CN110369247A - A kind of annular array transducer and preparation method - Google Patents
A kind of annular array transducer and preparation method Download PDFInfo
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- CN110369247A CN110369247A CN201910063461.6A CN201910063461A CN110369247A CN 110369247 A CN110369247 A CN 110369247A CN 201910063461 A CN201910063461 A CN 201910063461A CN 110369247 A CN110369247 A CN 110369247A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 239000003822 epoxy resin Substances 0.000 claims description 19
- 229920000647 polyepoxide Polymers 0.000 claims description 19
- 238000009413 insulation Methods 0.000 claims description 17
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001459 lithography Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 abstract description 16
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 239000004593 Epoxy Substances 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0625—Annular array
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- Engineering & Computer Science (AREA)
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention discloses a kind of annular array transducer and preparation methods comprising shell is equipped with matching layer, piezoelectric layer, electrode connection unit and back sheet in the shell；The electrode connection unit includes several spaced annular electrodes, several first electrodes are arranged at intervals on the first face that the piezoelectric layer is connected with the substrate, when piezoelectric layer is connected on the electrode connection unit, first electrode and several annular electrodes on the piezoelectric layer form several annular array elements.The present invention is by including several annular electrodes in electrode connection unit, and is matched by annular electrode and piezoelectric layer and realize annular array element, without directly carrying out joint-cutting between annular array element, simplify the processing technology of annular array transducer, furthermore, due to avoiding interference of the burr on gap made of cutting to echo-signal it is not necessary that joint-cutting is not present between annular array element.
Description
Technical field
The present invention relates to transducer technology field, in particular to a kind of annular array transducer and preparation method.
Background technique
Annular array transducer can realize single point focus and focus adjustable, many in medical imaging, industrial nondestructive testing etc.
There is larger application advantage in field.Compared to single array element focused transducer, the complete axial symmetry of annular array transducer sound field has excellent
Axial focusing ability more, resolution ratio with higher and sensitivity, and focal length accurately dynamically can be adjusted, use operation
It is convenient；In addition, annular array can form height in the case where the first number of vibration is significantly less than linear array and face array transducer vibration member number
The focusing acoustic field of resolution ratio, manufacture craft is simple, reduces due to the excessive bring cost of manufacture of number of channels, while simplifying circuit
And control system.
Existing ring array transducer mainly includes back sheet, piezoelectric layer and matching layer, and the piezoelectric layer contains multiple independent battle arrays
Member, gap is filled with decoupling insulating materials between each array element, and each array element individually carries out circuit control.Wherein, the piezoelectricity
Layer generally realizes the separation of array element using two methods, and first method is that each cyclic annular array element is prepared separately, then with exhausted
Each array element is bonded by edge glue, and this method is suitble to the array element of larger size, that is, is suitable for preparing low frequency ring battle array transducing
Device (1MHz or less)；Second method is to be cut by laser in a piece of bulk piezoelectric material or the mode of chemical etching is formed
Gap between array element is then filled with decoupling insulating materials, and the annulus joint-cutting depth that this method is formed is limited, is only used for height
The division (15MHz or more) of frequency transducer array element is not used to prepare low frequency ring battle array ultrasonic transducer.
Summary of the invention
In view of the deficiencies in the prior art, the present invention is intended to provide a kind of annular array transducer and preparation method and its preparation
Method, to improve the applicable frequency range of annular array transducer.
The technical solution adopted in the present invention is as follows:
A kind of annular array transducer comprising shell, matching layer, piezoelectric layer, back sheet and the electricity being equipped in the shell
Pole connection unit;The electrode connection unit includes at least several annular electrodes, between several annular electrodes in any phase
It is provided with gap between two adjacent annular electrodes, several first electrodes are provided on the first face of the piezoelectric layer, it is described
First electrode and several annular electrodes on piezoelectric layer form several annular array elements.
The annular array transducer, wherein the electrode connection unit further includes substrate, several annular electrode cloth
It is placed on the substrate.
The annular array transducer, wherein several annular electrode arranged concentrics, the outer diameter of each annular electrode according to
Sequence apart from circle center distance is sequentially increased, and two annular electrodes of arbitrary neighborhood are mutually not in contact with each other
The annular array transducer, wherein the second electricity is provided on the piezoelectric layer the second face opposite with first face
Pole, the second electrode cover second face.
