CN110319789B - Detection device and method for tooth profile error and deformation function of flexible gear of harmonic reducer - Google Patents
Detection device and method for tooth profile error and deformation function of flexible gear of harmonic reducer Download PDFInfo
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- CN110319789B CN110319789B CN201910633256.9A CN201910633256A CN110319789B CN 110319789 B CN110319789 B CN 110319789B CN 201910633256 A CN201910633256 A CN 201910633256A CN 110319789 B CN110319789 B CN 110319789B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2416—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of gears
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Abstract
The invention discloses a detection device and a detection method for tooth profile error and deformation function of a flexible gear of a harmonic reducer, wherein the detection device comprises a high-precision rotary table system arranged on an optical flat plate, the installation and 360-degree uniform indexing rotation of the flexible gear are realized through the high-precision rotary table system, a laser displacement sensor is arranged on a horizontal sliding table through a sensor support, and the laser penetrates through the central axis of a precision rotary table through front-back movement adjustment, so that the calibration of the position of a tooth profile point is realized; according to the method, the vector diameter of the flexbile gear tooth profile point data under different rotation angles is obtained by establishing the corresponding relation between the laser displacement sensor and the precise rotary table, the tooth profile errors of different rotation angles are obtained by comparing the point data coordinates of the theoretical tooth profile, and theoretical and experimental bases are laid for the representation of the actual tooth profile and the deformation equation of the harmonic reducer.
Description
Technical Field
The invention relates to the technical field of design and manufacture of harmonic reducers, in particular to a device and a method for detecting tooth profile errors and deformation functions of a flexible gear of a harmonic reducer.
Background
The harmonic reducer is a core element of a robot joint, and meshing of a flexible gear and a rigid gear of the harmonic reducer belongs to small-modulus multi-tooth meshing under a large deformation condition. The large deformation process of the harmonic reducer refers to a space motion process of flexible gear teeth realized in the rotation process of the inner ring of the flexible gear after the elliptical wave generator is installed in the flexible bearing. Aiming at tangential displacement, radial displacement and axial rotation angle of a flexible gear tooth profile in a large deformation enveloping process, at present, the flexible gear tooth profile is obtained by adopting finite element simulation and a traditional empirical formula, and the influence caused by actual materials, heat treatment and machining errors is not considered. In addition, the traditional three-coordinate probe contact detection process needs to customize a special ultra-small detection probe and special software, so the customization cost of software and hardware is high, and the measurement period is long. The non-contact measurement technology adopting the laser displacement sensor is an advanced means for detecting small-modulus gears, complex tooth surfaces and precise displacement at present.
Disclosure of Invention
The invention aims to: in order to obtain tooth profile data of a flexible gear which is actually processed and tooth profile deformation data after a wave generator and a flexible bearing are installed, a detection device and a detection method of tooth profile errors and deformation functions of the flexible gear of the harmonic reducer are provided according to the radial distance between the corresponding high-precision grating turntable corner and a laser displacement sensor.
The technical scheme adopted by the invention is as follows:
a detection device for tooth profile errors and deformation functions of a flexible gear of a harmonic reducer comprises a high-precision turntable system arranged on an optical flat plate 1, wherein the installation and 360-degree uniform indexing rotation of a flexible gear 5 are realized through the high-precision turntable system, a laser displacement sensor 7 is arranged on a horizontal sliding table 8 through a sensor support 6, and the passing of laser through the central axis of a precision turntable 3 is realized through front-back movement adjustment, so that the calibration of the position of a tooth profile point is realized;
the high-precision rotary table system comprises a servo motor 2, a precision rotary table 3 and a high-precision circular grating 11, a closed-loop system is formed among the servo motor 2, the precision rotary table 3 and the high-precision circular grating 11, the servo motor 2 is connected with the precision rotary table 3, the high-precision circular grating 11 is arranged on the outer side of the precision rotary table 3, and the real-time output of corner positioning precision of less than 30 arcseconds and corner signals is realized through the closed-loop system;
