CN110372201A - A kind of large scale, high deposition rate preform blowtorch and its loose manufacturing method - Google Patents
A kind of large scale, high deposition rate preform blowtorch and its loose manufacturing method Download PDFInfo
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- CN110372201A CN110372201A CN201910709475.0A CN201910709475A CN110372201A CN 110372201 A CN110372201 A CN 110372201A CN 201910709475 A CN201910709475 A CN 201910709475A CN 110372201 A CN110372201 A CN 110372201A
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- blowtorch
- protective gas
- oxygen
- spray orifice
- raw material
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- 230000008021 deposition Effects 0.000 title claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 239000007789 gas Substances 0.000 claims abstract description 94
- 238000000151 deposition Methods 0.000 claims abstract description 64
- 239000007921 spray Substances 0.000 claims abstract description 46
- 239000002994 raw material Substances 0.000 claims abstract description 45
- 230000001681 protective effect Effects 0.000 claims abstract description 44
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims abstract description 30
- 239000005049 silicon tetrachloride Substances 0.000 claims abstract description 30
- 239000011148 porous material Substances 0.000 claims abstract description 8
- 239000007787 solid Substances 0.000 claims abstract description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 68
- 239000001301 oxygen Substances 0.000 claims description 68
- 229910052760 oxygen Inorganic materials 0.000 claims description 68
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 13
- 230000000630 rising effect Effects 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 230000007062 hydrolysis Effects 0.000 claims description 9
- 238000006460 hydrolysis reaction Methods 0.000 claims description 9
- 230000000903 blocking effect Effects 0.000 claims description 8
- 238000005660 chlorination reaction Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
- 238000007872 degassing Methods 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 3
- 238000005019 vapor deposition process Methods 0.000 claims description 3
- 238000002485 combustion reaction Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 19
- 238000009826 distribution Methods 0.000 abstract description 5
- 239000013307 optical fiber Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 238000005137 deposition process Methods 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 229910003978 SiClx Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 235000010215 titanium dioxide Nutrition 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000037396 body weight Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 239000000567 combustion gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000002737 fuel gas Substances 0.000 description 2
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical class [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000012681 fiber drawing Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of large scales, high deposition rate preform blowtorch and its loose manufacturing method, including blowtorch ontology, blowtorch ontology is in multilayer concentric cannula structure, including the donor center pipe set gradually from inside to outside, raw material intermediate tube and raw material outer tube, interior protective gas pipe and outer protective gas pipe, wherein, outer protective gas pipe is solid tubes, outer protection tracheae has multi-layer annular distributed pores around interior protective gas pipe, multi-layer annular distributed pores are followed successively by internal layer burning gases spray orifice from inside to outside, outer layer burning gases spray orifice and outer protective gas spray orifice.Have many advantages, such as that converting silicon tetrachloride rate is high, deposition rate is high, Density Distribution is uniform, loosening body diameter fluctuation is small with preform loosening body prepared by this method.
Description
Technical field:
The present invention relates to optic fibre manufacturing technology field, especially a kind of large scale, the spray of high deposition rate preform
Lamp and its loose manufacturing method.
Background technique:
With the rapid development of optical communication industry, the competition of Optical Fiber Market is also further fierce, to reduce fiber manufacturing cost,
Market competitiveness of enterprises is improved, manufacture large-scale optical fiber prefabricating stick has become the inevitable direction of internal optical fiber enterprise development.System
Large-scale optical fiber prefabricating stick is made, the loss end to end of prefabricated rods on the one hand can be reduced, increases the successive sedimentation time, improves four chlorinations
On the other hand the raw material utilization efficiency such as silicon can reduce the installation of prefabricated rods in drawing process, fiber drawing furnace heating cooling frequency
Etc. non-essential working hour, to effectively raise the production efficiency of preform drawing.Current optical fiber enterprise manufactures optical fiber
The technical method of prefabricated rods is main are as follows: pipe Outside Vapor Deposition (OVD), axial vapor deposition method (VAD), plasma chemistry vapour
Phase sedimentation (PCVD), modified chemical vapor deposition (MCVD) and combinations thereof, MCVD+OVD, VAD+OVD etc..Wherein OVD and
A combination thereof method has become large scale, high deposition rate preform preparation because deposition rate is high, deposition outer diameter is unrestricted
Main flow direction, and this method is often due to the mismatch of Blowtorch structure and burning gases in deposition process, combustion-supporting gas flow makes
It obtains raw material to be unable to fully react, causes deposition rate and utilization rate of raw materials lower.
