CN110380211B - Liquid crystal metamaterial antenna array for terahertz wave beam regulation and control - Google Patents
Liquid crystal metamaterial antenna array for terahertz wave beam regulation and control Download PDFInfo
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- CN110380211B CN110380211B CN201910659717.XA CN201910659717A CN110380211B CN 110380211 B CN110380211 B CN 110380211B CN 201910659717 A CN201910659717 A CN 201910659717A CN 110380211 B CN110380211 B CN 110380211B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01Q1/48—Earthing means; Earth screens; Counterpoises
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- H—ELECTRICITY
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- H01Q21/00—Antenna arrays or systems
- H01Q21/0087—Apparatus or processes specially adapted for manufacturing antenna arrays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
- H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
- H01Q3/30—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
- H01Q3/34—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means
- H01Q3/36—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means with variable phase-shifters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
- H01Q3/44—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the electric or magnetic characteristics of reflecting, refracting, or diffracting devices associated with the radiating element
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Abstract
The invention discloses a liquid crystal metamaterial antenna array for terahertz wave beam regulation and control, which comprises an upper quartz substrate, a lower quartz substrate, a metal metamaterial structure growing on the upper quartz substrate, a metal ground plane structure growing on the lower quartz substrate and a liquid crystal material sealed between the metal metamaterial structure and the metal ground plane structure. The invention also discloses a method for preparing the terahertz liquid crystal metamaterial antenna array, and a beam regulation method and a characterization method by using the terahertz liquid crystal metamaterial antenna array. The invention realizes the dynamic regulation and control of the beam of the terahertz wave in a certain angle space range, and the device has simple structure and the regulation and control method is flexible and convenient.
Description
Technical Field
The invention belongs to the technical field of terahertz wave regulation and control, particularly relates to a liquid crystal metamaterial antenna array for terahertz wave beam regulation and control, and particularly relates to preparation and application of a terahertz antenna array based on digital and programmable metamaterials (also called a super surface, a metamaterial, a super structure surface and an artificial electromagnetic medium) by taking a liquid crystal material as a tuning unit.
Background
The terahertz technology is developed rapidly in the past two decades, and shows great application potential in the fields of imaging, biomedicine, high-speed wireless communication, national defense safety and the like. In the fields of terahertz communication, radar imaging and the like, a beam regulating and controlling device with high efficiency and a large scanning range is indispensable. However, compared with a mature semiconductor phase shifter and a ferrite phase shifter in a microwave band, a material with strong tuning performance is absent in the terahertz band, and factors such as high material loss and large parasitic capacitance cause that a device for terahertz band beam adjustment is relatively absent. In recent ten years, phase control devices based on tunable materials such as liquid crystal, graphene and vanadium oxide and terahertz metamaterials are rapidly developed. The phase shift regulation range of the device on the terahertz waves is usually small, the insertion loss is large, and the terahertz wave beam regulation efficiency is low.
Disclosure of Invention
The invention provides a preparation, characterization and coding control method of a terahertz antenna array based on digital and programmable metamaterial by taking a liquid crystal material as a tuning unit, provides a novel terahertz waveband liquid crystal digital and programmable metamaterial antenna array, and provides a method for actively regulating and controlling terahertz space beams.
In order to achieve the above object, a first technical solution adopted by the present invention is a liquid crystal metamaterial antenna array for terahertz beam modulation, which is characterized by comprising an upper quartz substrate, a lower quartz substrate, a metal metamaterial structure grown on the upper quartz substrate, a metal ground plane structure grown on the lower quartz substrate, and a liquid crystal material sealed between the metal metamaterial structure and the metal ground plane structure.
Further, the electromagnetic dielectric constant characteristics of the liquid crystal material are changed along with bias voltage applied to the metal metamaterial structure and the metal grounding surface structure.
Further, the metal metamaterial structure is of a Yellowski cross shape.
