CN110306151A - A kind of high-speed steel self-lubricating coat in use pre-processing device and its application method - Google Patents
A kind of high-speed steel self-lubricating coat in use pre-processing device and its application method Download PDFInfo
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- CN110306151A CN110306151A CN201910658794.3A CN201910658794A CN110306151A CN 110306151 A CN110306151 A CN 110306151A CN 201910658794 A CN201910658794 A CN 201910658794A CN 110306151 A CN110306151 A CN 110306151A
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- filament
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- reaction gas
- power supply
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
Abstract
The invention discloses a kind of high-speed steel self-lubricating coat in use pre-processing devices, the inner cavity or so of the vacuum cavity is plugged with two filament electrodes being located at left and right sides of tooling platform extended downwardly, it is connected between the lower end of two filament electrodes by filament supply, and it is connected between the upper end of two filament electrodes by filament, reaction gas is provided in the vacuum cavity, described matrix connection is located at the pulsed bias power supply on the outside of vacuum cavity, and the side of filament electrode is provided with cooling water pipe.And application method, comprising the following steps: it is plasma nitrided that S1 is vacuumized, S2 heated filament heats reduction treatment, S3 heated filament plasma etching and S4 heated filament.The present invention is restored using filament plasma heating, cleaning and the surfaces nitrided processing mode being integrated, and the hardness and coating binding force on surface is significantly greatly increased, and process is continuously, not influence the production cycle of coating, while not generating the nitride layer, white layer of conventional nitridation processing.
Description
Technical field
The present invention relates to high-speed steel to moisten layer pretreatment technology field, specially a kind of high-speed steel self-lubricating coat in use pre-treatment
Equipment and its application method.
Background technique
In high-speed steel, mould steel and bearing steel are handled before coating, are got rusty easily, and surface hardness is not high, cause coating
Binding force it is bad, be always a great problem of iron-containing metal heat treatmet material surface coating, need one kind can be in coating
Before handled, improve the device and method of coating binding force.
Summary of the invention
The purpose of the present invention is to provide a kind of high-speed steel self-lubricating coat in use pre-processing device and its application methods, to solve
The problems mentioned above in the background art.
To achieve the above object, the invention provides the following technical scheme: a kind of high-speed steel self-lubricating coat in use pre-processing device,
Including vacuum cavity and it vacuum cavity left and right ends are set can each lead into the air inlet of argon gas, hydrogen and nitrogen, it is described
The upper end of vacuum cavity is provided with bleeding point, is rotatably connected to tooling platform, the tooling platform on the downside of the inner cavity of the vacuum cavity
Be connected with motor, and be provided with matrix on tooling platform, the inner cavity or so of the vacuum cavity be plugged with extend downwardly be located at work
Two filament electrodes at left and right sides of platform are filled, are connected between the lower end of two filament electrodes by filament supply, and two filaments
It is connected between the upper end of electrode by filament, reaction gas is provided in the vacuum cavity, described matrix connection is located at vacuum
Pulsed bias power supply on the outside of cavity, and the side of filament electrode is provided with cooling water pipe.
Preferably, the filament electrode is graphite material.
Preferably, the quantity of the filament is 4~6 groups.
Preferably, the pulsed bias power supply is DC pulse grid bias power supply.
Preferably, the reaction gas is one of hydrogen, argon gas and nitrogen or two kinds.