In order to improve the production capacity of preform, it is necessary to promote deposition rate.Currently often adopted to improve deposition efficiency
It is designed with more Blowtorch structures, such as " method (CN104909556B) that more blowtorch prepare loose body optical fiber prefabricated rod " patented technology,
Using more Blowtorch structures (5~15 blowtorch) although effectively improving deposition rate, the increase of deposition rate is then resulted in
The reduction of deposition efficiency, so that the production cost increases for preform.The reduction of deposition efficiency simultaneously makes to deposit in warehouse not
The silica dioxide granule for depositing to loosening body surface increases, so that there are bubbles, white point in prefabricated rods after loosening body sintering.Again
Such as a kind of " method and device (CN104176926B) of synthesizing large diameter preform loosening body " patented technology, deposition process
It is middle to switch big small-bore blowtorch, although can effectively improve converting silicon tetrachloride rate and deposition rate, since two kinds of bores spray
Gas flow, flame temperature is necessarily caused to have biggish difference when the otherness switching of lamp, so that the titanium dioxide generated when switching
Si powder distribution of particles, bulk density have biggish difference to easily lead to loosening body cracking in deposition process.
Summary of the invention:
The technical problem to be solved by the invention is to provide a kind of large scales, high deposition rate preform blowtorch
And its loose manufacturing method, there is converting silicon tetrachloride rate height, deposition speed with preform loosening body prepared by this method
The advantages that rate is high, Density Distribution is uniform, loosening body diameter fluctuation is small.
The technical solution of the invention is as follows, provides a kind of large scale, high deposition rate preform blowtorch, including
Blowtorch ontology, blowtorch ontology are in multilayer concentric cannula structure, including set gradually from inside to outside donor center pipe, among raw material
Pipe and raw material outer tube, interior protective gas pipe and outer protective gas pipe, wherein outer protective gas pipe is solid tubes, outer protection gas
Pipe has multi-layer annular distributed pores around interior protective gas pipe, and multi-layer annular distributed pores are followed successively by internal layer burning from inside to outside
Air jetting holes, outer layer burning gases spray orifice and outer protective gas spray orifice, and donor center pipe, raw material intermediate tube and the original
Material outer tube respectively constitutes the linear passages along export direction for circulate silicon tetrachloride vapor and delivery oxygen, the interior guarantor
Shield flue and outer protective gas spray orifice respectively constitute the linear passages along export direction for the oxygen that circulates, internal layer combustion gas
Body spray orifice, outer layer burning gases spray orifice respectively constitute the linear passages along export direction for circulate methane and oxygen.
Preferably, internal layer burning gases spray orifice, outer layer burning gases spray orifice and outer its path of protective gas spray orifice difference
It is parallel to export direction.
The present invention also provides a kind of large scales, the loose manufacturing method of high deposition rate preform, in deposition rank
Section is only supplied donor center pipe silicon tetrachloride steam and delivery oxygen early period, and interior protective gas jet pipe is passed through oxygen to improve flame
Inner cone prevents blowtorch mouth from blocking, and internal layer burning gases spray orifice and outer layer burning gases spray orifice be passed through the methane and oxygen of high flow capacity
Mixed gas generates thermal-flame, and generates silica dust particle, while outer protection with silicon tetrachloride steam hydrolysis
Air jetting holes are passed through high flow capacity oxygen to improve flame temperature, and loosening body is made to grow up rapidly under the action of temperature gradient；When thin
When rising to aimed dia 1/5~1/4 of loose body diameter, mixed silicon tetrachloride steam and delivery oxygen start among raw material
Pipe supply, while interior protection oxygen flow increases；When loosening body diameter is when rising to aimed dia 1/2~1/3, the four of mixing
Chlorination silicon vapor and delivery oxygen start to supply to raw material outer tube, and blowtorch then uses high temperature always；Flame is to improve tetrachloro
The conversion ratio and deposition rate of SiClx.