The second technical scheme adopted by the invention is a method for preparing the liquid crystal metamaterial antenna array for terahertz wave beam regulation, which comprises the following steps:
(1) substrate pretreatment: cleaning and drying the upper quartz substrate and the lower quartz substrate; (2) spin coating of photoresist: respectively spin-coating two layers of photoresist LOR10b and AZ1500 on the surfaces of the upper layer quartz substrate and the lower layer quartz substrate, and drying; (3) substrate photoetching: placing an upper quartz substrate coated with photoresist and a mask plate on a photoetching machine and aligning, wherein the structure of the mask plate is a metamaterial metal structure, developing by using a positive photoresist developing solution after exposure, then carrying out post-baking, then selecting a mask plate area of a metal grounding surface structure on the photoetching machine, and repeating the photoetching and developing operation on the lower quartz substrate; (4) metal sputtering and stripping: respectively sputtering a layer of metal on the upper quartz substrate and the lower quartz substrate after the operation of the step (3) by using a magnetron sputtering instrument, stripping the sputtered substrates in an organic solution, and removing the residual photoresist to obtain a metal metamaterial structure growing on the upper quartz substrate and a metal grounding surface structure growing on the lower quartz substrate; (5) transferring an upper layer electrode: repeating the operations of photoetching, developing, sputtering and stripping in the step (3) and the step (4) on the other surface of the upper quartz substrate without transferring the metal metamaterial structure, so that an upper metal electrode is grown on the other surface; (6) ultraviolet light orientation treatment: respectively spin-coating a layer of liquid crystal orientation agent on the surfaces of the metal metamaterial structure and the metal grounding surface structure after the step (4) is finished, drying, irradiating the surfaces by ultraviolet light, and heating and drying again; (7) manufacturing a liquid crystal box and filling liquid crystal: and (3) oppositely placing the metal metamaterial structure processed in the step (6) and the metal grounding surface structure, taking a Mylar (Mylar) film as an interval in the middle, clamping the upper quartz substrate and the lower quartz substrate by using a plastic clamp, coating epoxy resin glue on two sides of the Mylar film, and pouring liquid crystal after the epoxy resin glue is cured.
The third technical scheme adopted by the invention is that the wave beam regulation and control method of the liquid crystal metamaterial antenna array for terahertz wave beam regulation and control is utilized, and the one-dimensional liquid crystal metamaterial antenna array formed by N metamaterial units is subjected to thetaiUnder the excitation of the electromagnetic wave with the incident angle, the spatial beam distribution Ft(θ) can be represented by the following formula:
wherein the unit period of the liquid crystal metamaterial antenna array is d, Fs(theta) is the beam distribution of each line element, anFor coding of the nth array element, k0Is the free space wave vector; since the reflection type digital metamaterial unit is generally characterized by '0' and '1' with the reflection coefficients being 180 degrees out of phase, anThe value of (A) is only +/-1; according to the formula, the distribution of the reflected spatial beams of the liquid crystal metamaterial antenna array can be changed by changing the applied bias voltage sequence of each unit of the liquid crystal metamaterial antenna array; if the applied bias voltage sequence is composed of repeated subsequences, and the coding arrangement of the subsequences meets the requirement that '0' and '1' are symmetrically arranged along the center of the subsequences, the formula is used for calculating that the space beams corresponding to the sequences are symmetrically distributed along the angle theta i, and the length of the subsequences is dynamically changed, so that the beams which are symmetrically distributed can be controlled to be far away from or close to the angle theta i, and the dynamic control of the space beams is realized.