Its application method, comprising the following steps:
S1: it vacuumizes: vacuumizing first, vacuum cavity is extracted into 0.03Pa or less；
S2: heated filament heats reduction treatment: after the vacuum degree for reaching step S1, being passed through reaction gas through air inlet, at this moment
Reaction gas is hydrogen, and aerating amount is 200~1000scm, and the anode of grid bias power supply is connected to matrix, cathode connection by the used time
To filament, the oxygen of matrix surface is replaced, the power of filament is 1.2~1.8kw, and filament quantity 6, the time is 40~60min, electricity
10~80A is flowed, temperature is 350 DEG C；
S3: in arrival step S3 after temperature, the anode of pulsed bias power supply heated filament plasma etching: is connected to vacuum chamber
On body, and cathode is connect with matrix, breaks hydrogen, while being passed through reaction gas, and reaction gas at this moment is argon gas, the stream of argon gas
Amount is 150scm, is etched, and the time is 10~20min；
S4: heated filament is plasma nitrided: after the time for reaching step S3, closing argon gas, is passed through reaction gas, reaction at this moment
Gas is the mixture of hydrogen and nitrogen, and ratio is 10:1~15:1, and air pressure 0.5Pa, the voltage of pulsed bias power supply is 180
~260V, frequency: 100~300kHZ, 0.4~0.6Pa of air pressure, temperature are 300~400 DEG C, and the electric current of filament is 20~30A,
30~60min of time, nitridation depth are 5~15 microns.
Compared with prior art, the beneficial effects of the present invention are: the present invention is restored using filament plasma heating, cleaning
With the surfaces nitrided processing mode being integrated, it is significantly greatly increased the hardness and coating binding force on surface, process is continuous, not shadow
The production cycle of coating is rung, while not generating the nitride layer, white layer of conventional nitridation processing, after the unnecessary and troublesome nitridation of reduction
Polishing treatment.In quality, by the binding force of coating on steel, it is promoted to FH1 from traditional FH2/FH3, while surfaces nitrided
Depth is 5-15 microns, in addition, every furnace saves electricity 50-80kwh.g, in high-speed steel tool, mold and the plating of industrial part surface
Film and coating have good use value.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
In figure: 1 reaction gas, 2 air inlets, 3 vacuum cavities, 4 filament electrodes, 5 filaments, 6 tooling platforms, 7 matrixes.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, the invention provides the following technical scheme:
Embodiment 1
A kind of high-speed steel self-lubricating coat in use pre-processing device, including vacuum cavity 3 and setting are in vacuum cavity 3 or so two
End can each lead into the air inlet 2 of argon gas, hydrogen and nitrogen, and the upper end of vacuum cavity 3 is provided with bleeding point, vacuum cavity 3
It is rotatably connected to tooling platform 6 on the downside of inner cavity, tooling platform 6 is connected with motor, and matrix 7 is provided on tooling platform 6, vacuum cavity 3
Inner cavity or so be plugged with two filament electrodes 4 for being located at 6 left and right sides of tooling platform extended downwardly, two filament electrodes 4
It is connected between lower end by filament supply, and is connected between the upper end of two filament electrodes 4 by filament 5, the quantity of filament 5 is
4~6 groups, guarantee temperature and processing speed, reaction gas 1 is provided in vacuum cavity 3, reaction gas 1 is hydrogen, argon gas and nitrogen
One of gas or two kinds, every kind of gas here has special control unit, such as solenoid valve, is the prior art, no
Specific connection is described in detail again, the connection of matrix 7 is located at the pulsed bias power supply in 3 outside of vacuum cavity, and pulsed bias power supply is direct current arteries and veins
Grid bias power supply is rushed, and the side of filament electrode 4 is provided with cooling water pipe, filament electrode 4 is graphite material, high temperature resistant.
