CN110220981B - Positioning instrument for ultrasonic scanning microscope - Google Patents
Positioning instrument for ultrasonic scanning microscope Download PDFInfo
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- CN110220981B CN110220981B CN201910527740.3A CN201910527740A CN110220981B CN 110220981 B CN110220981 B CN 110220981B CN 201910527740 A CN201910527740 A CN 201910527740A CN 110220981 B CN110220981 B CN 110220981B
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/225—Supports, positioning or alignment in moving situation
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- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention relates to a positioning instrument for an ultrasonic scanning microscope, which comprises an objective table, an information acquisition component, a clamping component and a controller, wherein the objective table is arranged in a water tank of the ultrasonic scanning microscope, the information acquisition component is used for acquiring position information of a detected object on the objective table, the clamping component is used for fixing the information acquisition component right above the detected object, and the information acquisition component is electrically connected with the controller, so that the information acquisition component can acquire horizontal position information and vertical position information of the detected object on the objective table and transmit the acquired horizontal position information and vertical position information to the controller, and the accuracy of probe position adjustment is greatly improved so as to avoid collision between a probe and the detected object.
Description
Technical Field
The invention relates to the technical field of ultrasonic scanning microscopes, in particular to a positioning instrument for an ultrasonic scanning microscope.
Background
The SAM 301 high-end type and SAM 401 high-end type of the PVA ultrasonic scanning microscope can be arbitrarily input or selected in a frame mode; meanwhile, the scanning of the self-defined sequence can be realized, and blank positions without samples are skipped; the center position of the sample to be detected and the edge size of the sample can be automatically searched, and the scanning range is automatically set; the software can display the X/Y/Z three-dimensional coordinates of the probe in the water tank and the currently set scanning range; the Z-axis automatic focusing not only can automatically focus on the surface of a sample, but also can automatically focus any interface inside the sample; the step-by-step automatic focusing can set the step distance, and the Z-axis probe starts to scan upwards from the bottom of the sample layer by layer according to the step distance. But the cost of implementing these functions is high.
The PVA ultrasonic scanning microscope AM 300 basically does not have the function of automatically searching the center position of a measured sample and the edge size of the sample, a software interface can display the X/Y/Z three-dimensional coordinate of the probe in a water tank and the currently set scanning range, a user needs to observe the relative positions of the probe and the measured object and the related parameters displayed by the software interface back and forth between the measured object and a computer, and the related preparation work before scanning is carried out by repeated operation; moreover, the Z axis can not automatically focus, and the problem that a user can not accurately know the distance between the upper surface of the measured object and the probe exists, and the probe is easy to touch the object or scratch and damage during focusing.
Disclosure of Invention
The invention aims to solve the technical problem that the Z-axis can not be automatically focused in the prior art, and provides a positioning instrument for an ultrasonic scanning microscope, which can realize rapid positioning in the horizontal direction.
The technical scheme adopted for solving the technical problems is as follows: a positioner for an ultrasonic scanning microscope is constructed.
The positioning instrument for the ultrasonic scanning microscope comprises an objective table, an information acquisition component, a clamping component and a controller, wherein the objective table is arranged in a water tank of the ultrasonic scanning microscope, the information acquisition component is used for acquiring position information of a measured object on the objective table, the clamping component is used for fixing the information acquisition component right above the measured object, and the information acquisition component is electrically connected with the controller.
In the positioning instrument for the ultrasonic scanning microscope, scale marks are arranged on the objective table and correspond to the scale marks in the water tank one by one.
In the positioning device for the ultrasonic scanning microscope, the information acquisition component comprises a camera and a laser range finder, wherein the camera and the laser range finder are connected with the clamping component, the camera is used for acquiring an image of a measured object on the objective table, and the laser range finder is used for measuring the vertical distance between the upper surface of the measured object and the laser range finder.
In the positioning instrument for the ultrasonic scanning microscope, the clamping assembly comprises a first main pin shaft, a first connecting piece, a second connecting piece, a first clamp and a second clamp, wherein the first main pin shaft, the first connecting piece, the second connecting piece, the first clamp and the second clamp are connected with the first main pin shaft in a pin joint mode, the first clamp is fixedly connected with the first connecting piece, the second clamp is fixedly connected with the second connecting piece, the first clamp is used for clamping the camera, and the second clamp is used for clamping the laser range finder.
In the positioning instrument for an ultrasonic scanning microscope, the first connecting piece comprises a first main rod which is in pin joint with the first main pin shaft and a second main rod which is in pin joint with the first main rod, and the second main rod is fixedly connected with the first clamp.
