CN110289338A - Diffusion furnace is used in a kind of manufacture of solar-energy photo-voltaic cell - Google Patents
Diffusion furnace is used in a kind of manufacture of solar-energy photo-voltaic cell Download PDFInfo
- Publication number
- CN110289338A CN110289338A CN201910572234.6A CN201910572234A CN110289338A CN 110289338 A CN110289338 A CN 110289338A CN 201910572234 A CN201910572234 A CN 201910572234A CN 110289338 A CN110289338 A CN 110289338A
- Authority
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- China
- Prior art keywords
- sic
- annular groove
- quartz boat
- outside
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000010453 quartz Substances 0.000 claims abstract description 45
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 45
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- 238000010438 heat treatment Methods 0.000 abstract description 13
- 230000007704 transition Effects 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to diffusion furnace technical fields, and disclose a kind of solar-energy photo-voltaic cell manufacture diffusion furnace, including furnace body, quartz boat, sic paddle and feeding mechanism, the quartz boat is located in the furnace body, the quantity of the sic paddle is two, and two sic paddles are respectively positioned on the outside of the quartz boat, the side of one sic paddle is fixedly connected with feeding mechanism, the feeding mechanism is fixedly installed in the side of the furnace body, annular groove outside is offered in the furnace body, the bottom of the annular groove outside offers inner circle annular groove, the quantity of the inner circle annular groove is two.Solar-energy photo-voltaic cell manufacture diffusion furnace, at the uniform velocity transition state is in by heating position, the uniformity of heating can be improved, two sic paddles are in rotation simultaneously, always some bottom for being in quartz boat, play a supporting role to quartz boat, therefore it is also ensured that quartz boat when heated, in stable state.
Description
Technical field
The present invention relates to diffusion furnace technical field, diffusion furnace is used in specially a kind of solar-energy photo-voltaic cell manufacture.
Background technique
Solar-energy photo-voltaic cell is used to the luminous energy of the sun be converted into electric energy, and ground photovoltaic system largely uses at present
Be silicon solar cell using silicon as substrate.Silicon before the use, is needed to be diffused by diffusion furnace, aoxidize, anneals, is closed
Gold and sintering.The disengaging boat system of diffusion furnace includes cantilever oar system and soft-landing system, and cantilever oar system is taken by sic paddle
After band quartz boat and silicon wafer enter Quartz stove tube, stay in Quartz stove tube, until process terminates, sic paddle is just carried
Boat and silicon wafer slowly return to original position, and still, when heated, in order to prevent to the damage of sic paddle, therefore sic paddle is usual for the system
It is made of heat-resisting material, and sic paddle can surround the side of quartz boat, and the heating of the part is caused to be obstructed, and occur being heated not
Uniform situation, while quartz boat is when heated, and a large amount of process gas can be generated in furnace body, the particle in gas was rising
Cheng Zhonghui is attached to quartz boat surface, under prolonged attachment, will lead to quartz boat surface layer and thickens, heating conduction reduces, shadow
Ring the heating effect to internal silicon body.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of solar-energy photo-voltaic cell manufacture diffusion furnace, has guarantor
The advantages of demonstrate,proving the uniformity of silicon body heating and improving to silicon body heating effect solves silicon body and heats uneven and silicon body heating effect
The problem of fruit declines.
The invention provides the following technical scheme: a kind of solar-energy photo-voltaic cell manufacture diffusion furnace, including furnace body, quartz
Boat, sic paddle and feeding mechanism, the quartz boat are located in the furnace body, and the quantity of the sic paddle is two, and described in two
Sic paddle is respectively positioned on the outside of the quartz boat, and the side of a sic paddle is fixedly connected with feeding mechanism, the feeder
Structure is fixedly installed in the side of the furnace body, and annular groove outside is offered in the furnace body, and the bottom of the annular groove outside offers
Inner circle annular groove, the quantity of the inner circle annular groove is two, and two inner circle annular grooves are connected to the inner cavity of furnace body, two institutes
It states and is slidably fitted with sliding block in inner circle annular groove, the same side of two sliding blocks is fixedly installed with connection arc plate, two institutes
The same side for stating connection arc plate is fixedly installed with rotation ring flat-plate, and the inside of two sliding blocks is fixedly installed with arc connection
Block, and two arc link blocks are fixedly connected on the outside of two sic paddles respectively.
