CN110274489A - Cooling system - Google Patents

Cooling system Download PDF

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Publication number
CN110274489A
CN110274489A CN201810220442.5A CN201810220442A CN110274489A CN 110274489 A CN110274489 A CN 110274489A CN 201810220442 A CN201810220442 A CN 201810220442A CN 110274489 A CN110274489 A CN 110274489A
Authority
CN
China
Prior art keywords
tower body
collecting tank
cooling system
unit
coolant liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810220442.5A
Other languages
Chinese (zh)
Inventor
王世民
詹勋皓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiwan Semiconductor Manufacturing Co TSMC Ltd
Original Assignee
Taiwan Semiconductor Manufacturing Co TSMC Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Manufacturing Co TSMC Ltd filed Critical Taiwan Semiconductor Manufacturing Co TSMC Ltd
Priority to CN202410227313.4A priority Critical patent/CN118089430A/en
Priority to CN201810220442.5A priority patent/CN110274489A/en
Publication of CN110274489A publication Critical patent/CN110274489A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28CHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA COME INTO DIRECT CONTACT WITHOUT CHEMICAL INTERACTION
    • F28C1/00Direct-contact trickle coolers, e.g. cooling towers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F25/00Component parts of trickle coolers
    • F28F25/02Component parts of trickle coolers for distributing, circulating, and accumulating liquid

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Degasification And Air Bubble Elimination (AREA)

Abstract

It includes tower body, radiating subassembly, feed liquor unit, collecting tank, fan unit and fluid infusion and defoaming unit that the embodiment of the present invention, which provides a kind of cooling system,.Tower body has air outlet and air intake vent.Radiating subassembly is configured in tower body and between air outlet and air intake vent.Feed liquor unit connects tower body to provide coolant liquid to tower body, and the flow path of coolant liquid passes through radiating subassembly.Collecting tank connects tower body.Radiating subassembly is set between feed liquor unit and collecting tank, and collecting tank is to collect the coolant liquid by radiating subassembly.Fan unit is set to tower body and enters tower body from air intake vent with certain driving air-flow and flow through radiating subassembly and tower body is discharged from air outlet.Fluid infusion and defoaming unit connect tower body and including catheters, are set to above collecting tank and including multiple spray holes.Angle between the axis direction and gravity direction of each spray hole is between 20 degree to 60 degree.

