CN110275288A - A kind of multidirectional MEMS scanning means - Google Patents
A kind of multidirectional MEMS scanning means Download PDFInfo
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- CN110275288A CN110275288A CN201910540290.1A CN201910540290A CN110275288A CN 110275288 A CN110275288 A CN 110275288A CN 201910540290 A CN201910540290 A CN 201910540290A CN 110275288 A CN110275288 A CN 110275288A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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Abstract
The invention discloses a kind of multidirectional MEMS scanning means, are related to laser scanner technique field, which is cascaded using more than two two-dimensional scanning micro mirrors, may be implemented to the multi-direction of sample to be tested while scanning, can greatly improve scan efficiency；And each micro mirror can make scanning element realize the scanning of arbitrary graphic with independent control, can match different scanning patters for different samples to be tested in practical application, realize dynamic change measurement, scan freedom degree and flexibility ratio is high.The multidirectional MEMS scanning means structure is simple, and the volume and cost of device are substantially reduced using MEMS technology design.
Description
Technical field
The present invention relates to laser scanner technique field, especially a kind of multidirectional MEMS scanning means.
Background technique
Laser scanning has been widely used in every field as a kind of contactless measurement method, usually scanning point
For two ways, one is one-dimensional scannings, and one is two-dimensional scannings.Traditional sweep mechanism mainly uses motor driven reflecting mirror
Or galvanometer is scanned, entire scanning means volume is larger, and scan frequency has certain limitations.In MEMS laser scanner technique
After appearance, the volume of scanning means is reduced very much, but certain MEMS laser scanning devices scanning dimension and area have very greatly
It limits, scan efficiency is all subject to certain restrictions in actual use.
Summary of the invention
The present inventor regarding to the issue above and technical need, proposes a kind of multidirectional MEMS scanning means, which can be with
Realize the scanning of multi-direction large area, scan efficiency is higher, and scanning patter can be controlled flexibly, scanning freedom degree also compared with
It is high.
Technical scheme is as follows:
A kind of multidirectional MEMS scanning means, the multidirectional MEMS scanning means include light source and double micro mirror scanning elements, double micro-
Scarnning mirror unit includes the first micro mirror, the second micro mirror, beam splitter, the first micro mirror isolation cover and the second micro mirror isolation cover, and first is micro-
Mirror, the second micro mirror, the first micro mirror isolation cover and the second micro mirror isolation cover are respectively adopted MEMS technology and are process, the first micro mirror and
Second micro mirror is all made of two-dimensional scanning micro mirror, and beam splitter is connected to the first micro mirror isolation cover and the second micro mirror isolation cover respectively
Together, the first micro mirror and the first micro mirror isolation cover link together, and the second micro mirror and the second micro mirror isolation cover link together, the
Isolation cover chamber, isolation of first micro mirror in the first micro mirror isolation cover are carved on one micro mirror isolation cover and the second micro mirror isolation cover respectively
It is scanned inside cover chamber, the second micro mirror is scanned in the intracavitary portion of isolation cover of the second micro mirror isolation cover；Light source direction is double micro-
Beam splitter in scarnning mirror unit, the light that light source issues are incident on the first micro mirror and second after the beam splitting of beam splitter effect respectively
On micro mirror, incident light is incident on to be measured by the first micro mirror and the second micro mirror according to respective scanning mode by beam splitter respectively
On object, the scanning mode of the first micro mirror and the second micro mirror is controlled by independent scanning signal respectively.
Its further technical solution is that multidirectional MEMS scanning means includes N number of double micro mirror scanning elements, each double micro mirrors
The scanning mode of scanning element is controlled by independent scanning signal respectively, N >=2, and N number of double micro mirror scanning elements are arranged successively
Form a scanning element row, the beam splitting for the 1st double micro mirror scanning elements that the light that light source issues is incident in scanning element row
Device；In scanning element row, the light for being incident on the beam splitter of i-th pair of micro mirror scanning element divides after the beam splitting of beam splitter effect
The beam splitter for micro mirror and the i+1 double micro mirror scanning elements not being incident in i-th pair of micro mirror scanning element, i is parameter
And 1≤i≤N-1.