Its application method, comprising the following steps:
S1: it vacuumizes: vacuumizing first, use vacuum pump, be the prior art, vacuum cavity 3 is extracted into 0.03Pa or less；
S2: heated filament heats reduction treatment: after the vacuum degree for reaching step S1, being passed through reaction gas 1 through air inlet 2, at this moment
Reaction gas 1 be hydrogen, aerating amount is 200scm, and the anode of grid bias power supply is connected to matrix 7 by the used time, and cathode is connected to
Filament 5, replaces the oxygen on 7 surface of matrix, and the power of filament 5 is 1.2kw, 5 quantity of filament 6, time 40min, electric current 10A,
Temperature is 350 DEG C；
S3: in arrival step S3 after temperature, the anode of pulsed bias power supply heated filament plasma etching: is connected to vacuum chamber
On body 3, and cathode is connect with matrix 7, breaks hydrogen, while being passed through reaction gas 1, and reaction gas 1 at this moment is argon gas, argon gas
Flow be 150scm, be etched, time 10min；
S4: heated filament is plasma nitrided: after the time for reaching step S3, argon gas closed, reaction gas 1 is passed through, at this moment anti-
Answering gas 1 is the mixture of hydrogen and nitrogen, and ratio 10:1, air pressure 0.5Pa, the voltage of pulsed bias power supply is 180V,
Frequency: 100~300kHZ, air pressure 0.4Pa, temperature are 3000 DEG C, and the electric current of filament 5 is 20A, time 30min, and nitridation depth is
5 microns.
Embodiment 2
A kind of high-speed steel self-lubricating coat in use pre-processing device, including vacuum cavity 3 and setting are in vacuum cavity 3 or so two
End can each lead into the air inlet 2 of argon gas, hydrogen and nitrogen, and the upper end of vacuum cavity 3 is provided with bleeding point, vacuum cavity 3
It is rotatably connected to tooling platform 6 on the downside of inner cavity, tooling platform 6 is connected with motor, and matrix 7 is provided on tooling platform 6, vacuum cavity 3
Inner cavity or so be plugged with two filament electrodes 4 for being located at 6 left and right sides of tooling platform extended downwardly, two filament electrodes 4
It is connected between lower end by filament supply, and is connected between the upper end of two filament electrodes 4 by filament 5, the quantity of filament 5 is
4~6 groups, guarantee temperature and processing speed, reaction gas 1 is provided in vacuum cavity 3, reaction gas 1 is hydrogen, argon gas and nitrogen
One of gas or two kinds, every kind of gas here has special control unit, such as solenoid valve, is the prior art, no
Specific connection is described in detail again, the connection of matrix 7 is located at the pulsed bias power supply in 3 outside of vacuum cavity, and pulsed bias power supply is direct current arteries and veins
Grid bias power supply is rushed, and the side of filament electrode 4 is provided with cooling water pipe, filament electrode 4 is graphite material, high temperature resistant.
Its application method, comprising the following steps:
S1: it vacuumizes: vacuumizing first, use vacuum pump, be the prior art, vacuum cavity 3 is extracted into 0.03Pa or less；
S2: heated filament heats reduction treatment: after the vacuum degree for reaching step S1, being passed through reaction gas 1 through air inlet 2, at this moment
Reaction gas 1 be hydrogen, aerating amount is 1000scm, and the anode of grid bias power supply is connected to matrix 7 by the used time, and cathode is connected to
Filament 5, replaces the oxygen on 7 surface of matrix, and the power of filament 5 is 1.8kw, 5 quantity of filament 6, time 60min, electric current 80A；
S3: in arrival step S3 after temperature, the anode of pulsed bias power supply heated filament plasma etching: is connected to vacuum chamber
On body 3, and cathode is connect with matrix 7, breaks hydrogen, while being passed through reaction gas 1, and reaction gas 1 at this moment is argon gas, argon gas
Flow be 150scm, be etched, time 20min；
S4: heated filament is plasma nitrided: after the time for reaching step S3, argon gas closed, reaction gas 1 is passed through, at this moment anti-
Answering gas 1 is the mixture of hydrogen and nitrogen, and ratio 15:1, air pressure 0.5Pa, the voltage of pulsed bias power supply is 260V,
Frequency: 300kHZ, air pressure 0.6Pa, temperature are 400 DEG C, and the electric current of filament 5 is 30A, time 60min, and nitridation depth is 15 micro-
Rice.
