CN110359029B - Coating for cutting tools and method for producing the same - Google Patents
Coating for cutting tools and method for producing the same Download PDFInfo
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- CN110359029B CN110359029B CN201910754365.6A CN201910754365A CN110359029B CN 110359029 B CN110359029 B CN 110359029B CN 201910754365 A CN201910754365 A CN 201910754365A CN 110359029 B CN110359029 B CN 110359029B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/38—Borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention provides a coating for a cutter and a preparation method thereof, and the coating sequentially comprises the following components from bottom to top: a TiN layer, the thickness of the TiN layer being 0.5-1.0 μm; the TiCN layer is 0.5-1.0 mu m thick; the thickness of the TiSiCN layer is 2-8 mu m; a TiSiCNO layer with the thickness of 3-8 mu m; the thickness of the TiB layer is 0.5-2 μm. The preparation method specifically comprises the step of sequentially depositing the coatings on the hard alloy blade by using a chemical vapor deposition method at corresponding temperature, atmosphere and pressure. The blade coated with the coating has the advantages of higher hardness and wear resistance, higher wear resistance degree and longer service life.
Description
Technical Field
The invention relates to the field of coatings of cutting tools, in particular to a coating for a tool and a preparation method thereof.
Background
The coating on the surface of the cutting tool is one of important ways for improving the performance of the cutting tool, the coated cutting tool has the advantages of high surface hardness, good wear resistance, stable chemical performance, heat resistance, oxidation resistance, small friction coefficient, low thermal conductivity and the like, and the service life of the coated cutting tool is prolonged by more than 5-10 times compared with the uncoated cutting tool during cutting. The surface coating technology of the cutting tool can ensure that the cutting tool obtains good comprehensive mechanical properties, not only can effectively prolong the service life of the cutting tool, but also can greatly improve the machining efficiency, so the technology becomes one of key technologies for manufacturing the cutting tool.
Currently, the alumina system coating is mostly used for the chemical coating blade matured in the market because the alumina coating has good heat insulation and chemical stability. The most predominant preparation is the CVD (chemical vapor deposition) technique due to the insulating properties of the alumina coating and the higher deposition temperature. However, thermal cracking occurs in the coating due to thermal stresses created by the mismatch in the coefficients of thermal expansion of the substrate and the alumina coating materials. These thermal cracks are likely to cause the tool coating to break or chip during the cutting process.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a coating for a cutter and a preparation method thereof, aiming at increasing the bonding force of the coating, reducing cracks and obtaining a cutting cutter with high hardness, good wear resistance and longer service life.
In order to achieve the purpose, the invention provides the following technical scheme:
a method of preparing a coating for a cutting tool, comprising the steps of:
(1) placing the numerical control blade into a reaction chamber, and pumping the air pressure of the reaction chamber to be below 10 mbar;
(2) introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 50-200 mbar4、N2And H2Depositing a TiN layer with the thickness of 0.5-1 mu m on the numerical control blade by using the mixed gas;
(3) introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 200-500 mbar4、N2、CH4And H2Depositing a TiCN layer of 0.5-1 μm on the TiN layer by using the mixed gas;
(4) introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 50-200 mbar4、SiCl4、N2、NH3And H2Depositing a 2-8 mu m TiSiCN layer on the TiCN layer by using the mixed gas;
(5) introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 50-200 mbar4、SiCl4、CO2、CO、HCl、NH3And H2Depositing a TiSiCN NO layer with the thickness of 3-8 mu m on the surface of the TiSiCN by using the mixed gas;
(6) introducing TiCl under the conditions that the temperature of a reaction chamber is 950-1010 ℃ and the pressure is 200-700 mbar4、BCl3And H2The mixed gas is used for depositing a layer of 0.5-2 mu m TiB on the surface of TiSiCNO2Layer, completing the coating for the cutting tool.