The annular array transducer, wherein several third electrodes, the third are provided on the side wall of the piezoelectric layer
Electrode one end is connected with the part first electrode on the first face, and the other end is connected with the second electrode on the second face.
The annular array transducer, wherein each first electrode is not in contact with any gap.
The annular array transducer, wherein the piezoelectric layer includes piezoelectric layer ontology and several insulation strips；If described
Dry insulation strip runs through the piezoelectric layer ontology and arranges according to predetermined manner, the piezoelectric layer ontology is divided into several mutual
The piezoelectricity array element not being in contact.
The annular array transducer, wherein several first electrodes are respectively arranged in each piezoelectricity array element, and are respectively pressed
A first electrode is provided in electric array element.
The annular array transducer, wherein the insulation strip is epoxy resin item, and several epoxy resin items
It is arranged by vertical and horizontal interleaved mode.
The annular array transducer, wherein the edge of the annular array element is zigzag.
A kind of preparation method of annular array transducer comprising:
Several insulation strips are embedded according to preset rules in piezoelectric layer, the piezoelectric layer is divided into several mutually isolated piezoelectricity
Array element, and several spaced annular electrodes are configured on default substrate according to the arrangement position of the piezoelectricity array element；
It will be laid with respectively first electrode in the piezoelectricity array element in the first face of piezoelectric layer, and will be integrally laid on the second face of piezoelectric layer
Second electrode；
Matching layer is bonded on the second face of piezoelectric layer, and the first face of piezoelectric layer and substrate are provided with the one of annular electrode
Face is connected, to form annular array element；
Back sheet is adhered to the another side of substrate, then package casing to form annular array transducer.
The preparation method of the annular array transducer, wherein the arrangement position according to the piezoelectricity array element exists
Several spaced annular electrodes are configured on default substrate specifically:
Several spaced rings are configured on default substrate according to the arrangement position of first electrode on the piezoelectric layer and size
Shape electrode.
The preparation method of the annular array transducer, wherein described according to first electrode on the piezoelectric layer
Arrangement position and size configure several spaced annular electrodes on default substrate and specifically include:
According to the shape for determining each annular electrode according to the arrangement position of first electrode and size on the piezoelectric layer；
Lithography forms several annular electrodes on default substrate when being used according to the shape of each annular electrode.
The preparation method of the annular array transducer, wherein the row according to first electrode on the piezoelectric layer
Column position and size configure several spaced annular electrodes on default substrate and specifically include:
According to the shape for determining each annular electrode according to the arrangement position of first electrode and size on the piezoelectric layer；
It is laid with whole face electrode on default substrate, and is cut by laser and the whole face electrode is divided into several annular electros
Pole.
The utility model has the advantages that compared with prior art, it is described the present invention provides a kind of annular array transducer and preparation method
Annular array transducer includes shell, and matching layer, piezoelectric layer, electrode connection unit and back sheet are equipped in the shell；Institute
Stating electrode connection unit includes several spaced annular electrodes, on the first face that the piezoelectric layer is connected with the substrate
Be arranged at intervals with several first electrodes, when piezoelectric layer is connected on the electrode connection unit, on the piezoelectric layer first
Electrode and several annular electrodes form several annular array elements.The present invention is by including several annular electros in electrode connection unit
Pole, and matched by annular electrode and piezoelectric layer and realize annular array element, without directly carrying out joint-cutting between annular array element, simplify
The processing technology of annular array transducer, further, since avoiding and cutting it is not necessary that joint-cutting is not present between annular array element
Gap on interference of the burr to echo-signal.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of annular array transducer provided by the invention.
Fig. 2 is the explosive view that annular array transducer provided by the invention does not install shell.
Fig. 3 is the structural schematic diagram of substrate in annular array transducer provided by the invention.
Fig. 4 is the structural schematic diagram of piezoelectric layer in annular array transducer provided by the invention.
Fig. 5 is the flow chart of the preparation method of annular array transducer provided by the invention.
