CN110241394A - A kind of alloy steel surface reinforcement method and steel alloy - Google Patents
A kind of alloy steel surface reinforcement method and steel alloy Download PDFInfo
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- CN110241394A CN110241394A CN201910636049.9A CN201910636049A CN110241394A CN 110241394 A CN110241394 A CN 110241394A CN 201910636049 A CN201910636049 A CN 201910636049A CN 110241394 A CN110241394 A CN 110241394A
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/04—Ferrous alloys, e.g. steel alloys containing manganese
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
- C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
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Abstract
The present invention provides a kind of alloy steel surface reinforcement methods, comprising: in a nitrogen atmosphere, first carries out primary ions injection to alloy steel substrate using Ti target, obtains ion implanting substrate；Secondary ion injection is carried out to the ion implanting substrate using Cr target again, completes the intensive treatment of alloy steel surface.Ceramic phase and surface that the present invention is formed using the distortion of lattice, the higher C concentration of alloy steel surface and the interionic alloying action of injection that generate during metal Ti and Cr compound ion implantation introduce the effect of compression, the hardness for improving low-carbon alloy steel surface, improves its wearability and anti-fatigue performance.The present invention also provides the steel alloys that a kind of method described in above-mentioned technical proposal is prepared.
Description
Technical field
The present invention relates to steel surface processing technology field more particularly to a kind of alloy steel surface reinforcement methods and alloy
Steel.
Background technique
The high speed development of modern science and technology, to the requirement day of metal material surface characteristics (wear-resistant, anticorrosive, antifatigue etc.)
Benefit improves, especially to high load capacity, high revolving speed, the urgent need of high life, high temperature resistant, low-loss metal components.Currently, wide
General metal surface treatment technology and technique (polishing, Brush Plating, composite electroless plating layer, thermal jet, laser table using latest developments
Surface strengthening, vapor deposition, plasma nitridation, carburizing, boronising and metal mending glue and film protection technique), although each
It plays an important role, but all has some disadvantages and limitation from field.
Low-carbon alloy steel has as engineering structure and machine components in fields such as automobile, machine-building, ship and chemical industry
Very extensive application.In mechanical equipment, the stress that most of components are born is mechanical periodicity.According to statistics, these zero
80% or more the damage of part is due to caused by fatigue fracture.Since the failure of metal material starts from superficial layer more, thus mention
For the surface property of high-alloy steel for increasing wearability, corrosion resistance, improving its fatigue life has highly important effect.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of alloy steel surface reinforcement methods and steel alloy, the present invention to mention
The surface reinforcing method of the steel alloy of confession makes the steel alloy obtained have good hardness, wearability and anti-fatigue performance.
The present invention provides a kind of alloy steel surface reinforcement methods, comprising:
In a nitrogen atmosphere, primary ions injection is first carried out to alloy steel substrate using Ti target, obtains ion implanting base
Material；
Secondary ion injection is carried out to the ion implanting substrate using Cr target again, at the reinforcing for completing alloy steel surface
Reason.
Preferably, the ingredient of the alloy steel substrate are as follows:
The C of 0.17~0.23wt%；
The Si of 0.17~0.37wt%；
The Mn of 0.3~0.6wt%；
The S of≤0.03wt%；
The P of≤0.03wt%；
The Cr of 1.25~1.65wt%；
The Ni of 3.25~3.65wt%；
Surplus is Fe.
Preferably, the surface roughness of the alloy steel substrate is 0.01~0.06 μm.
Preferably, vacuum degree >=10 of the primary ions injection4Pa；
Vacuum degree >=10 of the secondary ion injection4Pa。
Preferably, the acceleration voltage that Ti injects in the primary ions injection process is 48~52V.
Preferably, the implantation dosage that Ti injects in the primary ions injection process is 1.8 × 1017~2.2 ×
1017ion/cm2。
Preferably, the acceleration voltage that Cr injects in the secondary ion injection process is 48~52V.
