CN110369390A - A kind of 360 degree of cyclones of ceramic disk - Google Patents
A kind of 360 degree of cyclones of ceramic disk Download PDFInfo
- Publication number
- CN110369390A CN110369390A CN201910604952.7A CN201910604952A CN110369390A CN 110369390 A CN110369390 A CN 110369390A CN 201910604952 A CN201910604952 A CN 201910604952A CN 110369390 A CN110369390 A CN 110369390A
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- China
- Prior art keywords
- ceramic disk
- wheel
- degree
- cyclones
- card slot
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
Landscapes
- Cleaning In General (AREA)
Abstract
The present invention relates to technical field of semiconductors, specially a kind of 360 degree of cyclones of ceramic disk, for in the cleaning process of ceramic disk, described hold intracorporal load carrier including being equipped with the volume of hatch frame, rotary drive mechanism and being installed on, ceramic disk is set on the load carrier, the load carrier and the rotary drive mechanism direct or indirect connection;The rotary drive mechanism is for driving corresponding load carrier to rotate, so that the ceramic disk being set on the load carrier rotates, revotating card sheave is driven to rotate using rotary drive mechanism, to drive 360 degree of ceramic disk rotations, ceramic disk is cleaned by ultrasonic oscillation rinse bath again, realizes comprehensive cleaning of ceramic disk, and ceramic disk is placed in volume, relative to the cleaning way of mechanical arm clamping, security risk is reduced.
Description
Technical field
The present invention relates to technical field of semiconductors, specially a kind of 360 degree of cyclones of ceramic disk.
Background technique
Semiconductive ceramic refers to characteristic of semiconductor, conductivity about in the ceramics of 10-6~105S/m.Semiconductive ceramic
Conductivity significant change occurs because of the variation of external condition (temperature, illumination, electric field, atmosphere and temperature etc.), therefore can
The physical quantity variation of external environment is changed into electric signal, sensing element for various purposes is made.
It is existing in the related technology, in the cleaning process of ceramic disk, mostly use artificial cleaning, working efficiency is low, also uses
Machine is cleaned in such a way that mechanical arm clamps.
However, cleaning in such a way that mechanical arm clamps, cleaning is not comprehensive enough, and there are security risks.
So how to design a kind of 360 degree of cyclones of ceramic disk is currently to solve the problems, such as.
Summary of the invention
The present invention provides a kind of 360 degree of cyclones of ceramic disk, to solve artificial cleaning low efficiency, mechanical arm clamping
Mode clean, clean not comprehensive enough, and there are problems that security risk.
A kind of 360 degree of cyclones of ceramic disk, in the cleaning process of ceramic disk, including be equipped with hatch frame volume,
Rotary drive mechanism and be installed on it is described hold intracorporal load carrier, ceramic disk is set on the load carrier, the carrying
Mechanism and the rotary drive mechanism direct or indirect connection;
The rotary drive mechanism is for driving corresponding load carrier to rotate, so that being set on the load carrier
Ceramic disk rotates.
Optionally, the rotary drive mechanism include driving motor, driving wheel, driven wheel, be transmitted in driving wheel with it is described
Synchronous belt between driven wheel;The driving wheel is fixed with the driven wheel relative to the volume position, the driving electricity
Machine is for directly or indirectly driving the driving wheel to rotate, with the fortune using the synchronous belt around the driving wheel and driven wheel
The dynamic drive load carrier, which synchronizes, to rotate.
Optionally, the load carrier includes at least two card slot wheels, the card slot on the ceramic disk and the card slot wheel
It is slidably fastened, the card slot wheel can rotate with the movement of the synchronous belt, so that being set on the card slot wheel
Ceramic disk can rotate as the card slot wheel synchronizes.
Optionally, the rotary drive mechanism further includes rotary shaft, the bearing block for cooperating rotary shaft to use and umbrella
Wheel, the rotary shaft one end connect the output shaft of the driving motor, and the other end drives the master by the umbrella wheel
Driving wheel rotates synchronously.
