CN110231288B - Compact and stable optical path air chamber - Google Patents
Compact and stable optical path air chamber Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 76
- 239000000835 fiber Substances 0.000 claims description 9
- 238000002839 fiber optic waveguide Methods 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 abstract description 18
- 238000013519 translation Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 28
- 238000004458 analytical method Methods 0.000 description 10
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010183 spectrum analysis Methods 0.000 description 3
- 230000014616 translation Effects 0.000 description 2
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The invention provides a compact and stable optical path gas chamber, which adopts a confocal optical system consisting of a concave mirror, a plane mirror and a collimating mirror, can obtain an output beam with the same size and angle as an input beam at an output end, and under the conditions of temperature and stress change and vibration, the position, angle and size of the output beam cannot be influenced by the translation and angle change of the concave mirror relative to the plane mirror, and the optical path is stable, thereby meeting the application requirement of an optical path gas chamber taking an optical fiber waveguide as an input end and an output end.
Description
Technical Field
The invention relates to an optical path gas chamber in the field of optical sensing, in particular to an optical path gas chamber which is used for gas optical sensing, adopts optical fibers as an input end and an output end, has compact optical path and is insensitive to temperature and stress change and vibration.
Background
In a limited volume, multiple reflection of light beams is realized, so that the light beams can travel through a relatively long optical path, and the optical device has important application in the field of optical sensing, particularly the sensing and analysis field of special gases.
At present, semiconductor tunable laser absorption spectrum analysis (TDLAS for short) and Fourier transform infrared spectrum analysis (FTIR for short) are two main technical routes, wherein the TDLAS is mainly used for performing spectrum analysis in a near infrared band based on tunable laser, and the FTIR is used for performing spectrum analysis in middle and far infrared bands by Fourier transform through a wide-spectrum light source.
In order to achieve sufficient detection accuracy, both TDLAS and FTIR require an optical path gas cell to allow the beam to transmit sufficient optical path within the desired analysis gas to enhance the absorption lines, and in order to keep the volume of the detection instrument within an acceptable range, the optical path gas cell needs to take the form of an optical path folding device to reflect the beam as many times as possible within a limited volume to achieve sufficient optical path.
For TDLAS application, because the divergence angle of the laser beam is small, the herriott cell structure (APPLIED OPTICS/vol.3, No.4/April 1964) is commonly used in the industry, as shown in fig. 1, the herriott cell 100 uses two concave mirrors 103, 104 with the same focal length f to form a reflective cavity, and when the incident direction and position of the input light beam at the input end 101 and the distance d of the two concave mirrors along the z direction satisfy certain conditions (generally, the defocusing configuration is set such that 0 < d < 2f or 2f < d < 4 f), the light beam will be reflected back and forth multiple times at the two concave mirrors, and finally output from the output end 102. Fig. 2 shows two concave mirrors 203, 204 with reflection points forming a circular spot trajectory 201 in the x-y plane. From the optical path analysis it can be seen that the output position of the final spot is related to the relative position and angle of the two concave mirrors 103, 104.
For FTIR applications, the beam divergence is Large and the performance of the herriott cell cannot be met due to the incoherent configuration characteristics required for the source, which results from the incoherent beam divergence after multiple reflections by the defocusing system, the conventional White cell structure (White, j.u. "Long Optical Paths of Large Aperture" j.opt.soc.am., vol.32, pp285-288, May 1942) is commonly used in the industry, as shown in fig. 3, where the White cell 300 is composed of three concave mirrors with the same radius of curvature and focal length f, the primary mirror 301 is located on one side, the two secondary mirrors 302, 303 are located on the opposite side of the primary mirror, and the input beam 304 and the output beam 305 are located on both sides of the primary mirror. The two secondary reflectors have a certain inclination angle, the distance between the main reflector and the two secondary reflectors is set to be 2f, so that light beams are reflected and imaged for multiple times back and forth on the main reflector and the two secondary reflectors and finally output from one side of the main reflector. The locus of the spot on the primary mirror is shown in fig. 4, and typically the input beam position 404 is offset from the axis 402 of the primary mirror 401 so that the spots are distributed over two rows of loci 403,406 for maximum reflection. The output beam position 405 is generally on the other side of the trajectory 406 from the input beam. The output beam position is related to the beam separation of the traces 406, and it can be seen from the optical path analysis that the relative position and angle of the two secondary mirrors 302, 303 has the greatest effect on the output beam position.