Preferably, the implantation dosage that Cr injects in the secondary ion injection process is 1.8 × 1017~2.2 ×
1017ion/cm2。
Preferably, purity >=99% of the Ti target；Purity >=99% of the Cr target.
The present invention provides the steel alloys that a kind of method described in above-mentioned technical proposal is prepared.
The present invention first injects element ti, and Ti and nitrogen form ceramic layer, and intensity is high, and wear-resisting property is good；Cr is reinjected to be formed more
Add fine and close amorphous layer and more ceramic phases, further increases the wear-out life of alloy steel surface.The present invention passes through using high
Can ion pair alloy steel surface carry out ion implanting processing, the atom that ion bombardment will cause target material surface layer is subjected to displacement and again
New arrangement, and a large amount of interstitial atom is formed in substrate surface ion implanted layer, compression is generated around crystal, keeps matrix mutually brilliant
Interplanar distance increases, and generates distortion of lattice and forms new hardening constituent.The present invention utilizes metal Ti and Cr compound ion implantation process
The ceramic phase and surface that distortion of lattice, alloy steel surface and the interionic alloying action of injection of middle generation are formed are introduced and are pressed
The effect of stress improves the hardness of alloy steel surface, improves its wearability and anti-fatigue performance.The present invention carries out dual implant
Afterwards, material surface hardness improves 15%, and coefficient of friction reduces by 75%, and average abrasion volume reduces half or so, and surface property obtains
To improvement, while the problems such as the hardened layer that is formed of dual implant will not fall off failure.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is the scanning electron microscope (SEM) photograph for the steel alloy ion implanted layer that the embodiment of the present invention 1 carries out after surface peening；
Fig. 2 is that the embodiment of the present invention 1 carries out the steel alloy after surface peening and the steel alloy that does not carry out surface peening is micro-
Hardness distribution；
Fig. 3 is that the embodiment of the present invention 1 carries out the steel alloy after surface peening and do not carry out the XRD of the steel alloy of surface peening
Diffracting spectrum；
Fig. 4 is that the embodiment of the present invention 1 carries out the steel alloy after surface peening and do not carry out the steel alloy friction of surface peening
Coefficient test result；
Fig. 5 is that the embodiment of the present invention 1 carries out the steel alloy after surface peening and the steel alloy not being surface-treated abrasion
The test result of volume；
Fig. 6 is the PVvalue testing result that the embodiment of the present invention 2 and embodiment 3 carry out the steel alloy after surface peening；
Fig. 7 is the test result that the embodiment of the present invention 2 and embodiment 3 carry out the steel alloy wear volume after surface peening；
Fig. 8 is the PVvalue testing result for the steel alloy that comparative example 1~3 of the present invention carries out after surface peening；
Fig. 9 is the test result for the steel alloy wear volume that comparative example 1~3 of the present invention carries out after surface peening.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The present invention provides a kind of alloy steel surface reinforcement methods, comprising:
In a nitrogen atmosphere, primary ions injection is first carried out to alloy steel substrate using Ti target, obtains ion implanting base
Material；
Secondary ion injection is carried out to the ion implanting substrate using Cr target again, at the reinforcing for completing alloy steel surface
Reason.
The present invention first injects element ti, and Ti and nitrogen form ceramic layer, and intensity is high, and wear-resisting property is good；Cr is reinjected to be formed more
Add fine and close amorphous layer and more ceramic phases, further increases the wear-out life of alloy steel surface.
The present invention preferably carries out primary ions injection and secondary ion injection in ion implanting vacuum system, preferably by alloy
Steel substrate is placed on ion implanting vacuum system target disc central location, under vacuum conditions carry out primary ions injection and it is secondary from
Son injection；The vacuum degree of the vacuum is preferably >=104Pa, more preferably 2~4 × 104Pa, more preferably 3 × 104Pa.In this hair
In bright, the primary ions are infused in nitrogen atmosphere and carry out；The secondary ion injection carries out preferably in nitrogen atmosphere.
