CN110282329A - Horse transport mechanism applied to vacuum chamber - Google Patents
Horse transport mechanism applied to vacuum chamber Download PDFInfo
- Publication number
- CN110282329A CN110282329A CN201910599083.3A CN201910599083A CN110282329A CN 110282329 A CN110282329 A CN 110282329A CN 201910599083 A CN201910599083 A CN 201910599083A CN 110282329 A CN110282329 A CN 110282329A
- Authority
- CN
- China
- Prior art keywords
- drive rod
- sliding block
- slide block
- vacuum chamber
- transport mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 230000007723 transport mechanism Effects 0.000 title claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 239000011324 bead Substances 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 abstract description 8
- 238000001771 vacuum deposition Methods 0.000 abstract description 4
- 230000009471 action Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/10—Storage devices mechanical with relatively movable racks to facilitate insertion or removal of articles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transmission Devices (AREA)
Abstract
The present invention is field of vacuum coating, discloses a kind of horse transport mechanism applied to vacuum chamber, including sliding block A, slide block B, drive rod A and drive rod B, and the drive rod A and drive rod B are longitudinally placed in parallel, and are each passed through sliding block A and slide block B, forms groined type；The sliding block A, slide block B, drive rod A and drive rod B are located in working cavity, and the drive rod A is connect with motor A, and the drive rod B is connect with motor B.Drive rod screw hole and the excessive through-hole of drive rod are provided in the sliding block A and slide block B.The present invention can freely control the transmission speed and direction of transfer of horse, since its structure is simple, accessory is few, and while reducing transmission mechanism cost, the reliability of transmission mechanism can be improved by the rotation of control drive rod A and B.
Description
Technical field
The present invention is field of vacuum coating, and in particular to the horse transport mechanism of vacuum coating equipment.
Background technique
The vacuum chamber horse transport mechanism of traditional vacuum coating equipment is essentially all that guide wheel drives horse to be driven,
Its structure is complicated, and reliable transmission is poor.It is inadequate that such as there is a situation where stiction, then will lead to horse traveling lag and bounce,
To influence sputtering process.There are spacing between each guide wheel, limit the length of horse；If guide wheel spacing is too small, need
Guide wheel number it is more, be unfavorable for that transmission system is stable, enduringly travels at the uniform speed.
Summary of the invention
In view of the above-mentioned problems, the invention proposes one kind to be applied to vacuum chamber horse transport mechanism, structure is simple, accessory
It is few, while reducing transmission mechanism cost, the reliability of transmission mechanism can be improved.
It realizes above-mentioned technical purpose, reaches above-mentioned technical effect, the invention is realized by the following technical scheme:
A kind of horse transport mechanism applied to vacuum chamber, including sliding block A (1), slide block B (2), drive rod A (3) and transmission
Bar B (4), the drive rod A (3) and drive rod B (4) are longitudinally placed in parallel, and are each passed through sliding block A (1) and slide block B (2), shape
At groined type；The sliding block A (1), slide block B (2), drive rod A (3) and drive rod B (4) are located in working cavity (5), the biography
Lever A (3) is connect with motor A (6), and the drive rod B (4) connect with motor B (7).On the sliding block A (1) and slide block B (2)
It is provided with drive rod screw hole (8) and the excessive through-hole of drive rod (9).
Further, the drive rod screw hole (8) on the sliding block A (1) passes through for drive rod B (4)；On the sliding block A (1)
The excessive through-hole of drive rod (9) pass through for drive rod A (3)；The drive rod screw hole (8) is internally provided with screw thread internal thread, corresponding
Drive rod A (3) be provided with and the outer silk of the matched screw thread of drive rod screw hole (8) inner surface screw thread internal thread in outer surface.