The fourth technical scheme provided by the invention is a characterization method of the liquid crystal metamaterial antenna array for terahertz beam regulation, which comprises the following steps:
1) connecting the circuit board: fixing the liquid crystal metamaterial antenna array on a printed circuit board through a double-sided adhesive tape, and connecting 24 lines of control electrodes on the circuit board and corresponding electrodes connected with 24 lines of array units on the liquid crystal metamaterial antenna array by using metal wires with the diameter of 50 mu m through a lead bonding machine;
2) connecting a test system: (1) writing a control program to drive an independent switch of an output port on a field programmable logic array board, wherein the control program is used for controlling the output voltage of an FPGA port; (2) connecting the output ports of the 32 paths of FPGA with the corresponding input ports of the 32 paths of amplifying circuits through DuPont lines; (3) connecting the output port of the 24-path amplifying circuit with the corresponding input port of the circuit board fixed with the liquid crystal metamaterial antenna array through a DuPont wire;
3) fixing the liquid crystal metamaterial antenna array fixed on the circuit board in the step 1) at the central position of a digital rotating table, and adjusting the position of a receiving and transmitting module of a terahertz time-domain spectroscopy system to enable the liquid crystal metamaterial antenna array to be positioned at the intersection of terahertz wave optical paths of the receiving and transmitting module; dynamically changing bias voltage independently applied to each linear array unit on the liquid crystal metamaterial antenna array through the control program in the step 2), controlling the digital rotating table to rotate by using the control program, and measuring spatial beam distribution of the liquid crystal metamaterial antenna array corresponding to different bias voltage sequences.
The invention has the beneficial effects that:
the invention provides a novel terahertz antenna array which takes a liquid crystal metamaterial as a tuning unit and is based on a digital and programmable metamaterial by utilizing the electro-optic effect of the liquid crystal material, and dynamic regulation and control of terahertz space beams are realized. The device process is simple in preparation method, the regulation and control means are flexible and convenient, and the requirements of the phased array technology used by the traditional wave beam regulation and control on the feed network are simplified.
Drawings
FIG. 1 is a schematic unit structure diagram of a liquid crystal metamaterial antenna array for terahertz beam modulation and control according to the present invention;
FIG. 2 is a flow chart of a preparation method of a liquid crystal metamaterial antenna array for terahertz wave beam modulation and control according to the invention;
FIG. 3 is a schematic diagram of a characterization system of a liquid crystal metamaterial antenna array for terahertz beam modulation; .
Fig. 4 is a dynamic spatial beam distribution diagram of a liquid crystal metamaterial antenna array for terahertz beam modulation.
Detailed Description
The present invention is further illustrated by the following figures and specific examples, which are to be understood as illustrative only and not as limiting the scope of the invention for use, and modifications of various equivalent forms of the invention which are obvious to those skilled in the art, after reading the present disclosure, are intended to be included within the scope of the appended claims.
The invention discloses a terahertz antenna array based on digital and programmable metamaterials (also called a metamaterials, a metamaterials and an artificial electromagnetic medium) by taking a liquid crystal material as a tuning unit, which has a space beam dynamic regulation function. The metamaterial unit is composed of a metal structure grown on an upper layer quartz substrate and a lower layer quartz substrate and a liquid crystal layer sandwiched between the two metal structures, and is arranged into a one-dimensional linear array composed of a plurality of linear array units. By utilizing the birefringence effect of the liquid crystal, the orientation of the liquid crystal is adjusted by applying bias voltage to the liquid crystal unit, and the refractive index of the liquid crystal in the terahertz wave band is changed, so that the phase of the reflected terahertz wave of the linear array unit is regulated and controlled. And then, the dynamic regulation and control of the terahertz wave beam are realized by controlling the linear array unit. The invention discloses a dynamic coding regulation and control method for terahertz waveband space beams through a digital and programmable metamaterial antenna array, and also discloses a preparation and test method for the digital and programmable metamaterial antenna array. The invention realizes the dynamic regulation and control of the beam of the terahertz wave in a certain angle space range, and the device has simple structure and the regulation and control method is flexible and convenient. The details are described below.
Design of terahertz digital and programmable metamaterial antenna array (namely liquid crystal metamaterial antenna array for terahertz beam regulation) unit based on liquid crystal material
The liquid crystal material can dynamically change the electromagnetic dielectric constant of the material by changing the bias voltage applied to the liquid crystal material, and is a good functional material for actively regulating and controlling the metamaterial device. In order to design a unit structure of a terahertz digital metamaterial antenna array based on a liquid crystal material, various metamaterial structure forms and geometric dimensions are researched and optimized. The optimized cell structure is schematically shown in fig. 1, wherein the period size is 170 μm, the arm length a is 86 μm, the line width w is 20 μm, and the liquid crystal layer thickness is 25 μm.