Further, the first step, plug loosening body is prepared using axial vapor deposition process, plug loosening body is through burning
Knot, degassing, drawing process prepares the OVD of 30~50mm of diameter can deposit plug；
Second step is docked stick at plug both ends, and will be polished to the plug being connected to stick, and interface is answered in removing
The impurity of power and mandrel surface；
Third step will be mounted on the chuck pedestal of depositing device the plug both ends being connected to stick, to deposition blowlamp point
Fire, depositing device chuck start to rotate with the revolving speed of 300~50r/min, and blowtorch is with blowtorch bracket with 600~2500mm/min's
Movement speed starts to deposit SiO 2 powder particle in mandrel surface, and exhaust hood is always positioned at the surface of blowtorch；
After 4th step, loosening body deposition, deposition blowtorch auto extinguishing, deposition terminates.
Using after above scheme compared with prior art, the invention has the following advantages that
(1) large scale provided by the present invention, high deposition rate preform loosening body manufacture blowtorch, first blowtorch
Ontology is in multilayer concentric cannula structure, and different flow gas, raw material in conjunction with needed for the different depositional phases are supplied, to have
Effect improves deposition rate and utilization rate of raw materials；Secondly protective gas pipe is passed through oxygen to improve flame inner cone in being arranged,
To delay silicon tetrachloride and flame hydrolysis to generate silica dust particale, the blocking of blowtorch mouth is avoided；Finally
It adds outer protective gas spout and is passed through oxygen, flame flame envelope shape concentration can on the one hand do not dissipated and effectively increases torch flame
Stability, on the other hand being passed through for outer protection oxygen can be improved the temperature of flame flame envelope and increase " thermophoretic effect " and promote more
More silica dust particales is accumulated to loosening body surface.
(2) large scale of the present invention, high deposition rate preform loosening body manufacture blowtorch, in deposition rank
Section is only supplied donor center pipe silicon tetrachloride steam and delivery oxygen early period, and interior protective gas jet pipe is passed through oxygen to improve flame
Inner cone prevents blowtorch mouth from blocking, and internal layer burning gases spray orifice and outer layer burning gases spray orifice be passed through the methane and oxygen of high flow capacity
Mixed gas generates thermal-flame, and generates silica dust particle, while outer protection with silicon tetrachloride steam hydrolysis
Air jetting holes are passed through high flow capacity oxygen to improve flame temperature, and loosening body is made to grow up rapidly under the action of temperature gradient；When thin
When rising to aimed dia 1/5~1/4 of loose body diameter, mixed silicon tetrachloride steam and delivery oxygen start among raw material
Pipe supply, and inside/outside protection oxygen flow increases simultaneously, on the one hand effectively improves the height and flame core temperature of flame flame core,
On the other hand the stability of torch flame and the temperature of flame envelope are improved, so that aggravating " thermophoretic effect " promotes more titanium dioxides
Silicon dust particale is accumulated to loosening body surface；When loosening body diameter is when rising to aimed dia 1/2~1/3, mixed tetrachloro
SiClx steam starts to supply to raw material outer tube with delivery oxygen, while inside/outside protection oxygen flow increases again to be promoted and be sunk
Product rate and utilization rate of raw materials.
Therefore, a kind of large scale of the present invention, high deposition rate preform are designed rationally with blowtorch, with the blowtorch and are tied
Close flow gas different needed for the different depositional phases, raw material is supplied, deposition rate and raw material can be effectively raised
Utilization rate, while the preform loosening body Density Distribution of invention preparation is uniform, loosening body diameter fluctuation is small, can effectively mention
The quality of high prefabricated rods.
Detailed description of the invention:
Fig. 1 is the equipment schematic diagram of outside vapor deposition (OVD) manufacture preform loosening body.
Fig. 2 is gas, raw material supply blowtorch schematic diagram.
Fig. 3 is the main view of burner nozzle of the present invention.
Figure label explanation: 1- deposits storehouse, 2- exhaust hood, 4- chuck, 5- plug, 6- loosening body, 7- blowtorch ontology, 8- spray
Lamp base, 9- blowtorch platform, 17- donor center pipe, 18- raw material intermediate tube, 19- raw material outer tube, protective gas pipe, 21- in 20-
The outer protective gas spray orifice of internal layer burning gases spray orifice, 22- outer layer burning gases spray orifice, 23-.