Further, the drive rod screw hole (8) on the slide block B (2) passes through for drive rod A (3)；On the slide block B (2)
The excessive through-hole of drive rod (9) pass through for drive rod B (4)；The drive rod screw hole (8) is internally provided with screw thread internal thread, corresponding
Drive rod B (4) be provided with and the outer silk of the matched screw thread of drive rod screw hole (8) inner surface screw thread internal thread in outer surface.
Further, the excessive through-hole of drive rod (9) on the sliding block A (1) is greater than the drive rod screw hole on sliding block A (1)
(8)；The excessive through-hole of drive rod (9) on the slide block B (2) is greater than the drive rod screw hole (8) on sliding block A (1).
Further, it is arranged fluted (10) in the sliding block A (1) and slide block B (2), the groove (10) can accommodate work
Make carrying horse (11) to pass through.
Further, groove (10) two sides of the sliding block A (1) and slide block B (2) are provided with collision bead guide groove (12).
Further, groove (10) every side in two sides of the sliding block A (1) and slide block B (2) is provided with 3 collision bead guide grooves
(12)。
Further, collision bead (13) and spring (14) are installed in the collision bead guide groove (12).
Beneficial effects of the present invention:
The invention proposes one kind to be applied to vacuum chamber horse transport mechanism, can by controlling the rotation of drive rod A and B
Freely to control the transmission speed and direction of transfer of horse, structure is simple, and accessory is few, is reducing the same of transmission mechanism cost
When, the reliability of transmission mechanism can be improved.
The utility model has the advantages that
The invention proposes one kind to be applied to vacuum chamber horse transport mechanism, can by controlling the rotation of drive rod A and B
Freely to control the transmission speed and direction of transfer of horse, structure is simple, and accessory is few, is reducing the same of transmission mechanism cost
When, the reliability of transmission mechanism can be improved.
Detailed description of the invention
Fig. 1 is sliding block cut-away view；
Fig. 2 is sliding block and drive rod assembling plan view；
Fig. 3 is a kind of sliding block top view of embodiment of the invention；
Fig. 4 is sliding block main view of the invention；
Fig. 5 is sliding block left view of the invention.
1, sliding block A；2, slide block B；3, drive rod A；4, drive rod B；5, working cavity；6, motor A；7, motor B；8, it is driven
Bar screw hole；9, the excessive through-hole of drive rod；10, groove；11, work carrying horse；12, collision bead guide groove；13, collision bead；14, bullet
Spring.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to embodiments, to the present invention
It is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to
Limit the present invention.
Application principle of the invention is explained in detail with reference to the accompanying drawing.
As shown in Figs. 1-5, the present invention provides a kind of applied to vacuum chamber horse transport mechanism, including sliding block A (1), slide block B
(2), drive rod A (3) and drive rod B (4), the drive rod A (3) and drive rod B (4) are longitudinally placed in parallel, and are each passed through
Sliding block A (1) and slide block B (2) form groined type.The sliding block A (1), slide block B (2), drive rod A (3) and drive rod B (4) position
In working cavity (5), the drive rod A (3) connect with motor A (6), and the drive rod B (4) connect with motor B (7).
Drive rod screw hole (8) and the excessive through-hole of drive rod (9), the cunning are provided in the sliding block A (1) and slide block B (2)
Drive rod screw hole (8) on block A (1) passes through for drive rod A (3)；The excessive through-hole of drive rod (9) on the sliding block A (1) is for passing
Lever B (4) passes through；The drive rod screw hole (8) is internally provided with screw thread internal thread, and corresponding drive rod A (3) is arranged in outer surface
Have and the outer silk of the matched screw thread of drive rod screw hole (8) inner surface screw thread internal thread；
Drive rod screw hole (8) on the slide block B (2) passes through for drive rod B (4)；Drive rod on the slide block B (2)
Excessive through-hole (9) passes through for drive rod A (3)；The drive rod screw hole (8) is internally provided with screw thread internal thread, corresponding drive rod B
(4) it is provided with and the outer silk of the matched screw thread of drive rod screw hole (8) inner surface screw thread internal thread in outer surface；
The excessive through-hole of drive rod (9) on the sliding block A (1) is greater than the drive rod screw hole (8) on sliding block A (1)；The cunning
The excessive through-hole of drive rod (9) on block B (2) is greater than the drive rod screw hole (8) on sliding block A (1)；
It is arranged fluted (10) in the sliding block A (1) and slide block B (2), the groove (10) can accommodate work carrying horse
(11) pass through；Groove (10) every side in two sides of the sliding block A (1) and slide block B (2) is provided with 3 collision bead guide grooves (12), described
Collision bead (13) and spring (14) are installed in collision bead guide groove (12), when work carrying horse (11) is embedded into groove (10)
When, collision bead is under pressure spring (14) contraction, and it is internal that collision bead (13) is retracted collision bead guide groove (12).