In the positioning instrument for the ultrasonic scanning microscope, the first clamp is formed by sequentially connecting three first clamping pieces in a pin joint mode, each first clamping piece comprises two first screw rods and a first threaded pipe, and two ends of each first threaded pipe are respectively connected with threaded parts of the two first screw rods in a threaded mode.
In the positioning instrument for an ultrasonic scanning microscope, the second connecting piece comprises a second main pin shaft which is in pin joint with the first main pin shaft, a third main rod which is in pin joint with the second main pin shaft, and a fourth main rod which is in pin joint with the third main rod, and the fourth main rod is fixedly connected with the second clamp.
In the positioning instrument for the ultrasonic scanning microscope, the second clamp is formed by sequentially connecting three second clamping pieces in a pin joint mode, each second clamping piece comprises two second screw rods and a second threaded pipe, and two ends of each second clamping piece are respectively connected with the threaded parts of the two second screw rods in a threaded mode.
In the positioning instrument for the ultrasonic scanning microscope, the controller comprises an operation interface, and the operation interface is provided with a first button for controlling the camera to acquire images, a second button for controlling the laser range finder to measure and calculate the distance, a third button for reading the horizontal position information of the measured object on the objective table, a fourth button for recovering the horizontal position of the probe, a coordinate value area for displaying the horizontal coordinate value and the vertical coordinate value of the measured object, and a calibration value input area for inputting the calibration distance between the probe and the laser range finder.
The positioning instrument for the ultrasonic scanning microscope has the following beneficial effects:
The invention discloses a positioning instrument for an ultrasonic scanning microscope, which comprises an objective table, an information acquisition component, a clamping component and a controller, wherein the objective table is arranged in a water tank of the ultrasonic scanning microscope, the information acquisition component is used for acquiring position information of a detected object on the objective table, the clamping component is used for fixing the information acquisition component right above the detected object, and the information acquisition component is electrically connected with the controller, so that the information acquisition component can acquire horizontal position information and vertical position information of the detected object on the objective table and transmit the acquired horizontal position information and vertical position information to the controller, and the accuracy of probe position adjustment is greatly improved, so that the probe and the detected object are prevented from collision.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a schematic view of a positioning apparatus for an ultrasonic scanning microscope according to the present invention;
Wherein, the reference numerals in fig. 1 are:
1. A water tank; 2. an objective table; 3. a first main pin shaft; 4. a first main lever; 5. a second main lever; 6. a first screw; 7. a first threaded pipe; 8. the second main pin shaft; 9. a third main lever; 10. a fourth boom; 11. a second screw; 12. and a second threaded pipe.
Detailed Description
For a clearer understanding of technical features, objects and effects of the present invention, a detailed description of embodiments of the present invention will be made with reference to the accompanying drawings.
As shown in fig. 1, the positioning apparatus for an ultrasonic scanning microscope according to the present invention includes an objective table 2 disposed in a water tank 1 of the ultrasonic scanning microscope, an information acquisition assembly, a clamping assembly, and a controller, wherein the information acquisition assembly is used for acquiring position information of a measured object on the objective table 2, the clamping assembly is used for fixing the information acquisition assembly directly above the measured object, and the information acquisition assembly is electrically connected with the controller, so that horizontal position information and vertical position information of the measured object located on the objective table 2 can be acquired by the information acquisition assembly, and the acquired horizontal position information and vertical position information can be transmitted to the controller, so that accurate position information of the measured object can be acquired, and accuracy of probe position adjustment is greatly improved, so as to avoid collision between the probe and the measured object.
In the positioning instrument for the ultrasonic scanning microscope, the scale marks are arranged on the objective table 2 and correspond to the scale marks in the water tank one by one, so that the accuracy of the horizontal position information of the measured object is improved.
In the present invention, the scale lines are formed on the stage 2 by pasting or painting, and are in one-to-one correspondence with the X/Y coordinate lines in the water tank 1.
In the positioning device for an ultrasonic scanning microscope, the information acquisition component comprises a camera and a laser range finder, wherein the camera and the laser range finder are connected with the clamping component, the camera and the laser range finder are electrically connected with the controller, the camera is used for acquiring the whole image of the object to be measured and the object stage, which are positioned on the object stage 2, and the laser range finder is used for measuring the vertical distance between the upper surface of the object to be measured and the laser range finder.
When the device works, the controller controls the camera to collect images of the detected object, the collected images are transmitted to the controller, and the controller calculates the horizontal position of the detected object, namely coordinate values of the detected object in the X direction and the Y direction according to the received images; and the controller can control the probe of the ultrasonic scanning microscope to move to the position right above the measured object at one time according to the calculated coordinate values of the X direction and the Y direction.
