holds portion and is moved relative to the aforementioned 1st prominent back body along aforementioned up and down direction, aforementioned 2nd shifting apparatus has the 2nd protrusion and moves back Return mechanism and the 2nd elevating mechanism, aforementioned 2nd prominent back body allow to by aforementioned 1st kind of article, aforementioned 2nd kind of article and Any one the 2nd maintaining part kept of aforementioned 3rd kind of article is to the 2nd retracted position and relative to aforementioned 2nd retracted position Mobile to the 2nd prominent position outstanding of side existing for aforementioned 2nd handling device, aforementioned 2nd elevating mechanism makes the aforementioned 2nd to keep It is moved relative to the aforementioned 2nd prominent back body along aforementioned up and down direction in portion.
According to the program, the 1st elevating mechanism only makes the 1st maintaining part liter in the 1st prominent back body and the 1st maintaining part Drop, so can make compared with the case where making both sides' lifting of the 1st prominent back body and the 1st maintaining part by the 1st elevator The weight of the object of structure lifting, so can be realized miniaturization, the lightweight of the 1st elevating mechanism.Similarly, about the 2nd Elevating mechanism can also make the weight of the object gone up and down by the 2nd elevating mechanism, so can be realized the 2nd elevating mechanism Miniaturization, lightweight.
Moreover it is preferred that aforementioned 3rd conveyer have judge carry in article be aforementioned 2nd kind of article still before State the judgment means of the 3rd kind of article.
According to the program, in the 3rd conveyer, it can suitably judge that the article in carrying is the 2nd kind of article or the 3rd Kind article.It therefore, can be that the 2nd kind of article or the 3rd kind of article are accordingly appropriate with the article in carrying in the 3rd conveyer Carrying after progress.
Moreover it is preferred that aforementioned 1st shifting apparatus has the 1st maintaining part, aforementioned 1st maintaining part be configured to by from Lower section supports the bottom surface of aforementioned 1st kind of article to keep, and aforementioned 2nd shifting apparatus has the 2nd maintaining part, aforementioned 2nd maintaining part It is configured to be had on the top of the 1st maintained portion, aforementioned 2nd kind of article that the top of aforementioned 1st kind of article has The 2nd maintained portion and any one of the 3rd maintained portion that has of top of aforementioned 3rd kind of article keep.
It, can will be only by the 1st kind of article transfer in the 1st kind of article, the 2nd kind of article and the 3rd kind of article according to the program The 1st shifting apparatus, the 1st kind of article of transfer, the 2nd kind of article and the 3rd kind of article the 2nd shifting apparatus appropriately respectively constitute. In addition, according to the program, it can be by the 1st maintaining part of the 1st shifting apparatus relative to the 1st kind of object for being held in the 1st shifting apparatus Product be configured at lower section, can by the 2nd maintaining part of the 2nd shifting apparatus relative to be held in the 2nd shifting apparatus the 1st kind of article, 2nd kind of article, the 3rd kind of article are disposed above.Therefore, above-mentioned to configure the 2nd transfer against the top than the 1st shifting apparatus like that In the case where device, the 1st maintaining part and the 2nd maintaining part can be configured with leaving up and down, can be formed and be used between them Keep the space of article.Therefore, the article that the article for being held in the 1st shifting apparatus can be made and be held in the 2nd shifting apparatus The narrower intervals of up and down direction.Thus, it is also possible to make the transfer object position of the 1st shifting apparatus and the transfer of the 2nd shifting apparatus The narrower intervals of the up and down direction at object position are easy that transfer object position is made to save space.
Moreover it is preferred that aforementioned 2nd conveyer is arranged to, before the aforementioned 1st kind of article that the 2nd conveyer is carried The height of aforementioned 2nd maintained portion for the aforementioned 2nd kind of article that the height and aforementioned 3rd conveyer for stating the 1st maintained portion are carried It is identical.
According to the program, the 2nd shifting apparatus can be by the 1st kind of article T1 and the 2nd kind of article T2 with identical movement transfer. Therefore, it can be easy to make simplifying the structure for the 2nd shifting apparatus, and also be easy to keep the control structure of the 2nd shifting apparatus simple Change.
Moreover it is preferred that aforementioned 1st kind of article is the wafer container for storing semiconductor crystal wafer, aforementioned 2nd kind of article For the EUV container for storing EUV exposure mask, aforementioned 3rd kind of article is the reticule container for storing reticule.
According to the program, in semiconductor manufacturing facility, can will generally the more wafer container of carrying amount, carry It measures fewer EUV container and reticule and is suitably carried while inhibiting the decline of handling efficiency with container.
