CN110376406A - A kind of miniature probe platform and its operating method - Google Patents
A kind of miniature probe platform and its operating method Download PDFInfo
- Publication number
- CN110376406A CN110376406A CN201910746728.1A CN201910746728A CN110376406A CN 110376406 A CN110376406 A CN 110376406A CN 201910746728 A CN201910746728 A CN 201910746728A CN 110376406 A CN110376406 A CN 110376406A
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- probe
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- adjustment
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- 239000000523 sample Substances 0.000 title claims abstract description 117
- 238000011017 operating method Methods 0.000 title claims abstract description 13
- 238000012360 testing method Methods 0.000 claims abstract description 17
- 230000032683 aging Effects 0.000 claims abstract description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 9
- 230000001105 regulatory effect Effects 0.000 claims abstract description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 9
- 239000010432 diamond Substances 0.000 claims description 9
- 230000007423 decrease Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 5
- 238000004891 communication Methods 0.000 abstract description 3
- 208000035126 Facies Diseases 0.000 abstract description 2
- 235000003283 Pachira macrocarpa Nutrition 0.000 description 2
- 241001083492 Trapa Species 0.000 description 2
- 235000014364 Trapa natans Nutrition 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 235000009165 saligot Nutrition 0.000 description 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07392—Multiple probes manipulating each probe element or tip individually
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention relates to optic communication device manufacturing field, in particular to the ageing tester and its operating method of a kind of chip.A kind of miniature probe platform, regulating mechanism and chip mounting table are installed on pedestal, the regulating mechanism includes left long-armed, right long-armed, a left side is long-armed to be fixedly arranged at the front end with left probe, the right side is long-armed to be fixedly arranged at the front end with right probe, left long-armed and right long facies lateralis brachii has probe adjustment axis, and probe adjustment axis is assemblied in the sliding slot on slide unit, and a left side is long-armed and the right side is long-armed is separately installed with probe height adjusting screw.The present invention is convenient for mounting and clamping, stablizes, and is not limited by chip bonding pad position, compact, and portability is high, can be compatible with various sizes of chip, is suitable for various occasions.The operating method of probe station of the present invention realizes the adjustment of the three-dimensional of left and right probe by adjusting to the long-armed direction in left and right, it can make probe alignment chip bonding pad, easy to operate, test or power-up ageing process are stablized, testing efficiency is improved, production cost is reduced.
Description
Technical field
The present invention relates to optic communication device manufacturing field, in particular to the ageing tester of a kind of chip and its operation side
Method.
Background technique
In optic communication manufacturing field, manufacturing process need to carry out chip test and burn-in screen, this for
It is a critically important link for the stability and reliability of device work.In general, chip volume is all smaller, chip
The chip bonding pad position of manufacturer's design and spacing are also inconsistent, traditional this adds increased the difficulty to chip ageing test
Probe station volume is big, and structure is complicated, at high cost, when being tested chip using traditional probe station or be powered on aging, clamping
It is limited by chip bonding pad position, inconvenient for operation, test or power-up ageing process are unstable, and testing efficiency is lower.
Summary of the invention
The invention aims to solve the technical problem that probe station volume is big, structure is complicated, at high cost in the prior art,
To provide a kind of miniature probe platform, compact, structure are simple, cost is relatively low.
It is another object of the present invention to solve probe station traditional in the prior art in use, since structure is multiple
Miscellaneous, inconvenient for operation, the not high technical problem of testing efficiency provides a kind of operating method of miniature probe platform, easy to operate, visits
Pin position adjustment is accurate in place, while can be improved testing efficiency.
Present invention technical solution used for the above purpose is: a kind of miniature probe platform, is equipped with tune on pedestal
Mechanism and chip mounting table are saved, the regulating mechanism includes that a left side is long-armed, right long-armed, and a left side is long-armed to be fixedly arranged at the front end with left probe, right length
Arm is fixedly arranged at the front end with right probe, and left long-armed and right long facies lateralis brachii has probe adjustment axis, and probe adjustment axis is assemblied on slide unit
Sliding slot in, it is left long-armed and right long-armed is separately installed with probe height adjusting screw.