the distance detection precision of the laser displacement sensor 7 is less than 5um, and the laser displacement sensor is arranged on the horizontal sliding table 8 through the sensor bracket 6;
the flexible gear 5 is arranged on the special clamp 4, and the single-side tooth profile of the flexible gear is ensured to be positioned in the measuring range of the laser displacement sensor 7;
the special fixture 4 comprises a bolting hole 13 fixed with the precision turntable 3 and an inner circle 14 for positioning the flexspline cup body, wherein the coaxiality of the inner circle 14 of the special fixture and the outer circle 12 of the special fixture is less than 0.015mm, and the coaxiality of the outer circle 12 of the special fixture and the central axis of the precision turntable 3 is less than 0.01 mm;
the processing precision of the inner circle 14 of the special clamp is the same as that of the inner hole of the flexible gear shell of the harmonic reducer;
the method comprises the following steps:
the method comprises the following steps: installing a precision turntable 3 on an optical platform 1, installing a special fixture 4, and respectively measuring the runout of a rotating plane of the precision turntable 3 and the excircle of the special fixture 4 through a dial indicator until the excircle runout value of the special fixture 4 is smaller than the circular runout of the precision turntable 3 when the table surface rotates, thereby realizing the alignment calibration of the special fixture 4 and the axis of the precision turntable 3;
step two: adopt 7 centering debugging frocks of laser displacement sensor, the operation flow of repetition step one realizes the centering operation of the centering debugging frocks of laser displacement sensor 7 and 3 axes of precision turntable, and at this moment, 7 translations of laser displacement sensor carry out real-time distance measurement, and the position that the distance is the shortest has realized the centering of laser displacement sensor 7 and precision turntable 4 promptly and has calibrated:
step three: the servo motor 2 drives the precise rotary table 3 to rotate in an evenly indexing way, the distance between a corner and the laser displacement sensor is collected at the same time, the one-to-one correspondence between the corner of the precise rotary table and the radius of the undeformed flexible gear tooth is realized by calibrating the distance between the position of the laser displacement sensor and the central axis of the rotary table, the standard flexible gear tooth profile shape is fitted and compared, and the basic error of the flexible gear tooth profile is extracted;
step four: the flexible bearing and the central shaft are installed, the distance between the corner of the high-precision circular grating 11 and the laser displacement sensor 7 is collected, and the one-to-one correspondence between the corner of the precision rotary table 3 and the tooth profile radius of the flexible gear 5 is realized by calibrating the distance between the laser position of the laser displacement sensor 7 and the central shaft of the rotary table;
the invention has the advantages and positive effects that: according to the method, the vector diameter of the flexbile gear tooth profile point data under different rotation angles is obtained by establishing the corresponding relation between the laser displacement sensor and the precise rotary table, the tooth profile errors of different rotation angles are obtained by comparing the point data coordinates of the theoretical tooth profile, and theoretical and experimental bases are laid for the representation of the actual tooth profile and the deformation equation of the harmonic reducer.
Drawings
FIG. 1 is a device for detecting a tooth profile error and a deformation function of a flexible gear of a harmonic reducer;
FIG. 2 shows a flexible gear clamp for a harmonic reducer;
wherein, 1 optics is dull and stereotyped, 2 servo motor, 3 accurate revolving stages, 4 special fixtures, 5 flexbile wheels, 6 laser displacement sensor supports, 7 laser displacement sensor, 8 horizontal slip tables, 9 slip table supports, 10 installation bases, 11 high-accuracy circle grating, 12 special fixture excircle, 13 bolt hole, 14 special fixture inner circle
Detailed Description
In order to further understand the contents, features and effects of the present invention, the following embodiments are illustrated and described in detail with reference to the accompanying drawings:
as shown in fig. 1, a device for detecting a tooth profile error and a deformation function of a flexspline of a harmonic reducer comprises the following structures: the high-precision turntable system arranged on the optical flat plate 1 realizes the installation and 360-degree uniform indexing rotation of the flexible gear 5, the laser displacement sensor 7 is arranged on the horizontal sliding table 8 through the sensor support 6, and the laser penetrates through the central axis of the precision turntable 3 through the front-back movement adjustment, so that the calibration of the tooth profile point position is realized;