The Ti target of the injection needed for preferably using argon purge before carrying out primary ions injection and secondary ion injection
With Cr target, the time of the cleaning is preferably 3~10min, more preferably 4~8min, most preferably 5~6min.
In the present invention, during primary ions injection and secondary ion injection, preferred energetic ions incident side
To perpendicular to steel alloy substrate surface to guarantee the smallest surface sputtering amount.
In the present invention, the acceleration voltage that Ti injects in the primary ions injection process is preferably 48~52V, more preferably
For 50V；Implantation dosage is preferably 1.8 × 1017~2.2 × 1017ion/cm2, more preferably 2.0 × 1017ion/cm2；Ti target
Purity preferably >=99%.
In the present invention, after the completion of primary ions injection preferably by obtained ion implanting substrate cleaned again into
The injection of row secondary ion；The method of the cleaning is preferably cleaned by ultrasonic.
In the present invention, the acceleration voltage that Cr injects in the secondary ion injection process is preferably 48~52V, more preferably
For 50V；Implantation dosage is preferably 1.8 × 1017~2.2 × 1017ion/cm2, more preferably 2.0 × 1017ion/cm2；Cr target
Purity preferably >=99%.
The present invention preferably uses above-mentioned acceleration voltage and note in carrying out primary ions injection and secondary ion injection process
Enter dosage, steel alloy can be made to obtain better surface peening effect using acceleration voltage provided by the invention and implantation dosage.
The present invention does not have special limitation, those skilled in the art to type, ingredient and the source of the alloy steel substrate
The steel alloy using heterogeneity can be selected according to actual needs, and the steel alloy using ingredient known to those skilled in the art is
It can.In the present invention, the alloy steel substrate is preferably low-carbon alloy steel, more preferably the steel alloy of 20Cr2Ni4A ingredient；Institute
The ingredient for stating alloy steel substrate is preferred are as follows:
The C of 0.17~0.23wt%；
The Si of 0.17~0.37wt%；
The Mn of 0.3~0.6wt%；
The S of≤0.03wt%；
The P of≤0.03wt%；
The Cr of 1.25~1.65wt%；
The Ni of 3.25~3.65wt%；
Surplus is Fe.
In the present invention, the mass content of the carbon is preferably 0.19~0.21%, and more preferably 0.2%；The Si's
Mass content is preferably 0.2~0.3%, and more preferably 0.23~0.27%, most preferably 0.25%；The mass content of the Mn
Preferably 0.4~0.5%, more preferably 0.45%；The mass content of the S preferably≤0.02%, more preferably≤0.01%；Institute
State P mass content preferably≤0.02%, more preferably≤0.01%；The mass content of the Cr is preferably 1.3~1.6%, more
Preferably 1.4~1.5%；The mass content of the Ni is preferably 3.3~3.6%, and more preferably 3.4~3.5%.
In the present invention, the surface roughness of the alloy steel substrate is preferably 0.01~0.06 μm, more preferably 0.02
~0.05 μm, most preferably 0.03~0.04 μm；Present invention preferably employs sand paper to polish smooth steel alloy substrate surface to general
Logical mirror effect, makes it obtain above-mentioned roughness.
Before carrying out ion implanting, the present invention preferably cleans the alloy steel substrate, to guarantee to ion implanting
Steel alloy substrate surface cleaning.In the present invention, the method for the cleaning is preferably super cleaning, is more preferably repeated
First it is cleaned by ultrasonic using acetone, then is cleaned using EtOH Sonicate, the time of the acetone ultrasonic cleaning is preferably 4~6min, more
Preferably 5min；The time of the EtOH Sonicate cleaning is preferably 4~6min, more preferably 5min, the EtOH Sonicate cleaning
Preferably dehydrated alcohol is cleaned by ultrasonic, and the number repeatedly is preferably 2~3 times；It will preferably obtain after the completion of the cleaning
Product drying.