Its further technical solution is, multidirectional MEMS scanning means includes M scanning element row and M beam splitter, M >=
2, M scanning element rows are arranged successively the scanning element array to form M row N column, and M beam splitter is arranged successively to form the column of M row 1
Beam splitter array, each beam splitter respectively correspond a scanning element row；The light that light source issues is incident on the 1st beam splitter,
The light for being incident on j-th of beam splitter is incident on+1 beam splitter of jth respectively after the beam splitting of beam splitter effect and j-th of scanning is single
The beam splitter of the 1st double micro mirror scanning elements in first row, j are parameter and 1≤j≤M-1.
Its further technical solution is that, for any one double micro mirror scanning element, double micro mirror scanning elements are at two
Mesh pattern scanning is realized when loading the Biaxial linear scanning signal of opposite in phase on micro mirror simultaneously.
Its further technical solution is that, for any one double micro mirror scanning element, double micro mirror scanning elements are at two
The scanning signal that the sinusoidal signal envelope range value that phase difference is 90 ° is triangular wave is loaded on micro mirror simultaneously and realizes that ring-shaped figure is swept
It retouches.
Its further technical solution is that, for any one double micro mirror scanning element, double micro mirror scanning elements are at one
Linear scanning signal is loaded on micro mirror, real when load sinusoidal signal envelope range value is the scanning signal of triangular wave on another micro mirror
Existing line pattern scanning and ring-shaped figure scanning.
Its further technical solution is that, for each double micro mirror scanning elements, beam splitter passes through colloid and the first micro mirror
Isolation cover and the second micro mirror isolation cover bond together, and the first micro mirror isolation cover is connected to the first micro mirror by welding
Together, the second micro mirror isolation cover links together with the second micro mirror by welding.
The method have the benefit that:
This application discloses a kind of multidirectional MEMS scanning means, which uses more than two two dimensions
Scanning micro-mirror cascade, may be implemented to the multi-direction of sample to be tested while scanning, can greatly improve scan efficiency；And it is each micro-
Mirror can make scanning element realize the scanning of arbitrary graphic with independent control, can be directed in practical application different to test sample
Product match different scanning patters, realize dynamic change measurement, scan freedom degree and flexibility ratio is high.The multidirectional MEMS scanning means
Structure is simple, and the volume and cost of device are substantially reduced using MEMS technology design.
It is single that the multidirectional MEMS scanning means can also be made up of one-dimensional or two-dimensional scanning the cascade between scanning element
Element array increases scanning dimension, increases scan area, to improve scan efficiency.Each scanning list in scanning element array
Member can independent control, so as to the non-uniform sample to be tested of shape each section carry out adaptability scanning, flexibility
It is high.In addition scanning element forms background graphics, software algorithm can also be assisted to handle by independent control, respective regions, improves
Data precision.
Detailed description of the invention
Fig. 1 is the use schematic diagram of multidirectional MEMS scanning means.
Fig. 2 is a kind of structure chart of the multidirectional MEMS scanning means.
Fig. 3 is the schematic diagram to the isolation cover chamber of double micro mirror scanning elements.
Fig. 4 is a kind of scanning patter schematic diagram of double micro mirror scanning elements.
Fig. 5 is that scanning patter shown in Fig. 4 improves the scanning patter schematic diagram after frequency.
Fig. 6 is another scanning patter schematic diagram of double micro mirror scanning elements.
Fig. 7 is another scanning patter schematic diagram of double micro mirror scanning elements.
Fig. 8 is another structure chart for constituting one-dimensional scanning structure of the multidirectional MEMS scanning means.
Fig. 9 is another structure chart for constituting two-dimensional scanning structure of the multidirectional MEMS scanning means.
Figure 10 is a kind of scanning patter of the multidirectional MEMS scanning means of structure shown in Fig. 9.
Figure 11 is another scanning patter of the multidirectional MEMS scanning means of structure shown in Fig. 9.
Figure 12 is another scanning patter of the multidirectional MEMS scanning means of structure shown in Fig. 9.
Specific embodiment
The following further describes the specific embodiments of the present invention with reference to the drawings.
This application discloses a kind of multidirectional MEMS scanning means, please refer to Fig. 1 and show the multidirectional MEMS scanning means
Application scenario diagram, light source control device control the light source of scanning means, and scan controller controls the scanning mode of scanning means,
Scanning means issues scanning light beam under the control of scan controller and is incident on sample to be tested S, and sample to be tested S is due to having
Different shape characteristics enters in image collecting device after reflection and restore processing realization scanning.