the high-precision rotary table system comprises a closed loop system consisting of a servo motor 2, a precision rotary table 3 and a high-precision circular grating 11, and is used for realizing that the corner positioning precision is less than 30 arcseconds and the real-time output of a corner signal is realized;
the distance detection precision of the laser displacement sensor 7 is less than 5um, and the laser displacement sensor is arranged on the horizontal sliding table 8 through the sensor bracket 6;
the flexible gear 5 is arranged on the special clamp 4, and the single-side tooth profile of the flexible gear is ensured to be positioned in the measuring range of the laser displacement sensor 7;
as shown in fig. 2, the special fixture 4 includes a bolting hole 13 fixed with the precision turntable 3, an inner circle 14 for positioning the flexspline cup, and the coaxiality of the inner circle 14 and the outer circle 12 of the special fixture should be less than 0.015, and the coaxiality of the outer circle 12 of the special fixture and the central axis of the precision turntable 3 should be less than 0.01;
as shown in fig. 2, the machining precision of the inner circle 14 of the special fixture should be the same as that of the inner hole of the shell body of the flexible gear of the harmonic reducer;
the method comprises the following steps:
the method comprises the following steps: installing a precision turntable 3 on an optical platform 1, installing a special fixture 4, and respectively measuring the runout of a rotating plane of the precision turntable 3 and the excircle of the special fixture 4 through a dial indicator until the excircle runout value of the special fixture 4 is smaller than the circular runout of the precision turntable 3 when the table surface rotates, thereby realizing the alignment calibration of the special fixture 4 and the axis of the precision turntable 3;
step two: adopt 7 centering debugging frocks of laser displacement sensor, the operation flow of repetition step one realizes the centering operation of the centering debugging frocks of laser displacement sensor 7 and 3 axes of precision turntable, and at this moment, 7 translations of laser displacement sensor carry out real-time distance measurement, and the position that the distance is the shortest has realized the centering of laser displacement sensor 7 and precision turntable 4 promptly and has calibrated:
step three: the servo motor 2 drives the precise rotary table 3 to rotate in an evenly indexing way, the distance between a corner and the laser displacement sensor is collected at the same time, the one-to-one correspondence between the corner of the precise rotary table and the radius of the undeformed flexible gear tooth is realized by calibrating the distance between the position of the laser displacement sensor and the central axis of the rotary table, the standard flexible gear tooth profile shape is fitted and compared, and the basic error of the flexible gear tooth profile is extracted;
step four: the flexible bearing and the central shaft are installed, the distance between the corner of the high-precision circular grating 11 and the laser displacement sensor 7 is collected, and the one-to-one correspondence between the corner of the precision rotary table 3 and the tooth profile radius of the flexible gear 5 is realized by calibrating the distance between the laser position of the laser displacement sensor 7 and the central shaft of the rotary table;
the invention has the advantages and positive effects that: according to the method, the vector diameter of the flexbile gear tooth profile point data under different rotation angles is obtained by establishing the corresponding relation between the laser displacement sensor and the precise rotary table, the tooth profile errors of different rotation angles are obtained by comparing the point data coordinates of the theoretical tooth profile, and theoretical and experimental bases are laid for the representation of the actual tooth profile and the deformation equation of the harmonic reducer.
Claims (2)
1. A detection method of tooth profile error and deformation function of a flexible gear of a harmonic reducer comprises a high-precision rotary table system arranged on an optical flat plate (1), wherein the installation and 360-degree uniform indexing rotation of the flexible gear (5) are realized through the high-precision rotary table system, a laser displacement sensor (7) is arranged on a horizontal sliding table (8) through a sensor support (6), and the central axis of the laser penetrating through a precision rotary table (3) is realized through front-back movement adjustment so as to realize the calibration of the position of the tooth profile point;
the high-precision rotary table system comprises a servo motor (2), a precision rotary table (3) and a high-precision circular grating (11), a closed-loop system is formed among the servo motor (2), the precision rotary table (3) and the high-precision circular grating (11), the servo motor (2) is connected with the precision rotary table (3), the high-precision circular grating (11) is installed on the outer side of the precision rotary table (3), and the real-time output of a corner signal with the corner positioning precision of less than 30 arcseconds is realized through the closed-loop system;