It can be seen that the herriott cell and the white cell have the problem of optical path stability, and the change of the relative position and angle between the reflecting mirrors caused by temperature and stress changes, vibration and other factors can cause the change of the position of the output light beam, so that the light energy received by the output end is unstable. Therefore, in application, the herriott cell and the white cell generally adopt a free space light source for direct input, and a large-area light detector is adopted at an output end, so that the influence of the position change of an output light beam on the energy of the output light is eliminated.
In industrial application, optical fiber waveguides such as optical fibers are needed to be used as input and output ends of a sensing gas chamber to facilitate connection between a light source and the gas chamber and between the gas chamber and a light detector, the optical fibers can be pulled far, the sensing gas chamber is placed at a far end to realize distributed optical fiber detection, and a pure passive optical sensing gas chamber is used in dangerous and explosive occasions. Because the core diameter of the optical fiber is small, the single-mode optical fiber is about 10 micrometers, the multimode optical fiber is about tens of micrometers, and the micron-scale change of the position of the output light beam can cause huge change of the light energy of the output end. Thus, the hurriett cell and the white cell do not solve the stability problem when using optical fibers as input and output terminals.
Disclosure of Invention
The invention provides a corresponding technical solution aiming at the requirement of the industry on an optical path air chamber with compact structure and high stability, in particular to an optical path air chamber which can be suitable for taking an optical fiber waveguide as an input end and an output end.
As shown in fig. 5, the present invention provides a compact and stable optical path gas cell 500 comprising:
an input terminal 501 for inputting a light beam;
an output end 502 for outputting a light beam;
a collimating mirror 505 for collimating the light beam inputted from the input end and condensing the collimated light beam to the output end, and having a first focal plane 510 and a second focal plane 511;
a plane mirror 504;
a concave mirror 503 having a primary focal plane 506, the distance 507 from the primary focal plane to the concave mirror being the focal length of the concave mirror, shown as f in FIG. 5; the plane mirror is located on the main focal plane 506, the main focal plane further has an origin 509, which is an intersection point of a main optical axis 508 of an optical system composed of the plane mirror and the concave mirror;
the input end 501 and the output end 502 are located on the same side of the collimating mirror 505, and the collimating mirror 505 is eccentrically arranged relative to the origin 509;
the light beam is input from the input end, becomes a collimated light beam after passing through the collimating mirror, is reflected for multiple times between the concave reflecting mirror and the plane reflecting mirror, finally reaches the collimating mirror again, and is focused to the output end through the collimating mirror to be output;
the input end and the output end are positioned on a first focal plane of the collimating mirror, and the plane mirror is positioned on a second focal plane of the collimating mirror;
light rays parallel to the main optical axis are focused on a first focal plane through the collimating lens to form a central point 512, and the input end and the output end are symmetrically arranged around the central point.
In a specific implementation, the collimator is one of a transmissive or reflective collimator, and when a reflective collimator is used, an off-axis parabolic mirror may further be used to reduce aberrations.
In a specific implementation, the input end and the output end can adopt optical fiber waveguides to facilitate the optical connection between the light source to the gas chamber and the gas chamber to the light detector. Further, the input end and the output end can share one optical fiber waveguide, and the position of the optical fiber waveguide is coincided with the central point, so that the output light beam is reversely transmitted relative to the input light beam in the optical fiber waveguide.
The principle that a light beam is input into the optical path gas chamber from the input end, reflected multiple times in the optical path gas chamber, and finally output from the output end is further described with reference to fig. 6. Fig. 6 shows a collimator mirror 505, an input beam position 601, an output beam position 605, beam positions 602, 603, and 604 formed by multiple reflections, and their relative relationship with respect to an origin 509, at a primary focal plane 506. On the main focal plane 506, which is also the second focal plane 511 of the collimator lens 505, the order of arrival of the light beams is 601- > 602- > 603- > 604- > 605, and due to the use of the confocal optical system, 601 and 603 are symmetrical with respect to the origin 509, 602 and 604 are symmetrical with respect to the origin 509, and 605 and 603 are symmetrical with respect to the origin 509; position 602 is dependent on the angle of the collimated input beam with respect to the primary optical axis of the system, and can be arbitrarily chosen within the effective aperture of the plane mirror. Since 605 and 601 and 603 are both symmetrical with respect to the origin 509, the 605 and 601 positions coincide, i.e. 511 on the second focal plane of the collimator mirror 505, the input and output beam positions coincide regardless of the positions of 602 and 604.