Embodiment 3
A kind of high-speed steel self-lubricating coat in use pre-processing device, including vacuum cavity 3 and setting are in vacuum cavity 3 or so two
End can each lead into the air inlet 2 of argon gas, hydrogen and nitrogen, and the upper end of vacuum cavity 3 is provided with bleeding point, vacuum cavity 3
It is rotatably connected to tooling platform 6 on the downside of inner cavity, tooling platform 6 is connected with motor, and matrix 7 is provided on tooling platform 6, vacuum cavity 3
Inner cavity or so be plugged with two filament electrodes 4 for being located at 6 left and right sides of tooling platform extended downwardly, two filament electrodes 4
It is connected between lower end by filament supply, and is connected between the upper end of two filament electrodes 4 by filament 5, the quantity of filament 5 is
4~6 groups, guarantee temperature and processing speed, reaction gas 1 is provided in vacuum cavity 3, reaction gas 1 is hydrogen, argon gas and nitrogen
One of gas or two kinds, every kind of gas here has special control unit, such as solenoid valve, is the prior art, no
Specific connection is described in detail again, the connection of matrix 7 is located at the pulsed bias power supply in 3 outside of vacuum cavity, and pulsed bias power supply is direct current arteries and veins
Grid bias power supply is rushed, and the side of filament electrode 4 is provided with cooling water pipe, filament electrode 4 is graphite material, high temperature resistant.
Its application method, comprising the following steps:
S1: it vacuumizes: vacuumizing first, use vacuum pump, be the prior art, vacuum cavity 3 is extracted into 0.03Pa or less；
S2: heated filament heats reduction treatment: after the vacuum degree for reaching step S1, being passed through reaction gas 1 through air inlet 2, at this moment
Reaction gas 1 be hydrogen, aerating amount is 200~1000scm, and the anode of grid bias power supply is connected to matrix 7, cathode by the used time
It is connected to filament 5, replaces the oxygen on 7 surface of matrix, the power of filament 5 is 1.5kw, 5 quantity of filament 6, time 45min, electricity
50A is flowed, temperature is 350 DEG C；
S3: in arrival step S3 after temperature, the anode of pulsed bias power supply heated filament plasma etching: is connected to vacuum chamber
On body 3, and cathode is connect with matrix 7, breaks hydrogen, while being passed through reaction gas 1, and reaction gas 1 at this moment is argon gas, argon gas
Flow be 150scm, be etched, time 15min；
S4: heated filament is plasma nitrided: after the time for reaching step S3, argon gas closed, reaction gas 1 is passed through, at this moment anti-
Answering gas 1 is the mixture of hydrogen and nitrogen, and ratio 13:1, air pressure 0.5Pa, the voltage of pulsed bias power supply is 220V,
Frequency: 200kHZ, air pressure 0.5Pa, temperature are 350 DEG C, and the electric current of filament 5 is 25A, time 45min, and nitridation depth is 10 micro-
Rice.
Embodiment 4
A kind of high-speed steel self-lubricating coat in use pre-processing device, including vacuum cavity 3 and setting are in vacuum cavity 3 or so two
End can each lead into the air inlet 2 of argon gas, hydrogen and nitrogen, and the upper end of vacuum cavity 3 is provided with bleeding point, vacuum cavity 3
It is rotatably connected to tooling platform 6 on the downside of inner cavity, tooling platform 6 is connected with motor, and matrix 7 is provided on tooling platform 6, vacuum cavity 3
Inner cavity or so be plugged with two filament electrodes 4 for being located at 6 left and right sides of tooling platform extended downwardly, two filament electrodes 4
It is connected between lower end by filament supply, and is connected between the upper end of two filament electrodes 4 by filament 5, the quantity of filament 5 is
4~6 groups, guarantee temperature and processing speed, reaction gas 1 is provided in vacuum cavity 3, reaction gas 1 is hydrogen, argon gas and nitrogen
One of gas or two kinds, every kind of gas here has special control unit, such as solenoid valve, is the prior art, no
Specific connection is described in detail again, the connection of matrix 7 is located at the pulsed bias power supply in 3 outside of vacuum cavity, and pulsed bias power supply is direct current arteries and veins
Grid bias power supply is rushed, and the side of filament electrode 4 is provided with cooling water pipe, filament electrode 4 is graphite material, high temperature resistant.