the distance detection precision of the laser displacement sensor (7) is less than 5um, and the laser displacement sensor is arranged on the horizontal sliding table (8) through a sensor support (6);
the flexible gear (5) is arranged on the special fixture (4), and the unilateral tooth profile of the flexible gear is ensured to be positioned in the measuring range of the laser displacement sensor (7);
the special fixture (4) comprises a bolting hole (13) fixed with the precision turntable (3), a special fixture inner circle (14) for positioning the flexspline cup body, and the coaxiality of the special fixture inner circle (14) and the special fixture outer circle (12) is less than 0.015mm, and the coaxiality of the special fixture outer circle (12) and the central axis of the precision turntable (3) is less than 0.01 mm;
the method is characterized in that: the method comprises the following steps of,
the method comprises the following steps: installing a precision turntable (3) on an optical flat plate (1), installing a special fixture (4), and respectively measuring the runout of the rotating plane of the precision turntable (3) and the excircle of the special fixture (4) through a dial indicator until the excircle runout value of the special fixture (4) is smaller than the circular runout of the precision turntable (3) when the table top rotates, thereby realizing the alignment and calibration of the axes of the special fixture (4) and the precision turntable (3);
step two: adopt laser displacement sensor (7) centering debugging frock, the operation flow of repetition step one realizes the centering operation of the centering debugging frock of laser displacement sensor (7) and accurate revolving stage (3) axis, and at this moment, laser displacement sensor (7) translation and carry out real-time ranging, and the position that the distance is the shortest has realized the centering calibration of laser displacement sensor (7) and accurate revolving stage (3) promptly:
step three: the servo motor (2) drives the precise rotary table (3) to rotate in an evenly indexing manner, the distance between a corner and a laser displacement sensor is collected, the one-to-one correspondence between the corner of the precise rotary table and the tooth profile radius of the undeformed flexible gear (5) is realized by calibrating the distance between the position of the laser displacement sensor and the central axis of the rotary table, the shape of the standard flexible gear tooth profile is fitted and compared, and the basic error of the flexible gear tooth profile is extracted;
step four: the flexible bearing and the central shaft are installed, the distance between the corner of the high-precision circular grating (11) and the laser displacement sensor (7) is collected, and the one-to-one correspondence between the corner of the precision rotary table (3) and the tooth profile radius of the flexible wheel (5) is realized by calibrating the distance between the laser position of the laser displacement sensor (7) and the central axis of the rotary table.
2. The method for detecting the tooth profile error and the deformation function of the flexspline of the harmonic reducer according to claim 1, wherein the method comprises the following steps: the processing precision of the inner circle (14) of the special clamp is the same as that of the inner hole of the flexible gear shell body of the harmonic reducer.
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| CN110986813A (en) * | 2019-12-11 | 2020-04-10 | 北京工业大学 | Radial deformation measurement system for harmonic reducer flexible gear |
| CN112033296A (en) * | 2020-08-07 | 2020-12-04 | 北京工业大学 | Harmonic drive flexible gear radial deformation reconfigurable measuring device |
| CN113791480A (en) * | 2021-07-17 | 2021-12-14 | 国华(青岛)智能装备有限公司 | Precise swing angle table for optical experiment and assembling method |
| CN113587846A (en) * | 2021-08-01 | 2021-11-02 | 北京工业大学 | Small modulus tooth profile detection method based on coordinate transformation principle |
| CN114234855B (en) * | 2021-11-22 | 2024-04-09 | 北京航天控制仪器研究所 | Small-angle rotation angle calibration device and method for vibrating mirror motor |
| CN115615373B (en) * | 2022-12-19 | 2023-04-28 | 山东九博智能装备有限公司 | Harmonic gear radial runout detection device, detection method and control method |
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| CN102116611B (en) * | 2011-03-04 | 2012-03-21 | 常州工学院 | Detection method for cam outline detection system |
| JP6142858B2 (en) * | 2014-10-31 | 2017-06-07 | Ｊｆｅスチール株式会社 | Method and apparatus for measuring shape of forged steel pipe |
| CN105823435B (en) * | 2016-05-17 | 2017-12-29 | 扬州大学 | A kind of gear measurement device and gear measuring method based on laser displacement sensor |
| JP6743597B2 (en) * | 2016-09-02 | 2020-08-19 | 株式会社デンソーウェーブ | Deflection angle detector |
| CN207681943U (en) * | 2017-12-30 | 2018-08-03 | 东莞市固德自动化科技有限公司 | A kind of four axis rotation CNC workbench |
| CN108204791B (en) * | 2017-12-30 | 2020-07-31 | 北京工业大学 | Six-axis laser gear measuring device |
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