The structure chart of multidirectional MEMS scanning means shown in Fig. 2 is please referred to, which includes 1 He of light source
Double micro mirror scanning elements 2.Double micro mirror scanning elements 2 include the first micro mirror 3, the second micro mirror 4, beam splitter 5, the first micro mirror isolation cover
6 and the second micro mirror isolation cover 7.First micro mirror 3, the second micro mirror 4, the first micro mirror isolation cover 6 and the second micro mirror isolation cover 7 are adopted respectively
It is process with MEMS technology.Beam splitter 5 links together with the first micro mirror isolation cover 6 and the second micro mirror isolation cover 7 respectively,
It is usually bonded together, can be filled in bonding process lazy with the first micro mirror isolation cover 6 and the second micro mirror isolation cover 7 by colloid
Property gas vacuumizes.First micro mirror 3 and the first micro mirror isolation cover 6 link together, the second micro mirror 4 and the second micro mirror isolation cover
7 link together, and are usually connected micro mirror and micro mirror isolation cover by the way of welding.First micro mirror isolation cover, 6 He
Be carved with isolation cover chamber respectively on second micro mirror isolation cover 7, as Fig. 3 illustratively shown in open up on the first micro mirror isolation cover 6
Cover chamber 8 is isolated, the first micro mirror 3 is scanned in the intracavitary portion of isolation cover of the first micro mirror isolation cover 6, and the second micro mirror 4 is micro- second
The intracavitary portion of the isolation cover of mirror isolation cover 7 is scanned.
Light source 1 is controlled towards the beam splitter 5 in double micro mirror scanning elements 2, light source 1 by light source control device.Light source 1
After the beam splitting of beam splitter 5 effect, light beam is incident on the first micro mirror 3 light of sending by the first micro mirror isolation cover 6, another
Shu Guang is incident on the second micro mirror 4 by the second micro mirror isolation cover 7.First micro mirror 3 and the second micro mirror 4 are according to respective scanning side
Incident light is incident on sample to be tested S by formula by beam splitter 5.It is micro- that first micro mirror 3 and the second micro mirror 4 are all made of two-dimensional scanning
Mirror, and the scanning mode of the first micro mirror 3 and the second micro mirror 4 is controlled by independent scanning signal respectively, by adjusting scanning
The voltage and frequency of signal can adjust the scanning mode of each micro mirror, be controlled by scan controller.It is micro- by two
The combination of the scanning mode of mirror can make double micro mirror scanning elements 2 realize the scanning of a variety of different graphics, common are as follows
It is several:
1, when the Biaxial linear scanning signal for loading opposite in phase on two micro mirrors in double micro mirror scanning elements 2 simultaneously
When, which can scan the figure such as Fig. 4, be the scan line of two square crossings, two friendships in figure
Pitch scan line can in the x-direction and the z-direction simultaneously vertical scanning, can also along α angle carry out rotary cross scanning.It is hanging down
The frequency that Biaxial linear scanning signal is improved on the basis of straight cross scan can make double micro mirror scanning elements 2 realize network diagramming
Shape scanning, as shown in figure 5, the ranks number of mesh pattern can carry out any setting by the frequency and amplitude of signal.
It 2, is 90 ° of sinusoidal signal envelope when loading phase difference on two micro mirrors in double micro mirror scanning elements 2 simultaneously
When amplitude is the scanning signal of triangular wave, two micro mirrors can scan the circular scanning line of radius consecutive variations simultaneously, setting
The initial phase of two micro mirrors, the round cross scan that two micro mirrors can be made to scan, as shown in fig. 6, to make double micro mirrors sweep
It retouches unit 2 and realizes ring-shaped figure scanning.
3, when loading linear scanning signal on a micro mirror in double micro mirror scanning elements 2, load on another micro mirror
When sinusoidal signal envelope range value is the scanning signal of triangular wave, the micro mirror of load linear scanning signal is vertically swept in one direction
It retouches or carries out rotary scanning along α angle, load sinusoidal signal envelope range value is the micro mirror scanning of the scanning signal of triangular wave
The circular scanning line of radius consecutive variations out, so that double micro mirror scanning elements 2 realize line pattern scanning and circular chart simultaneously
Shape scanning, as shown in Figure 7.