Optionally, 360 degree of cyclones of this kind of ceramic disk further include ultrasonic oscillation rinse bath, the ultrasonic oscillation cleaning
Slot is installed on the volume, for cleaning the ceramic disk.
Optionally, 360 degree of cyclones of this kind of ceramic disk further include mounting plate, the mounting plate is detachable be installed on it is described
Volume, the driving wheel and the driven wheel are set to the mounting plate.
Optionally, 360 degree of cyclones of this kind of ceramic disk further include the adjustment machine for adjusting the synchronous belt elasticity
Structure, the adjustment mechanism include the sliding rail being fixedly mounted on the mounting plate, can along the sliding rail slide sliding shoe with
And fixed block;The sliding shoe is equipped with regulating wheel, and the regulating wheel is bonded with the synchronous belt, so that the regulating wheel
Elasticity adjusting can be carried out to the synchronous belt when sliding along the sliding rail, the fixed block is for adjusting the cunning
The relative sliding position of motion block.
Optionally, 360 degree of cyclones of this kind of ceramic disk further include fixed frame, and the fixed frame is set to the mounting plate.
Optionally, the rotary drive mechanism further includes support base, and the support base is installed on the mounting plate, to prop up
Support the rotary shaft.
Optionally, the sliding rail is made of two blocks of symmetrically arranged "L" shaped plates, and the sliding shoe is embedded in described in two pieces
In the space that "L" shaped plate is formed.
Above-mentioned technical proposal of the invention has following beneficial technical effect:
360 degree of cyclones of a kind of ceramic disk provided by the invention drive revotating card sheave to rotate using rotary drive mechanism,
To drive 360 degree of ceramic disk rotations, then ceramic disk is cleaned by ultrasonic oscillation rinse bath, realizes the complete of ceramic disk
Face cleaning, and ceramic disk is placed in volume, relative to the cleaning way of mechanical arm clamping, reduces security risk.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without any creative labor, may be used also for those of ordinary skill in the art
To obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram one of 360 degree of cyclones of ceramic disk in one embodiment of the invention;
Fig. 2 is the structural schematic diagram two of 360 degree of cyclones of ceramic disk in one embodiment of the invention;
Fig. 3 is the structural schematic diagram three of 360 degree of cyclones of ceramic disk in one embodiment of the invention;
Fig. 4 is the structural schematic diagram of adjustment mechanism in one embodiment of the invention;
Fig. 5 is the structural schematic diagram four of 360 degree of cyclones of ceramic disk in one embodiment of the invention;
Description of symbols:
1- volume;2- ceramic disk;3- adjustment mechanism;31- sliding rail;32- sliding shoe;33- fixed block;34- engaging lug;35-
Regulating wheel;4- driving motor;5- bearing block;6- rotary shaft;7- driven wheel;8- the first umbrella wheel;9- driving wheel;10- synchronizes skin
Band;11- fixed frame;12- card slot wheel;13- ultrasonic oscillation rinse bath;14- mounting plate;15- support base;16- belt;12A- is every
Group card slot wheel.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Term (" first ", " second ", " third " " in description and claims of this specification and above-mentioned attached drawing
Four " etc. if there is) be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should manage
The data that solution uses in this way are interchangeable under appropriate circumstances, so as to the embodiment of the present invention described herein can in addition to
Here the sequence other than those of diagram or description is implemented.In addition, term " includes " and " having " and their any deformation,
Be intended to cover it is non-exclusive include, for example, containing the process, method of a series of steps or units, system, product or setting
It is standby those of to be not necessarily limited to be clearly listed step or unit, but may include be not clearly listed or for these mistakes
The intrinsic other step or units of journey, method, product or equipment.
Technical solution of the present invention is described in detail with specifically embodiment below.These specific implementations below
Example can be combined with each other, and the same or similar concept or process may be repeated no more in some embodiments.