Description

Cooling system
Technical field
The present embodiments relate to a kind of cooling systems.
Background technique
An important factor for effective use of water resource is industry development, to the sustainable development with the demand of water with industry And be continuously increased, therefore how effectively to conserve water and reach water resource using optimization, become enterprise and pursues the important of Sustainable Development One of target.Cooling tower is especially needed using big in semiconductor industry during volume production in very extensive in industrial application The cooling water of amount, generally all using processing procedure recycle-water as main water source.
However, the Sewage treatment of semiconductor industry technique is recycled, it is supplied to cooling tower use, can be produced after a long time Raw a large amount of foam.The foam of this generation not only will affect the radiating efficiency of cooling tower itself, while can also make cooling water Chemicals dosage (such as defoaming dosage) increases.In this way, not only increase production cost, but will increase to caused by environment Injury.
Summary of the invention
The embodiment of the present invention is can to reduce the usage amount of defoaming agent for a kind of cooling system and can reach good disappear Steep effect.
According to an embodiment of the invention, cooling system includes tower body, multiple radiating subassemblies, feed liquor unit, collecting tank, fan Unit and fluid infusion and defoaming unit.Tower body has air outlet and air intake vent.Radiating subassembly is configured in tower body and is located at outlet air Between mouth and air intake vent.Feed liquor unit connects tower body to provide coolant liquid to tower body, and the flow path of coolant liquid passes through heat dissipation group Part.Collecting tank connects tower body.Radiating subassembly is set between feed liquor unit and collecting tank.Collecting tank is to collect through heat dissipation group The coolant liquid of part.Fan unit is set to tower body, tower body is entered from air intake vent with certain driving air-flow and flow through radiating subassembly and from go out Tower body is discharged in air port.Fluid infusion and defoaming unit connection tower body and including catheter, catheter be set to above collecting tank and including Multiple spray holes, wherein the angle between the axis direction and gravity direction of each spray hole is between 20 degree to 60 degree.
Detailed description of the invention
Following detailed description is read in conjunction with the figure, the various aspects of the embodiment of the present invention may be best understood.It should be noted that root According to the standard practice in the industry, various features are not necessarily drawn to scale.In fact, can arbitrarily increase for the sake of discussing clearly Or reduce the size of various features.
Fig. 1 is the schematic diagram according to the cooling system of the certain exemplary embodiments of the present invention;
Fig. 2 is to show according to the fluid infusion of the cooling system of the certain exemplary embodiments of the present invention and the use situation of defoaming unit It is intended to;
Fig. 3 is the fluid infusion according to the cooling system of the certain exemplary embodiments of the present invention and the schematic diagram for defoaming unit;
Fig. 4 is to show according to the fluid infusion of the cooling system of the certain exemplary embodiments of the present invention and the defoaming situation of defoaming unit It is intended to.
Drawing reference numeral explanation
100: cooling system
110: tower body
112: air outlet
114: air intake vent
120: radiating subassembly
130: feed liquor unit
132: nozzle
140: collecting tank
142: liquid outlet
150: fan unit
160: fluid infusion and defoaming unit
162: catheter
164: spray hole
170: coolant line
180: coolant liquid reserve tank
A1: axis direction
CL: coolant liquid
D1: aperture
G1: gravity direction
L1: spacing
SL: replenisher
θ1: angle
Specific embodiment
Following disclosure provides many different embodiments or example of the different characteristic for the provided theme of implementation. Component set forth below and the specific example of arrangement are to simplify present disclosure.Certainly, these are only that example and being not intended to is limited System.For example, below explanation in by fisrt feature be formed in second feature " on " or second feature "upper" may include wherein Fisrt feature is formed the embodiment directly contacted with second feature, and may also comprise the wherein fisrt feature and described the Supplementary features can be formed between two features so that the fisrt feature and the second feature may be not directly contacted with Embodiment.In addition, present disclosure may reuse Ref. No. and/or letter in various examples.This repetition is In succinctly and clearly purpose, rather than itself indicate the relationship between discussed various embodiments and/or configuration.
In addition, being ease of explanation, such as " under (beneath) ", " following (below) ", " lower part may be used herein (lower) ", the spaces relativity term such as " top (above) ", " top (upper) " illustrates a component shown in figure Or the relationship of feature and another (other) component or feature.The space relativity term is intended in addition to orientation depicted in figure Also include the different orientation of device in use or operation.Equipment can have other orientations (being rotated by 90 ° or in other orientations) And space relativity used herein describes language and equally can correspondingly explain.