In the positioning instrument for an ultrasonic scanning microscope, the clamping assembly comprises a first main pin shaft 3, a first connecting piece, a second connecting piece, a first clamp and a second clamp which are spliced with the water tank, the first connecting piece and the second connecting piece are in pin joint with the first main pin shaft 3, the first clamp is fixedly connected with the first connecting piece, the second clamp is fixedly connected with the second connecting piece, the first clamp is used for clamping the camera, and the second clamp is used for clamping the laser range finder.
In order to facilitate the connection of the first main pin shaft 3 to the water tank 1, an inserting groove is formed in the top of the water tank 1, and only the first main pin shaft 3 is required to be inserted into the inserting groove, so that the connection is convenient; moreover, as the first connecting piece and the second connecting piece are both in pin joint with the first main pin shaft 3, the first connecting piece and the second connecting piece can be rotated according to the position of a measured object on the objective table 2 so as to adjust the positions of the camera and the laser range finder, and the application range of the camera and the laser range finder is greatly improved.
In the positioning apparatus for an ultrasonic scanning microscope according to the present invention, the first connector includes a first main bar 4 that is pin-connected with the first main pin 3, and a second main bar 5 that is pin-connected with the first main bar 4, and the second main bar 5 is fixedly connected with the first jig.
In the positioning instrument for an ultrasonic scanning microscope, the first clamp is formed by sequentially connecting three first clamping pieces in a pin joint mode, each first clamping piece comprises two first screw rods 6 and a first threaded pipe 7, and two ends of each first threaded pipe 7 are respectively connected with threaded parts of the two first screw rods 6 in a threaded mode.
When specifically arranged, each first screw rod 6 comprises a pin joint end and a threaded part fixedly connected with the pin joint end.
The first clamp is formed by connecting three first clamping pieces end to end, so that the first clamp is of an equilateral triangle structure, and the stability of the clamped camera is greatly improved; when the camera is required to be clamped during operation, the three first threaded pipes 7 are unscrewed, the camera is placed between the three first threaded pipes 7, and then the three first threaded pipes 7 are screwed.
In the positioning apparatus for an ultrasonic scanning microscope according to the present invention, the second connector includes a second main pin 8 pin-connected to the first main pin 3, a third main rod 9 pin-connected to the second main pin 8, and a fourth main rod 10 pin-connected to the third main rod 9, and the fourth main rod 10 is fixedly connected to the second jig.
In the positioning device for an ultrasonic scanning microscope, the second clamp is formed by sequentially connecting three second clamping pieces in a pin joint mode, each second clamping piece comprises two second screw rods 11 and a second threaded pipe 12, and two ends of each second threaded pipe 12 are respectively connected with threaded parts of the two second screw rods 11 in a threaded mode.
When specifically arranged, the second screw 11 includes a pin joint portion and a threaded portion fixedly connected with the pin joint portion.
The second clamp is formed by connecting three second clamping pieces end to end, so that the second clamp is of an equilateral triangle structure, and the stability of the laser range finder after clamping is greatly improved; when the laser range finder is required to be clamped in operation, the three second threaded pipes 12 are unscrewed, the laser range finder is placed between the three second threaded pipes 12, and then the three second threaded pipes 12 are screwed.
In the present invention, the first boom 4, the second boom 5, the third boom 9, and the fourth boom 10 have the same structure; the first threaded pipe 7 and the second threaded pipe 12 have the same structure; the first screw 6 and the second screw 11 have the same structure.
In the positioning instrument for an ultrasonic scanning microscope, the controller comprises an operation interface, and the operation interface is provided with a first button for controlling the camera to acquire images, a second button for controlling the laser range finder to perform distance measurement, a third button for reading horizontal position information of a measured object on the objective table 2, a fourth button for recovering the horizontal position of the probe, a coordinate value area for displaying horizontal coordinate values and vertical coordinate values of the measured object, and a calibration value input area for inputting the calibration distance between the probe and the laser range finder.
The operation interface is not limited to the first button, the second button, the third button, the coordinate value area, the calibration value input area, and the like.
When the positioning device for an ultrasonic scanning microscope is mounted on the water tank 1, the distance between the laser distance meter and the bottom of the water tank 1 will change, so that after the positioning device for an ultrasonic scanning microscope is mounted each time, the distance between the laser distance meter and the probe needs to be calibrated, and the specific method for calibrating is as follows:
(1) The vertical distance between the laser range finder and the bottom of the water tank 1 (denoted as a) is measured first, and the vertical distance between the probe and the bottom of the water tank 1 (denoted as B) can be displayed on the operation interface.