Specific embodiment:
With regard to specific embodiment, the invention will be further described with reference to the accompanying drawing:
As shown in Figure 1-3, a kind of large scale, high deposition rate preform blowtorch, including blowtorch ontology 7, blowtorch
Ontology 7 is in multilayer concentric cannula structure, including the donor center pipe 17, raw material intermediate tube 18 and raw material set gradually from inside to outside
Outer tube 19, interior protective gas pipe 20 and outer protective gas pipe, wherein outer protective gas pipe is solid tubes, and outer protection tracheae encloses
There are multi-layer annular distributed pores around interior protective gas pipe, multi-layer annular distributed pores are followed successively by internal layer burning gases from inside to outside
Spray orifice 21, outer layer burning gases spray orifice 22 and outer protective gas spray orifice 23, and the donor center pipe 17, raw material intermediate tube
18 and raw material outer tube 19 respectively constitute for circulate silicon tetrachloride vapor and deliver oxygen the linear passages along export direction,
The interior protective gas pipe 20 and outer protective gas spray orifice 23 respectively constitute logical for the straight line along export direction for the oxygen that circulates
Road, internal layer burning gases spray orifice 21, outer layer burning gases spray orifice 22 are respectively constituted for circulate methane and oxygen along exporter
To linear passages.
It is fixed in deposition storehouse 1 by above-mentioned Blowtorch structure, and by it by blowtorch pedestal 8 and blowtorch platform 9, is used first
VAD technique prepares plug loosening body, and plug loosening body prepares diameter 30-50mm through sintering, degassing, stretching and welding procedure
OVD can deposit plug, subsequent plug both ends are mounted on 4 pedestal of chuck of depositing device, and blowtorch of the present invention are mounted on
OVD is deposited on the blowtorch platform 9 in storehouse.It is deposited using OVD technique, is only supplied donor center pipe 17 4 in early period depositional phase
Chlorination silicon vapor and delivery oxygen, interior protective gas pipe 20, which is passed through oxygen raising flame inner cone, prevents blowtorch mouth from blocking, combustion gas
Body spout includes the methane and oxygen mixture that internal layer burning gases spray orifice 21 and outer layer burning gases spray orifice 22 are passed through high flow capacity
Body generates high-temperature flame, and generates silica dust particle, while outer protective gas with silicon tetrachloride steam hydrolysis
Spray orifice 23 is passed through high flow capacity oxygen to improve flame temperature, and loosening body is made to grow up rapidly under the action of temperature gradient.When loose
When rising to aimed dia 1/5~1/4 of body diameter, mixing silicon tetrachloride steam and delivery oxygen start to raw material intermediate tube 18
Supply, while interior protection oxygen flow increases.When loosening body diameter is when rising to aimed dia 1/2~1/3, four chlorinations are mixed
Silicon vapor and delivery oxygen start to supply to raw material outer tube 19, and blowtorch then uses high-temperature flame to improve four chlorinations always
The conversion ratio and deposition rate of silicon.
The preparation step of preform loosening body is:
The first step prepares plug loosening body using axial vapor deposition process (VAD technique), and plug loosening body is through burning
Knot, degassing, drawing process prepares the OVD of 30~50mm of diameter can deposit plug；
Second step is docked stick at plug both ends, and will be polished to the plug being connected to stick, and interface is answered in removing
The impurity of power and mandrel surface；
Third step will be mounted on the chuck pedestal of depositing device the plug both ends being connected to stick, to deposition blowlamp point
Fire clicks " automatic operating " button, and the chuck 4 of depositing device starts to rotate with the revolving speed of 300~50r/min, and blowtorch is with blowtorch
Platform 9 starts to deposit SiO 2 powder particle in mandrel surface with the movement speed of 600~2500mm/min, and exhaust hood 2 is always
Positioned at the surface of blowtorch；
After 4th step, loosening body deposition, deposition blowtorch auto extinguishing, deposition terminates.
Specifically, following two embodiments
Embodiment 1
A kind of large scale, the preparation method of high deposition rate preform loosening body: heavy using OVD as illustrated in fig. 1 and 2
Product technique, uses methane as fuel gas, oxygen is as combustion-supporting gas, carrier gas and protective gas.Raw material and each gas are by spraying
Lamp group part sprays, and the silica dust particle for reacting generation deposits to form loosening body 6 on 5 surface of plug.Initial rotation speed
220r/min, after be gradually decreased to 65r/min；Starting relative moving speed be 2000mm/min, after be gradually decreased to 900mm/min；
Plug 5 is fixed, and the opposite starting stick of blowtorch moves back and forth.It is only supplied 17 flow 50g/min's of donor center pipe early period depositional phase
Silicon tetrachloride steam and 6L/min deliver oxygen, and interior protective gas pipe 20 is passed through 10L/min oxygen raising flame inner cone and prevents from spraying
Socket blocking, internal layer burning gases spray orifice 21, outer layer burning gases spray orifice 22 are passed through the methane and 32L/min oxygen of 40L/min
Mixed gas generates high-temperature flame, and generates silica dust particle, while outer guarantor with silicon tetrachloride steam hydrolysis
Shield air jetting holes 23 are passed through 15L/min oxygen to improve flame temperature, and loosening body is made to grow up rapidly under the action of temperature gradient.