Fig. 1 is the structural schematic diagram one of 360 degree of cyclones of ceramic disk in one embodiment of the invention;Fig. 2 is that the present invention one is real
Apply the structural schematic diagram two of 360 degree of cyclones of ceramic disk in example;Fig. 3 is 360 degree of cyclones of ceramic disk in one embodiment of the invention
Structural schematic diagram three;Fig. 4 is the structural schematic diagram of adjustment mechanism in one embodiment of the invention;Fig. 5 is one embodiment of the invention
The structural schematic diagram four of middle 360 degree of cyclones of ceramic disk.
360 degree of cyclones of ceramic disk described in it, it can be understood as in the cleaning process of ceramic disk.
With reference to Fig. 1 and Fig. 2, a kind of 360 degree of cyclones of ceramic disk, volume 1, rotary driving machine including being equipped with hatch frame
Structure and load carrier;The load carrier is installed on inside the volume 1, and ceramic disk 2 is set on the load carrier, described
Load carrier and the rotary drive mechanism direct or indirect connection;
In the present embodiment, the rotary drive mechanism is for driving corresponding load carrier to rotate, so that being set to institute
The ceramic disk 2 stated on load carrier rotates.
Since load carrier is fixedly connected with the direct or indirect relative position of rotary drive mechanism, the two can synchronize generation and turn
Dynamic, since ceramic disk 2 is arranged on load carrier, the two can also be synchronized and be rotated.
As long as load carrier, ceramic disk 2 are synchronized therewith and are rotated as it can be seen that rotary drive mechanism works.
So in the present embodiment, the rotary drive mechanism can drive the load carrier to be rotated, so that
2 disk of ceramics on load carrier, which synchronizes, to rotate.
In one of embodiment, with reference to Fig. 1, the rotary drive mechanism includes driving motor 4, driving wheel 9, driven
Wheel 7, the synchronous belt 10 being transmitted between driving wheel 9 and the driven wheel 7.
The driving wheel 9 is fixed with the driven wheel 7 relative to 1 position of volume, and the driving motor is for direct
Or the driving wheel 9 is driven to rotate indirectly, with the movement band using the synchronous belt 10 around the driving wheel 9 and driven wheel 7
It moves the load carrier and synchronizes and rotate.
Wherein, driving wheel 9 and driven wheel 7 the difference is that, driving wheel 9 is driven by driving motor 4, and driven wheel 7 is
It is rotated under the drive of synchronous belt 10, the diameter of driving wheel 9 and driven wheel 7 can be identical, be also possible to not
With.
Driving wheel 9 can also can be realized and be driven by other drive mechanisms directly with the output axis connection of driving motor 4
Transmission between motor 4.
For example, in one embodiment, the rotary drive mechanism further includes rotary shaft 6, rotary shaft 6 is cooperated to use
Bearing block 5 and umbrella wheel 8,6 one end of rotary shaft connect the output shaft of the driving motor 4, and the other end passes through institute
Stating umbrella wheel 8 drives the driving wheel 9 to rotate synchronously.
In the specific implementation process, umbrella wheel 8 is made of the first umbrella wheel and the second umbrella wheel, and one end of rotary shaft is worn
Cross the bearing block 5 and connect with the first umbrella wheel, the second umbrella wheel is concentric to be installed on driving wheel 9, and driving wheel 9 with
Second umbrella wheel can rotate synchronously, and the first umbrella wheel and the second umbrella wheel are ratcheting.
In the present embodiment, driving motor 4 drives the first umbrella wheel to rotate using rotary shaft 6, due to the first umbrella wheel
It is ratcheting (plumbness) with the second umbrella wheel, therefore, drive the second umbrella wheel to rotate while the rotation of the first umbrella wheel, due to the
Two umbrella wheels are concentric to be installed on driving wheel 9, and driving wheel 9 can be rotated synchronously with the second umbrella wheel, therefore, the rotation of the second umbrella wheel
Driving wheel 9 can be driven to synchronize rotation, to realize driving of the driving motor 4 to driving wheel 9.