Preparation of terahertz digital and programmable metamaterial antenna array based on liquid crystal material
According to the terahertz digital and programmable metamaterial antenna array unit structure parameters designed and optimized in size as shown in figure 1, actual processing is carried out, firstly, a mask file is drawn out of the structure of figure 1 through drawing software, and then, a mask real object is processed according to the drawing file. As shown in fig. 2, the specific steps of the sample preparation process are as follows:
(1) substrate pretreatment: cleaning and drying the upper and lower quartz substrates;
(2) spin coating of photoresist: respectively spin-coating two layers of photoresist LOR10b and AZ1500 on the surface of the upper layer quartz substrate and the lower layer quartz substrate and drying;
(3) photoetching an upper layer quartz substrate and a lower layer quartz substrate: placing an upper quartz substrate coated with photoresist and a mask plate on a photoetching machine and aligning, wherein the structure of the mask plate is a metamaterial metal structure, developing by using a positive photoresist developing solution after exposure, then carrying out post-baking, then selecting a mask plate area of a metal grounding surface structure on the photoetching machine, and repeating the photoetching and developing operation on the lower quartz substrate;
(4) metal sputtering and stripping: and (4) respectively sputtering a layer of metal on the upper quartz substrate and the lower quartz substrate after the operation of the step (3) by using a magnetron sputtering instrument, stripping the sputtered substrates in an organic solution, and removing the residual photoresist to obtain a metamaterial metal structure growing on the upper quartz substrate and a metal grounding surface structure growing on the lower quartz substrate.
(5) And transferring the upper electrode. And (4) repeating the operations of photoetching, developing, sputtering and stripping in the steps (3) and (4) on the other surface of the upper quartz substrate on which the metamaterial metal structure is not transferred, so that an upper metal electrode is grown on the surface.
(6) And (5) ultraviolet light orientation treatment. And (5) spin-coating a layer of liquid crystal orientation agent on the surfaces of the metamaterial structure grown on the upper quartz substrate and the metal grounding surface structure grown on the lower quartz substrate after the step (4) is finished, and drying. And irradiating the surface with ultraviolet light, and heating and drying again.
(7) And (5) making a box and filling liquid crystals. And (4) oppositely placing the metamaterial structure on the upper-layer quartz substrate after the processing in the step (6) and the metal grounding surface structure on the lower-layer quartz substrate, and taking a Mylar film as an interval in the middle. And (3) using a plastic clamp to clamp the upper and lower substrates, and coating epoxy resin glue on two sides. And pouring liquid crystals after the epoxy resin glue is cured.
Third, characterization method of terahertz digital and programmable metamaterial antenna array based on liquid crystal material
FIG. 3 is a schematic diagram of a method for characterizing a terahertz digital and programmable metamaterial antenna array based on a liquid crystal material. The method comprises the following steps:
1) connecting the circuit board: fixing the terahertz digital metamaterial antenna array (namely the liquid crystal metamaterial antenna array) based on the liquid crystal material on a printed circuit board, and connecting 32 paths of control electrodes on the circuit board with corresponding position electrodes on the sample by using bonding wires for a wire bonding machine;
2) connecting a test system: (1) and writing a control program to drive an independent switch of an output port on the FPGA board. (2) Connecting the output ports of the 32 paths of FPGA with the corresponding input ports of the 32 paths of amplifying circuits through DuPont lines; (3) connecting the output port of the 32-path amplifying circuit with the corresponding input port of the circuit board through a DuPont wire;
3) fixing the terahertz digital metamaterial antenna array based on the liquid crystal material on the fixed circuit board in the step 1) at the central position of a digital rotating table (a turntable for short), and adjusting the position of a receiving and transmitting module of a terahertz time-domain spectroscopy system to enable the terahertz digital metamaterial antenna array sample to be positioned at the intersection of terahertz wave optical paths of the receiving and transmitting module. Dynamically changing bias voltage applied to each unit of the terahertz digital metamaterial antenna array through the control software in the step 2), and controlling the rotation of the rotary table by using the software to measure the space beam distribution of the terahertz digital metamaterial antenna array sample under different bias voltage sequences.