Preferably, the TiCl in step (2)4、N2And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of N22-50%, the balance being H2。
Preferably, the TiCl in step (3)4、N2、CH4And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of CH40.2 to 10% of N22-50%, the balance being H2。
Preferably, the TiCl in step (4)4、SiCl4、N2、NH3And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of SiCl40.2 to 10% of N22 to 50% of NH30.2-10%, and the balance of H2。
Preferably, the TiCl in step (5)4、SiCl4、CO2、CO、HCl、NH3And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of SiCl40.2 to 10% of CO20.2-5%, CO 0.2-5%, HCl 0.2-5%, NH30.2-10%, and the balance of H2。
Preferably, the TiCl in step (6)4、BCl3And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of BCl32-10%, the balance being H2。
Preferably, the deposition method used in steps (2) to (6) is a chemical vapor deposition method.
The invention also provides a coating on a blade substrate, which comprises the following components in sequence from bottom to top:
a TiN layer, the thickness of the TiN layer being 0.5-1.0 μm;
the TiCN layer is 0.5-1.0 mu m thick;
the thickness of the TiSiCN layer is 2-8 mu m;
a TiSiCNO layer, wherein the thickness of the TiSiCNO layer is 3-8 mu m;
and the thickness of the TiB layer is 0.5-2 mu m.
The scheme of the invention has the following beneficial effects:
the coating on the blade substrate provided by the invention adopts TiN as a priming layer, and a TiCN layer is deposited on the surface of the TiN, so that the binding force of the coating is increased; then a TiSiCN layer is deposited on the surface of the TiCN, so that the hardness and the wear resistance of the TiCN can be greatly improved; then depositing a TiSiCNO layer on the surface of the TiSiCN, wherein the TiSiCNO layer has a good columnar crystal structure, so that the TiSiCNO layer has better impact resistance; finally depositing TiB on the surface of the TiSiCNO layer2Coating of TiB2Has higher hardness and lubricity than TiN.
According to the preparation method of the coating for the cutter, the TiN and TiCN layers are deposited at the temperature of 920-980 ℃ to serve as the priming layers, the TiN and TiCN layers are generally deposited at the temperature of 800-900 ℃ in the prior art, and the TiCN coating deposited at the temperature of 920-980 ℃ is composed of fine isometric crystals, so that the hardness is high, the friction coefficient is small, and the wear resistance is better than that of the prior art. The TiSiCN layer formed by doping Si element in TiCN has higher hardness and wear resistance. The TiSiCN NO layer formed by doping O element in the TiSiCN has a columnar crystal structure, so that the thermal cracks of the coating are reduced, and the service life of the coating during cutting can be prolonged; finally depositing TiB on the surface of the TiSiCNO layer2Layer, TiB2Compared with TiN, the high-hardness high-friction wear-resistant steel has higher hardness and smaller friction coefficient. TiB of coating surface when cutting stainless steel2The layer provides a higher finish to the surface and the cutting resistance of the tool is much reduced during cutting, which is effective against adhesive wear during cutting.
Drawings
FIG. 1 is a sectional electron micrograph (magnification 10K) of a coating layer applied to example 1 of the present invention;
FIG. 2 is a photograph of a prior art applied coating taken by electron microscopy (magnification 8K).
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following detailed description is given with reference to specific embodiments.
Example 1
The surface of the hard alloy cutting blade is sequentially coated with a TiN layer from bottom to top, and the thickness of the TiN layer is 0.5-1.0 mu m; a TiCN layer, wherein the thickness of the TiCN layer is 0.5-1.0 μm; a TiSiCN layer, wherein the thickness of the TiSiCN layer is 4-8 mu m; a TiSiCNO layer with a thickness of 3-8 μm; a TiB layer with a thickness of 0.5-1 μm. The detailed process for preparing the above coating is shown in the following table.
Table 1 example 1 details of the process parameters
| Step (ii) of | 1 | 2 | 3 | 4 | 5 |
| TiN | TiCN | TiSiCN | TiSiCNO | TiB2 | |
| TiCl4(％) | 2.0 | 2.1 | 2.0 | 1.9 | 3.8 |
| N2(％) | 42 | 39 | 42 | ||
| CO2(％) | 0.2 | ||||
| CO(％) | 0.2 | ||||
| CH4(％) | 0.9 | ||||
| NH3(％) | 3 | 10 | |||
| SiCl4(％) | 0.8 | 0.9 | |||
| HCl(％) | 0.2 | ||||
| BCl3(％) | 2 | ||||
| H2(％) | Balance of | Balance of | Balance of | Balance of | Balance of |
| Pressure (mabr) | 100 | 500 | 70 | 100 | 600 |
| Temperature (. degree.C.) | 950 | 950 | 950 | 950 | 1000 |
| Time (min) | 60 | 30 | 200 | 200 | 60 |
FIG. 1 is an SEM of the applied coating obtained in example 1, and FIG. 2 is an SEM of the applied coating of the prior art. As can be seen from the fracture photographs of the coating of the present example and the coating of the prior art, the coating of the present example is denser and there are fewer cracks between the grains of the coating. When cutting stainless steel with a tool coated with the coating, the service life of the tool is longer, since there are fewer cracks in the coating.