The present invention also provides a kind of steel alloy, the steel alloy is alloy steel surface reinforcement described in above-mentioned technical proposal
The steel alloy that method is prepared, the present invention repeat no more the method for the alloy steel surface reinforcement.In the present invention, described
Alloy steel surface contains implanted layer, and the implanted layer is the surface layer containing Ti and Cr element in steel alloy.In the present invention, institute
The thickness for stating implanted layer is preferably 60~100 μm, more preferably 70~90 μm, most preferably 80 μm.
In the present invention, ion implanting is carried out under normal-temperature vacuum, is not in thermal deformation, material by modified material
Material surface does not have residual impurity and oxide skin, and the original dimensional accuracy of basis material and surface roughness are unaffected, nothing
Secondary reparation need to be carried out to material, meet the processing request of high-accuracy mechanical structure parts, can also introduced in matrix surface beneficial
Compression.The present invention carries out Ion Implantation Strengthening in alloy steel surface, can be improved its surface property and anti-fatigue performance.
For the present invention by carrying out ion implanting processing to alloy steel surface using energetic ion, ion bombardment will cause target
The atom of superficial layer is subjected to displacement and rearranges, and forms a large amount of interstitial atom, crystal in substrate surface ion implanted layer
Surrounding generates compression, increases matrix phase interplanar distance, generates the distortion of lattice hardening constituent new with formation.
The present invention uses Ti+Cr dual implant to alloy steel surface, first injects Ti ion, then carries out secondary Cr ion note
Enter, form the ceramic phase for having that hardness is high, coefficient of friction is low, introduce compression, improves anti-fatigue performance.
For adhesiveness generally existing in traditional paint-on technique, not strong, easy to fall off and thermal expansion coefficient mismatches the present invention
The problems such as, one layer of modified layer is formed in metal surface using ion implantation technique, is not between modified layer and basis material
Apparent interface, avoids holiday caused by existing because of interface, and modified layer and basis material show good knot
Close intensity.
The present invention utilizes distortion of lattice, alloy steel surface and the injection generated during metal Ti and Cr compound ion implantation
Ceramic phase and surface that interionic alloying action is formed introduce the effect of compression, improve the hardness of alloy steel surface,
Improve its wearability and anti-fatigue performance.After the present invention carries out dual implant, material surface hardness improves 15%, coefficient of friction
75% is reduced, average abrasion volume reduces half or so, and surface property is improved, while the hardened layer that dual implant is formed
The problems such as will not fall off failure.
Alloy steel substrate used in following embodiment of the present invention is 20Cr2Ni4A steel alloy, is provided for Iron and Steel Research Geueral Institute
Product；Used ion implanting vacuum system is the 50 type MEVVA that Beijing Normal University's Nuclear Science and Technology institute provides
Source ion implanter.
Embodiment 1
Steel alloy substrate surface is polished smooth to common mirror effect, 0.01~0.06 μ of roughness requirements using sand paper
M, the alloy steel substrate after being polished；
5min is cleaned by ultrasonic to the alloy steel substrate after polishing using acetone repeatedly, dehydrated alcohol is cleaned by ultrasonic 5min, instead
It is 2~3 times multiple, guarantee the cleaning to ion implanting surface, dries up spare；
Alloy steel substrate after above-mentioned cleaning is placed in ion implanting vacuum system target disc central location and is evacuated to work
Make state, the vacuum level requirements of vacuum system are 3 × 104Pa, using injection element ti and Cr target 3 needed for argon purge~
10min first carries out ion implanting processing, in ion implantation process, energetic ions incident side using Ti target in a nitrogen atmosphere
Guarantee its smallest surface sputtering amount to perpendicular to steel alloy substrate surface, the acceleration voltage of Ti injection is 50Kv, implantation dosage
It is 2 × 1017ion/cm2, after the completion of purity >=99%, Ti injection of Ti target, alloy steel substrate is taken out, to the base after injection Ti
Material is cleaned by ultrasonic；
Then secondary ion injection, ion in a nitrogen atmosphere, then using substrate of the Cr target to above-mentioned injection Ti are carried out
In injection process, energetic ions incident direction guarantees its smallest surface sputtering amount, Cr injection perpendicular to steel alloy substrate surface
Acceleration voltage be 50Kv, implantation dosage be 2 × 1017ion/cm2, complete steel alloy substrate surface compound ion implantation it is strong
Change.