Specific embodiment
The present invention provides a kind of annular array transducer and preparation method, to make the purpose of the present invention, technical solution and effect
Fruit is clearer, clear, and the present invention is described in more detail as follows in conjunction with drawings and embodiments.It should be appreciated that this place
Specific examples are only used to explain the present invention for description, is not intended to limit the present invention.
A kind of annular array transducer is present embodiments provided, as illustrated in fig. 1 and 2 comprising shell 1, piezoelectric layer 3, electricity
Pole connection unit 4, back sheet 5 and matching layer 2；The matching layer 2, piezoelectric layer 3, electrode connection unit 4 and back sheet 5 are successively folded
It puts to form a Huan Zhen mechanism, the Huan Zhen mechanism is packaged in the shell 1.The electrode connection unit 4 includes several intervals
The annular electrode 411 being provided with has gap 412 in several annular electrodes between two annular electrodes 411 of arbitrary neighborhood,
The gap 412 separates its corresponding two annular electrode 411, so that being not in contact with each other between the annular electrode.Originally it is
Invention matches to form the annular array element with piezoelectric layer by each annular electrode 411, and the height of the annular electrode can root
Determined according to the frequency that annular array transducer uses, that is to say, that according to the frequency range that annular array transducer uses come
The height of the annular electrode is set, a burst of member of the ring for having annular electrode to be formed with piezoelectric layer can be made to can be adapted in this way
Each frequency, thus solve due to laser cutting formed joint-cutting depth it is limited, and caused by with joint-cutting a burst of member of ring
It is only capable of the suitable annular array transducer using high frequency.Further, since avoiding cutting it is not necessary that joint-cutting is not present between annular array element
Made of interference of the burr to echo-signal on gap.
In the present embodiment, several the are arranged at intervals on the first face that the piezoelectric layer and electrode connection unit fit
One electrode, the first electrode with the annular electrode 411 for matching, piezoelectric layer and two annular electrodes of arbitrary neighborhood
The not set electrode in the corresponding position in gap between 411, so that not being connected to mutually between each annular electrode 411.That is,
When the piezoelectric layer 3 fits on the electrode connection unit 4, each annular electrode 411 be located at the corresponding position of piezoelectric layer 3
The first electrode set is in contact, and forms several annular array elements by each annular electrode 411 and first electrode in contact, and
And it is not provided with first electrode on piezoelectric layer corresponding with each gap, different connections between annular array element each in this way, to avoid each ring
The signal of shape array element interferes with each other.
As shown in figure 3, the electrode connection unit 4 further includes flexible base board, the flexibility electric substrate includes configuration plate 41
With connecting plate 42, the connecting plate 42 is connected with the configuration plate 41, and relative to the configuration plate 41 to close to back sheet 5
Direction extends, and the connecting plate 42 is between the back sheet 5 and the shell 1.The annular electrode 411 is is set to
The loop line on configuration plate 41 is stated, there is gap 412, and it will be located at by gap 412 between two neighboring loop line
The loop line of two sides is isolated, to form several mutually isolated annular electrode 411.In addition, each annular electrode 411 is and part
First electrode is in contact, and each gap 412 is not in contact with first electrode, i.e., the gap 412 between each annular electrode 411 and pressure
Interval in electric layer 3 between first electrode is corresponding.That is, on the position to fit on piezoelectric layer 3 with the gap 412
Be the interval between first electrode, such gap 412 and on its piezoelectric layer 3 that fits gap 412 formed separation layer, it is described
The annular array element that separation layer isolation has annular electrode 411 and first electrode to be formed, so that each annular array element is not in contact with each other.
Further, the first ground electrode 413, first ground electrode 413 and each annular electro are provided on the flexible base board
Pole 411 is isolated, and is arranged between first ground electrode 413 and annular electrode 411 and has the gap, gap does not also connect with first electrode
Touching is got along ground area by gap and the interval between the first electrode that matches of the gap, realizes that annular array changes
The ground connection of energy device.In the present embodiment, first ground electrode 413 is located at the side in the separate center of circle of flexible base board, and passes through
Gap is isolated with annular electrode 411 on the outermost side, can simplify the mode of connection of the first ground electrode 413 in this way.