Further, the left side it is long-armed and it is right it is long-armed between be also equipped with left and right adjusting spring.
Further, the chip mounting table uses chip lifting platform structure, before chip lifting platform is located at regulating mechanism
Portion, pan frontward end is provided with chip lifting platform adjusting screw and chip lifting platform is drivingly connected.
Further, the chip lifting platform has a diamond shape inclined-plane, diamond shape inclined-plane and chip lifting platform adjusting screw
It is drivingly connected.
The present invention is that technical solution used by realizing above-mentioned another object is: a kind of operating method of miniature probe platform,
The following steps are included:
Step 1: three-dimensional adjustment: chip to be measured is placed on chip mounting table, by adjusting left length by front-rear position adjustment
Arm and the right side are long-armed in position in the front-back direction, to drive the adjustment of left probe and right probe front-rear position；Left-right position adjustment,
By adjusting it is left long-armed and it is right it is long-armed between left and right adjusting spring, the left long-armed and right long-armed position in left and right directions of adjustment,
To drive the adjustment of left probe and right probe left-right position；Upper and lower position adjustment, adjusts the upper of probe and/or chip lifting platform
Realize upper and lower position adjustment in lower position；
Step 2: test, electrified ageing: by the adjustment of three-dimensional, making probe alignment chip bonding pad, then by probe to core
The power-up of piece pad, carries out test or the electrified ageing of chip.
Further, in the step 1, front-rear position adjustment is adjusted according to following two mode: by pushing a left side manually
Long-armed and right long-armed rear portion adjustment is left long-armed and right long-armed in position in the front-back direction；It is long-armed that an axial adjustment left side is adjusted using probe
It is long-armed in position in the front-back direction with the right side.
Further, in the step 1, upper and lower position adjustment is adjusted according to following three kinds of modes: the next on adjustment probe
It sets: by adjusting the probe height adjusting screw on left long-armed and right long-armed top, and cooperating probe adjustment axis, before an adjustment left side is long-armed
The upper and lower position of the left probe at end and the right probe of right long-armed front end；Adjust chip lifting platform upper and lower position: chip mounting table is adopted
With chip lifting platform structure, chip lifting platform adjusting screw is screwed, chip lifting platform adjusting screw top is along chip lifting platform
Diamond shape inclined-plane ramps up, to make chip lifting platform to decline, conversely, chip lifting platform rises；Adjust probe and chip lifting
The upper and lower position of platform: behind the position for adjusting chip lifting platform, then by the upper and lower position of probe relative to the upper of chip lifting platform
Lower position is finely adjusted.
The present invention is not limited by chip bonding pad position, convenient for mounting and clamping, stablize, by the adjusting to probe three-dimensional,
Probe can be made to precisely align chip bonding pad, realize test and the electrified ageing of chip, structure is simple, compact, portability
Height can be compatible with different scale chips, be suitable for various occasions.
Operating method of the invention, it is long-armed by adjusting the left long-armed and right side, realize left probe and right probe in X, Y, Z three-dimensional
The adjusting in direction, probe adjustment axis cooperate probe height adjusting screw, Ke Yishi while realizing the adjustment of probe front-rear position
The adjustment of existing probe upper and lower position, easy to operate, test or power-up ageing process are stablized, and improve testing efficiency, reduce
Production cost.
Detailed description of the invention
Fig. 1 is structure chart of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the top view that the present invention has left and right adjusting spring.
Fig. 4 is chip lifting platform structure chart of the present invention.
In figure: 1. is left long-armed, 2. right long-armed, 3. probe adjustment axis, 4. left probes, 5. right probes, 6. chip mounting tables, and 7.
Pedestal, 8. chip lifting platform adjusting screws, 9. probe height adjusting screws, 10. slide units, 11. sliding slots, 12. left and right adjusting springs.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawings and examples, but the invention is not limited to specific implementations
Example.