Fourth, experimental results of terahertz digital metamaterial antenna array based on liquid crystal material
The main application aspect of the terahertz digital metamaterial antenna array based on the liquid crystal material is dynamic beam regulation of a terahertz frequency band.
For the one-dimensional terahertz digital metamaterial antenna array formed by N metamaterial units, the theta angle is thetaiUnder the excitation of the electromagnetic wave with the incident angle, the spatial beam distribution Ft(θ) can be represented by the following formula:
the unit period of the terahertz digital metamaterial antenna array is d, Fs(theta) is the beam distribution of each line element, anFor coding of the nth array element, k0Is the free space wavevector. Since the reflection type digital metamaterial unit is generally characterized by '0' and '1' with the reflection coefficients being 180 degrees out of phase, anThe value of (A) is only +/-1; according to the formula, the distribution of the reflected spatial beams of the terahertz digital metamaterial antenna array can be changed by changing the applied bias voltage sequence of each unit of the terahertz digital metamaterial antenna array; if the applied bias voltage sequence is composed of repeated subsequences, and the coding arrangement of the subsequences meets the requirement that '0' and '1' are symmetrically arranged along the center of the subsequences, the formula is used for calculating that the space beams corresponding to the sequences are symmetrically distributed along the angle theta i, and the length of the subsequences is dynamically changed, so that the beams which are symmetrically distributed can be controlled to be far away from or close to the angle theta i, and the dynamic control of the space beams is realized.
And finally, performing simulation optimization, and obtaining the number of the effective linear array units of the terahertz digital metamaterial antenna array sample prepared by the processing steps, wherein the number of the effective linear array units is N-24, and the period D of the effective linear array units is 540 mu m. It was determined that when a square wave bias voltage with a peak value of 25V and a frequency of 100Hz was applied, the reflection coefficients of the metamaterial '0' and '1' units had the same amplitude at about 670GHz and a phase difference value of approximately 180 °, which could satisfy the frequency response condition required for the digital metamaterial unit.
FIG. 4 shows the spatial beam distribution at 672GHz of the prepared terahertz digital metamaterial antenna array measured by using the characterization system shown in FIG. 3. As can be seen from the figure, for an incident electromagnetic wave inclined by 20 °, when the encoding sequence of the prepared terahertz digital metamaterial antenna array is/00./and/11./the spatial beam points to the direction of the specular reflection angle between the incident beam and the plane of the array. Whereas the spatial beam pointing directions of the corresponding/10./,/1100./,/111000./sequence deviate approximately from the specular angle by 31.5 °, 13 °, and 8 °, respectively. Therefore, the dynamic beam regulation function of the terahertz waves can be realized by changing the coding sequence of the terahertz digital metamaterial antenna array.
The active beam regulation and control method realizes active beam regulation and control of the terahertz waves in a certain angle and space range, and has the advantages of simple device structure and flexible and convenient regulation and control method.