After the above scanning patter is irradiated to sample to be tested S, the image of variation can be generated on image collecting device, is passed through
Range of triangle method can accurately calculate the depth information of sample to be tested S, so as to obtain the three-dimensional structure of sample to be tested S
Information.When different scanning patters can be set for the sample to be tested S of different-shape, such as measuring circular sample to be tested S
Ring-shaped figure can be used to be scanned, scan irregular sample to be tested S mesh pattern can be used and be scanned.Utilize this
Scanning means can substantially increase the collecting efficiency of image, since micro mirror can pass through scanning multi-direction upper while scanning
The voltage and frequency of signal are controlled, therefore are scanned freedom degree and greatly improved.It in addition can using linear scanning and circular scanning
The recovery precision of image can be improved by background calibration algorithm in calculating process mutually as image background.
In practical application, the multidirectional MEMS scanning means includes N number of double micro mirror scanning elements 2 as shown in Figure 2, N >=
2.This N number of double micro mirror scanning element 2 is arranged successively to form a scanning element row, as shown in Figure 8.In practical application, this is N number of
Double micro mirror scanning elements 2 are fixed on by welding on substrate 9, and substrate 9 is connected to scanning control by way of electrical connection
Device processed realizes the control to N number of double micro mirror scanning elements 2.The light that light source 1 issues is incident on the 1st pair in scanning element row
The beam splitter of micro mirror scanning element 2 is incident on the beam splitter of i-th pair of micro mirror scanning element in a scanning element row
Light is incident on micro mirror and the double micro mirrors of i+1 in i-th pair of micro mirror scanning element respectively after the beam splitting of beam splitter effect
The beam splitter of scanning element, and so on, i is parameter and 1≤i≤N-1.Each double micro mirror scanning elements in scanning element row
2 scanning mode is controlled by independent scanning signal respectively, therefore different figures may be implemented in each double micro mirror scanning elements 2
The scanning of shape.
Further, which includes M scanning element rows as shown in Figure 8, and M >=2, this M are swept
It retouches cell row and is arranged successively the two-dimensional scanning element array to form M row N column, if Fig. 9 is to be illustrated vertical view with M=N=4
Figure.Likewise, in practical application, the double micro mirror scanning elements 2 of this M*N are fixed on by welding on substrate 9, substrate
9 are connected to the control that scan controller realizes double micro mirror scanning elements 2 a to M*N by way of electrical connection.In addition to this
The multidirectional MEMS scanning means further includes M beam splitter 10, this M beam splitter 10 is arranged successively the beam splitter battle array to form the column of M row 1
Column, beam splitter array are set together with scanning element array, each beam splitter 10 respectively corresponds a scanning element row.Light
The light that source 1 issues is incident on the 1st beam splitter 10, is incident on the light of j-th of beam splitter 10 after the beam splitting of beam splitter 10 effect
The beam splitter of the double micro mirror scanning elements 2 of the 1st be incident in+1 beam splitter of jth 10 and j-th of scanning element row respectively, according to
Secondary to analogize, j is parameter and 1≤j≤M-1.The scanning mode point of each double micro mirror scanning elements 2 in entire scanning element array
It is not controlled by independent scanning signal, therefore the scanning of different graphic may be implemented in each double micro mirror scanning elements 2, works as institute
When having double micro mirror scanning elements 2 to realize mesh pattern scanning, entire multidirectional MEMS scanning means may be implemented greater area of
Mesh pattern, as shown in Figure 10.When all double micro mirror scanning elements 2 realize ring-shaped figure scanning, entire multidirectional MEMS is swept
Imaging apparatus realizes the ring-shaped figure scanning of array, as shown in figure 11.Be also possible to the double micro mirror scanning elements 2 in part realize it is netted
Graph scanning, the double micro mirror scanning elements 2 in part realize ring-shaped figure scanning, as shown in figure 12.
Above-described is only the preferred embodiment of the application, and present invention is not limited to the above embodiments.It is appreciated that this
The other improvements and change that field technical staff directly exports or associates without departing from the spirit and concept in the present invention
Change, is considered as being included within protection scope of the present invention.