Its application method, comprising the following steps:
S1: it vacuumizes: vacuumizing first, use vacuum pump, be the prior art, vacuum cavity 3 is extracted into 0.03Pa or less；
S2: heated filament heats reduction treatment: after the vacuum degree for reaching step S1, being passed through reaction gas 1 through air inlet 2, at this moment
Reaction gas 1 be hydrogen, aerating amount is 500scm, and the anode of grid bias power supply is connected to matrix 7 by the used time, and cathode is connected to
Filament 5, replaces the oxygen on 7 surface of matrix, and the power of filament 5 is 1.5kw, 5 quantity of filament 6, time 50min, electric current 30A,
Temperature is 350 DEG C；
S3: in arrival step S3 after temperature, the anode of pulsed bias power supply heated filament plasma etching: is connected to vacuum chamber
On body 3, and cathode is connect with matrix 7, breaks hydrogen, while being passed through reaction gas 1, and reaction gas 1 at this moment is argon gas, argon gas
Flow be 150scm, be etched, time 20min；
S4: heated filament is plasma nitrided: after the time for reaching step S3, argon gas closed, reaction gas 1 is passed through, at this moment anti-
Answering gas 1 is the mixture of hydrogen and nitrogen, and ratio 10:1, air pressure 0.5Pa, the voltage of pulsed bias power supply is 220V,
Frequency: 200kHZ, air pressure 0.5Pa, temperature are 350 DEG C, and the electric current of filament 5 is 30A, time 45min, and nitridation depth is 10 micro-
Rice.
For embodiment 4, select high velocity powder metallurgy screw tap: M8, ten, control group five directly applies TiCN, and in addition five
Only being handled by 4 condition of embodiment, TiCN coating layer thickness is 3.2 microns, and five are averaged, obtain following result:
| It is untreated | The invention | Remarks | ||
| Surface hardness | HRC 58 | Surface hardness | HRC 62 | |
| Surface roughness | RZ1.23 | Surface roughness | RZ1.22 | |
| Coating binding force | 49N | Coating binding force | 73N | |
| Coating surface hardness | HV2900 | Coating surface hardness | HV3100 |
There it can be seen that treated, screw tap hardness has been increased to HRC62, and roughness has dropped, and coating binding force is bright
It is aobvious to improve, 73N is arrived, coating surface hardness is also increased to HV3100, hence it is evident that seeing the The effect of invention.
Then for workpieces processing: 40CrMo heat- treated steel, attrition value 0.3mm stop test, obtain following result:
There it can be seen that process 759 holes to the screw tap of TiCN coating after processing, wear for 0.29mm, lower than not locating
The 0.31mm of the screw tap with TiCN coating of reason, moreover, control group is only 522 holes, explanation, hence it is evident that improve wearability.
The present invention is restored using 5 plasma heating of filament, and cleaning and the surfaces nitrided processing mode being integrated greatly increase
Add the hardness and coating binding force on surface, process is continuously, not influence the production cycle of coating, while not generating traditional nitrogen
Change the nitride layer, white layer of processing, the polishing treatment after the unnecessary and troublesome nitridation of reduction.In quality, by the knot of coating on steel
With joint efforts, it is promoted to FH1 from traditional FH2/FH3, while surfaces nitrided depth is 5-15 microns, in addition, every furnace saves electricity 50-
80kwh.g, in high-speed steel tool, mold and industrial part surface coating and coating have good use value.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (6)
1. a kind of high-speed steel self-lubricating coat in use pre-processing device, including vacuum cavity (3) and setting are in vacuum cavity (3) left and right
Both ends can each lead into the air inlet (2) of argon gas, hydrogen and nitrogen, and the upper end of the vacuum cavity (3) is provided with bleeding point,
It is characterized in that: being rotatably connected to tooling platform (6) on the downside of the inner cavity of the vacuum cavity (3), the tooling platform (6) is connected with electricity
Machine, and matrix (7) are provided on tooling platform (6), the inner cavity or so of the vacuum cavity (3) be plugged with extend downwardly be located at work
Two filament electrodes (4) at left and right sides of platform (6) are filled, are connected between the lower end of two filament electrodes (4) by filament supply, and
It is connected between the upper end of two filament electrodes (4) by filament (5), is provided with reaction gas (1) in the vacuum cavity (3),
Described matrix (7) connection be located at vacuum cavity (3) on the outside of pulsed bias power supply, and the side of filament electrode (4) be provided with it is cold
But water pipe.
