CN110217367B - Surface acoustic wave drive-based micro propeller moving in liquid and preparation method thereof - Google Patents
Surface acoustic wave drive-based micro propeller moving in liquid and preparation method thereof Download PDFInfo
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- CN110217367B CN110217367B CN201910393688.7A CN201910393688A CN110217367B CN 110217367 B CN110217367 B CN 110217367B CN 201910393688 A CN201910393688 A CN 201910393688A CN 110217367 B CN110217367 B CN 110217367B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B63—SHIPS OR OTHER WATERBORNE VESSELS; RELATED EQUIPMENT
- B63H—MARINE PROPULSION OR STEERING
- B63H1/00—Propulsive elements directly acting on water
- B63H1/30—Propulsive elements directly acting on water of non-rotary type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B63—SHIPS OR OTHER WATERBORNE VESSELS; RELATED EQUIPMENT
- B63H—MARINE PROPULSION OR STEERING
- B63H21/00—Use of propulsion power plant or units on vessels
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Abstract
A micro-thruster for moving in liquid based on surface acoustic wave drive, comprising: the acoustic surface wave device comprises a piezoelectric substrate and an interdigital transducer deposited on the piezoelectric substrate, and the working frequency is 10-600 MHz; the signal source is connected with the surface acoustic wave device in a wired mode and used for exciting the surface acoustic wave device to generate surface acoustic waves; and the propelling carrier is used for carrying the surface acoustic wave device, so that the included angle between the surface direction of the surface acoustic wave device and the normal direction of the liquid surface, namely the inclined angle is 10-30 degrees. The micro propeller in the liquid can generate certain driving force to drive the carrier to move. Also discloses a preparation method of the acoustic microfluidic-based micro-propeller in liquid.
Description
Technical Field
The invention belongs to the field of micro propellers moving in liquid, and particularly relates to a micro propeller moving in liquid based on surface acoustic wave driving and a preparation method thereof.
Background
In recent years, the propulsion system in liquid has attracted extensive research interest in the scientific research field and the industrial field, which benefits from the important application potential in the fields of military, aviation, biomedicine and the like, and has promoted various novel drivers in liquid, such as a miniature underwater driver, an underwater soft body robot, a self-driven actuator and the like. Taking the medical field as an example, the 2009 article "Piezoelectric ultrasonic resistant motor with a stator diameter less than 250 μm" published by Watson B et al in JMicromech Microeng "reported a miniature motile robot that can be used for minimally invasive surgery and endoscopy. These propulsion systems are usually driven by rotary propellers based on principles covering electrostatic fields, electromagnetic fields, piezoelectricity, osmotic pressure, thermal drive, etc. However, the miniaturization of these propulsion systems is complex and faces many technical challenges, especially when there are higher demands on the precise control of the power and direction of the drive.
Self-powered propulsion systems are an important direction towards miniaturization. So-called self-drive, i.e. the propulsion system does not have a rotary propeller driven by an electric motor, but the self-drive is achieved by modifying the material or the principle of the drive. The conventional propulsion system driven by a motor (i.e. including moving parts) considers various problems such as friction, heat dissipation, power loss, etc., which makes the physical size of the propulsion system difficult to be small, and how to develop the propulsion system without moving parts is one of the hot spots under study. Fast-moving soft electronic fish published by the li-iron wind team at SCIENCE ADVANCES, 2017, 4 and 5 days, Zhejiang university, "Fast-moving soft electronic fish" reports a rapidly movable soft robotic fish that is self-propelled and moves in a liquid at speeds of up to 6.4cm/s by using a stimulus-responsive material. However, the soft robotic fish has a complex manufacturing process and is difficult to precisely control the moving direction.
The surface acoustic wave device has wide application in the fields of mobile communication and sensors, and in recent years, the surface acoustic wave device also has great attraction in the field of microfluidics, which benefits from the advantages of small size, low price, simple process, wireless and passive work and the like of the surface acoustic wave device. By depositing the interdigital transducer on the piezoelectric substrate and applying alternating signals at two ends of the interdigital electrode, surface acoustic waves can be generated on the surface of the piezoelectric substrate due to the inverse piezoelectric effect. When the piezoelectric substrate has liquid on the surface, the propagating surface acoustic wave is coupled into the liquid when meeting the liquid. Acoustic energy decays rapidly in the liquid and the lost energy is converted into mechanical vibrations and internal energy of the liquid, forming a flow of liquid within the liquid, a phenomenon known as sonomicrofluidization. The sound-induced microflow effect has rich application in the field of microfluidics, and can realize functions of mixing, separating, spraying, jetting, pumping and the like. In the solid-liquid interface of the surface acoustic wave device, when the refraction angle of the sound wave is 23 degrees, the sound-induced microflow is called Rayleigh microflow, and the solid-liquid coupling efficiency is high at the moment. In 2013, 2 months, Yannyk Bourquin et al, manchester university, uk, on PLOS ONE, demonstrated an efficient propulsion method using microelectronics to generate SAW for driving by local fluid flow. This technique provides propulsion without any moving parts and can be driven under silent conditions. When the interdigital transducers of the surface acoustic wave device are designed in different ways through experiments, SAW in different directions can be excited, so that the traveling direction can be controlled simply. The invention takes the paper as a theoretical basis, utilizes Rayleigh microflow effect, fixes the surface acoustic wave device at the tail of a carrier such as a light plastic boat and the like at a certain angle, and expands the environment in which the boat can travel into liquid with various viscosities. When the device is pushed, part of the length of the device extends into liquid in a carrying mode; when a signal source excites a surface acoustic wave device to work through a power amplifier, the surface acoustic wave generates sound pressure on liquid due to the acoustic microfluidic effect, and the boat moves forwards under the action of a reaction force. Based on the principle, the invention analyzes the influence factors influencing the propelling movement of the surface acoustic wave device in different liquids through experiments, pays attention to and optimizes the carrying mode of the SAW device on the propeller, the surface contact angle of the SAW device, the signal supply and power amplification of a signal source, the material selection and size design of the SAW device, provides the micro propeller driven by the surface acoustic wave and moving in the liquid and the preparation method thereof, and shows part of the most preferable schemes.