Further, as shown in figure 3, in one embodiment of the invention, each annular electrode 411 is provided with opening
414, and the opening 414 of each annular electrode 411 is sequentially increased according to its corresponding arrangement position.Wherein, one end of each opening 414
It is located along the same line, the other end of each opening 414 is in step-like setting.The step surface that each annular electrode 411 is formed by it
Connection signal line can make the mode of connection of each annular electrode 411 simple in this way, and improve the tight of signal wire arrangement
Gathering property.
In addition, as shown in figure 3,411 arranged concentric of each annular electrode, and the outer diameter of each annular electrode 411 according to
The sequence of distance apart from the center of circle is sequentially increased, and the smallest annular electrode 411 of radius is located at center, the maximum annular electrode of radius
411 are located at outermost.In the present embodiment, there are five annular electrodes for setting on the flexible base board, are denoted as respectively first annular
Electrode, the second annular electrode, third annular electrode, fourth annular electrode and the 5th annular electrode；The first annular electrode,
Second annular electrode, third annular electrode, fourth annular electrode and the 5th annular electrode are successively arranged, and described first annular
Electrode is located at most inner side, and the 5th annular electrode is located at outermost.Wherein, the center of the first annular electrode is described same
The center of circle of heart circle.
As shown in figure 4, the piezoelectric layer 3 includes piezoelectric layer ontology and several insulation strips 32, several insulation strips 32
It is simultaneously flushed respectively with the two sides of piezoelectric layer ontology at both ends through the piezoelectric body, so that 3 two sides of piezoelectric layer is plane.Institute
It states several insulation strips 32 to arrange according to predetermined manner, the piezoelectric layer ontology is divided into several piezoelectricity array elements 31.In this reality
It applies in example, the piezoelectric layer ontology is made of ceramics or piezoelectric monocrystal, and the insulation strip 32 uses epoxy resin item, if described
Dry epoxy resin item includes several first epoxy resin items and several second epoxy resin items；Several first epoxy resin items
Along first direction equidistant arrangement on the piezoelectric layer ontology, several second epoxy resin items equidistant arrangement in a second direction
In in the piezoelectric body, several first epoxy resin items described in this way and several second epoxy resin items are by the piezoelectric layer sheet
Body is divided into several equal-sized piezoelectricity array elements 31.
In addition, the spacing between several first epoxy resin items and/or several second epoxy resin items can not also
Together, and the arrangement mode of several epoxy resin items can be designed according to the design of annular electrode 411, here
Do not illustrate one by one.In addition, the first direction and second direction can be set according to the design requirement of annular array transducer,
Preferably, first direction is horizontal direction, and second direction is vertical direction.
Further, several first electrodes are respectively arranged in several piezoelectricity array elements 31, and each piezoelectricity array element 31
On be provided with a first electrode, in this way by the epoxy resin item between piezoelectricity array element 31 by first electrode every
From so that any two first electrode does not contact.In addition, on the second face that the piezoelectric layer 3 fits with the matching layer 2
It is provided with second electrode, the second electrode covers second face.There are portions in several first electrodes on first face
Sub-electrode is connected with the second electrode, and the part first electrode being in contact with second electrode described in this way is electric as the second
Pole, second ground electrode are located at the position that the position on the piezoelectric layer 3 is located on the flexible base board with the first ground electrode 413
Set corresponding, and the first ground electrode 413 and the second ground electrode are in contact to form the ground level of annular array transducer.In this reality
It applies in example, several third electrodes, the second electrode and coupled part is provided on the side of the piezoelectric layer 3
One electrode is connected by several third electrodes.Wherein, the quantity for the first electrode being connected with second electrode is 5, institute
State the side that third electrode covers 3 piezoelectricity array element 31.Certainly, the quantity of the first electrode and the data of third electrode and
Its area for covering 3 side of piezoelectric layer can be determined according to design requirement, just not illustrated one by one here.
Further, in one embodiment of the invention, the piezoelectric layer can only only include piezoelectric layer ontology, the pressure
It is provided with several first electrodes corresponding with several annular array elements on first face of electric layer ontology, the of the piezoelectric layer ontology
Second electrode is provided on two faces, second electrode covers second face.Wherein, several first electrode arranged for interval are in institute
It states on piezoelectric layer ontology, each first electrode is in arranged in concentric circles, and each first electrode and each annular electrode correspond, the first electricity
The shape and size of extremely corresponding annular electrode are equal.