When loosening body diameter is when rising to aimed dia 1/5, the silicon tetrachloride for starting to supply 100g/min to raw material intermediate tube 18 steams
Gas and 7L/min deliver oxygen, while interior protection oxygen flow increases to 15L/min.When loosening body diameter to rise to target straight
When diameter 1/3, start the silicon tetrachloride steam that 120g/min is supplied to raw material outer tube 19 and 8L/min delivery oxygen mixed gas,
Between blowtorch and deposition surface distance maintain 220mm~260mm always in deposition process, total sedimentation time is 11 hours.
Optical wand loosening body prepared by the present embodiment is weighed through SMS and laser diameter measuring instrument detects: loose body weight is
113.62kg；Active component maximum gauge 337.1mm, minimum diameter 336.5mm, average diameter 336.8mm, uniform diameter；It is flat
Equal density 0.58g/cm3。
Embodiment 2
A kind of large scale, the preparation method of high deposition rate preform loosening body: heavy using OVD as illustrated in fig. 1 and 2
Product technique, uses methane as fuel gas, oxygen is as combustion-supporting gas, carrier gas and protective gas.Raw material and each gas are by institute
Blowtorch assembly ejection is stated, the silica dust particle for reacting generation deposits to form loosening body 6 on 5 surface of plug.Initial rotation
Speed 200r/min, after be gradually decreased to 55r/min；Starting relative moving speed be 2200mm/min, after be gradually decreased to 1000mm/
min；Plug 5 is fixed, and the opposite starting stick of blowtorch moves back and forth.It is only supplied 17 flow 60g/ of donor center pipe early period depositional phase
The silicon tetrachloride steam and 6L/min of min delivers oxygen, and it is anti-that interior protective gas pipe 20 is passed through 12L/min oxygen raising flame inner cone
Only blowtorch mouth blocks, and internal layer burning gases spray orifice 21, outer layer burning gases spray orifice 22 are passed through the methane and 34L/min of 42L/min
Oxygen mixed gas generates high-temperature flame, and generates silica dust particle with silicon tetrachloride steam hydrolysis, simultaneously
Outer protective gas spray orifice 23 is passed through 15L/min oxygen to improve flame temperature, keeps loosening body rapid under the action of temperature gradient
It grows up.When loosening body diameter is when rising to aimed dia 1/4, start four chlorinations that 110g/min is supplied to raw material intermediate tube 18
Silicon vapor and 7L/min deliver oxygen, while interior protection oxygen flow increases to 15L/min.Mesh is risen to when loosening body diameter
When marking diameter 1/2, start the silicon tetrachloride steam that 130g/min is supplied to raw material outer tube 19 and 8L/min delivery oxygen mix
Gas, between blowtorch and deposition surface distance maintain 220mm~260mm always in deposition process, total sedimentation time is 12 hours.
Optical wand loosening body prepared by the present embodiment is weighed through SMS and laser diameter measuring instrument detects: loose body weight is
126.22kg；Active component maximum gauge 341.1mm, minimum diameter 339.7mm, average diameter 340.6mm, uniform diameter；It is flat
Equal density 0.63g/cm3。
Using after above scheme compared with prior art, the invention has the following advantages that
(1) large scale provided by the present invention, high deposition rate preform loosening body manufacture blowtorch, first blowtorch
Ontology is in multilayer concentric cannula structure, and different flow gas, raw material in conjunction with needed for the different depositional phases are supplied, to have
Effect improves deposition rate and utilization rate of raw materials；Secondly protective gas pipe is passed through oxygen to improve flame inner cone in being arranged,
To delay silicon tetrachloride and flame hydrolysis to generate silica dust particale, the blocking of blowtorch mouth is avoided；Finally
It adds outer protective gas spout and is passed through oxygen, flame flame envelope shape concentration can on the one hand do not dissipated and effectively increases torch flame
Stability, on the other hand being passed through for outer protection oxygen can be improved the temperature of flame flame envelope and increase " thermophoretic effect " and promote more
More silica dust particales is accumulated to loosening body surface.
