CN110274677B - Device and method for measuring normal random micro-vibration of restrictor - Google Patents
Device and method for measuring normal random micro-vibration of restrictor Download PDFInfo
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- CN110274677B CN110274677B CN201910652815.0A CN201910652815A CN110274677B CN 110274677 B CN110274677 B CN 110274677B CN 201910652815 A CN201910652815 A CN 201910652815A CN 110274677 B CN110274677 B CN 110274677B
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- 238000000034 method Methods 0.000 title abstract description 13
- 239000004579 marble Substances 0.000 claims abstract description 20
- 238000009423 ventilation Methods 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims description 7
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 13
- 238000004590 computer program Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention discloses a device and a method for measuring normal random micro-vibration of a throttle. The invention comprises a laser vibration meter, an electric micro-head, an X-Y two-dimensional translation table, a limiting component, a high-precision marble platform, an industrial personal computer and a display screen. The restrictor is placed on the high-precision marble platform and limited by using the limiting component; the electric sensing micro-head is vertically fixed on the upper surface of the throttle; and adjusting the X-Y two-dimensional translation stage to enable laser beams of the laser vibration meter to fall on each to-be-measured point in sequence, sequentially measuring and recording normal random micro-vibration data of each to-be-measured point of the restrictor after ventilation is stable, and simultaneously measuring the thickness of an initial air film after ventilation is stable by the electric sensing micro-head until measurement of all to-be-measured points is completed. The right-angle ball limiting block in the limiting assembly is used for limiting the position of the restrictor, the balls are in point contact with the side face of the restrictor, and friction force applied to the restrictor during normal vibration can be reduced. The invention can simultaneously measure the normal random micro-vibration of the throttle and the thickness of the air film, and has high precision.
Description
Technical Field
The invention relates to the field of vibration measurement of a restrictor, in particular to a device and a method for measuring normal random micro-vibration of the restrictor.
Background
In the existing device, the linear or rotary motion is realized, and the aerostatic lubrication technology is generally adopted. In the aspect of gas static pressure lubrication, the technology of integral throttlers is adopted in China, namely throttle holes are distributed on the integral inner surface of a containing part (a shaft sleeve or a guide rail frame) of an ultra-precise kinematic pair matched coupling part to form throttlers, gas flows out of the throttle holes, and a layer of lubricating air film is formed between the kinematic pairs. The kinematic pair can realize frictionless translational sliding through the lubricating air film.
However, the throttler can generate fluid-solid coupling micro-vibration in the throttling process, which is characterized by random vibration, the magnitude is between picometers and nanometers, and the normal vibration characteristics of different points on the throttler are different. When the nanoscale movement is required, an error generated by vibration becomes an important error source, so that the random micro-vibration of different points on the measuring throttle is beneficial to the kinematic pair to avoid a stochastic resonance region, and the positioning accuracy is improved.
In addition, the characteristics of the normal random micro-vibration of the throttle are related to air source pressure, throttle hole distribution, throttle hole diameter, normal stress of the throttle and the like, and the influence factors are finally related to the air film thickness, so that the air film thickness of the throttle is measured while the normal random micro-vibration of the throttle is measured, and the analysis of the vibration characteristics and the influence factors of the normal random micro-vibration of the throttle is facilitated. There is a need for a device and method for measuring normal and random micro-vibrations of a restrictor.
Disclosure of Invention
The invention provides a device and a method for measuring normal random micro-vibration of a throttle aiming at the defects of the prior art.
The technical scheme adopted by the invention is as follows:
the measuring device for the normal random micro-vibration of the throttle comprises a laser vibration meter, a measuring device and a measuring device, wherein the laser vibration meter is used for measuring the normal random micro-vibration of a certain point of the throttle; the electric sensing micro-head is used for measuring the thickness of the stable initial air film after the air of the restrictor is ventilated; the X-Y two-dimensional translation platform is used for realizing the movement of the high-precision marble platform relative to the laser vibration meter in X and Y directions, and the high-precision marble platform is used for installing a limiting assembly and placing a throttle; the limiting component is used for limiting the positions of the throttlers with different sizes, preventing the throttlers from sliding after ventilation and avoiding the deviation of the current measuring point from the laser beam; the industrial personal computer and the display are used for controlling the X-Y two-dimensional translation stage, and recording, analyzing and displaying data measured by the laser vibrometer and the electric sensing micro-head.