Further, the formation of the matching layer 2, piezoelectric layer 3, electrode connection unit 4 and back sheet 5 can be identical, example
It such as, is circle；And matching layer 2, piezoelectric layer 3, electrode connection unit 4 and back sheet 5 stack rear each layer edge and stack direction
It flushes.Wherein, the matching layer 2 fits on the second face of the piezoelectric layer 3, can have matching materials to be made, for example, ring
Oxygen resin etc..The back sheet 5 fits in side of the electrode connection unit 4 far from the piezoelectric layer 3, the back sheet 5
It can be made of back lining materials, for example, the mixture of epoxy resin and acoustic attenuation filler material.
Based on above-mentioned annular array transducer, the present invention also provides a kind of preparation methods of annular array transducer, such as
Shown in Fig. 5, which comprises
S10, according to preset rules several insulation strips are embedded in piezoelectric layer, the piezoelectric layer are divided into several mutually isolated
Piezoelectricity array element, and several spaced annular electrodes are configured on default substrate according to the arrangement position of the piezoelectricity array element；
S20, first electrode will be laid with respectively in the piezoelectricity array element in the first face of piezoelectric layer, and will be whole on the second face of piezoelectric layer
It is laid with second electrode；
S30, matching layer is bonded on the second face of piezoelectric layer, and the first face of piezoelectric layer and substrate are provided with annular electrode
It is connected on one side, to form annular array element；
S40, the another side that back sheet is adhered to substrate, then package casing is to form annular array transducer.
Specifically, on the structure of the piezoelectric layer, the arrangement mode of insulation strip and substrate several annular electrodes position
Relationship and with the matching relationship of piezoelectric layer in above-mentioned annular array transducer it is stated that just not repeating here.Here
The process for being only embedded in several insulation strips to the piezoelectric layer is illustrated, and the piezoelectric layer is embedded in several several insulation strips of insulation strip
Process be specifically as follows first choose thickness be greater than piezoelectric layer thickness piezoelectric material and piezoelectric material two sides is polished, according to
The size in the gap between piezoelectricity array element and position (for example, slit width is 0.1mm, the center spacing in gap is 0.5mm) are from pressure
Electric material one carries out the cutting of first direction in face of piezoelectric material, wherein the depth of cut is greater than the thickness of piezoelectric layer and small
In the thickness of piezoelectric material.Filling insulating epoxy is as decoupling material in the joint-cutting that cutting obtains, to insulating epoxy tree
The epoxy resin of excess surface is ground off after rouge dry solidification, exposes piezoelectric material surface.Then the is carried out to piezoelectric material again
The cutting in two directions, then insulating epoxy is inserted in the joint-cutting that second direction is cut, it is dry to insulating epoxy
The epoxy resin of excess surface is ground off into exposing piezoelectric material surface after solidification, forms piezoelectric layer.
Further, in the preparation method of the annular array transducer, wherein the row according to the piezoelectricity array element
Column position configures several spaced annular electrodes on default substrate specifically:
Several spaced rings are configured on default substrate according to the arrangement position of first electrode on the piezoelectric layer and size
Shape electrode.
Further, in the preparation method of the annular array transducer, wherein described according on the piezoelectric layer
The arrangement position and size of first electrode configure several spaced annular electrodes on default substrate and specifically include:
According to the shape for determining each annular electrode according to the arrangement position of first electrode and size on the piezoelectric layer；
Lithography forms several annular electrodes on default substrate when being used according to the shape of each annular electrode.
Further, in the preparation method of the annular array transducer, wherein described according to first on the piezoelectric layer
The arrangement position and size of electrode configure several spaced annular electrodes on default substrate and specifically include:
According to the shape for determining each annular electrode according to the arrangement position of first electrode and size on the piezoelectric layer；
It is laid with whole face electrode on default substrate, and is cut by laser and the whole face electrode is divided into several annular electros
Pole.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (14)
1. a kind of annular array transducer, which is characterized in that it includes shell, matching layer, the piezoelectricity being equipped in the shell
Layer, back sheet and electrode connection unit;The electrode connection unit includes at least several annular electrodes, several annular electrodes
Between in arbitrary neighborhood two annular electrodes between be provided with gap, several are provided on the first face of the piezoelectric layer
One electrode, first electrode and several annular electrodes on the piezoelectric layer form several annular array elements.