Further optical path analysis shows that when the output light beam reaches the collimating mirror, the angle of the output light beam and the angle of the input light beam after being collimated are symmetrical relative to the main optical axis of the system, after the output light beam is focused by the collimating mirror, the position of the output light beam on the first focal plane of the collimating mirror is symmetrical relative to the central point with respect to the position of the input end, and the output light beam is received and output by the output end because the output end is symmetrically arranged relative to the input end about the central point. Further analysis has shown that due to the nature of the confocal optical system, the beams at even positions 602 and 604 have the same spot size and the beams at odd positions 601, 603 and 605 have the same spot size, although the spot sizes of the beams at even and odd positions are generally different, but the input and output positions are the same as at odd positions and the output and input beams have the same size. The above characteristics make the output and input light beams have the same spot size and incident angle at the input and output ends, and are particularly suitable for lossless input and output of light beams by using two same optical fiber waveguides as the input and output ends.
The off-center placement of the collimator 505 relative to the origin 509 causes the beam positions 601 and 603 to also be off-center relative to the origin 509, so that a complete path of the beam from 601 through 602, 603, 604 to 605 is achieved. When the collimator mirror 505 is set at the position of the origin 509, 603 overlaps with 601, and the light beam is incident on the collimator mirror halfway, so that the complete path from 601 to 605 cannot be completed.
Further referring to fig. 7, it is illustrated that the solution provided by the present invention has the characteristic of being insensitive to temperature and stress variations and vibrations. In the case of temperature and stress changes and vibrations, the concave mirror 503 may produce small translations and angular changes with respect to the plane mirror, equivalent in terms of optical system to the change of the position of the origin 509 to the new origin position 5091 of fig. 7, and accordingly, on the main focal plane 506, the beam position 602 changes to 6021, the beam position 603 changes to 6031, and the beam position 604 changes to 6041; since the input beam position 601 and the output beam position 605 are still symmetrical to the beam position 6031 with respect to the new origin position 5091, regardless of the positions of 6031 and 5091, the output beam coincides with the collimated input beam position before the collimating mirror 505, and their angles are symmetrical with respect to the main optical axis and have the same spot size, so that the position and angle at which the output beam reaches the output end after being focused by the collimating mirror 505 are unchanged, the spot size is unchanged, and the optical path is very stable.
The above analysis shows that the solution provided by the present invention can obtain an output light beam with the same size and angle as the input light beam on the output end while having a compact light path, and even under the conditions of temperature and stress variation and vibration, the position, angle and size of the output light beam are not affected by the translation and angle variation of the concave reflecting mirror relative to the plane mirror, and the light path is stable, thereby satisfying the application requirement of the optical path gas chamber of the optical fiber waveguide as the input and output ends.
Drawings
FIG. 1 is a schematic diagram of a Herriott cell of the prior art
FIG. 2 is a prior art chart of spot trajectories for reflection points from a Herriott cell
FIG. 3 is a schematic diagram of a white room in the prior art
FIG. 4 is a light beam reflection point spot trace plot for a white room in the prior art
FIG. 5 is a schematic diagram of an optical path gas cell according to the present invention
FIG. 6 shows the relationship of the beam position on the primary focal plane of the optical path gas cell provided by the present invention
FIG. 7 optical path gas cell stability analysis provided by the present invention
FIG. 8 optical path gas cell example 2 according to the present invention
FIG. 9 optical path gas cell example 3 provided by the invention
Detailed Description
[ example 1]
As shown in fig. 5, the present invention provides a compact and stable optical path gas cell 500, comprising:
an input terminal 501 for inputting a light beam;
an output end 502 for outputting a light beam;
a collimating mirror 505 for collimating the light beam inputted from the input end and condensing the collimated light beam to the output end, and having a first focal plane 510 and a second focal plane 511;
a plane mirror 504;
a concave mirror 503 having a primary focal plane 506, the distance 507 from the primary focal plane to the concave mirror being the focal length of the concave mirror, shown as f in FIG. 5; the plane mirror is located on the main focal plane 506, the main focal plane further has an origin 509, which is an intersection point of a main optical axis 508 of an optical system composed of the plane mirror and the concave mirror;
the input end and the output end are positioned at the same side of the collimating mirror; the collimating mirror 505 is eccentrically arranged relative to the origin 509;
the light beam is input from the input end, becomes a collimated light beam after passing through the collimating mirror, is reflected for multiple times between the concave reflecting mirror and the plane reflecting mirror, finally reaches the collimating mirror again, and is focused to the output end to output the light beam through the collimating mirror;
the input end and the output end are positioned on a first focal plane of the collimating mirror, and the plane mirror is positioned on a second focal plane of the collimating mirror;
light rays parallel to the main optical axis are focused on a first focal plane through the collimating lens to form a central point 512, and the input end and the output end are symmetrically arranged around the central point.