Preferably, the sic paddle is semicircle shape, and two sic paddles are in 180 ° centered on the axis of the quartz boat
It is symmetrically positioned in the outside of the quartz boat, and two sic paddles are located at the both sides on the outside of the quartz boat.
Preferably, the sic paddle passes through electromagnet and is fixedly connected respectively with feeding mechanism and arc link block, and two
Electromagnet is connect with two external independent current sources respectively.
Preferably, the quantity of the connection arc plate is two, and the thickness of two connection arc plates is identical, is described
The half of annular groove outside thickness, one it is described connection arc plate and annular groove outside outer side contacts, another described connection arc plate and
The interior side contacts of annular groove outside, and the outside of two connection arc plates is flat with the outside of corresponding two sliding blocks respectively
Together.
Preferably, the side of the rotation ring flat-plate passes through fixing bolt and is fixedly connected respectively with two connection arc plates,
And the side contacts with furnace body.
The present invention have it is following the utility model has the advantages that
1, solar-energy photo-voltaic cell manufacture diffusion furnace, by sic paddle in the intracorporal uniform rotation of furnace, when heated,
It can remain that the half side of quartz boat is exposed to external heating, it is in addition half side to be surrounded by sic paddle, and two substitute in continuous
State, therefore heat position and be at the uniform velocity transition state, that is, can be improved the uniformity of heating, while two sic paddles are in rotation,
Always some bottom for being in quartz boat, plays a supporting role to quartz boat, therefore it is also ensured that quartz boat is heating
When, in stable state.
2, solar-energy photo-voltaic cell manufacture diffusion furnace, is rotated by sic paddle on the surface of quartz boat, and and stone
The contact of the surface Ying Zhou, therefore the friction on the inside of sic paddle and quartz boat surface can achieve the effect of the cleaning to quartz boat surface,
Simultaneously because the length of two sic paddles be greater than quartz boat length, therefore rotation when, can to everywhere in quartz boat surface into
Row cleaning, guarantees the heating effect to internal silicon body.
Detailed description of the invention
Fig. 1 is the whole structural schematic diagram of the present invention；
Fig. 2 is cross-sectional view of the invention；
Fig. 3 is the partial enlarged view of A in Fig. 2.
In figure: 1, furnace body；2, quartz boat；3, sic paddle；4, feeding mechanism；5, annular groove outside；6, inner circle annular groove；7, sliding block；
8, arc plate is connected；9, ring flat-plate is rotated；10, arc link block.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1-3, a kind of solar-energy photo-voltaic cell manufacture diffusion furnace, including furnace body 1, quartz boat 2,3 and of sic paddle
Feeding mechanism 4, feeding mechanism 4 are to spread the included device of furnace body, are existing mechanism, quartz boat 2 is located in furnace body 1, sic paddle
3 quantity is two, and two sic paddles 3 are respectively positioned on the outside of quartz boat 2, and the side of a sic paddle 3 and feeding mechanism 4 are fixed
Connection, sic paddle 3 are semicircle shape, and two sic paddles 3 are symmetrically positioned in the outer of quartz boat 2 in 180 ° centered on the axis of quartz boat 2
Side, and two sic paddles 3 are located at the both sides in 2 outside of quartz boat, guarantee that quartz boat 2 has sic paddle 3 always during heating
Its bottom is supported, sic paddle 3 is fixedly connected with feeding mechanism 4 and arc link block 10 by electromagnet respectively, should
Sic paddle 3 is the sic paddle 3 being fixedly connected with feeding mechanism 4, and another sic paddle 3 is only fixedly connected with sliding block 7, and two electromagnet
It is connect respectively with two external independent current sources, electromagnet can be fixed two attachments by the connection and disconnection of power supply
And separation, meet the requirement of this programme, feeding mechanism 4 is fixedly installed in the side of furnace body 1, offers annular groove outside in furnace body 1