In one embodiment, with reference to Fig. 3, the load carrier includes at least two card slot wheels 12, the ceramic disk 2
It is slidably fastened with the card slot on the card slot wheel 12, the card slot wheel 12 can occur to turn with the movement of the synchronous belt 10
It is dynamic, so that the ceramic disk 2 being set on the card slot wheel 12 can rotate as the card slot wheel 12 synchronizes.
In the specific implementation process, load carrier includes three card slot wheels 12, and three card slot wheels 12 are located at ceramics
The bottom end of 2 vertical direction of disk, and 2 both ends of ceramic disk are symmetricly set on, three card slot wheels 12 hold ceramic disk 2, and ceramics
Disk 2 and three tangent settings of card slot wheel 12, so, when card slot wheel 12 rotates, it will drive ceramic disk 2 and synchronize and rotate.
In one embodiment, card slot wheel 12 is opposite by shaft or 7/ driving wheel 9 of other connectors and driven wheel
It is fixedly connected, in this way, it is possible to make rotary drive mechanism while driving driving wheel 9 to rotate, each card slot wheel 12 is also synchronized
It rotates therewith, so that ceramic disk 2 be driven to be rotated.For example, three card slot wheels 12 of setting, respectively the first card slot wheel,
Second card slot wheel, third card slot wheel, wherein connected between the first card slot wheel and driving wheel by shaft, the second card slot wheel and the
Three card slot wheels can connect (note: the quantity of driven wheel 7 >=card slot wheel 12 quantity) with driven wheel 7 respectively by same mode,
In this scheme, driven wheel 7 preferably two, and it is symmetrically distributed in 9 two sides of driving wheel.When driving wheel 9 rotates, pass through synchronous belt
10 drive driven wheels 7 are rotated, and three synchronizations of card slot wheel 12 rotate therewith, so that ceramic disk 2 be driven to carry out 360 rotations
Turn.
Either, card slot wheel 12 passes through in connecting rod/shaft member installation and volume 1, equally by taking three card slot wheels 12 as an example, one
A main card sheave, two connected between card slot wheel, three card slot wheels by belt, wherein the main card sheave is by being fixedly connected
Part connect (rod shape connector that fixedly connected part such as connecting rod, connecting shaft etc. can connect two wheel-shaped bodies) with driving wheel 9.
Due to will drive the rotation of main latch position wheel when driving wheel 9 rotates, under the action of belt, two can also rotate with it from card slot wheel,
And then ceramic disk 2 is driven to rotate.
In one embodiment, 360 degree of cyclones of this kind of ceramic disk further include mounting plate 14, and the mounting plate 14 is removable
The formula of unloading is installed on the volume 1, and the driving wheel 9 is set to the mounting plate 14 with the driven wheel 7.
In the specific implementation process, the through slot for being less than the mounting plate 14 is opened up in the side wall of volume 1, retells peace
Loading board 14 is assemblied in volume 1, so that the installation region on mounting plate 14 covers the through slot opened up.
In one embodiment, with reference to Fig. 1, it is also equipped with fixed frame on the mounting plate 14, is conducive to whole device
Installation and fixation.
In one embodiment, with reference to Fig. 1, Fig. 4,360 degree of cyclones of this kind of ceramic disk further include described for adjusting
The adjustment mechanism 3 of 10 elasticity of synchronous belt.
In the present embodiment, the adjustment mechanism 3 include the sliding rail 31 being fixedly mounted on the mounting plate 14, can be along
The sliding shoe 32 and fixed block 33 that the sliding rail 31 slides;The sliding shoe 32 is equipped with regulating wheel 35, the regulating wheel 35
It is bonded with the synchronous belt 10, so that the regulating wheel 35 can be to the synchronous skin when sliding along the sliding rail 31
Band 10 carries out elasticity adjusting, and the fixed block 33 is used to adjust the relative sliding position of the sliding shoe 32.