(2) The controller calculates the distance (marked as C) between the laser range finder and the probe according to A and B, and the specific calculation method is as follows: if a > B, c=a-B; if ase:Sub>A < B, c=b-ase:Sub>A.
(3) Measuring a vertical distance (denoted as D) between the laser range finder and the upper surface of the measured object;
(4) The controller calculates the vertical distance (marked as E) between the upper surface of the detected object and the probe according to A, B, C and D, and displays the value on the operation interface, and the calculation mode of E is as follows: if a > B, e=d-C; if a < B, e=c+d.
(5) Calculating to obtain the vertical coordinate value of the upper surface of the measured object and displaying the coordinate value to the coordinate value area of the measured object.
In the invention, the function process of the positioning instrument for the ultrasonic scanning microscope is as follows:
(1) The object to be measured is placed on the stage 2, and the first boom 4 and the second boom 5 are rotated so that the camera is positioned substantially directly above the object to be measured.
(2) And rotating the third main rod 9 and the fourth main rod 10 to enable the laser range finder to be located right above the measured object, then pressing a second button on the operation interface, namely obtaining the vertical distance between the probe and the upper surface of the measured object according to the vertical distance between the laser range finder and the upper surface of the measured object, displaying the vertical distance between the probe and the upper surface of the measured object to the calibration value input area, and then calculating the vertical coordinate value of the upper surface of the measured object by the controller and displaying the coordinate value to the measured object coordinate value area on the operation interface.
(3) Pressing a first button on the operation interface, the camera will collect images of the detected object and the object stage 2, the operation interface will pop up a new window to display the image collected by the camera, then pressing a third button on the operation interface, the controller will read the coordinate values of the detected object in the X direction and the Y direction and display the coordinate values in the coordinate value area, and when the coordinate values of the detected object in the X direction and the coordinate values of the detected object in the Y direction are input into the numerical value area for controlling the moving position of the probe on the operation interface, the controller can control the probe to move to the position right above the detected object at one time.
(4) The vertical distance between the probe and the upper surface of the measured object can be adjusted by the vertical coordinate value of the probe and taking the reservation of a proper gap into consideration, so as to move the probe to a desired position.
(5) When the probe moves to a desired position, carrying out ultrasonic scanning on a tested piece; after the scanning is finished, the probe can be restored to the last horizontal position by pressing the fourth button on the operation interface, so that the probe can be moved to the position where the user wants to perform the experiment, the problem that the user needs to observe the object to be tested and the operation interface back and forth in the experiment process is avoided, the time is saved, the data are accurate, and the experiment efficiency is greatly improved.
The embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present invention and the scope of the claims, which are to be protected by the present invention.
Claims (5)
1. A locator for an ultrasonic scanning microscope, characterized by: the ultrasonic scanning microscope comprises an objective table, an information acquisition component, a clamping component and a controller, wherein the objective table is arranged in a water tank of the ultrasonic scanning microscope, the information acquisition component is used for acquiring position information of an object to be detected on the objective table, the clamping component is used for fixing the information acquisition component right above the object to be detected, and the information acquisition component is electrically connected with the controller;
The object stage is provided with scale marks, and the scale marks are in one-to-one correspondence with the scale marks in the water tank;
The information acquisition assembly comprises a camera and a laser range finder, wherein the camera and the laser range finder are connected with the clamping assembly, the camera and the laser range finder are electrically connected with the controller, the camera is used for acquiring an image of an object to be measured on the objective table, and the laser range finder is used for measuring the vertical distance between the upper surface of the object to be measured and the laser range finder;
The clamping assembly comprises a first main pin shaft, a first connecting piece, a second connecting piece, a first clamp and a second clamp which are spliced with the water tank, the first connecting piece and the second connecting piece are both in pin joint with the first main pin shaft, the first connecting piece and the second connecting piece are rotated according to the position of a measured object on the objective table so as to adjust the positions of the camera and the laser range finder, the first clamp is fixedly connected with the first connecting piece, the second clamp is fixedly connected with the second connecting piece, the first clamp is used for clamping the camera, and the second clamp is used for clamping the laser range finder;
The controller comprises an operation interface, wherein a first button for controlling the camera to acquire images, a second button for controlling the laser range finder to measure and calculate the distance, a third button for reading the horizontal position information of a measured object on the object stage, a fourth button for recovering the horizontal position of the probe, a coordinate value area for displaying the horizontal coordinate value and the vertical coordinate value of the measured object, and a calibration value input area for inputting the calibration distance between the probe and the laser range finder are arranged on the operation interface;
The controller calculates a vertical coordinate value of the upper surface of the measured object and displays the vertical coordinate value to a measured object coordinate value area on the operation interface; the controller controls the camera to collect images of the detected object and transmits the collected images to the controller, the controller calculates coordinate values of the detected object in the horizontal position, namely the X direction and the Y direction of the detected object according to the received images, the controller reads the coordinate values of the detected object in the X direction and the Y direction and displays the coordinate values of the X direction and the Y direction into the coordinate value area, and when the coordinate values of the detected object in the X direction and the coordinate values of the Y direction are input into the numerical value area for controlling the moving position of the probe on the operation interface, the controller controls the probe to move right above the detected object at one time; adjusting the vertical distance between the probe and the upper surface of the measured object by the vertical coordinate value of the probe and reserving a proper gap so as to move the probe to a desired position; and when the probe moves to a desired position, carrying out ultrasonic scanning on the detected object, and after the scanning is finished, pressing a fourth button on the operation interface to enable the probe to return to the last horizontal position so as to enable the probe to move to the position where the experiment is carried out.