In this embodiment, the input end 501 and the output end 502 are fiber waveguides, which may be one of single mode or multimode fibers; the collimator 505 is a transmission type collimator, and a conventional spherical or aspherical collimator, or a self-focusing collimator is used.
The process of inputting light beams into the optical path gas chamber through the input end, reflecting the light beams in the optical path gas chamber for multiple times and finally focusing the light beams to the output end is described with reference to fig. 5 and 6. The light beam is input through the fiber waveguide 501, and becomes a collimated light beam after passing through the transmission type collimating mirror 505, the position on the main focal plane 506 is 601, the position on the main focal plane 506 after being reflected by the concave mirror is 602, and the position on the main focal plane 506 after being reflected by the planar mirror and the concave mirror again is 603. Due to the nature of the confocal optical system, the beam positions 603 and 601 will be symmetric about the origin 509; the beam is reflected by the plane mirror at position 603, reflected again by the concave mirror, and reaches position 604 on the main focal plane 506, and due to the characteristics of the confocal optical system, the beam positions 604 and 602 will be symmetrical about the origin 509; the beam, after being reflected by the plane mirror at position 604 and the concave mirror again, reaches position 605 on the main focal plane 506, and due to the characteristics of the confocal optical system, the beam positions 605 and 603 will be symmetrical about the origin 509; since 605 and 601 and 603 are both symmetrical with respect to the origin 509, the 605 and 601 positions coincide, i.e. the input and output beam positions coincide regardless of the 602 and 604 positions, in the second focal plane of the collimator mirror 505.
Due to the characteristics of the confocal optical system, when the output light beam reaches the collimating mirror 505, the output light beam and the collimated input light beam have the same size, and the angle of the output light beam and the angle of the collimated input light beam after the input light beam reaches the collimating mirror 505 are symmetrical relative to the main optical axis of the optical system.
Meanwhile, the change of the angle and position of the main concave mirror 503 relative to the plane mirror 504 only affects the change of the beam positions 602, 603 and 604 and the origin 509, the position 605, angle and spot size of the output beam do not change, the optical path system is insensitive to the change of temperature and stress and vibration, and the optical path is very stable, thereby meeting the application requirement of the optical path gas chamber of the optical fiber waveguide as the input and output end.
[ example 2]
This embodiment is similar to embodiment 1, and as shown in fig. 8, differs from embodiment 1 in that a transmission type collimator 505 in embodiment 1 is replaced with a reflection type collimator, and in a preferable case, a 90-degree off-axis parabolic reflector is used. Meanwhile, the positions of the input and output terminals are rotated by 90 degrees with respect to the position of embodiment 1. The collimating lens adopts a reflection type, so that the use of a transmission type collimating lens is avoided, and the loss and the device processing difficulty can be reduced in specific wavelength such as ultraviolet application.
[ example 3]
This embodiment is similar to embodiment 1, and is shown in fig. 9, except that the input end 501 and the output end 502 share a fiber waveguide, and the position of the fiber waveguide is coincident with the position of the center point 512, so that the input light beam is collimated by the collimating mirror 505 and then parallel to the main optical axis 508 of the optical system, and still complete the complete trajectory of the light beam position from 601- > 602- > 603- > 604- > 605 on the focal plane shown in fig. 6, except that the positions 602 and 604 are coincident with the origin 509. The trajectory of the beam in the gas cell is reversible, starting from position 603 and returning along the original path and exiting from the output end fiber waveguide-also the input end fiber waveguide. An optical circulator or an optical splitter is typically used at the distal end of the fiber waveguide to separate the input and output beams to feed the returned beam to a photodetector for spectral analysis.
Claims (7)
1. A compact and stable optical path gas cell, comprising:
an input end for inputting a light beam;
an output for outputting a light beam;
a collimating lens for collimating the light beam inputted from said input end and focusing the collimated light beam to said output end and outputting it, and having first and second focal planes;
a plane mirror;
a concave reflector having a primary focal plane, the distance from the primary focal plane to the concave reflector being the focal length of the concave reflector; the plane mirror is positioned on the main focal plane; the main focal plane also has an origin which is the intersection point of the main optical axis of the optical system formed by the plane reflector and the concave reflector;
the input end and the output end are positioned at the same side of the collimating mirror; the collimating mirror is eccentrically arranged relative to the origin;
the light beam is input from the input end, becomes a collimated light beam after passing through the collimating mirror, is reflected for multiple times between the concave reflecting mirror and the plane reflecting mirror, finally reaches the collimating mirror again, and is focused to the output end through the collimating mirror to be output.