Further, the limiting component comprises 4 right-angle ball limiting blocks, 4 square ejector rods, 2 fixing screws and 2 moving screws capable of moving along the X direction along the small sliding rail. The concrete structure and the installation position are as follows: 2 parallel grooves are formed in the high-precision marble platform, and 2 small sliding rails are respectively fixed in the 2 grooves through screws; the 2 movable screws are respectively fixed on the 2 small slide rails through set screws; the 2 fixing screws are respectively arranged in the two grooves and are positioned at the left side of the small-sized slide rail; each right-angle ball limiting block is connected with 1 square ejector rod through threads; the square ejector rod is fixed on the screw rod through a set screw, and the fixed position can be adjusted according to the width of the throttle; the distance between the movable screw and the fixed screw in the same groove is changed by changing the position of the movable screw on the small sliding rail, so that the distance between 2 corresponding right-angle ball limiting blocks is changed, and the positions of the throttles with different lengths are limited; through the structure, according to the position of the square ejector rod in the screw rod and the position of the movable screw rod on the small sliding rail, 4 right-angle ball limiting blocks are just attached to 4 corners of the throttle, so that the position of the throttle is limited, the throttle is prevented from sliding after ventilation, and the square ejector rod and the movable screw rod are fixed by using the set screw after adjustment.
Further, the square ejector rod and the right-angle ball limiting block are not contacted with the plane of the high-precision marble, so that the right-angle ball limiting block is prevented from blocking the air film air outlet; the square ejector rod can avoid the inclination of the right-angle ball limiting block; the right-angle ball limiting block is structurally characterized in that balls are arranged in the right-angle sheet metal groove, and when the right-angle sheet metal groove limits the position of the restrictor, the balls are in point contact with the side face of the restrictor, so that the friction force of the restrictor during normal vibration is reduced.
A measuring method of normal random micro-vibration of a throttle is to paste a reflective film on a point to be measured on the upper surface of the throttle, place the reflective film on a high-precision marble platform, adjust a limiting component according to the size of the throttle, and limit the position of the throttle; the inductance micro-head is vertically downwards fixed on a square ejector rod by a set screw, and the square ejector rod is fixed on a rotatable screw rod by the set screwOn the upper part, the angle of the rotatable screw rod and the position of the square ejector rod in the rotatable screw rod are adjusted to enable the electric sensing micro-head to vertically contact with the upper surface of the restrictor, and the reading x of the electric sensing micro-head at the moment is recorded 1 The method comprises the steps of carrying out a first treatment on the surface of the The industrial personal computer and the upper computer program control the laser vibration meter to move along the X direction, and the high-precision marble platform to move along the Y direction, so that the laser beam of the laser vibration meter vertically falls on the center point of the reflective film; the air inlet of the throttle is connected with an air inlet pipe through an air pipe quick connector; the air inlet pipe is filled with stable air pressure, after the normal vibration of the throttler is stable, namely after the salient frequency point in the amplitude-frequency curve of the data measured by the laser vibration meter is basically unchanged with time, the normal random micro-vibration data of the throttler measured by the laser vibration meter starts to be recorded, and meanwhile, the current reading x is recorded by the inductance micro-head 2 The film thickness is Δx=x 1 -x 2 The method comprises the steps of carrying out a first treatment on the surface of the If all the measuring points on the upper surface of the throttle are measured, the measurement is finished, if not, the industrial personal computer and an upper computer program control the laser vibration meter to move along the X direction, and the high-precision marble platform moves along the Y direction, so that the laser beam of the laser vibration meter vertically falls on the central point of the reflective film of the next measuring point for measurement until all the measuring points to be measured are measured; and recording and analyzing the normal random micro-vibration data of the restrictor and the thickness of the air film, and displaying the data through a display screen.