Example 2
The surface of the hard alloy cutting blade is sequentially coated with a TiN layer from bottom to top, and the thickness of the TiN layer is 0.5-1.0 mu m; a TiCN layer, wherein the thickness of the TiCN layer is 0.5-1.0 μm; a TiSiCN layer, wherein the thickness of the TiSiCN layer is 4-8 mu m; a TiSiCNO layer with a thickness of 3-8 μm; a TiB layer with a thickness of 0.5-1 μm. The detailed process for preparing the above coating is shown in the following table.
Table 2 example 2 details of the process parameters
Example 3
The surface of the hard alloy cutting blade is sequentially coated with a TiN layer from bottom to top, and the thickness of the TiN layer is 0.5-1.0 mu m; a TiCN layer, wherein the thickness of the TiCN layer is 0.5-1.0 μm; a TiSiCN layer, wherein the thickness of the TiSiCN layer is 2-8 mu m; a TiSiCNO layer with a thickness of 3-8 μm; a TiB layer with a thickness of 0.5-2 μm. The detailed process for preparing the above coating is shown in the following table.
Table 3 example 3 details of the process parameters
| Step (ii) of | 1 | 2 | 3 | 4 | 5 |
| TiN | TiCN | TiSiCN | TiSiCNO | TiB2 | |
| TiCl4(％) | 2.0 | 10 | 10 | 10 | 10 |
| N2(％) | 50 | 2 | 2 | ||
| CO2(％) | 3 | ||||
| CO(％) | 5 | ||||
| CH4(％) | 0.2 | ||||
| NH3(％) | 0.2 | 6 | |||
| SiCl4(％) | 0.2 | 0.2 | |||
| HCl(％) | 2 | ||||
| BCl3(％) | 6 | ||||
| H2(％) | Balance of | Balance of | Balance of | Balance of | Balance of |
| Pressure (mabr) | 50 | 300 | 200 | 50 | 200 |
| Temperature (. degree.C.) | 980 | 980 | 920 | 920 | 1010 |
| Time (min) | 45 | 45 | 120 | 420 | 45 |
Example 4
Comparing the coatings a and b in an impact resistance experiment, wherein the workpiece is a cylindrical rod with 4 broken grooves;
the material is 306 stainless steel; the model of the blade is CNMG 080408; the cutting parameters are V250M/s, ap 1.5mm, and F0.25 mm/r, three existing tools were selected simultaneously and compared under the same conditions, and the experimental results are shown in table 4.
TABLE 4 impact resistance test results
As can be seen from Table 4, the point of the blade coated with the coatings of examples 1-3 remained intact after 5000 times of impact resistance within 20 minutes, and the toughness of the coating of the invention was better than that of the prior art coating.
Example 5
Wear resistance tests were performed on coating a and coating b: the workpiece is a flange plate; the material is 201 stainless steel; the model of the blade is WNMG 080408; the cutting parameters are V equal to 280M/s, ap equal to 1.2mm and F equal to 0.25 mm/r.
After cutting for 10min, the abrasion loss of the tool nose is measured, the numerical value is recorded, then cutting is carried out for 5min, and the abrasion loss numerical value of the tool nose is measured, in the embodiment, three existing tools are simultaneously selected to carry out a comparison experiment under the same condition, and the result is shown in table 5.