Act into piece: horse enters working cavity from cavity is prepared, and when horse front end reaches slide block B position, passes
Sensor receives signal, and B electric motor starting simultaneously drives drive rod B, and horse is taken action together with slide block B at this time.Sliding block A due to transmission
Bar B is through-hole cooperation, so sliding block A is motionless.When horse end reaches the position of sliding block A, motor A starts and with movable slider A
Together with horse action, the rotational frequency of motor A is consistent with the rotational frequency of motor B.At this point, drive rod B is also in the same direction together
Rotation, two sliding block of A, B carrying horse are run in operating room.Reversely, A, B motor reversal.
Slice movement: when sliding block A reaches working cavity left end, motor A stops and stops sliding block A, and slide block B is after reforwarding
Row.Etc. slide block Bs reach sensor set by position when (the starting position of slide block B), motor B stops operating, slide block B stop, it is complete
It is acted at slice.
A, when B motor works at the same time, rotational frequency is consistent, i.e., all A, B drive rods rotate simultaneously, rotational frequency one
It causes；That is when running while sliding block A, B, the speed of service is consistent.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this
The principle of invention, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes
Change and improvement all fall within the protetion scope of the claimed invention.The claimed scope of the invention by appended claims and its
Equivalent thereof.
Claims (8)
1. a kind of horse transport mechanism applied to vacuum chamber, including sliding block A (1), slide block B (2), drive rod A (3) and drive rod
B (4), which is characterized in that the drive rod A (3) and drive rod B (4) are longitudinally placed in parallel, and are each passed through sliding block A (1) and are slided
Block B (2) forms groined type；The sliding block A (1), slide block B (2), drive rod A (3) and drive rod B (4) are located at working cavity (5)
Interior, the drive rod A (3) connect with motor A (6), and the drive rod B (4) connect with motor B (7)；The sliding block A (1) and cunning
Drive rod screw hole (8) and the excessive through-hole of drive rod (9) are provided on block B (2).
2. a kind of horse transport mechanism applied to vacuum chamber according to claim 1, which is characterized in that the sliding block A
(1) the drive rod screw hole (8) on passes through for drive rod A (3)；The excessive through-hole of drive rod (9) on the sliding block A (1) is for transmission
Bar B (4) passes through；The drive rod screw hole (8) is internally provided with screw thread internal thread, and corresponding drive rod A (3) is provided in outer surface
With the outer silk of the matched screw thread of drive rod screw hole (8) inner surface screw thread internal thread.
3. a kind of horse transport mechanism applied to vacuum chamber according to claim 1, which is characterized in that the slide block B
(2) the drive rod screw hole (8) on passes through for drive rod B (4)；The excessive through-hole of drive rod (9) on the slide block B (2) is for transmission
Bar A (3) passes through；The drive rod screw hole (8) is internally provided with screw thread internal thread, and corresponding drive rod B (4) is provided in outer surface
With the outer silk of the matched screw thread of drive rod screw hole (8) inner surface screw thread internal thread.