2. A compact and stable optical path gas cell as defined by claim 1 wherein said input and output ends are located at a first focal plane of said collimating mirror and said plane mirror is located at a second focal plane of said collimating mirror.
3. A compact and stable optical path gas cell as defined by claim 1 wherein light rays parallel to said primary optical axis are focused by said collimating mirror onto a first focal plane to form a central point, said input and output ends being symmetrically disposed about said central point.
4. A compact and stable optical path gas cell according to claim 1, wherein said collimating mirror is one of a transmissive or reflective collimating mirror.
5. A compact and stable optical path gas cell as claimed in claim 4, wherein said reflective collimating mirror is an off-axis parabolic mirror.
6. A compact and stable optical path gas cell according to claim 3, wherein said input and output ends are fiber optic waveguides.
7. A compact and stable optical path gas cell as defined in claim 6 wherein said input and output ends share a fiber waveguide positioned at said central point.
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| CN111148986B (en) * | 2019-12-20 | 2023-02-10 | 徐州旭海光电科技有限公司 | Compact sensing device |
| CN113484266B (en) * | 2021-05-28 | 2023-01-17 | 汉威科技集团股份有限公司 | Optical path multiplying device and optical path multiplying gas absorption cell |
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| EP2610659A1 (en) * | 2011-12-27 | 2013-07-03 | Huawei Technologies Co., Ltd. | Optical path coupling device, optical path coupling apparatus and optical path coupling method |
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| JPS5666735A (en) * | 1979-11-05 | 1981-06-05 | Anritsu Corp | Gas cell with long optical path |
| GB0213326D0 (en) * | 2002-06-11 | 2002-07-24 | Edinburgh Instr | Gas sensors |
| KR100576541B1 (en) * | 2005-06-16 | 2006-05-03 | (주) 인바이런먼트 리딩 테크놀러지 | Optical cavity for ndir gas sensor |
| US8018981B2 (en) * | 2006-04-12 | 2011-09-13 | Li-Cor, Inc. | Multi-pass optical cell with actuator for actuating a reflective surface |
| CN201269853Y (en) * | 2008-10-09 | 2009-07-08 | 聚光科技（杭州）有限公司 | Gas analysis device applying ICOS technique |
| JP5474576B2 (en) * | 2009-01-14 | 2014-04-16 | ギガフォトン株式会社 | LASER OPTICAL AMPLIFIER AND LASER DEVICE USING THE SAME |
| CN102004283B (en) * | 2009-09-02 | 2012-05-23 | 中国科学院半导体研究所 | Optical fiber coupling White cavity |
| JP2016212197A (en) * | 2015-05-01 | 2016-12-15 | キヤノン株式会社 | Catoptric system and astronomical observation device using the same |
| CN106959271B (en) * | 2016-01-12 | 2023-06-09 | 江苏旭海光电科技有限公司 | Long optical path air chamber with stable packaging structure |
| CN105739104A (en) * | 2016-05-10 | 2016-07-06 | 力合科技（湖南）股份有限公司 | Multi-beam coupling device and detection air chamber |
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| EP2610659A1 (en) * | 2011-12-27 | 2013-07-03 | Huawei Technologies Co., Ltd. | Optical path coupling device, optical path coupling apparatus and optical path coupling method |
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Address after: No.99, Xuhai Road, Xuzhou Economic and Technological Development Zone, Xuzhou City, Jiangsu Province, 221004 Patentee after: Jiangsu Xuhai Photoelectric Technology Co.,Ltd. Address before: No.99, Xuhai Road, Xuzhou Economic and Technological Development Zone, Xuzhou City, Jiangsu Province, 221004 Patentee before: XUZHOU XUHAI OPTO-ELECTRONIC TECHNOLOGIES Co.,Ltd. |
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Denomination of invention: A compact and stable optical path chamber Granted publication date: 20220408 Pledgee: Bank of Nanjing Co.,Ltd. Xuzhou Branch Pledgor: Jiangsu Xuhai Photoelectric Technology Co.,Ltd. Registration number: Y2024980011287 |