The tissue of the steel alloy implanted layer after surface peening is observed using Nova NanoSEM450 type scanning electron microscope
Pattern, as shown in Figure 1, as shown in Figure 1, the injection layer tissue of the steel alloy for the surface peening that method provided by the invention obtains produces
Raw apparent crystal grain refinement, thickness is about 80 μm.
The section hardness of steel alloy surface implant layer is measured using TH702 type microhardness tester and is not surface-treated
Alloy steel substrate hardness distribution, test load is 1000g, and testing result is as shown in Figure 2.
Surface peening is not carried out to the alloy steel surface after surface peening and using BRUCKER D8X x ray diffractometer x
Alloy steel substrate carries out X-ray diffraction detection, and using continuous sweep method, scanning speed is 7 °/min, and scanning range is 15~
It 90 °, is moved right to determine in ion implanting relative to X-ray diffraction spectrum before injecting by X-ray diffraction spectrum after ion implanting
The compression that face introduces, and material phase analysis is carried out to alloy steel surface, testing result is as shown in figure 3, from the figure 3, it may be seen that the present invention
The surface reinforcing method of offer, in the new Ti-N ceramic phase of steel alloy Surface Creation, to greatly improve steel alloy superficial layer
Hardness and wear-resisting property.
Using reciprocating friction and wear testing machine (CETR-UMT-5, Bruker) to the steel alloy after surface peening and not into
The alloy steel matrix of row surface peening carries out tribological test, obtains its coefficient of friction, testing result is as shown in figure 4, can by Fig. 4
Know, due to the abrasion of surface oxide layer and adsorption layer, the coefficient of friction for not carrying out the alloy steel matrix of surface peening increases sharply
It is then held essentially constant to about 0.85；Coefficient of friction of the steel alloy in 225s after intensive treatment is basically stable at 0.2, far
Lower than alloy steel matrix, 0.6 or so is rapidly increased to after 225s.Using three-dimensional white light interference contourgraph (nexview,
Syklamda abrasion loss (carrying out abrasion loss when tribological test 300s)) is measured, testing result is as shown in figure 5, can by Fig. 5
Know, the minimal wear amount of the steel alloy after intensive treatment reaches 0.649 × 105μm3, do not carry out the steel alloy of intensive treatment about
The abrasion loss (1.235 × 10 of substrate5μm3) half, the steel alloy of the Ion Implantation Strengthening of method provided by the invention preparation is resistance to
Mill property greatly improves, and wear-out life significantly extends, and can be obviously improved the wearability of steel alloy.