Since sliding shoe 32 can slide above and below, synchronous belt 10 is fitted on sliding shoe 32, then sliding in sliding shoe 32
While, synchronous belt 10 can be tensed or be loosened.
So the elasticity of adjustment synchronous belt 10 only needs the position of slidable adjustment sliding shoe 32.
In the specific implementation process, the sliding rail 31 is made of two pieces of symmetrically arranged " L " shape steel plates, two " L " types
Steel plate is fixed by screws on mounting plate 14, and L shaped opening forms riding space inwardly, and sliding shoe 32 is embedded in two pieces of " L " types
The space that steel plate is formed, is fixed with a fixed ear 34 in the position that the end of sliding shoe 32 corresponds to fixed block 33.
It is fixed between the fixed ear 34 and fixed block 33 using locking member.
For example, locking member may include the first through hole being provided in fixed ear 34, second be provided on fixed block 33
Through-hole, and for connecting the locking level of first through hole Yu the second through-hole, locking level is passed through into first through hole and the second through-hole, it can
Lock the position of fixed ear 34 and fixed block 33.In other citings, locking member is also possible to the frame modes such as screw, bolt.
Sliding shoe 32 is slided, when adjusting the elasticity for arriving suitable synchronous belt 10, by above-mentioned locking member to solid
Determine ear 34 to be locked with fixed block 33, thus the relative position of fixed sliding shoe 32.
In one embodiment, with reference to Fig. 1, the rotary drive mechanism further includes support base 15, the support base 15
It is assemblied in the mounting plate 14, for supporting the rotary shaft 6, is conducive to rotary shaft 6 in rotation, keeps higher stabilization
Property.
In the above embodiment, with reference to Fig. 2,360 degree of cyclones of this kind of ceramic disk further include ultrasonic oscillation rinse bath
13, the ultrasonic oscillation rinse bath 13 is installed on the volume 1, for cleaning the ceramic disk 2.
In a specific embodiment, ultrasonic oscillation rinse bath 13 is assemblied in 1 bottom of volume, so that ultrasonic oscillation is clear
Washing trough 13 at work, can clean ceramic disk 2, i.e., during the entire process of ceramic disk 2 carries out 360 degree rotation, ultrasound
Wave concussion rinse bath 13 can clean ceramic disk 2, realize comprehensive cleaning of ceramic disk 2.In addition clear in ultrasonic oscillation
End-of-the-pipe, the spot after discharge cleaning should be equipped in washing trough 13.
In an embodiment, with reference to Fig. 1, Fig. 5, which can also clean simultaneously multiple ceramic disks 2.
For example, multiple groups are arranged, for three groups, every group is used to support a pottery with three above-mentioned card slot wheels for one group
Porcelain dish 2 in every group of card slot wheel 12A, main card sheave and is connected from belt 16 is passed through between card slot wheel;Certainly, the installation of belt 16
Position is on the outside of card slot wheel card slot, as an example, open up another card slot again on card slot wheel, the company for belt 16
It connects.
In the present embodiment, it is connected side by side between every group of card slot wheel 12A by connecting shaft.The rotation of driving wheel 9 in this way,
Multiple groups card slot wheel can be driven to be rotated simultaneously, rotated to drive and be located at ceramic disk on every group of card slot wheel 12A, in turn
Carry out cleaning.Explanation is needed further exist for, connecting shaft at least corresponding with driving wheel 9 is can be with driving wheel 9
Rotation, so the card slot wheel 12 on every group of card slot wheel 12A is to be driven (its mounting means and rotary principle by belt 16
Identical with the above embodiments, this will not be repeated here).