(2) large scale of the present invention, high deposition rate preform loosening body manufacture blowtorch, in deposition rank
Section is only supplied donor center pipe silicon tetrachloride steam and delivery oxygen early period, and interior protective gas jet pipe is passed through oxygen to improve flame
Inner cone prevents blowtorch mouth from blocking, and internal layer burning gases spray orifice and outer layer burning gases spray orifice be passed through the methane and oxygen of high flow capacity
Mixed gas generates thermal-flame, and generates silica dust particle, while outer protection with silicon tetrachloride steam hydrolysis
Air jetting holes are passed through high flow capacity oxygen to improve flame temperature, and loosening body is made to grow up rapidly under the action of temperature gradient；When thin
When rising to aimed dia 1/5~1/4 of loose body diameter, mixed silicon tetrachloride steam and delivery oxygen start among raw material
Pipe supply, and inside/outside protection oxygen flow increases simultaneously, on the one hand effectively improves the height and flame core temperature of flame flame core,
On the other hand the stability of torch flame and the temperature of flame envelope are improved, so that aggravating " thermophoretic effect " promotes more titanium dioxides
Silicon dust particale is accumulated to loosening body surface；When loosening body diameter is when rising to aimed dia 1/2~1/3, mixed tetrachloro
SiClx steam starts to supply to raw material outer tube with delivery oxygen, while inside/outside protection oxygen flow increases again to be promoted and be sunk
Product rate and utilization rate of raw materials.
Therefore, a kind of large scale of the present invention, high deposition rate preform are designed rationally with blowtorch, with the blowtorch and are tied
Close flow gas different needed for the different depositional phases, raw material is supplied, deposition rate and raw material can be effectively raised
Utilization rate, while the preform loosening body Density Distribution of invention preparation is uniform, loosening body diameter fluctuation is small, can effectively mention
The quality of high prefabricated rods.
Only the preferred embodiment of the present invention has been described above, but is not to be construed as limiting the scope of the invention.It is all
The equivalent structure or equivalent flow shift done using description of the invention, be included in scope of patent protection of the invention it
It is interior.
Claims (4)
1. a kind of large scale, high deposition rate preform blowtorch, including blowtorch ontology, it is characterised in that: blowtorch ontology
In multilayer concentric cannula structure, including donor center pipe, raw material intermediate tube and the raw material outer tube, interior set gradually from inside to outside
Protective gas pipe and outer protective gas pipe, wherein outer protective gas pipe is solid tubes, and outer protection tracheae surrounds interior protective gas pipe
With multi-layer annular distributed pores, multi-layer annular distributed pores are followed successively by internal layer burning gases spray orifice, outer layer burning from inside to outside
Air jetting holes and outer protective gas spray orifice, and donor center pipe, raw material intermediate tube and the raw material outer tube respectively constitutes
For the linear passages along export direction of circulate silicon tetrachloride vapor and delivery oxygen, the interior protective gas pipe and outer protection
Air jetting holes respectively constitute the linear passages along export direction for the oxygen that circulates, internal layer burning gases spray orifice, outer layer burning
Air jetting holes respectively constitute the linear passages along export direction for circulate methane and oxygen.
2. large scale according to claim 1, high deposition rate preform blowtorch, it is characterised in that: internal layer combustion
It burns air jetting holes, outer layer burning gases spray orifice and outer its path of protective gas spray orifice and is respectively parallel to export direction.
3. a kind of large scale, the loose manufacturing method of high deposition rate preform, it is characterised in that: in early period depositional phase
It is only supplied donor center pipe silicon tetrachloride steam and delivery oxygen, interior protective gas jet pipe is passed through oxygen to improve flame inner cone
The blocking of blowtorch mouth is prevented, internal layer burning gases spray orifice and outer layer burning gases spray orifice are passed through the methane and oxygen mixture of high flow capacity
Body generates thermal-flame, and generates silica dust particle with silicon tetrachloride steam hydrolysis, while outer protective gas sprays
Hole is passed through high flow capacity oxygen to improve flame temperature, and loosening body is made to grow up rapidly under the action of temperature gradient；When loosening body is straight
When rising to aimed dia 1/5~1/4 of diameter, mixed silicon tetrachloride steam and delivery oxygen start to supply to raw material intermediate tube
It gives, while interior protection oxygen flow increases；When loosening body diameter is when rising to aimed dia 1/2~1/3, four chlorinations of mixing
Silicon vapor and delivery oxygen start to supply to raw material outer tube, and blowtorch then uses high temperature always；Flame is to improve silicon tetrachloride
Conversion ratio and deposition rate.