Fig. 1 is the schematic diagram according to the cooling system of the certain exemplary embodiments of the present invention.Fig. 1 is please referred to, in this implementation In example, cooling system 100 includes tower body 110, multiple radiating subassemblies 120, feed liquor unit 130, collecting tank 140, fan unit 150 And fluid infusion and defoaming unit 160.Tower body 110 has air outlet 112 and air intake vent 114.Radiating subassembly 120 is configured at tower body In 110, and radiating subassembly 120 is set between the air outlet 112 of tower body 110 and air intake vent 114, so that air-flow can be by inlet air Mouth 114 enters tower body 110, and by leaving tower body 110 by air outlet 112 again after radiating subassembly 120.In the present embodiment, Radiating subassembly 120 can be multiple radiating fins.
In the present embodiment, feed liquor unit 130 connects tower body 110, to provide coolant liquid CL to tower body 110.For example, Feed liquor unit 130 may include multiple nozzles 132, and coolant liquid CL is sprayed in tower body 110.In the present embodiment, collecting tank 140 are also connected to tower body, and radiating subassembly 120 is then set between feed liquor unit 130 and collecting tank 140.For example, feed liquor list Member 130 can be as shown in Figure 1 the top for being set to tower body 110, and collecting tank 140 may be disposed at the lower part of tower body 110, heat dissipation group Part 120 is then set between feed liquor unit 130 and collecting tank 140, so that the flow path of coolant liquid CL can be by feed liquor unit 130 Collecting tank 140 is fallen into tower body 110, and by radiating subassembly 120.Collecting tank 140 passes through radiating subassembly to collect Coolant liquid CL after 120 cooling.
In the present embodiment, cooling system 100 more may include coolant line 170, and collecting tank 140 can then correspond to including Liquid outlet 142, to be connected to coolant line 170.Configured in this way, the coolant liquid CL to cool down collected by collecting tank 140 can be through Coolant line 170 is discharged to by liquid outlet 142.Coolant line 170 is connected to feed liquor unit 130 and collecting tank 140, so that cold But liquid CL can be recycled in cooling system 100.
Furthermore, it is understood that cooling system 100 more may include coolant liquid reserve tank 180 as shown in Figure 1, it is cold to store But liquid CL, for cooling device use.In the present embodiment, cooling device may be, for example, air-conditioning equipment.Coolant line 170 is divided It is not connected between feed liquor unit 130 and coolant liquid reserve tank 180 and between collecting tank 140 and coolant liquid reserve tank 180.Such as This configuration, the higher coolant liquid CL of temperature after cooling device use can flow into feed liquor unit via coolant line 170 130, and tower body 110 is imported via feed liquor unit 130.The higher coolant liquid CL of this temperature flows through radiating subassembly 120 to carry out Heat dissipation and cooling, and the coolant liquid CL after cooling down then falls into collecting tank 140 and leads via the liquid outlet of collecting tank 140 142 Tower body 110 out, then coolant liquid reserve tank 180 back to is sent this coolant liquid CL after cooling down by coolant line 170 and is filled for cooling Set use.
In the present embodiment, fan unit 150 is set to tower body 110, enters tower body from air intake vent 112 with certain driving air-flow 110 and flow through radiating subassembly 120 and from air outlet 112 be discharged tower body 110.Configured in this way, cooling system 100 can utilize fan The air-flow that unit 150 is driven carries out the thermal convection in tower body 110, so to flow through the coolant liquid CL of radiating subassembly 120 into Row heat dissipation.In the present embodiment, fan unit 150 may be disposed at air outlet 112.
Fig. 2 is shown according to the fluid infusion of the cooling system of the certain exemplary embodiments of the present invention and the use situation of defoaming unit It is intended to.Fig. 3 is the fluid infusion according to the cooling system of the certain exemplary embodiments of the present invention and the schematic diagram for defoaming unit.Fig. 4 is According to the fluid infusion of the cooling system of the certain exemplary embodiments of the present invention and the defoaming situation schematic diagram of defoaming unit.Please also refer to Fig. 1 to Fig. 3, the coolant liquid CL in cooling system 100 may generate consumption (such as: evaporation) in above-mentioned cyclic process, Therefore, fluid infusion and defoaming unit 160 can be connected to replenisher source, and it is as shown in Figure 1 be connected to tower body 110, specific Time point (such as: the time interval of setting or when the coolant liquid in collecting tank 140 lower than setting liquid level when) provide replenisher SL is to collecting tank 140.For example, settable detection device (not shown), such as sensor, floating ball etc. in collecting tank 140.When When the liquid level of coolant liquid is lower than default value in collecting tank 140, it can be detected by detection device, and by replenisher source Replenisher SL is injected in collecting tank 140, to keep the amount of coolant liquid in required range.