2. annular array transducer according to claim 1, which is characterized in that the electrode connection unit further includes substrate,
Several annular electrodes are arranged on the substrate.
3. annular array transducer according to claim 1 or claim 2, which is characterized in that several annular electrode arranged concentrics,
The outer diameter of each annular electrode is sequentially increased according to the sequence apart from circle center distance, and two annular electrodes of arbitrary neighborhood are mutual
It does not contact.
4. annular array transducer according to claim 1, which is characterized in that the piezoelectric layer is opposite with first face
Second electrode is provided on second face, the second electrode covers second face.
5. annular array transducer according to claim 4, which is characterized in that be provided on the side wall of the piezoelectric layer several
Third electrode, third electrode one end are connected with the part first electrode on the first face, and on the other end and the second face
Two electrodes are connected.
6. annular array transducer according to claim 1, which is characterized in that each first electrode not with any gap
It is in contact.
7. annular array transducer according to claim 1, which is characterized in that the piezoelectric layer include piezoelectric layer ontology and
Several insulation strips；Several insulation strips run through the piezoelectric layer ontology and arrange according to predetermined manner, by the piezoelectricity
Layer ontology is divided into several piezoelectricity array elements not being in contact mutually.
8. annular array transducer according to claim 7, which is characterized in that several first electrodes are respectively arranged at respectively
In piezoelectricity array element, and a first electrode is provided in each piezoelectricity array element.
9. annular array transducer according to claim 7, which is characterized in that the insulation strip is epoxy resin item, and
Several epoxy resin items are arranged by vertical and horizontal interleaved mode.
10. annular array transducer according to claim 1, which is characterized in that the edge of the annular array element is zigzag.
11. a kind of preparation method of annular array transducer, characterized in that it comprises:
Several insulation strips are embedded according to preset rules in piezoelectric layer, the piezoelectric layer is divided into several mutually isolated piezoelectricity
Array element；
Several spaced annular electrodes are configured on default substrate according to the arrangement position of the piezoelectricity array element；
It will be laid with respectively first electrode in the piezoelectricity array element in the first face of piezoelectric layer, and will be integrally laid on the second face of piezoelectric layer
Second electrode；
Matching layer is bonded on the second face of piezoelectric layer, and the first face of piezoelectric layer and substrate are provided with the one of annular electrode
Face is connected, to form annular array element；
Back sheet is adhered to the another side of substrate, then package casing to form annular array transducer.
12. the preparation method of annular array transducer according to claim 11, which is characterized in that described according to the pressure
The arrangement position of electric array element configures several spaced annular electrodes on default substrate specifically:
Several spaced rings are configured on default substrate according to the arrangement position of first electrode on the piezoelectric layer and size
Shape electrode.
13. the preparation method of the annular array transducer according to claim 12, which is characterized in that described according to institute
Stating the arrangement position of first electrode and size on piezoelectric layer, to configure several spaced annular electrodes on default substrate specific
Include:
According to the shape for determining each annular electrode according to the arrangement position of first electrode and size on the piezoelectric layer；
Lithography forms several annular electrodes on default substrate when being used according to the shape of each annular electrode.
14. the preparation method of the annular array transducer according to claim 12, which is characterized in that described according to institute
Stating the arrangement position of first electrode and size on piezoelectric layer, to configure several spaced annular electrodes on default substrate specific
Include:
According to the shape for determining each annular electrode according to the arrangement position of first electrode and size on the piezoelectric layer；
It is laid with whole face electrode on default substrate, and is cut by laser and the whole face electrode is divided into several annular electros
Pole.
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| CN201910063461.6A CN110369247A (en) | 2019-01-23 | 2019-01-23 | A kind of annular array transducer and preparation method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111348612A (en) * | 2020-03-13 | 2020-06-30 | 深圳先进技术研究院 | Transducer and preparation method and application thereof |
| CN114308600A (en) * | 2021-12-16 | 2022-04-12 | 国网山东省电力公司烟台供电公司 | Air coupling ultrasonic transducer for non-contact detection of insulation defects of switch cabinet |
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