4. large scale according to claim 3, the loose manufacturing method of high deposition rate preform, feature exist
In:
The first step prepares plug loosening body using axial vapor deposition process, and plug loosening body is through sintering, degassing, stretching work
The OVD that skill prepares 30~50mm of diameter can deposit plug；
Second step docks at plug both ends stick, and will polish to the plug being connected to stick, removing to the stress of interface and
The impurity of mandrel surface；
Third step will be mounted on the chuck pedestal of depositing device the plug both ends being connected to stick, light a fire to deposition blowlamp, sink
Product equipment chuck starts to rotate with the revolving speed of 300~50r/min, and blowtorch is with blowtorch bracket with the movement of 600~2500mm/min
Speed starts to deposit SiO 2 powder particle in mandrel surface, and exhaust hood is always positioned at the surface of blowtorch；
After 4th step, loosening body deposition, deposition blowtorch auto extinguishing, deposition terminates.
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| CN110966607A (en) * | 2019-12-26 | 2020-04-07 | 中天科技精密材料有限公司 | Natural gas auxiliary flame treatment burner |
| CN111517633A (en) * | 2020-04-27 | 2020-08-11 | 通鼎互联信息股份有限公司 | High-speed deposition device for carrying out outer cladding on loose body of optical fiber preform |
| CN112035933A (en) * | 2020-09-03 | 2020-12-04 | 西北工业大学 | Solid rocket engine jet pipe thermal structure coupling analysis method considering structural clearance |
| CN112876044A (en) * | 2021-02-03 | 2021-06-01 | 江苏亨通智能科技有限公司 | Chemical deposition method and device for high-purity low-hydroxyl high-uniformity quartz glass |
| CN113860721A (en) * | 2021-10-28 | 2021-12-31 | 许平 | Blowtorch is used in optical fiber perform manufacturing |
| CN116062985A (en) * | 2023-02-17 | 2023-05-05 | 长飞光纤光缆股份有限公司 | Movable blowtorch for external vapor deposition method |
| CN116081938A (en) * | 2023-02-17 | 2023-05-09 | 长飞光纤光缆股份有限公司 | Blowtorch for external vapor deposition method |
| CN116217067A (en) * | 2023-02-17 | 2023-06-06 | 长飞光纤光缆股份有限公司 | Deposition system and method for quartz glass cylinder |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110966607A (en) * | 2019-12-26 | 2020-04-07 | 中天科技精密材料有限公司 | Natural gas auxiliary flame treatment burner |
| CN111517633A (en) * | 2020-04-27 | 2020-08-11 | 通鼎互联信息股份有限公司 | High-speed deposition device for carrying out outer cladding on loose body of optical fiber preform |
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| CN112876044A (en) * | 2021-02-03 | 2021-06-01 | 江苏亨通智能科技有限公司 | Chemical deposition method and device for high-purity low-hydroxyl high-uniformity quartz glass |
| CN112876044B (en) * | 2021-02-03 | 2024-01-05 | 江苏亨通智能科技有限公司 | Chemical deposition method and device for high-purity low-hydroxyl high-uniformity quartz glass |
| CN113860721A (en) * | 2021-10-28 | 2021-12-31 | 许平 | Blowtorch is used in optical fiber perform manufacturing |
| CN116062985A (en) * | 2023-02-17 | 2023-05-05 | 长飞光纤光缆股份有限公司 | Movable blowtorch for external vapor deposition method |
| CN116081938A (en) * | 2023-02-17 | 2023-05-09 | 长飞光纤光缆股份有限公司 | Blowtorch for external vapor deposition method |
| CN116217067A (en) * | 2023-02-17 | 2023-06-06 | 长飞光纤光缆股份有限公司 | Deposition system and method for quartz glass cylinder |
| CN116217067B (en) * | 2023-02-17 | 2023-12-19 | 长飞光纤光缆股份有限公司 | Deposition system and method for quartz glass cylinder |
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