The invention has the beneficial effects that: in the invention, the position of the restrictor is limited by adopting the right-angle ball limiting block when the normal random micro-vibration of the restrictor is measured, the structure is that the ball is arranged in the right-angle sheet metal groove, and when the position of the restrictor is limited, the ball is in point contact with the side surface of the restrictor, so that the friction force born by the restrictor during the normal vibration can be reduced, and the measurement result is more accurate; vibration data of different points to be measured of the same throttle can be measured by moving a laser vibration meter or a high-precision marble platform for placing the throttle, and two-dimensional distribution characteristics of normal random micro-vibration of the throttle can be obtained. In addition, the invention can measure not only the normal random micro-vibration of the throttle, but also the thickness of the air film. The method has high precision and high measurement efficiency.
Drawings
FIG. 1 is an overall device diagram of the present invention;
FIG. 2 is a block diagram of a throttle body limiting assembly of the present invention;
FIG. 3 is a block diagram of a right angle ball stop in the present invention;
fig. 4 is a flow chart of the operation of the present invention to perform a measurement.
Detailed Description
In order to make the technical means, the creation features, the achievement of the purpose and the effect of the present invention easy to understand, the present invention is further described below with reference to the accompanying drawings.
As shown in fig. 1 to 3, the invention comprises 1, a display screen, 2, an industrial personal computer, 3, a working platform, 4, a laser vibration meter, 5, a laser beam, 6, an X-axis displacement guide rail, 7, an air inlet pipe, 8, a high-precision marble platform, 9, a Y-axis linear module, 10, a cam structure, 11, a rotatable screw, 12, square ejector rods 5, 13, an electric sensing micro head, 14, a fixed screw 1, 15, square ejector rods 1, 16, a movable screw 1, 17, square ejector rods 2, 18, a reflective film, 19, small slide rails 1, 20, right-angle ball limiting blocks, 21, square ejector rods 3, 22, fixed screws 2, 23, square ejector rods 4, 24, movable screws 2, 25, small slide rails 2, 26, a throttle, 27, an air pipe quick connector, 28, right-angle sheet metal grooves 29 and balls.
As shown in FIG. 1, the normal random micro-vibration magnitude of the throttle is between picometers and nanometers, and the vibration frequency distribution is wide, so that the high-performance laser vibration meter (4) with Baolida is selected for measurement, the model is OFV/5000, the frequency range is DC-24 MHz, the displacement resolution is better than 0.05pm, and the measurement requirement is met.
The X-Y two-dimensional translation stage shown in fig. 1 is not limited to the specific structure shown in fig. 1, and can be realized by moving the throttle in the X-Y direction relative to the laser vibration meter.
As shown in fig. 1 and 2, the specific implementation steps are as follows:
step 1: firstly, a reflective film (18) is stuck on a point to be measured on the upper surface of a throttle (26), and is placed on a high-precision marble platform (8). The positions of the square ejector rod 1 (15), the square ejector rod 2 (17), the square ejector rod 3 (21) and the square ejector rod 4 (23) in the fixed screw 1 (14), the movable screw 1 (16), the fixed screw 2 (22) and the movable screw 2 (24) are adjusted according to the width of the throttle; the positions of the moving screw 1 (16) and the moving screw 2 (24) on the small slide rail 1 (19) and the small slide rail 2 (25) are adjusted according to the lengths of the throttles; the 4 right-angle ball bearings are attached to 4 corners of the throttle by the adjustment, the position of the throttle is limited, and the square ejector rod and the movable screw rod are fixed by using the set screw;
step 2: according to the limited position of the throttle, the angle of the rotatable screw rod (11) and the position of the square ejector rod 5 (12) supporting the electric sensing micro-head (13) in the rotatable screw rod (11) are adjusted, so that the electric sensing micro-head (13) is vertically contacted with the upper surface of the throttle (26), the electric sensing micro-head (13) is fixed on the square ejector rod 5 (12) by a set screw, the square ejector rod 5 (12) is fixed on the rotatable screw rod (11) by the set screw, the rotatable screw rod (11) is fixed at an angle by a cam mechanism (10), and the reading x of the electric sensing micro-head (13) at the moment is recorded 1 ；