Embodiment 2
Steel alloy substrate surface is polished smooth to common mirror effect, 0.01~0.06 μ of roughness requirements using sand paper
M, the alloy steel substrate after being polished；
5min is cleaned by ultrasonic to the alloy steel substrate after polishing using acetone repeatedly, dehydrated alcohol is cleaned by ultrasonic 5min, instead
It is 2~3 times multiple, guarantee the cleaning to ion implanting surface, dries up spare；
Alloy steel substrate after above-mentioned cleaning is placed in ion implanting vacuum system target disc central location and is evacuated to work
Make state, the vacuum level requirements of vacuum system are 3 × 104Pa, using injection element ti and Cr target 3 needed for argon purge~
10min first carries out ion implanting processing, in ion implantation process, energetic ions incident side using Ti target in a nitrogen atmosphere
Guarantee its smallest surface sputtering amount to perpendicular to steel alloy substrate surface, the acceleration voltage of Ti injection is 48Kv, implantation dosage
It is 1.8 × 1017ion/cm2, after the completion of purity >=99%, Ti injection of Ti target, alloy steel substrate is taken out, after injection Ti
Substrate is cleaned by ultrasonic；
Then secondary ion injection, ion in a nitrogen atmosphere, then using substrate of the Cr target to above-mentioned injection Ti are carried out
In injection process, energetic ions incident direction guarantees its smallest surface sputtering amount, Cr injection perpendicular to steel alloy substrate surface
Acceleration voltage be 48Kv, implantation dosage be 1.8 × 1017ion/cm2, complete steel alloy substrate surface compound ion implantation it is strong
Change.
According to the method for embodiment 1, the steel alloy after the surface treatment embodiment of the present invention 2 being prepared carries out performance
Detection, testing result is as shown in Figure 6 and Figure 7, coefficient of friction average out to of the steel alloy after carrying out intensive treatment in 200s
0.5,0.65 is then increased to, abrasion loss is 0.891 × 105μm3。
Embodiment 3
Steel alloy substrate surface is polished smooth to common mirror effect, 0.01~0.06 μ of roughness requirements using sand paper
M, the alloy steel substrate after being polished；
5min is cleaned by ultrasonic to the alloy steel substrate after polishing using acetone repeatedly, dehydrated alcohol is cleaned by ultrasonic 5min, instead
It is 2~3 times multiple, guarantee the cleaning to ion implanting surface, dries up spare；
Alloy steel substrate after above-mentioned cleaning is placed in ion implanting vacuum system target disc central location and is evacuated to work
Make state, the vacuum level requirements of vacuum system are 3 × 104Pa, using injection element ti and Cr target 3 needed for argon purge~
10min first carries out ion implanting processing, in ion implantation process, energetic ions incident side using Ti target in a nitrogen atmosphere
Guarantee its smallest surface sputtering amount to perpendicular to steel alloy substrate surface, the acceleration voltage of Ti injection is 52Kv, implantation dosage
It is 2.2 × 1017ion/cm2, after the completion of purity >=99%, Ti injection of Ti target, alloy steel substrate is taken out, after injection Ti
Substrate is cleaned by ultrasonic；
Then secondary ion injection, ion in a nitrogen atmosphere, then using substrate of the Cr target to above-mentioned injection Ti are carried out
In injection process, energetic ions incident direction guarantees its smallest surface sputtering amount, Cr injection perpendicular to steel alloy substrate surface
Acceleration voltage be 52Kv, implantation dosage be 2.2 × 1017ion/cm2, complete steel alloy substrate surface compound ion implantation it is strong
Change.
According to the method for embodiment 1, the steel alloy after the surface treatment embodiment of the present invention 3 being prepared carries out performance
Detection, testing result is as shown in Figure 6 and Figure 7, coefficient of friction average out to of the steel alloy after carrying out intensive treatment in 240s
0.3,0.5 is then increased to, abrasion loss is 0.758 × 105μm3。
Comparative example 1
Steel alloy substrate surface is polished smooth to common mirror effect, 0.01~0.06 μ of roughness requirements using sand paper
M, the alloy steel substrate after being polished；
5min is cleaned by ultrasonic to the alloy steel substrate after polishing using acetone repeatedly, dehydrated alcohol is cleaned by ultrasonic 5min, instead
It is 2~3 times multiple, guarantee the cleaning to ion implanting surface, dries up spare；
Alloy steel substrate after above-mentioned cleaning is placed in ion implanting vacuum system target disc central location and is evacuated to work
Make state, the vacuum level requirements of vacuum system are 3 × 104Pa, using needed for argon purge inject 3~10min of element ti target,
In a nitrogen atmosphere, ion implanting processing is carried out using Ti target, in ion implantation process, energetic ions incident direction perpendicular to
Steel alloy substrate surface guarantees its smallest surface sputtering amount, and the acceleration voltage of Ti injection is 52Kv, implantation dosage is 4 ×
1017ion/cm2, after the completion of purity >=99%, Ti injection of Ti target, alloy steel substrate is taken out, steel alloy substrate surface is completed
Compound ion implantation strengthen.