Implement 1
A kind of miniature probe platform as shown in Figs. 1-3 is equipped with regulating mechanism and chip mounting table 6, the adjusting machine on pedestal 7
Structure includes left long-armed 1, the right side long-armed 2, and a left side long-armed 1 is fixedly arranged at the front end with left probe 4, and the right side long-armed 2 is fixedly arranged at the front end with right probe 5, left length
Arm 1 and right long-armed 2 lateral surface have probe adjustment axis 3, and probe adjustment axis 3 is assemblied in the sliding slot 11 on slide unit 10, a left side long-armed 1
It is separately installed with probe height adjusting screw 9 with the right side long-armed 2, is also equipped with left and right adjusting bullet between the left side long-armed 1 and the right side long-armed 2
Spring 12.
Using a kind of miniature probe platform operating method of above-mentioned miniature probe platform, comprising the following steps:
Step 1: three-dimensional adjustment: chip to be measured is placed on chip mounting table 6, works as required precision by front-rear position adjustment
When low, by pushing the rear portion on an a left side long-armed 1 and the right side long-armed 2 adjustment left side long-armed 1 and the right side long-armed 2 in position in the front-back direction manually；
When required precision is high, a left side long-armed 1 and the right side long-armed 2 are adjusted in position in the front-back direction, to drive a left side using probe adjustment axis 3
The left probe 4 and right probe 5 of right long-armed front end are in the adjustment of front-rear position, and sliding slot 11 is on a left side long-armed 1 and right long-armed 2 front and back adjustment
During play position-limiting action；Left-right position adjustment, by adjusting the left and right adjusting spring between a left side long-armed 1 and the right side long-armed 2
12 tightness, the position of an adjustment left side long-armed 1 and the right side long-armed 2 in left and right directions, to drive left probe 4 and right probe 5 left
The adjustment of right position；Upper and lower position adjustment is realized by adjusting the upper and lower position of probe, by adjusting a left side long-armed 1 and the right side long-armed 2
The degree that links closely of the probe height adjusting screw 9 on top, and cooperate probe adjustment axis 3, the left probe 4 of left long-armed 1 front end of adjustment
With the adjustment of 5 upper and lower position of right probe of right long-armed 2 front end, two probe height adjusting screws 9 on left long-armed 1 are applied to
When the equalising torque at 3 both ends of probe adjustment axis, left probe 4 keeps a horizontality, when two probes height on the right side long-armed 2
When adjusting screw 9 is applied to the equalising torque at 3 both ends of probe adjustment axis, right probe 5 keeps a horizontality, when a left side long-armed 1
On two probe height adjusting screws 9 when being applied to the moment unbalance at 3 both ends of probe adjustment axis, a left side long-armed 1 will be to visit
Needle adjustment axis 3 is that axis is rotated, when two probe height adjusting screws 9 on the right side long-armed 2 are applied to 3 both ends of probe adjustment axis
Moment unbalance when, the right side long-armed 2 will with probe adjustment axis 3 be axis be rotated, to drive left probe 4 and right probe 5
It lifts or pushes, complete the adjustment of probe upper and lower position；
Step 2: test, electrified ageing: by the adjustment of three-dimensional, making probe alignment chip bonding pad, then by probe to core
The power-up of piece pad, carries out test or the electrified ageing of chip.
Embodiment 2
The present embodiment uses miniature probe platform substantially the same manner as Example 1, and difference is chip mounting table 6 using such as Fig. 4 institute
The chip lifting platform structure shown, chip lifting platform are located at the front of regulating mechanism, and chip lifting platform has a diamond shape inclined-plane, water chestnut
Shape inclined-plane is drivingly connected with the chip lifting platform adjusting screw 8 that 7 front end of pedestal is arranged in.The chip lifting platform has a water chestnut
Shape inclined-plane, diamond shape inclined-plane and chip lifting platform adjusting screw 8 are drivingly connected.
The present embodiment uses the operating method of miniature probe platform substantially the same manner as Example 1, and difference is step 1, walks
Rapid 1: front-rear position adjustment and left-right position adjustment are same as Example 1, and difference is that upper and lower position adjustment is by adjusting core
It realizes precisely adjustment in the upper and lower position of piece lifting platform: screwing chip lifting platform adjusting screw 8, chip lifting platform adjusting screw 8 is pushed up
Portion is ramped up along the diamond shape inclined-plane of chip lifting platform, to make chip lifting platform to decline；Conversely, chip lifting platform rises, from
And realize precisely adjustment.