Step 3: the laser vibration meter (4) is vertically fixed on a sliding block of the X-axis displacement guide rail (6) and can move along the X-axis direction; the industrial personal computer (2) and an upper computer program control the laser vibration meter (4) to move along the X direction, and the high-precision marble platform (8) moves along the Y direction, so that the laser beam (5) of the laser vibration meter (4) vertically falls on the center point of the reflective film (18);
step 4: the air inlet of the throttle is connected with an air inlet pipe (7) through an air pipe quick connector (27); the air inlet pipe (7) is filled with stable air pressure, after the normal vibration of the throttle (26) is stable, namely after the salient frequency point in the amplitude-frequency curve of the data measured by the laser vibration meter (4) is basically unchanged with time, recording the throttle normal random micro-vibration data measured by the laser vibration meter is started, and simultaneously, the inductance micro-head records the current reading x 2 The film thickness is Δx=x 2 -x 1 . Recording and analyzing normal random micro-vibration data of the throttle and the thickness of the air film, and displaying the data through a display screen;
step 5: the industrial personal computer (2) and the upper computer program control the laser vibrometer (4) to move along the X direction, and the high-precision marble platform (8) moves along the Y direction, so that the laser beam (5) of the laser vibrometer (4) vertically falls on the central point of the reflective film of the next measuring point to carry out measurement until all the measuring points to be measured are measured.
Fig. 3 shows a structure diagram of a right-angle ball limiting block in the invention, which consists of a right-angle sheet metal groove (28) and 4 balls. When the position of the throttle is limited, the ball is tangent to the side surface of the throttle, so that the ball is in point contact with the side surface of the throttle, friction force applied to the throttle when the throttle vibrates normally is reduced, and the throttle is prevented from sliding due to ventilation, so that the laser beam of the laser vibration meter deviates from the current measuring point.
FIG. 4 is a flow chart of a cycle of operation by first attaching a reflective film to the point to be measured on the upper surface of the restrictor and placing it on a high precision marble platform; secondly, the position of the restrictor on the marble plane is limited by using a limiting component; secondly, fixing the electric sensing micro-head according to the position of the throttle so as to enable the electric sensing micro-head to vertically contact with the upper surface of the throttle, and recording the reading x of the electric sensing micro-head at the moment 1 The method comprises the steps of carrying out a first treatment on the surface of the Then, starting a measuring device, and adjusting the X-Y two-dimensional translation stage to enable a laser beam of the laser vibration meter to fall on a reflective film of a first to-be-measured point; then, the air pipe is filled with stable air pressure, after the normal vibration of the restrictor is stable, the recording of the random micro vibration data of the restrictor measured by the laser vibration meter is started, and meanwhile, the current reading x is recorded by the electric sensing micro head 2 The film thickness is Δx=x 1 -x 2 The method comprises the steps of carrying out a first treatment on the surface of the If all the to-be-measured points on the upper surface of the throttle are measured, ending the measurement, otherwise, adjusting the X-Y two-dimensional translation stage to enable the laser beam of the laser vibration meter to vertically fall on the central point of the reflective film of the next measuring point for measurement until the measurement of all the to-be-measured points is completed, recording and analyzing the normal random micro-vibration data of the throttle and the thickness of the air film, and displaying the data through a display screen.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.