According to the method for embodiment 1, the steel alloy after surface treatment comparative example 1 of the present invention being prepared carries out performance
Detection, testing result is as shown in Figure 8 and Figure 9, coefficient of friction average out to of the steel alloy after carrying out intensive treatment in 150s
0.5, then fluctuation rises to 0.7, and abrasion loss is 0.985 × 105μm3。
Comparative example 2
Steel alloy substrate surface is polished smooth to common mirror effect, 0.01~0.06 μ of roughness requirements using sand paper
M, the alloy steel substrate after being polished；
5min is cleaned by ultrasonic to the alloy steel substrate after polishing using acetone repeatedly, dehydrated alcohol is cleaned by ultrasonic 5min, instead
It is 2~3 times multiple, guarantee the cleaning to ion implanting surface, dries up spare；
Alloy steel substrate after above-mentioned cleaning is placed in ion implanting vacuum system target disc central location and is evacuated to work
Make state, the vacuum level requirements of vacuum system are 3 × 104Pa, using needed for argon purge inject 3~10min of element Cr target,
In a nitrogen atmosphere, ion implanting processing is carried out using Cr target, in ion implantation process, energetic ions incident direction perpendicular to
Steel alloy substrate surface guarantees its smallest surface sputtering amount, and the acceleration voltage of Cr injection is 52Kv, implantation dosage is 4 ×
1017ion/cm2, after the completion of purity >=99%, Cr injection of Cr target, alloy steel substrate is taken out, steel alloy substrate surface is completed
Compound ion implantation strengthen.
According to the method for embodiment 1, the steel alloy after surface treatment comparative example 2 of the present invention being prepared carries out performance
Detection, testing result is as shown in Figure 8 and Figure 9, and the steel alloy after intensive treatment is linearly increasing to about 0.7 in 40s coefficient of internal friction,
It is then held essentially constant, abrasion loss is 1.122 × 105μm3。
Comparative example 3
Steel alloy substrate surface is polished smooth to common mirror effect, 0.01~0.06 μ of roughness requirements using sand paper
M, the alloy steel substrate after being polished；
5min is cleaned by ultrasonic to the alloy steel substrate after polishing using acetone repeatedly, dehydrated alcohol is cleaned by ultrasonic 5min, instead
It is 2~3 times multiple, guarantee the cleaning to ion implanting surface, dries up spare；
Alloy steel substrate after above-mentioned cleaning is placed in ion implanting vacuum system target disc central location and is evacuated to work
Make state, the vacuum level requirements of vacuum system are 3 × 104Pa, using injection element ti and Cr target 3 needed for argon purge~
10min first carries out ion implanting processing, in ion implantation process, energetic ions incident side using Cr target in a nitrogen atmosphere
Guarantee its smallest surface sputtering amount to perpendicular to steel alloy substrate surface, the acceleration voltage of Cr injection is 50Kv, implantation dosage
It is 2 × 1017ion/cm2, after the completion of Cr injection, alloy steel substrate is taken out, the substrate after injection Cr is cleaned by ultrasonic；
Then secondary ion injection, ion in a nitrogen atmosphere, then using substrate of the Ti target to above-mentioned injection Cr are carried out
In injection process, energetic ions incident direction guarantees its smallest surface sputtering amount, Ti injection perpendicular to steel alloy substrate surface
Acceleration voltage be 50Kv, implantation dosage be 2 × 1017ion/cm2, complete steel alloy substrate surface compound ion implantation it is strong
Change.