Claims (7)
1. A preparation method of a liquid crystal metamaterial antenna array for terahertz wave beam regulation is characterized by comprising the following steps: (1) substrate pretreatment: cleaning and drying the upper quartz substrate and the lower quartz substrate; (2) spin coating of photoresist: respectively spin-coating two layers of photoresist LOR10b and AZ1500 on the surfaces of the upper layer quartz substrate and the lower layer quartz substrate, and drying; (3) substrate photoetching: placing the upper quartz substrate coated with the photoresist and the mask plate on a photoetching machine and aligning, wherein the structure of the used mask plate is a metamaterial metal structure, developing by using a positive photoresist developing solution after exposure, then carrying out post-baking, then selecting a mask plate area of a metal grounding surface structure on the photoetching machine, and repeating the photoetching and developing operation on the lower quartz substrate; (4) metal sputtering and stripping: respectively sputtering a layer of metal on the upper quartz substrate and the lower quartz substrate after the operation of the step (3) by using a magnetron sputtering instrument, stripping the sputtered substrates in an organic solution, and removing the residual photoresist to obtain a metal metamaterial structure growing on the upper quartz substrate and a metal grounding surface structure growing on the lower quartz substrate; (5) transferring an upper layer electrode: repeating the operations of photoetching, developing, sputtering and stripping in the step (3) and the step (4) on the other surface of the upper quartz substrate without transferring the metal metamaterial structure, so that an upper metal electrode is grown on the other surface; (6) ultraviolet light orientation treatment: respectively spin-coating a layer of liquid crystal orientation agent on the surfaces of the metal metamaterial structure and the metal grounding surface structure after the step (4) is finished, drying, irradiating the surfaces by ultraviolet light, and heating and drying again; (7) manufacturing a liquid crystal box and filling liquid crystal: placing the metal metamaterial structure processed in the step (6) and the metal grounding surface structure oppositely, taking a Mylar film as an interval in the middle, clamping the upper quartz substrate and the lower quartz substrate by using a plastic clamp, coating epoxy resin glue on two sides of the Mylar film, and pouring liquid crystal after the epoxy resin glue is cured; the liquid crystalThe metamaterial antenna array comprises an upper quartz substrate, a lower quartz substrate, a metal metamaterial structure growing on the upper quartz substrate, a metal ground plane structure growing on the lower quartz substrate and a liquid crystal material sealed between the metal metamaterial structure and the metal ground plane structure; in the step (2), a first layer of photoresist LOR10b is spin-coated on the upper layer of quartz substrate and the lower layer of quartz substrate, the pre-rotation speed is 600rpm, the stable rotation speed is 4000rpm, the time of the pre-rotation speed and the time of the stable rotation speed are respectively 6 seconds and 40 seconds, the baking temperature is 150 ℃, and the time is 5 minutes; spin-coating a second layer of photoresist AZ1500 at a pre-rotation speed of 600rpm and a stable rotation speed of 4000rpm for 6 seconds and 40 seconds respectively, baking at 90 ℃ for 5 minutes; the one-dimensional liquid crystal metamaterial antenna array formed by N metamaterial units is divided into thetaiUnder the excitation of the electromagnetic wave with the incident angle, the spatial beam distribution Ft(θ) can be represented by the following formula:
wherein the unit period of the liquid crystal metamaterial antenna array is d, Fs(theta) is the beam distribution of each line element, anFor coding of the nth array element, k0Is the free space wavevector, j is the imaginary unit; since the reflection type digital metamaterial unit is generally characterized by '0' and '1' with the reflection coefficients being 180 degrees out of phase, anThe value of (A) is only +/-1; the distribution of the reflected spatial beams of the liquid crystal metamaterial antenna array can be changed by changing the applied bias voltage sequence of each unit of the liquid crystal metamaterial antenna array; if the bias voltage applying sequence is composed of repeated subsequences, and the coding arrangement of the subsequences satisfies that '0' and '1' are symmetrically arranged along the center of the subsequences, the formula calculates that the space beam corresponding to the subsequences will be arranged along thetaiThe angle is symmetrically distributed, and the length of the subsequence is dynamically changed to control the distance between the symmetrically distributed beams and the theta or the near distance between the symmetrically distributed beams and the thetaiAngle, enabling dynamic control of spatial beams。
2. The method for manufacturing the liquid crystal metamaterial antenna array for terahertz beam modulation as claimed in claim 1, wherein the electromagnetic dielectric constant characteristics of the liquid crystal material are changed with bias voltages applied to the metal metamaterial structure and the metal ground plane structure.