Claims (7)
1. a kind of multidirectional MEMS scanning means, which is characterized in that the multidirectional MEMS scanning means includes that light source and double micro mirrors are swept
Unit is retouched, double micro mirror scanning elements include that the first micro mirror, the second micro mirror, beam splitter, the first micro mirror isolation cover and second are micro-
MEMS technology is respectively adopted in mirror isolation cover, first micro mirror, the second micro mirror, the first micro mirror isolation cover and the second micro mirror isolation cover
It is process, first micro mirror and the second micro mirror are all made of two-dimensional scanning micro mirror, and the beam splitter is micro- with described first respectively
Mirror isolation cover and the second micro mirror isolation cover link together, and first micro mirror and the first micro mirror isolation cover are connected to one
Rise, second micro mirror and the second micro mirror isolation cover link together, the first micro mirror isolation cover and the second micro mirror every
From isolation cover chamber is carved on cover respectively, first micro mirror is swept in the intracavitary portion of isolation cover of the first micro mirror isolation cover
It retouches, second micro mirror is scanned in the intracavitary portion of isolation cover of the second micro mirror isolation cover；The light source is towards described pair
The beam splitter in micro mirror scanning element, the light that the light source issues are incident on respectively after the beam splitting of beam splitter effect
On first micro mirror and second micro mirror, first micro mirror and second micro mirror are respectively according to respective scanning mode
Incident light is incident on object under test by the beam splitter, the scanning mode difference of first micro mirror and the second micro mirror
It is controlled by independent scanning signal.
2. multidirectional MEMS scanning means according to claim 1, which is characterized in that the multidirectional MEMS scanning means includes
N number of double micro mirror scanning elements, the scanning mode of each double micro mirror scanning elements respectively by independent scanning signal into
Row control, N >=2, N number of double micro mirror scanning elements are arranged successively to form a scanning element row, the light that the light source issues
The beam splitter of the double micro mirror scanning elements of the 1st be incident in the scanning element row；In the scanning element row, it is incident on
The light of the beam splitter of i-th pair of micro mirror scanning element is incident on described i-th pair after the beam splitting of beam splitter effect respectively
The beam splitter of micro mirror and i+1 double micro mirror scanning elements in micro mirror scanning element, i is parameter and 1≤i≤N-1.
3. multidirectional MEMS scanning means according to claim 2, which is characterized in that the multidirectional MEMS scanning means includes
The M scanning element rows and M beam splitter, M >=2, the M scanning element rows are arranged successively to form sweeping for M row N column
Cell array is retouched, the M beam splitter is arranged successively the beam splitter array to form the column of M row 1, each described beam splitter is right respectively
Answer the scanning element row；The light that the light source issues is incident on the 1st beam splitter, is incident on the light of j-th of beam splitter
The 1st be incident on respectively in+1 beam splitter of jth and j-th of scanning element row after the beam splitting of beam splitter effect is double micro-
The beam splitter of scarnning mirror unit, j are parameter and 1≤j≤M-1.
4. multidirectional MEMS scanning means according to claim 1 to 3, which is characterized in that for any one of double
Micro mirror scanning element, double micro mirror scanning elements load the Biaxial linear scanning signal of opposite in phase simultaneously on two micro mirrors
The scanning of Shi Shixian mesh pattern.
5. multidirectional MEMS scanning means according to claim 1 to 3, which is characterized in that for any one of double
Micro mirror scanning element, double micro mirror scanning elements load the sinusoidal signal envelope that phase difference is 90 ° simultaneously on two micro mirrors
Amplitude is that the scanning signal of triangular wave realizes ring-shaped figure scanning.
6. multidirectional MEMS scanning means according to claim 1 to 3, which is characterized in that for any one of double
Micro mirror scanning element, double micro mirror scanning elements load linear scanning signal on a micro mirror, load on another micro mirror
Line pattern scanning and ring-shaped figure scanning are realized when sinusoidal signal envelope range value is the scanning signal of triangular wave.
7. multidirectional MEMS scanning means according to claim 1, which is characterized in that each double micro mirrors are scanned single
Member, the beam splitter are bonded together by colloid and the first micro mirror isolation cover and the second micro mirror isolation cover, and described first
Micro mirror isolation cover links together with first micro mirror by welding, and the second micro mirror isolation cover passes through welding
Mode links together with second micro mirror.
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