Claims (1)
1. A device for measuring random microvibration normal to a restrictor, comprising:
the laser vibration meter is used for measuring normal random micro-vibration of a certain point of the throttle;
the electric sensing micro-head is used for measuring the thickness of the stable initial air film after the air of the restrictor is ventilated;
the X-Y two-dimensional translation platform is used for realizing the movement of the high-precision marble platform relative to the laser vibration meter in X and Y directions, and the high-precision marble platform is used for installing a limiting assembly and placing a throttle;
the limiting component is used for limiting the positions of the throttlers with different sizes, preventing the throttlers from sliding after ventilation and avoiding the deviation of the current measuring point from the laser beam;
the industrial personal computer and the display are used for controlling the X-Y two-dimensional translation stage, recording, analyzing and displaying data measured by the laser vibrometer and the electric sensing micro-head, and further obtaining the two-dimensional distribution characteristics of the normal random micro-vibration of the restrictor;
the limiting component comprises 4 right-angle ball limiting blocks, 4 square ejector rods, 2 fixing screws and 2 moving screws capable of moving along the X direction along the small sliding rail;
the concrete structure and the installation position are as follows: 2 parallel grooves are formed in the high-precision marble platform, and 2 small sliding rails are respectively fixed in the 2 grooves through screws; the 2 movable screws are respectively fixed on the 2 small slide rails through set screws; the 2 fixing screws are respectively arranged in the two grooves and are positioned at the left side of the small-sized slide rail; each right-angle ball limiting block is connected with 1 square ejector rod through threads; the square ejector rod is fixed on the screw rod through a set screw, and the fixed position can be adjusted according to the width of the throttle;
the distance between the movable screw and the fixed screw in the same groove is changed by changing the position of the movable screw on the small sliding rail, so that the distance between 2 corresponding right-angle ball limiting blocks is changed, and the positions of the throttles with different lengths are limited;
through the structure, the position of the square ejector rod in the screw rod and the position of the movable screw rod on the small sliding rail are adjusted according to the size of the throttle, so that 4 right-angle ball limiting blocks are just attached to 4 corners of the throttle, the position of the throttle is limited, the throttle is prevented from sliding after ventilation, and the square ejector rod and the movable screw rod are fixed by using a set screw after adjustment is completed;
the square ejector rod and the right-angle ball limiting block are not contacted with the plane of the high-precision marble, so that the right-angle ball limiting block is prevented from blocking the air film air outlet;
the square ejector rod can avoid the inclination of the right-angle ball limiting block; the right-angle ball limiting block is structurally characterized in that balls are arranged in the right-angle sheet metal groove, and when the right-angle sheet metal groove limits the position of the restrictor, the balls are in point contact with the side face of the restrictor, so that the friction force of the restrictor during normal vibration is reduced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910652815.0A CN110274677B (en) | 2019-07-19 | 2019-07-19 | Device and method for measuring normal random micro-vibration of restrictor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910652815.0A CN110274677B (en) | 2019-07-19 | 2019-07-19 | Device and method for measuring normal random micro-vibration of restrictor |
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| CN110274677A CN110274677A (en) | 2019-09-24 |
| CN110274677B true CN110274677B (en) | 2024-01-12 |
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| CN102261984A (en) * | 2011-04-18 | 2011-11-30 | 中国计量学院 | Device for detecting vibration characteristics of static pressure gas bearing |
| CN103091070A (en) * | 2013-01-21 | 2013-05-08 | 中国计量学院 | Testing device of gas static pressure flow regulator flow field parameters |
| CN205175641U (en) * | 2015-10-29 | 2016-04-20 | 昆明理工大学 | Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform |
| CN210051433U (en) * | 2019-07-19 | 2020-02-11 | 中国计量大学 | Measuring device for normal random micro-vibration of throttler |
-
2019
- 2019-07-19 CN CN201910652815.0A patent/CN110274677B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070040860A (en) * | 2005-10-13 | 2007-04-18 | 한국생산기술연구원 | Clamping of drive device for measurement of ball bearing inner race |
| CN102261984A (en) * | 2011-04-18 | 2011-11-30 | 中国计量学院 | Device for detecting vibration characteristics of static pressure gas bearing |
| CN103091070A (en) * | 2013-01-21 | 2013-05-08 | 中国计量学院 | Testing device of gas static pressure flow regulator flow field parameters |
| CN205175641U (en) * | 2015-10-29 | 2016-04-20 | 昆明理工大学 | Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform |
| CN210051433U (en) * | 2019-07-19 | 2020-02-11 | 中国计量大学 | Measuring device for normal random micro-vibration of throttler |
Non-Patent Citations (2)
| Title |
|---|
| Theoretical Study and Experimental Verification on Calculation of Bearing Capacity of Aerostatic Restrictor System with a Gas- impedance Model;Shen Xiaoyan;《Proceedings of SPIE》;第9446卷;全文 * |
| 新型气体静压节流器的设计及其静态性能测试装置的研究;张雯;《硕士电子期刊》(2013年第02期);全文 * |
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