Furthermore, it is understood that fluid infusion and defoaming unit 160 can include as shown in Figures 2 and 3 catheter 162, it is set to Above collecting tank 140 and including multiple spray holes 164, make replenisher source can be via fluid infusion and the spray hole of defoaming unit 160 164 provide replenisher SL to collecting tank 140.In the present embodiment, catheter 162 may be disposed at collecting tank 140 and air intake vent 114 Between.Also, the axial direction of catheter 162 can be as shown in Figure 2 the side wall for being parallel to collecting tank 140.
In addition to this, coolant liquid CL can be such as because of a variety of factors air quality, temperature, silt, chemical agent, water quality Influence and in generating a large amount of foam BL in collecting tank 140.When gas is mixed into coolant liquid CL, gas-liquid circle of these gases Face may be surrounded by surfactant, and can be raised to the surface of coolant liquid CL due to low-density and slowly and be formed foam BL (as shown in the left figure of Fig. 4).Therefore, in the present embodiment, fluid infusion and defoaming unit 160 may be designed as making replenisher SL with for example The forms such as special angle, special speed are sprayed to the liquid level of collecting tank 140, can break through walls and prevent foam BL from Steadily exist, and then have the function that defoaming (as shown in the centre of Fig. 4 and right figure).Therefore, the fluid infusion of the present embodiment and disappear Bubble 160 one side of unit can provide replenisher to collecting tank 140, and the impact force of liquid level on the other hand can be sprayed to using replenisher To be defoamed to the coolant liquid CL in collecting tank 140.For example, fluid infusion and defoaming unit 160 may be designed as each hydrojet Angle theta 1 between the axis direction A1 and gravity direction G1 in hole 164 is about between 20 degree to 60 degree, also, in an embodiment In, angle theta 1 is about 30 degree.The Spraying rates of the liquid level of collecting tank 140 are sprayed to about between 2.6m/s by each spray hole 164 To between 6m/s, also, in one embodiment, above-mentioned Spraying rates are about 3.8m/s.Furthermore, it is understood that each spray hole For 164 aperture D1 about between 2mm between 3mm, also, in one embodiment, aperture D1 is about 2.5mm.In addition, adjacent two Spacing L1 between spray hole 164 about can be between 100mm between 260mm, also, in one embodiment, and spacing L1 is about 180mm.In one embodiment, the ratio of the aperture D1 of the spacing L1 between adjacent two spray hole 164 and spray hole 164 about between Between 50 to 86, furthermore, the ratio of spacing L1 and aperture D1 are about 72.Certainly, those skilled in the art It should be appreciated that above-mentioned numberical range is only to for example, fluid infusion and defoam the size of spray hole 164 of unit 160, configuration The design parameters such as the spray rate of mode and replenisher SL can adjust according to the actual demand of cooling system 100, be mentioned with reaching It carries out the multiple efficacies such as defoaming for replenisher to collecting tank 140 and to the coolant liquid CL in collecting tank 140.
In the present embodiment, defoaming agent can be provided in collecting tank 140 via fluid infusion and defoaming unit 160, that is to say, that The replenisher SL being provided in collecting tank 140 may include coolant liquid and/or defoaming agent.Coolant liquid and defoaming agent can simultaneously via Fluid infusion and defoaming unit 160 are provided to collecting tank 140, can also be provided to respectively collecting tank 140 in different time points.In this way, due to The fluid infusion of the present embodiment and defoaming unit 160 can be sprayed to the impact force of liquid level using replenisher come to cold in collecting tank 140 But liquid CL is defoamed, thus the dosage of defoaming agent can be greatly reduced, or even in certain embodiments, and cooling system 100 can nothing The impact force pair of liquid level must be defoamed and is only sprayed to by the design of spray hole 164 using replenisher using defoaming agent Coolant liquid CL in collecting tank 140 is defoamed.
In conclusion fluid infusion and defoaming unit are designed to make replenisher in the cooling system of the embodiment of the present invention It is sprayed to the liquid level of collecting tank in the form of such as special angle, special speed etc., the coolant liquid in collecting tank can be broken through Walls, and prevent the foam of coolant liquid in collecting tank from steadily existing, thus have the function that defoaming.Therefore, this hair On the one hand the fluid infusion of bright embodiment and defoaming unit can provide replenisher to collecting tank, to keep the amount of the coolant liquid in collecting tank It, on the other hand can be by the design of spray hole to be sprayed to the impact force of liquid level using replenisher come to collection in required range Coolant liquid in liquid bath is defoamed.Therefore, the cooling system of the embodiment of the present invention can be greatly reduced or even save defoaming agent Dosage, and then the cost and defoaming agent that can reduce defoaming agent are to injury caused by environment.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the embodiment of the present invention, rather than to it Limitation;Although the embodiment of the present invention is described in detail referring to foregoing embodiments, those skilled in the art It is understood that it is still possible to modify the technical solutions described in the foregoing embodiments, either to part of or All technical features are equivalently replaced;And these are modified or replaceed, it does not separate the essence of the corresponding technical solution this hair The range of bright each embodiment technical solution.