Embodiment 3
The present embodiment uses miniature probe platform same as Example 2.
The present embodiment uses the operating method of miniature probe platform substantially the same manner as Example 1, and difference is step 1, walks
Rapid 1: front-rear position adjustment and left-right position adjustment are same as Example 1, and difference is that upper and lower position adjustment is by adjusting spy
Realize precisely adjustment in the upper and lower position of needle and chip lifting platform: behind the position for adjusting chip lifting platform, then will be above and below probe
Position is finely adjusted relative to the upper and lower position of chip lifting platform, to realize precisely adjustment.
The above content is combine optimal technical scheme to the present invention done further description, and it cannot be said that invention
Specific implementation is only limitted to these explanations.For general technical staff of the technical field of the invention, the present invention is not being departed from
Design under the premise of, can also make it is simple deduce and replacement, all should be considered as protection scope of the present invention.
Claims (7)
1. a kind of miniature probe platform, it is characterised in that: be equipped with regulating mechanism and chip mounting table (6), the tune on pedestal (7)
Saving mechanism includes left long-armed (1), right long-armed (2), and left long-armed (1) is fixedly arranged at the front end with left probe (4), and right long-armed (2) front end is fixed
Have right probe (5), left long-armed (1) and long-armed (2) lateral surface in the right side have probe adjustment axis (3), and probe adjustment axis (3) is assemblied in cunning
In sliding slot (11) on platform (10), left long-armed (1) and the right side long-armed (2) is separately installed with probe height adjusting screw (9).
2. a kind of miniature probe platform according to claim 1, it is characterised in that: the left side long-armed (1) and the right side long-armed (2) it
Between be also equipped with left and right adjusting spring (12).
3. a kind of miniature probe platform according to claim 1 or 2, it is characterised in that: the chip mounting table (6) uses core
Piece lifting platform structure, chip lifting platform are located at the front of regulating mechanism, and pedestal (7) front end is provided with chip lifting platform adjusting screw
(8) it is drivingly connected with chip lifting platform.
4. a kind of miniature probe platform according to claim 3, it is characterised in that: the chip lifting platform has a diamond shape
Inclined-plane, diamond shape inclined-plane and chip lifting platform adjusting screw (8) are drivingly connected.
5. a kind of operating method of miniature probe platform, it is characterised in that: the following steps are included:
Step 1: three-dimensional adjustment: chip to be measured is placed on chip mounting table (6) by front-rear position adjustment, by adjusting
A left side long-armed (1) and the right side long-armed (2) is in position in the front-back direction, to drive the tune of left probe (4) and right probe (5) front-rear position
It is whole；Left-right position adjustment, by adjusting the left and right adjusting spring (12) between left long-armed (1) and the right side long-armed (2), adjustment is left long-armed
(1) and the right side long-armed (2) position in left and right directions, to drive the adjustment of left probe (4) and right probe (5) left-right position；On
Lower position adjustment, adjusts the upper and lower position of probe and/or chip lifting platform, realizes upper and lower position adjustment；
Step 2: test, electrified ageing: by the adjustment of three-dimensional, making probe alignment chip bonding pad, then by probe to core
The power-up of piece pad, carries out test or the electrified ageing of chip.
6. a kind of operating method of miniature probe platform according to claim 5, it is characterised in that: in the step 1, front and back
Position adjustment is adjusted according to following two mode: by pushing the rear portion adjustment of left long-armed (1) and the right side long-armed (2) left long-armed manually
(1) and the right side long-armed (2) are in position in the front-back direction；Left long-armed (1) and the right side long-armed (2) is adjusted preceding using probe adjustment axis (3)
The position of rear direction.