2. a kind of high-speed steel self-lubricating coat in use pre-processing device according to claim 1, it is characterised in that: the filament electricity
Pole (4) is graphite material.
3. a kind of high-speed steel self-lubricating coat in use pre-processing device according to claim 2, it is characterised in that: the filament
(5) quantity is 4~6 groups.
4. a kind of high-speed steel self-lubricating coat in use pre-processing device according to claim 3, it is characterised in that: the pulse is inclined
Voltage source is DC pulse grid bias power supply.
5. a kind of high-speed steel self-lubricating coat in use pre-processing device according to claim 4, it is characterised in that: the reaction gas
Body (1) is one of hydrogen, argon gas and nitrogen or two kinds.
6. a kind of application method of high-speed steel self-lubricating coat in use pre-processing device according to claim 5, it is characterised in that:
The following steps are included:
S1: it vacuumizes: vacuumizing first, vacuum cavity (3) is extracted into 0.03Pa or less；
S2: heated filament heats reduction treatment: after the vacuum degree for reaching step S1, being passed through reaction gas (1) through air inlet (2), at this moment
Reaction gas (1) be hydrogen, aerating amount is 200~1000scm, and the anode of grid bias power supply is connected to matrix (7) by the used time,
Cathode is connected to filament (5), replaces the oxygen on matrix (7) surface, and the power of filament (5) is 1.2~1.8kw, filament (5) quantity 6
A, the time is 40~60min, and 10~80A of electric current, temperature is 350 DEG C；
S3: in arrival step S3 after temperature, the anode of pulsed bias power supply heated filament plasma etching: is connected to vacuum cavity
(3) on, and cathode is connect with matrix (7), breaks hydrogen, while being passed through reaction gas (1), and reaction gas (1) at this moment is argon
The flow of gas, argon gas is 150scm, is etched, and the time is 10~20min；
S4: heated filament is plasma nitrided: after the time for reaching step S3, closing argon gas, is passed through reaction gas (1), reaction at this moment
Gas (1) is the mixture of hydrogen and nitrogen, and ratio is 10:1~15:1, and the voltage of air pressure 0.5Pa, pulsed bias power supply are
180~260V, frequency: 100~300kHZ, 0.4~0.6Pa of air pressure, temperature are 300~400 DEG C, and the electric current of filament (5) is 20
~30A, 30~60min of time, nitridation depth are 5~15 microns.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959551A (en) * | 2022-04-29 | 2022-08-30 | 超微中程纳米科技（苏州）有限公司 | Ionic nitriding process for die steel cutter |
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| US20090197014A1 (en) * | 2008-02-04 | 2009-08-06 | Atomic Energy Council - Institute Of Nuclear Energy Research | Apparatus and method for coating diamond on work pieces via hot filament chemical vapor deposition |
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| CN114959551A (en) * | 2022-04-29 | 2022-08-30 | 超微中程纳米科技（苏州）有限公司 | Ionic nitriding process for die steel cutter |
| CN114959551B (en) * | 2022-04-29 | 2023-12-19 | 超微中程纳米科技（苏州）有限公司 | Ion nitriding process for die steel cutter |
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Application publication date: 20191008 |