2. The positioner for an ultrasonic scanning microscope as in claim 1, wherein: the first connecting piece comprises a first main rod which is in pin joint with the first main pin shaft, and a second main rod which is in pin joint with the first main rod, and the second main rod is fixedly connected with the first clamp.
3. The positioner for an ultrasonic scanning microscope as in claim 2, wherein: the first clamp is formed by sequentially connecting three first clamping pieces in a head-to-tail pin joint mode, each first clamping piece comprises two first screw rods and a first threaded pipe, and two ends of each first threaded pipe are respectively connected with threaded parts of the two first screw rods in a threaded mode.
4. The positioner for an ultrasonic scanning microscope as in claim 1, wherein: the second connecting piece comprises a second main pin shaft which is in pin joint with the first main pin shaft, a third main rod which is in pin joint with the second main pin shaft, and a fourth main rod which is in pin joint with the third main rod, and the fourth main rod is fixedly connected with the second clamp.
5. The positioner for an ultrasonic scanning microscope as in claim 4, wherein: the second clamp is formed by sequentially connecting three second clamping pieces in a head-to-tail pin joint mode, each second clamping piece comprises two second screw rods and a second threaded pipe, and two ends of each second clamping piece are respectively connected with threaded parts of the two second screw rods in a threaded mode.
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CN111102925A (en) * | 2019-12-31 | 2020-05-05 | 苏州浩智博智能科技有限公司 | Optical detection cooperation robot |
CN113466339B (en) * | 2021-06-18 | 2024-02-09 | 之江实验室 | Global focusing method and device of ultrasonic scanning microscope combined with depth camera |
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CN102854250A (en) * | 2011-06-28 | 2013-01-02 | 上海华碧检测技术有限公司 | Scanning mode of ultrasonic scanning microscope |
CN104777234A (en) * | 2015-04-03 | 2015-07-15 | 上海和伍新材料科技有限公司 | Device and method for ultrasonic probe positioning by utilizing camera |
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JP2881702B2 (en) * | 1990-08-14 | 1999-04-12 | 日立建機株式会社 | Ultrasound imaging device focusing method and ultrasonic imaging device using this method |
AU4039701A (en) * | 2000-03-27 | 2001-10-08 | Roman Buchler | Measuring microscope |
JP4111902B2 (en) * | 2003-09-30 | 2008-07-02 | 日立Geニュークリア・エナジー株式会社 | Automatic inspection system |
CN106691377A (en) * | 2016-12-15 | 2017-05-24 | 哈尔滨工业大学(威海) | Photoacoustic microimaging adaptive scanning system and method |
CN108872399B (en) * | 2018-08-08 | 2023-12-26 | 武汉工程大学 | Positioning system and method for ultrasonic scanning microscope |
CN208636260U (en) * | 2018-08-08 | 2019-03-22 | 武汉工程大学 | One kind being used for the microscopical positioning system of ultrasonic scanning |
CN210604518U (en) * | 2019-06-18 | 2020-05-22 | 武汉工程大学 | Locator for ultrasonic scanning microscope |
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CN102854250A (en) * | 2011-06-28 | 2013-01-02 | 上海华碧检测技术有限公司 | Scanning mode of ultrasonic scanning microscope |
CN104777234A (en) * | 2015-04-03 | 2015-07-15 | 上海和伍新材料科技有限公司 | Device and method for ultrasonic probe positioning by utilizing camera |
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