TABLE 5 abrasion resistance test results
| Serial number | Number plate | 10min abrasion loss by cutting (mm) | 15min abrasion loss (mm) of cutting |
| 1 | Example 1 | 0.165 | 0.284 |
| 2 | Example 2 | 0.154 | 0.279 |
| 3 | Example 3 | 0.164 | 0.285 |
| 4 | Prior art coating 1 | 0.292 | 0.420 |
| 5 | Prior art coating 2 | 0.274 | 0.412 |
| 6 | Prior art coating 3 | 0.286 | 0.403 |
As can be seen from tables 4-5, the wear loss of the blade coated with the coatings of examples 1-3 was less than 0.17mm in 10 minutes and less than 0.29mm in 11 minutes, and the wear resistance of the coating of the present invention was better than that of the prior art coating.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (5)
1. A method of preparing a coating for a cutting tool, comprising the steps of:
(1) placing the numerical control blade into a reaction chamber, and pumping the air pressure of the reaction chamber to be below 10 mbar;
(2) introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 50-200 mbar4、N2And H2Depositing a TiN layer with the thickness of 0.5-1 mu m on the numerical control blade by using the mixed gas;
(3) introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 200-500 mbar4、N2、CH4And H2Depositing a TiCN layer of 0.5-1 μm on the TiN layer by using the mixed gas;
(4) introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 50-200 mbar4、SiCl4、N2、NH3And H2Depositing a 2-8 mu m TiSiCN layer on the TiCN layer by using the mixed gas;
the TiCl4、SiCl4、N2、NH3And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of SiCl40.2 to 10% of N22 to 50% of NH30.2-10%, and the balance of H2；
(5) Introducing TiCl under the conditions that the temperature of a reaction chamber is 920-980 ℃ and the pressure is 50-200 mbar4、SiCl4、CO2、CO、HCl、NH3And H2Depositing a TiSiCN NO layer with the thickness of 3-8 mu m on the surface of the TiSiCN by using the mixed gas;
the TiCl4、SiCl4、CO2、CO、HCl、NH3And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of SiCl40.2 to 10% of CO20.2-5%, CO 0.2-5%, HCl 0.2-5%, NH30.2-10%, and the balance of H2；
(6) Introducing TiCl under the conditions that the temperature of a reaction chamber is 950-1010 ℃ and the pressure is 200-700 mbar4、BCl3And H2The mixed gas is used for depositing a layer of 0.5-2 mu m TiB on the surface of TiSiCNO2Layer, finishing the coating for the cutter;
the TiCl4、BCl3And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of BCl32-10%, the balance being H2。
2. The preparation process according to claim 1, wherein the TiCl in the step (2)4、N2And H2Mixed gas ofTiCl in percentage by mass40.2 to 10% of N22-50%, the balance being H2。
3. The process according to claim 1, wherein said TiCl in step (3)4、N2、CH4And H2According to the mass percentage of TiCl in the mixed gas40.2 to 10% of CH40.2 to 10% of N22-50%, the balance being H2。
4. The production method according to claim 1, wherein the deposition method used in the steps (2) to (6) is a chemical vapor deposition method.
5. A coated coating for a cutting tool, the coating comprising, in order from bottom to top:
a TiN layer, the thickness of the TiN layer being 0.5-1.0 μm;
the TiCN layer is 0.5-1.0 mu m thick;
the thickness of the TiSiCN layer is 2-8 mu m;
a TiSiCNO layer, wherein the thickness of the TiSiCNO layer is 3-8 mu m;
and the thickness of the TiB layer is 0.5-2 mu m.
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| JP3572732B2 (en) * | 1995-07-04 | 2004-10-06 | 三菱マテリアル株式会社 | Hard layer coated cutting tool |
| US7348074B2 (en) * | 2005-04-01 | 2008-03-25 | Oc Oerlikon Balzers Ag | Multilayer hard coating for tools |
| CN101889104B (en) * | 2007-12-06 | 2013-11-06 | 森拉天时奥地利有限公司 | Coated article |
| WO2013157472A1 (en) * | 2012-04-19 | 2013-10-24 | 住友電工ハードメタル株式会社 | Surface-coated cutting tool |
| JP6213867B2 (en) * | 2013-02-21 | 2017-10-18 | 住友電工ハードメタル株式会社 | Surface-coated cutting tool and manufacturing method thereof |
| DE102017102642A1 (en) * | 2017-02-10 | 2018-08-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. | Hard-material-coated bodies of metal, hard metal, cermet or ceramic and method for producing such bodies |
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