According to the method for embodiment 1, the steel alloy after surface treatment comparative example 3 of the present invention being prepared carries out performance
Detection, testing result is as shown in Figure 8 and Figure 9, and the steel alloy after intensive treatment is protected after 15s coefficient of internal friction increases to about 0.4
It holds constant, finally increases to 0.6, abrasion loss is 0.773 × 105μm3。
As seen from the above embodiment, the present invention provides a kind of alloy steel surface reinforcement methods, comprising: in nitrogen atmosphere
Under, primary ions injection is first carried out to alloy steel substrate using Ti target, obtains ion implanting substrate；Again using Cr target to institute
It states ion implanting substrate and carries out secondary ion injection, complete the intensive treatment of alloy steel surface.The present invention utilizes metal Ti and Cr
The distortion of lattice of generation, the higher C concentration of alloy steel surface are turned into interionic alloy is injected during compound ion implantation
The effect that compression is introduced with the ceramic phase of formation and surface, improves the hardness of low-carbon alloy steel surface, improves its wearability
With anti-fatigue performance.
Claims (10)
1. a kind of alloy steel surface reinforcement method, comprising:
In a nitrogen atmosphere, primary ions injection is first carried out to alloy steel substrate using Ti target, obtains ion implanting substrate；
Secondary ion injection is carried out to the ion implanting substrate using Cr target again, completes the intensive treatment of alloy steel surface.
2. the method according to claim 1, wherein the ingredient of the alloy steel substrate are as follows:
The C of 0.17~0.23wt%；
The Si of 0.17~0.37wt%；
The Mn of 0.3~0.6wt%；
The S of≤0.03wt%；
The P of≤0.03wt%；
The Cr of 1.25~1.65wt%；
The Ni of 3.25~3.65wt%；
Surplus is Fe.
3. the method according to claim 1, wherein the surface roughness of the alloy steel substrate be 0.01~
0.06μm。
4. the method according to claim 1, wherein vacuum degree >=10 of primary ions injection4Pa；
Vacuum degree >=10 of the secondary ion injection4Pa。
5. the method according to claim 1, wherein the acceleration electricity that Ti injects in the primary ions injection process
Pressure is 48~52V.
6. the method according to claim 1, wherein the injectant that Ti injects in the primary ions injection process
Amount is 1.8 × 1017~2.2 × 1017ion/cm2。
7. the method according to claim 1, wherein the acceleration electricity that Cr injects in the secondary ion injection process
Pressure is 48~52V.
8. the method according to claim 1, wherein the injectant that Cr injects in the secondary ion injection process
Amount is 1.8 × 1017~2.2 × 1017ion/cm2。
9. the method according to claim 1, wherein purity >=99% of the Ti target；The Cr target
Purity >=99%.
10. a kind of steel alloy that method described in claim 1 is prepared.
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|---|---|---|---|---|
| JPH04224670A (en) * | 1990-12-25 | 1992-08-13 | Nissin Electric Co Ltd | Corrosion resisting metallic material |
| CN1161384A (en) * | 1997-01-15 | 1997-10-08 | 核工业西南物理研究院 | Tech. for surface modification to easy-wear parts of machines for drilling or oil prodn. used in oil field |
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| CN104145320A (en) * | 2013-02-12 | 2014-11-12 | 苹果公司 | Multi-step ion implantation |
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| JPH04224670A (en) * | 1990-12-25 | 1992-08-13 | Nissin Electric Co Ltd | Corrosion resisting metallic material |
| CN1161384A (en) * | 1997-01-15 | 1997-10-08 | 核工业西南物理研究院 | Tech. for surface modification to easy-wear parts of machines for drilling or oil prodn. used in oil field |
| CN1676663A (en) * | 2004-12-01 | 2005-10-05 | 深圳国家863计划材料表面工程技术研究开发中心 | Single MEVVA ion source diffusion coating composite treating process |
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