4. a kind of horse transport mechanism applied to vacuum chamber according to claim 1, which is characterized in that the sliding block A
(1) the excessive through-hole of drive rod (9) on is greater than the drive rod screw hole (8) on sliding block A (1)；Drive rod on the slide block B (2)
Excessive through-hole (9) is greater than the drive rod screw hole (8) on sliding block A (1).
5. a kind of horse transport mechanism applied to vacuum chamber according to claim 1, which is characterized in that the sliding block A
(1) and in slide block B (2) it is arranged fluted (10), the groove (10) can accommodate work carrying horse (11) and pass through.
6. a kind of horse transport mechanism applied to vacuum chamber according to claim 1, which is characterized in that the sliding block A
(1) and groove (10) two sides of slide block B (2) are provided with collision bead guide groove (12).
7. a kind of horse transport mechanism applied to vacuum chamber according to claim 1, which is characterized in that the sliding block A
(1) and groove (10) every side in two sides of slide block B (2) is provided with 3 collision bead guide grooves (12).
8. a kind of horse transport mechanism applied to vacuum chamber according to claim 1, which is characterized in that the collision bead is led
Collision bead (13) and spring (14) are installed into slot (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910599083.3A CN110282329A (en) | 2019-07-04 | 2019-07-04 | Horse transport mechanism applied to vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910599083.3A CN110282329A (en) | 2019-07-04 | 2019-07-04 | Horse transport mechanism applied to vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110282329A true CN110282329A (en) | 2019-09-27 |
Family
ID=68020513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910599083.3A Pending CN110282329A (en) | 2019-07-04 | 2019-07-04 | Horse transport mechanism applied to vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110282329A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980019423A (en) * | 1998-03-17 | 1998-06-05 | 김종국 | Slide type transferring apparatus |
| CN2290733Y (en) * | 1997-06-16 | 1998-09-09 | 太仓市静电设备厂 | Double lead screw workpiece conveying mechanism of electronic powder coater |
| US20030136343A1 (en) * | 2002-01-18 | 2003-07-24 | Shen Tsung-Lin | Apparatus for sealing a vacuum chamber |
| JP3129443U (en) * | 2006-11-29 | 2007-02-22 | 上銀科技股▲分▼有限公司 | Dustproof device for linear transmission module |
| CN206264260U (en) * | 2016-11-25 | 2017-06-20 | 东莞市永博电子科技有限公司 | A kind of mechanical arm for being applied to injection machine |
| CN206936933U (en) * | 2017-04-26 | 2018-01-30 | 东莞市名怡自动化科技有限公司 | A kind of manipulator |
| CN210339183U (en) * | 2019-07-04 | 2020-04-17 | 浙江大学昆山创新中心 | Be applied to real empty room's piece frame transport mechanism |
-
2019
- 2019-07-04 CN CN201910599083.3A patent/CN110282329A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2290733Y (en) * | 1997-06-16 | 1998-09-09 | 太仓市静电设备厂 | Double lead screw workpiece conveying mechanism of electronic powder coater |
| KR19980019423A (en) * | 1998-03-17 | 1998-06-05 | 김종국 | Slide type transferring apparatus |
| US20030136343A1 (en) * | 2002-01-18 | 2003-07-24 | Shen Tsung-Lin | Apparatus for sealing a vacuum chamber |
| JP3129443U (en) * | 2006-11-29 | 2007-02-22 | 上銀科技股▲分▼有限公司 | Dustproof device for linear transmission module |
| CN206264260U (en) * | 2016-11-25 | 2017-06-20 | 东莞市永博电子科技有限公司 | A kind of mechanical arm for being applied to injection machine |
| CN206936933U (en) * | 2017-04-26 | 2018-01-30 | 东莞市名怡自动化科技有限公司 | A kind of manipulator |
| CN210339183U (en) * | 2019-07-04 | 2020-04-17 | 浙江大学昆山创新中心 | Be applied to real empty room's piece frame transport mechanism |
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