Claims (10)

1. a kind of cooling system characterized by comprising
Tower body has air outlet and air intake vent;
Multiple radiating subassemblies are configured in the tower body and between the air outlet and the air intake vent;
Feed liquor unit connects the tower body to provide coolant liquid to the tower body, and the flow path of the coolant liquid passes through described Multiple radiating subassemblies;
Collecting tank connects the tower body, and the radiating subassembly is set between the feed liquor unit and the collecting tank, the collection Liquid bath is to collect the coolant liquid by the radiating subassembly;
Fan unit is set to the tower body, enters the tower body from the air intake vent with certain driving air-flow and flows through the multiple Radiating subassembly and the tower body is discharged from the air outlet;And
Fluid infusion and defoaming unit, connect the tower body and including catheter, the catheter is set to above the collecting tank simultaneously Including multiple spray holes, wherein angle between the axis direction and gravity direction of each spray hole between 20 degree to 60 degree it Between.
2. cooling system according to claim 1, the fluid infusion and defoaming unit connect replenisher source, via described more A spray hole provides replenisher to the collecting tank.
3. cooling system according to claim 1, the replenisher includes coolant liquid or defoaming agent.
4. cooling system according to claim 2, the replenisher is sprayed to the collecting tank via each spray hole Liquid level Spraying rates between 2.6m/s between 6m/s, to be defoamed to the liquid level.
5. cooling system according to claim 2, the aperture of each of the multiple spray hole is between 2mm to 3mm Between.
6. cooling system according to claim 1, the spacing of two neighboring spray hole is between 100mm between 260mm.
7. cooling system according to claim 1, the side wall for being axially parallel to the collecting tank of the catheter.
8. cooling system according to claim 1, the fan unit is set at the air outlet.
9. cooling system according to claim 1 further includes coolant line, it is connected to the feed liquor unit and the collection The coolant liquid is imported the tower body by the feed liquor unit, and the coolant liquid is exported by the collecting tank by liquid bath The tower body.
10. cooling system according to claim 9 further includes coolant line, the collecting tank further includes liquid outlet, even Lead to the coolant line, the coolant liquid collected by the collecting tank is discharged to the cooling via the liquid outlet Liquid pipeline.
CN201810220442.5A 2018-03-16 2018-03-16 Cooling system Pending CN110274489A (en)

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Application Number Priority Date Filing Date Title
CN202410227313.4A CN118089430A (en) 2018-03-16 2018-03-16 Cooling system
CN201810220442.5A CN110274489A (en) 2018-03-16 2018-03-16 Cooling system

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Application Number Priority Date Filing Date Title
CN201810220442.5A CN110274489A (en) 2018-03-16 2018-03-16 Cooling system

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Publications (1)

Publication Number Publication Date
CN110274489A true CN110274489A (en) 2019-09-24

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CN201810220442.5A Pending CN110274489A (en) 2018-03-16 2018-03-16 Cooling system

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5768191A (en) * 1980-10-17 1982-04-26 Mitsubishi Electric Corp Ozone treating device
CN101700930A (en) * 2009-10-21 2010-05-05 宁波市鄞州区绿州能源利用有限公司 Automatic spraying defoaming device for waste leachate treatment
CN201522202U (en) * 2009-11-10 2010-07-07 姜鉴明 Negative pressure cooling tower of combined type hydrodynamical/electric fan
CN203336990U (en) * 2013-05-22 2013-12-11 上海万享冷却设备有限公司 Splitting type transverse flow closed type cooling tower
CN203798195U (en) * 2014-04-29 2014-08-27 唐山三友集团兴达化纤有限公司 Cooling tower system device for processing defoaming circulating water

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5768191A (en) * 1980-10-17 1982-04-26 Mitsubishi Electric Corp Ozone treating device
CN101700930A (en) * 2009-10-21 2010-05-05 宁波市鄞州区绿州能源利用有限公司 Automatic spraying defoaming device for waste leachate treatment
CN201522202U (en) * 2009-11-10 2010-07-07 姜鉴明 Negative pressure cooling tower of combined type hydrodynamical/electric fan
CN203336990U (en) * 2013-05-22 2013-12-11 上海万享冷却设备有限公司 Splitting type transverse flow closed type cooling tower
CN203798195U (en) * 2014-04-29 2014-08-27 唐山三友集团兴达化纤有限公司 Cooling tower system device for processing defoaming circulating water

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