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations;To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement;And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of 360 degree of cyclones of ceramic disk, in the cleaning process of ceramic disk, it is characterised in that: including being equipped with opening knot
Volume (1), rotary drive mechanism and the load carrier being installed in the volume (1) of structure, ceramic disk (2) are set to described hold
On mounted mechanism, the load carrier and the rotary drive mechanism direct or indirect connection;
The rotary drive mechanism is for driving corresponding load carrier to rotate, so that being set to the ceramics on the load carrier
Disk (2) rotates.
2. 360 degree of cyclones of a kind of ceramic disk according to claim 1, it is characterised in that: the rotary drive mechanism packet
Include driving motor (4), driving wheel (9), driven wheel (7), the synchronous skin being transmitted between driving wheel (9) and the driven wheel (7)
Band (10);The driving wheel (9) is fixed with the driven wheel (7) relative to the volume (1) position, and the driving motor is used for
The driving wheel (9) are driven to rotate, directly or indirectly to utilize the synchronous belt (10) around the driving wheel (9) and driven wheel
(7) movement drives the load carrier to synchronize and rotates.
3. 360 degree of cyclones of a kind of ceramic disk according to claim 1 or 2, it is characterised in that: the load carrier includes
At least two card slot wheels (12), the ceramic disk (2) are slidably fastened with the card slot on the card slot wheel (12), the card slot wheel
(12) it can rotate with the movement of the synchronous belt (10), so that being set to the ceramic disk on the card slot wheel (12)
(2) it can rotate as the card slot wheel (12) synchronizes.
4. 360 degree of cyclones of a kind of ceramic disk according to claim 1 or 2, it is characterised in that: the rotary drive mechanism
It further include rotary shaft (6), cooperation rotary shaft (6) bearing block (5) and umbrella wheel (8) for using, described rotary shaft (6) one end
Portion connects the output shaft of the driving motor (4), and the other end drives the driving wheel (9) synchronous by the umbrella wheel (8)
Rotation.
5. 360 degree of cyclones of a kind of ceramic disk according to claim 1, it is characterised in that: further include that ultrasonic oscillation is clear
Washing trough (13), the ultrasonic oscillation rinse bath (13) is installed on the volume (1), for cleaning the ceramic disk (2).
6. 360 degree of cyclones of a kind of ceramic disk according to claim 1 or 2, it is characterised in that: further include mounting plate
(14), the mounting plate (14) is detachable is installed on the volume (1), and the driving wheel (9) is set to the driven wheel (7)
The mounting plate (14).
7. 360 degree of cyclones of a kind of ceramic disk according to claim 6, it is characterised in that: further include described for adjusting
The adjustment mechanism (3) of synchronous belt (10) elasticity, the adjustment mechanism (3) include being fixedly mounted on the mounting plate (14)
Sliding rail (31), can along the sliding rail (31) slide sliding shoe (32) and fixed block (33);On the sliding shoe (32)
Equipped with regulating wheel (35), the regulating wheel (35) is bonded with the synchronous belt (10), so that the regulating wheel (35) is on edge
The sliding rail (31) sliding when can carry out elasticity adjusting to the synchronous belt (10), the fixed block (33) is for adjusting
Save the relative sliding position of the sliding shoe (32).
8. 360 degree of cyclones of a kind of ceramic disk according to claim 6, it is characterised in that: further include fixed frame (11), institute
Fixed frame (11) are stated set on the mounting plate (14).
9. a kind of according to claim 1,2 or 6 described in any item 360 degree of cyclones of ceramic disk, it is characterised in that: the rotation
Driving mechanism further includes support base (15), and the support base (15) is installed on the mounting plate (14), to support the rotation
Axis (6).
10. 360 degree of cyclones of a kind of ceramic disk according to claim 7, it is characterised in that: the sliding rail (31) is by two pieces
Symmetrically arranged "L" shaped plate composition, the sliding shoe (32) is in the space that two blocks of "L" shaped plates are formed.
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