Moreover it is preferred that being also equipped with aforementioned 1st shifting apparatus of control, aforementioned 2nd shifting apparatus and aforementioned lifting body The control unit of movement, aforementioned 1st shifting apparatus are configured to, can be by itself and aforementioned 2nd handling device of aforementioned 1st kind of article Between move loading action executed compared with aforementioned 2nd shifting apparatus with the short period, aforementioned control unit is executed from aforementioned 1st transmission Machine is filled to the 1st control of the aforementioned 1st kind of article of aforementioned 1st shifting apparatus transfer, from aforementioned 2nd conveyer to aforementioned 2nd transfer Set the 2nd control of the aforementioned 1st kind of article of transfer, from aforementioned 3rd conveyer to the aforementioned 2nd kind of object of aforementioned 2nd shifting apparatus transfer 3rd control of product or aforementioned 3rd kind of article, from aforementioned 2nd conveyer to the aforementioned 1st kind of article of aforementioned 1st shifting apparatus transfer The 4th control preferentially execute aforementioned the and in the case where being able to carry out the both sides of aforementioned 2nd control and aforementioned 4th control 4 controls.
It is preferential to execute the 4th control in the case where being able to carry out the both sides of the 2nd control and the 4th control according to the program. Also, the 1st shifting apparatus can be executed move loading action with the short period compared with the 2nd shifting apparatus.Therefore, according to the party Case, the carrying that carrying can be measured to more 1st kind of article efficiently carry out.
Industrial availability
The technology of the application can be used in the article carrying equipment for having the 1st handling device, the 2nd handling device.
Description of symbols
1: lift handling device (the 1st handling device)
2: conveyor type handling device (the 2nd handling device)
3: transfer object position
6: the 1 shifting apparatus
7: the 2 shifting apparatus
8: lifting body
11: the 1 maintaining parts
12: the 1 prominent back bodies
13: the 1 elevating mechanisms
16: the 2 maintaining parts
17: the 2 prominent back bodies
18: the 2 elevating mechanisms
21: the 1 conveyers
22: the 2 conveyers
23: the 3 conveyers
F1: the 1 maintained portion
F2: the 2 maintained portion
F3: the 3 maintained portion
H: control unit
S4: the 2 inventory sensor (the 1st sensor)
S5: the 3 inventory sensor (the 2nd sensor)
T1: a kind of article
T2: the 2 kind of article
T3: the 3 kind of article
Z: up and down direction.

Claims (9)

1. a kind of article carrying equipment, items haulage equipment have the 1st handling device and the 2nd handling device, by shape ruler Very little mutually different 1st kind of article, the 2nd kind of article, the 3rd kind of article are as moving object, which is characterized in that
Aforementioned 1st handling device has the 1st shifting apparatus, the 2nd shifting apparatus, lifting body, and aforementioned 2nd shifting apparatus is set to edge The up and down direction observation of up and down direction when position Chong Die with aforementioned 1st shifting apparatus, aforementioned lifting body supports aforementioned 1st shifting It carries and sets and aforementioned 2nd shifting apparatus, and moved along aforementioned up and down direction,
Aforementioned 1st shifting apparatus is configured to, only can be by aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article In aforementioned 1st kind of article in itself transfer between aforementioned 2nd handling device,
Aforementioned 2nd shifting apparatus is configured to, and aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article can exist Itself transfer between aforementioned 2nd handling device,
The carrying amount of aforementioned 1st kind of article is more total than the carrying amount of aforementioned 2nd kind of article and the carrying amount of aforementioned 3rd kind of article It is more,
Aforementioned 2nd handling device has the 1st conveyer and the 2nd conveyer, the 3rd conveyer, aforementioned 1st conveyer and the 2nd transmission Machine only removes the aforementioned 1st kind of article in aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article in the horizontal direction Fortune, aforementioned 3rd conveyer is only by the aforementioned 2nd kind of object in aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article Product and aforementioned 3rd kind of article are carried in the horizontal direction,
The side that aforementioned 1st shifting apparatus is provided with aforementioned 2nd shifting apparatus in aforementioned up and down direction is set as Aforementioned 2nd conveyer and aforementioned the is arranged in aforementioned up and down direction particular side relative to aforementioned 1st conveyer in lower direction particular side 3 conveyers,
Aforementioned 1st conveyer and aforementioned 2nd conveyer with can be performed simultaneously based on aforementioned 1st shifting apparatus itself with it is aforementioned The transfer of aforementioned 1st kind of article between 1st conveyer, itself and aforementioned 2nd conveyer based on aforementioned 2nd shifting apparatus it Between aforementioned 1st kind of article transfer interval setting,
Aforementioned 1st conveyer and aforementioned 3rd conveyer with can be performed simultaneously based on aforementioned 1st shifting apparatus itself with it is aforementioned The transfer of aforementioned 1st kind of article between 1st conveyer, itself and aforementioned 3rd conveyer based on aforementioned 2nd shifting apparatus it Between aforementioned 2nd kind of article and aforementioned 3rd kind of article transfer interval setting.
2. article carrying equipment as described in claim 1, which is characterized in that
Aforementioned up and down direction particular side is the upside in aforementioned up and down direction.