5, it is not connected to 1 inner cavity of furnace body, the bottom of annular groove outside 5 offers inner circle annular groove 6, and the quantity of inner circle annular groove 6 is two, and two
A inner circle annular groove 6 is connected to the inner cavity of furnace body 1, is slidably fitted with sliding block 7 in two inner circle annular grooves 6, two sliding blocks 7 it is same
Side is fixedly installed with connection arc plate 8, and two sides for connecting arc plate 8 and the corresponding side of furnace body 1 are concordant, connects arc plate
8 quantity is two, and the thickness of two connection arc plates 8 is identical, is the half of 5 thickness of annular groove outside, a connection arc plate 8
It is longer with the length of the outer side contacts of annular groove outside 5, the connection arc plate 8, the inside of another connection arc plate 8 and annular groove outside 5
Contact, the length of the connection arc plate 8 is shorter, and two connection arc plate 8 outside respectively with the outside of corresponding two sliding blocks 7
Concordantly, it is ensured that two connection arc plates 8, sliding block 7 and arc link block 10 can rotate in annular groove outside 5, and not produce mutually
Raw to influence, the same side of two connection arc plates 8 is fixedly installed with rotation ring flat-plate 9, and rotation ring flat-plate 9 and external rotational power source connect
It connects, the side of rotation ring flat-plate 9, which passes through fixing bolt and connect arc plate 8 with two respectively, to be fixedly connected, and is flanked with the one of furnace body 1
Touching, rotation ring flat-plate 9 can be rotated in the side of furnace body 1, while influence by furnace body 1, can drive 8 turns of plate of two connection arcs
Dynamic, the inside of two sliding blocks 7 is fixedly installed with arc link block 10, and two arc link blocks 10 respectively with two sic paddles 3
Outside be fixedly connected.
Working principle after quartz boat 2 is sent into furnace body 1, disconnects the electromagnet power supply of feeding mechanism 4 and sic paddle 3, simultaneously
The power supply for opening sic paddle 3 and arc link block 10, the two is fixed, and opens external power supply later, and rotation ring flat-plate 9 rotates, band
Dynamic connection arc plate 8 rotates, and connection arc plate 8 drives two sic paddles 3 to carry out around quartz boat 2 by sliding block 7 and arc link block 10
Rotation disconnects sic paddle 3 and connects the power supply of electromagnet between arc plate 8 when needing to take out quartz boat 2, and the two, which loses, fixes about
Beam, and it is connected to the power supply of electromagnet between sic paddle 3 and feeding mechanism 4, the two is fixed, and feeding mechanism 4 drives the sic paddle 3 and stone
English boat 2 leaves furnace body 1.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (5)
1. a kind of solar-energy photo-voltaic cell manufacture diffusion furnace, including furnace body (1), quartz boat (2), sic paddle (3) and feeding mechanism
(4), the quartz boat (2) is located in the furnace body (1), and the quantity of the sic paddle (3) is two, and two sic paddles
(3) it is respectively positioned on the outside of the quartz boat (2), the side of a sic paddle (3) is fixedly connected with feeding mechanism (4), described
Feeding mechanism (4) is fixedly installed in the side of the furnace body (1), it is characterised in that: offers annular groove outside in the furnace body (1)
(5), the bottom of the annular groove outside (5) offers inner circle annular groove (6), and the quantity of the inner circle annular groove (6) is two, and two
The inner circle annular groove (6) is connected to the inner cavity of furnace body (1), is slidably fitted with sliding block in two inner circle annular grooves (6)
(7), the same side of two sliding blocks (7) be fixedly installed with connection arc plate (8), two it is described connection arc plate (8) it is same
Side is fixedly installed with rotation ring flat-plate (9), and the inside of two sliding blocks (7) is fixedly installed with arc link block (10), and two
A arc link block (10) is fixedly connected on the outside of two sic paddles (3) respectively.
