CN110398793B - 一种基于全介质的光可调双带太赫兹吸收器及制作方法 - Google Patents
一种基于全介质的光可调双带太赫兹吸收器及制作方法 Download PDFInfo
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CN110994091A (zh) * | 2019-12-13 | 2020-04-10 | 华南理工大学 | 基于超表面的太赫兹可调谐滤波器 |
CN111308588B (zh) * | 2020-03-23 | 2022-03-25 | 中北大学 | 一种基于表面等离激元多频带完美吸收器 |
CN112382858B (zh) * | 2020-10-23 | 2022-03-15 | 西安理工大学 | 一种基于全介质材料的光可调四频带太赫兹超材料吸收器 |
CN113161760B (zh) * | 2021-03-03 | 2022-08-02 | 西安理工大学 | 一种单元随机分布的全介质多带太赫兹超材料吸收器 |
CN113820292B (zh) * | 2021-08-24 | 2024-02-27 | 西安理工大学 | 一种基于碳纳米管薄膜的柔性太赫兹超材料传感器 |
CN114137658B (zh) * | 2021-12-03 | 2023-09-12 | 电子科技大学长三角研究院(湖州) | 一种椭圆金属柱晶格光子晶体的低损耗太赫兹波导 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105824138A (zh) * | 2016-04-13 | 2016-08-03 | 电子科技大学 | 基于石墨烯/掺杂硅复合双层结构的光控太赫兹调制器 |
CN106785475A (zh) * | 2016-12-29 | 2017-05-31 | 电子科技大学 | 一种基于硅纳米针的太赫兹波宽带吸收材料 |
CN107146827A (zh) * | 2017-04-27 | 2017-09-08 | 电子科技大学 | 一种红外超材料吸收器及其制备方法 |
CN108666763A (zh) * | 2018-04-15 | 2018-10-16 | 哈尔滨理工大学 | 一种基于高掺杂半导体的宽带太赫兹吸收器 |
CN108827914A (zh) * | 2018-08-23 | 2018-11-16 | 天津大学 | 太赫兹瞬态吸收光谱探测***及载流子寿命测量方法 |
CN109066095A (zh) * | 2018-07-23 | 2018-12-21 | 西安理工大学 | 一种宽带可调谐太赫兹波吸收器及制作方法 |
Family Cites Families (8)
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JP5427061B2 (ja) * | 2010-02-24 | 2014-02-26 | パナソニック株式会社 | テラヘルツ波放射素子 |
WO2013112608A1 (en) * | 2012-01-23 | 2013-08-01 | The Regents Of The University Of Michigan | Photoconductive device with plasmonic electrodes |
JP2014163674A (ja) * | 2013-02-21 | 2014-09-08 | Seiko Epson Corp | テラヘルツ波検出装置、カメラ、イメージング装置、および計測装置 |
JP6281868B2 (ja) * | 2013-03-08 | 2018-02-21 | 国立大学法人大阪大学 | フォトニック結晶スラブ電磁波吸収体および高周波金属配線回路、電子部品、および送信器、受信器および近接無線通信システム |
US20180374981A1 (en) * | 2017-06-26 | 2018-12-27 | William N. Carr | Metamaterial Thermal Pixel for Limited Bandwidth Electromagnetic Sourcing and Detection |
US9772431B2 (en) * | 2013-05-07 | 2017-09-26 | Empire Technology Development Llc | Terahertz frequency tags and methods for their preparation and use |
CN204289720U (zh) * | 2014-12-24 | 2015-04-22 | 中国计量学院 | 一种基于高掺杂硅材料的高效宽带太赫兹吸波器 |
CN104882509B (zh) * | 2015-04-05 | 2017-04-19 | 北京工业大学 | 一种波导对接耦合型吸收倍增分离雪崩二极管 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105824138A (zh) * | 2016-04-13 | 2016-08-03 | 电子科技大学 | 基于石墨烯/掺杂硅复合双层结构的光控太赫兹调制器 |
CN106785475A (zh) * | 2016-12-29 | 2017-05-31 | 电子科技大学 | 一种基于硅纳米针的太赫兹波宽带吸收材料 |
CN107146827A (zh) * | 2017-04-27 | 2017-09-08 | 电子科技大学 | 一种红外超材料吸收器及其制备方法 |
CN108666763A (zh) * | 2018-04-15 | 2018-10-16 | 哈尔滨理工大学 | 一种基于高掺杂半导体的宽带太赫兹吸收器 |
CN109066095A (zh) * | 2018-07-23 | 2018-12-21 | 西安理工大学 | 一种宽带可调谐太赫兹波吸收器及制作方法 |
CN108827914A (zh) * | 2018-08-23 | 2018-11-16 | 天津大学 | 太赫兹瞬态吸收光谱探测***及载流子寿命测量方法 |
Non-Patent Citations (1)
Title |
---|
表面微纳结构的太赫兹波谱特性研究;吕晶;《中国优秀硕士学位论文全文数据库》;20160331;第五章 * |
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Application publication date: 20191101 Assignee: Wang Yue Assignor: XI'AN University OF TECHNOLOGY Contract record no.: X2022980005923 Denomination of invention: An optical tunable dual band terahertz absorber based on all dielectric and its fabrication method Granted publication date: 20210525 License type: Exclusive License Record date: 20220519 |
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Inventor after: Cui Zijian Inventor after: Wang Yue Inventor after: Zhu Dongying Inventor after: Yue Lisha Inventor before: Wang Yue Inventor before: Zhu Dongying Inventor before: Cui Zijian Inventor before: Yue Lisha |
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