3. article carrying equipment as claimed in claim 1 or 2, which is characterized in that
The size of aforementioned 1st kind of article aforementioned up and down direction compared with aforementioned 2nd kind of article and aforementioned 3rd kind of article is larger,
Aforementioned 2nd shifting apparatus has the 1st sensor for detecting aforementioned 1st kind of article, for detecting aforementioned 2nd kind of article And the 2nd sensor of aforementioned 3rd kind of article,
Aforementioned 1st sensor is set to the existing height of aforementioned 1st kind of article and the aforementioned 2nd that aforementioned 2nd shifting apparatus is kept The height that the aforementioned 2nd kind of article and aforementioned 3rd kind of article that shifting apparatus is kept are not present,
Aforementioned 2nd sensor is set to the existing height of aforementioned 2nd kind of article and the aforementioned 2nd that aforementioned 2nd shifting apparatus is kept The existing height of the aforementioned 3rd kind of article that shifting apparatus is kept.
4. article carrying equipment as claimed any one in claims 1 to 3, which is characterized in that
Aforementioned 1st shifting apparatus has the 1st prominent back body and the 1st elevating mechanism, and the aforementioned 1st prominent back body makes to keep 1st maintaining part of aforementioned 1st kind of article is to the 1st retracted position and relative to aforementioned 1st retracted position to aforementioned 2nd handling device Existing side the 1st prominent position outstanding is mobile, and aforementioned 1st elevating mechanism keeps aforementioned 1st maintaining part prominent relative to the aforementioned 1st Back body is moved along aforementioned up and down direction out,
Aforementioned 2nd shifting apparatus has the 2nd prominent back body and the 2nd elevating mechanism, and the aforementioned 2nd prominent back body allows to By any one the 2nd maintaining part for keeping of aforementioned 1st kind of article, aforementioned 2nd kind of article and aforementioned 3rd kind of article to the 2nd It retracted position and is moved relative to aforementioned 2nd retracted position to the 2nd prominent position outstanding of side existing for aforementioned 2nd handling device Dynamic, aforementioned 2nd elevating mechanism moves aforementioned 2nd maintaining part along aforementioned up and down direction relative to the aforementioned 2nd prominent back body.
5. article carrying equipment according to any one of claims 1 to 4, which is characterized in that
Aforementioned 3rd conveyer has the article in judging to carry and fills for the judgement of aforementioned 2nd kind of article or aforementioned 3rd kind of article It sets.
6. the article carrying equipment as described in any one of claims 1 to 5, which is characterized in that
Aforementioned 1st shifting apparatus has the 1st maintaining part, and aforementioned 1st maintaining part is configured to by supporting aforementioned 1st kind of object from below The bottom surfaces of product is kept,
Aforementioned 2nd shifting apparatus has the 2nd maintaining part, and aforementioned 2nd maintaining part is configured to the top of aforementioned 1st kind of article The 2nd maintained portion that the top of the 1st maintained portion, aforementioned 2nd kind of article that are had has and aforementioned 3rd kind of article it is upper Any one for the 3rd maintained portion that portion has is kept.
7. such as article carrying equipment described in any one of claims 1 to 6, which is characterized in that
Aforementioned 2nd conveyer is arranged to, the height of aforementioned 1st maintained portion for the aforementioned 1st kind of article that the 2nd conveyer is carried It is identical as the height of aforementioned 2nd maintained portion of aforementioned 2nd kind of article that aforementioned 3rd conveyer is carried.
8. the article carrying equipment as described in any one of claims 1 to 7, which is characterized in that
Aforementioned 1st kind of article is the wafer container for storing semiconductor crystal wafer,
Aforementioned 2nd kind of article is the EUV container for storing EUV exposure mask,
Aforementioned 3rd kind of article is the reticule container for storing reticule.
9. such as article carrying equipment described in any item of the claim 1 to 8, which is characterized in that
It is also equipped with the control unit for controlling the movement of aforementioned 1st shifting apparatus, aforementioned 2nd shifting apparatus and aforementioned lifting body,
Aforementioned 1st shifting apparatus is configured to, can be by itself shifting between aforementioned 2nd handling device of aforementioned 1st kind of article Load movement is executed compared with aforementioned 2nd shifting apparatus with the short period,
Aforementioned control unit execute the 1st control from from aforementioned 1st conveyer to the aforementioned 1st kind of article of aforementioned 1st shifting apparatus transfer, From aforementioned 2nd conveyer to the 2nd of the aforementioned 1st kind of article of aforementioned 2nd shifting apparatus transfer the control, from aforementioned 3rd conveyer to 3rd control of the aforementioned aforementioned 2nd kind of article of 2nd shifting apparatus transfer or aforementioned 3rd kind of article, from aforementioned 2nd conveyer forward The 4th control of the aforementioned 1st kind of article of the 1st shifting apparatus transfer is stated, and is being able to carry out aforementioned 2nd control and aforementioned 4th control In the case where the both sides of system, aforementioned 4th control is preferentially executed.
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