7. a kind of operating method of miniature probe platform according to claim 5, it is characterised in that: in the step 1, up and down
Position adjustment is adjusted according to following three kinds of modes: adjustment probe upper and lower position: by adjusting left long-armed (1) and the right side long-armed (2) top
The probe height adjusting screw (9) at end, and cooperate probe adjustment axis (3), the left probe (4) of left long-armed (1) front end of adjustment and the right side
The upper and lower position of the right probe (5) of long-armed (2) front end；Adjust chip lifting platform upper and lower position: chip mounting table (6) uses chip
Lifting platform structure screws chip lifting platform adjusting screw (8), and chip lifting platform adjusting screw (8) top is along chip lifting platform
Diamond shape inclined-plane ramps up, to make chip lifting platform to decline, conversely, chip lifting platform rises；Adjust probe and chip lifting
The upper and lower position of platform: behind the position for adjusting chip lifting platform, then by the upper and lower position of probe relative to the upper of chip lifting platform
Lower position is finely adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910746728.1A CN110376406A (en) | 2019-08-14 | 2019-08-14 | A kind of miniature probe platform and its operating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910746728.1A CN110376406A (en) | 2019-08-14 | 2019-08-14 | A kind of miniature probe platform and its operating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110376406A true CN110376406A (en) | 2019-10-25 |
Family
ID=68259350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910746728.1A Pending CN110376406A (en) | 2019-08-14 | 2019-08-14 | A kind of miniature probe platform and its operating method |
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| CN (1) | CN110376406A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2735356Y (en) * | 2004-10-19 | 2005-10-19 | 武汉电信器件有限公司 | Double-probe 3D micromotion coupling test bench for optoelectronic device die |
| KR20100051269A (en) * | 2008-11-07 | 2010-05-17 | 주식회사 크라또 | Probe unit being capable of delicate adjustment of probe |
| CN103293349A (en) * | 2012-02-24 | 2013-09-11 | 东京毅力科创株式会社 | Probe apparatus and parallelism adjustment mechanism of probe card |
| CN204228757U (en) * | 2014-11-14 | 2015-03-25 | 中国电子科技集团公司第二十六研究所 | Wafer scale SAW (Surface Acoustic Wave) device low-loss structured testing fixture |
| KR200478970Y1 (en) * | 2014-07-09 | 2015-12-04 | 박성윤 | Micro-positioner device for probe station |
| CN208433977U (en) * | 2018-08-23 | 2019-01-25 | 北京世纪东方通讯设备有限公司 | A kind of test fixture suitable for hand-held radio telephone |
| CN210401482U (en) * | 2019-06-24 | 2020-04-24 | 大连藏龙光电子科技有限公司 | Miniature probe station |
-
2019
- 2019-08-14 CN CN201910746728.1A patent/CN110376406A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2735356Y (en) * | 2004-10-19 | 2005-10-19 | 武汉电信器件有限公司 | Double-probe 3D micromotion coupling test bench for optoelectronic device die |
| KR20100051269A (en) * | 2008-11-07 | 2010-05-17 | 주식회사 크라또 | Probe unit being capable of delicate adjustment of probe |
| CN103293349A (en) * | 2012-02-24 | 2013-09-11 | 东京毅力科创株式会社 | Probe apparatus and parallelism adjustment mechanism of probe card |
| KR200478970Y1 (en) * | 2014-07-09 | 2015-12-04 | 박성윤 | Micro-positioner device for probe station |
| CN204228757U (en) * | 2014-11-14 | 2015-03-25 | 中国电子科技集团公司第二十六研究所 | Wafer scale SAW (Surface Acoustic Wave) device low-loss structured testing fixture |
| CN208433977U (en) * | 2018-08-23 | 2019-01-25 | 北京世纪东方通讯设备有限公司 | A kind of test fixture suitable for hand-held radio telephone |
| CN210401482U (en) * | 2019-06-24 | 2020-04-24 | 大连藏龙光电子科技有限公司 | Miniature probe station |
Non-Patent Citations (1)
| Title |
|---|
| 顾吉等: "一种微型探针台的设计和应用", 电子与封装, vol. 17, no. 1, 20 January 2017 (2017-01-20), pages 41 - 46 * |
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