2. a kind of solar-energy photo-voltaic cell manufacture diffusion furnace according to claim 1, it is characterised in that: the sic paddle
It (3) is semicircle shape, two sic paddles (3) are symmetrically positioned in the quartz in 180 ° centered on the axis of the quartz boat (2)
The outside of boat (2), and two sic paddles (3) are located at the both sides on the outside of the quartz boat (2).
3. a kind of solar-energy photo-voltaic cell manufacture diffusion furnace according to claim 1, it is characterised in that: the sic paddle
(3) it is fixedly connected with feeding mechanism (4) and arc link block (10) respectively by electromagnet, and two electromagnet are respectively with two
A external independent current source connection.
4. a kind of solar-energy photo-voltaic cell manufacture diffusion furnace according to claim 1, it is characterised in that: the connection arc
The quantity of plate (8) is two, and the thickness of two connections arc plate (8) is identical, is the one of the annular groove outside (5) thickness
Partly, the outer side contacts of connection arc plate (8) and annular groove outside (5), another described connection arc plate (8) and annular groove outside
(5) interior side contacts, and two it is described connection arc plate (8) outsides respectively with the outside of corresponding two sliding blocks (7)
Concordantly.
5. a kind of solar-energy photo-voltaic cell manufacture diffusion furnace according to claim 1, it is characterised in that: the swivel becket
The side of plate (9) passes through fixing bolt and is fixedly connected respectively with two connection arc plates (8), and flanks with the one of furnace body (1)
Touching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910572234.6A CN110289338B (en) | 2019-06-28 | 2019-06-28 | Diffusion furnace for manufacturing solar photovoltaic cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910572234.6A CN110289338B (en) | 2019-06-28 | 2019-06-28 | Diffusion furnace for manufacturing solar photovoltaic cell |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110289338A true CN110289338A (en) | 2019-09-27 |
| CN110289338B CN110289338B (en) | 2020-12-22 |
Family
ID=68020048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910572234.6A Active CN110289338B (en) | 2019-06-28 | 2019-06-28 | Diffusion furnace for manufacturing solar photovoltaic cell |
Country Status (1)
| Country | Link |
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| CN (1) | CN110289338B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4761134A (en) * | 1987-03-30 | 1988-08-02 | Norton Company | Silicon carbide diffusion furnace components with an impervious coating thereon |
| CN201322544Y (en) * | 2008-11-21 | 2009-10-07 | 株洲众欣科技发展有限责任公司 | Oscillating pusher of horizontal diffusion furnace |
| CN201327839Y (en) * | 2008-12-10 | 2009-10-14 | 中国电子科技集团公司第四十八研究所 | Silicon chip loading device for diffusion system |
| CN102610696A (en) * | 2012-03-22 | 2012-07-25 | 常州亿晶光电科技有限公司 | Diffusion process for solar cell tube furnace |
| CN102760674A (en) * | 2012-07-10 | 2012-10-31 | 中国电子科技集团公司第四十八研究所 | Push-boat movement executing device for soft-landing diffusion furnace |
-
2019
- 2019-06-28 CN CN201910572234.6A patent/CN110289338B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4761134A (en) * | 1987-03-30 | 1988-08-02 | Norton Company | Silicon carbide diffusion furnace components with an impervious coating thereon |
| US4761134B1 (en) * | 1987-03-30 | 1993-11-16 | Silicon carbide diffusion furnace components with an impervious coating thereon | |
| CN201322544Y (en) * | 2008-11-21 | 2009-10-07 | 株洲众欣科技发展有限责任公司 | Oscillating pusher of horizontal diffusion furnace |
| CN201327839Y (en) * | 2008-12-10 | 2009-10-14 | 中国电子科技集团公司第四十八研究所 | Silicon chip loading device for diffusion system |
| CN102610696A (en) * | 2012-03-22 | 2012-07-25 | 常州亿晶光电科技有限公司 | Diffusion process for solar cell tube furnace |
| CN102760674A (en) * | 2012-07-10 | 2012-10-31 | 中国电子科技集团公司第四十八研究所 | Push-boat movement executing device for soft-landing diffusion furnace |
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| Publication number | Publication date |
|---|---|
| CN110289338B (en) | 2020-12-22 |
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