3. The method for manufacturing the liquid crystal metamaterial antenna array for terahertz beam modulation as claimed in claim 1, wherein the thickness of the upper quartz substrate is 300 microns, and the thickness of the lower quartz substrate is 500 microns.
4. The method according to claim 1, wherein in the step (3), the photoresist LOR10b and AZ1500 are exposed on the upper quartz substrate and the lower quartz substrate by a photolithography machine for 18 seconds, and are developed by a positive photoresist developer for 14 seconds after exposure, and then are subjected to post-baking at a baking temperature of 90 ℃ for 10 minutes.
5. The method for manufacturing the liquid crystal metamaterial antenna array for terahertz beam modulation as claimed in claim 1, wherein in the step (4) and the step (5), a layer of metal is grown on the photoresist which is not developed and reacted and the exposed surface of the quartz substrate by a sputtering method, the upper quartz substrate and the lower quartz substrate which are sputtered are soaked in N-methyl pyrrolidone, a layer of metal on the photoresist is stripped, and the upper quartz substrate and the lower quartz substrate which are metal structure transferred are obtained by cleaning in isopropanol.
6. The method for manufacturing the liquid crystal metamaterial array antenna for terahertz beam modulation as claimed in claim 1, wherein in the step (7), the thickness of the poured liquid crystal is related to the thickness of the mylar film; when the liquid crystal is poured, the upper quartz substrate and the lower quartz substrate are preheated to a temperature above the clearing point temperature of the liquid crystal material, then the capillary tube is used for enabling the liquid crystal to gradually penetrate into a space formed by the Mylar film, and then the temperature is gradually reduced from the clearing point temperature to the room temperature.
7. The method for characterizing the liquid crystal metamaterial antenna array for terahertz beam modulation as claimed in claim 1, comprising the steps of:
1) connecting the circuit board: fixing the liquid crystal metamaterial antenna array on a printed circuit board through a double-sided adhesive tape, and connecting 24 lines of control electrodes on the circuit board and corresponding electrodes connected with 24 lines of array units on the liquid crystal metamaterial antenna array by using metal wires with the diameter of 50 mu m through a lead bonding machine;
2) connecting a test system: (1) writing a control program to drive an independent switch of an output port on a field programmable logic array board, wherein the control program is used for controlling the output voltage of an FPGA port; (2) connecting the output ports of the 32 paths of FPGA with the corresponding input ports of the 32 paths of amplifying circuits through DuPont lines; (3) connecting the output port of the 24-path amplifying circuit with the corresponding input port of the circuit board fixed with the liquid crystal metamaterial antenna array through a DuPont wire;
3) fixing the liquid crystal metamaterial antenna array fixed on the circuit board in the step 1) at the central position of a digital rotating table, and adjusting the position of a receiving and transmitting module of a terahertz time-domain spectroscopy system to enable the liquid crystal metamaterial antenna array to be positioned at the intersection of terahertz wave optical paths of the receiving and transmitting module; dynamically changing bias voltage independently applied to each linear array unit on the liquid crystal metamaterial antenna array through the control program in the step 2), controlling the digital rotating table to rotate by using the control program, and measuring spatial beam distribution of the liquid crystal metamaterial antenna array corresponding to different bias voltage sequences.
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| CN111123422A (en) * | 2020-01-07 | 2020-05-08 | 南京大学 | Novel terahertz dynamic adjustable grating and preparation method thereof |
| CN111190163B (en) * | 2020-02-21 | 2022-08-02 | 奥比中光科技集团股份有限公司 | Scanning device and scanning method based on reconfigurable optical super-surface layer |
| RU2756582C2 (en) * | 2020-03-20 | 2021-10-01 | Федеральное государственное автономное образовательное учреждение высшего образования "Уральский федеральный университет имени первого Президента России Б.Н. Ельцина" | Terahertz crystal |
| RU2756068C2 (en) * | 2020-03-20 | 2021-09-27 | Федеральное государственное автономное образовательное учреждение высшего образования "Уральский федеральный университет имени первого Президента России Б.Н. Ельцина" | Terahertz crystal |
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