Disclosure of Invention
The invention aims to provide a micro-thruster driven by surface acoustic waves and moving in liquid, wherein the micro-thruster in the liquid can generate certain driving force to drive a carrier to move.
In order to achieve the above object, the present invention provides the following solutions:
a micro-thruster for acoustic microfluidic based motion in a liquid, comprising:
the acoustic surface wave device comprises a piezoelectric substrate and an interdigital transducer deposited on the piezoelectric substrate, and the working frequency is 10-600 MHz;
the signal source is connected with the surface acoustic wave device in a wired mode and used for exciting the surface acoustic wave device to generate surface acoustic waves;
and the propelling carrier is used for carrying the surface acoustic wave device, so that the included angle between the surface direction of the surface acoustic wave device and the normal direction of the liquid surface, namely the inclined angle is 10-30 degrees.
When the acoustic surface wave micro-flow device is used, a driving carrier floats on liquid, a part of the acoustic surface wave device is immersed in the liquid and forms an angle of 10-30 degrees with the normal direction of a liquid plane, the acoustic surface wave device starts to work under the driving of a signal source, excited acoustic surface waves are coupled with the liquid to generate acoustic micro-flow, the acoustic surface waves can generate sound pressure on the liquid due to the acoustic micro-flow effect, and the propelling carrier can move forwards under the action of a reaction force.
A large number of experiments prove that the working frequency of the surface acoustic wave device is within 10-600MHz, and better micro-flow propulsion efficiency can be realized. In the present invention, the interdigital transducer may be rectangular, focus-shaped, or the like, or a slanted electrode may be employed. The propelling carrier can be a light plastic boat or a rubber duck and the like.
Preferably, the surface contact angle of the surface acoustic wave device is processed to be 10 degrees, so that the movement speed of the micro propeller in the liquid is high.
Preferably, when the included angle between the surface acoustic wave device carried on the propelling carrier and the normal direction of the liquid surface is 23 degrees, Rayleigh microflow is generated, and the optimal solid-liquid coupling efficiency can be realized, so that the higher moving speed of the propeller in the liquid is realized.
Preferably, the surface contact angle of the SAW device with the liquid is at a specific angle, and the surface contact angle (contact angle) is a tangent of the gas-liquid interface at the intersection of the gas, liquid and solid phases, and the tangent is at an angle θ between the solid-liquid boundary and the liquid-side boundarycThe surface contact angle of the surface acoustic wave device is the included angle theta between the tangent of the air-liquid drop interface and the boundary line between the surface liquid drop and the substrate-liquid dropcIs 5 to 30 degrees.
A signal generator of the signal source provides an alternating electric signal, and after the alternating electric signal is amplified by a power amplifier, the power provided for the surface acoustic wave device is about 10-50 dBm (0.01-100W), and the frequency is 10-600 MHz.
In the invention, the surface acoustic wave device works in a wired mode. When the surface acoustic wave device works in a wired mode, the signal source comprises a signal generator and a power amplifier for amplifying signals, and the power amplifier outputs amplified electric signals and transmits the amplified electric signals to the surface acoustic wave device through the coaxial line and the enameled wire.
Preferably, the surface acoustic wave device has a length of 0.5-2 cm, a width of 0.5-2 cm and a thickness of 500 μm, the piezoelectric substrate is one of quartz, lithium niobate, lithium tantalate, piezoelectric ceramic, zinc oxide and aluminum nitride, and the interdigital transducer of the surface acoustic wave device has a thickness of 50 nm-100 μm.
A preparation method of the micro-propeller moving in liquid based on acoustic microfluid comprises the following steps:
(1) depositing a graphical metal film on a piezoelectric substrate to be used as an interdigital transducer to form a surface acoustic wave device;
(2) carrying out hydrophilic (hydrophobic) liquid treatment on the surface of the surface acoustic wave device;
(3) fixing the surface acoustic wave device on the tangent plane of the tail part of the propelling carrier, so that the surface acoustic wave device forms a certain included angle with the normal direction of the liquid;
(4) when the surface acoustic wave device works in a wired mode, the signal generator is electrically connected with the power amplifier circuit, and output signals of the power amplifier are transmitted to the surface acoustic wave device through the coaxial line and the enameled wire in sequence;
the enameled wire connecting circuit can prevent the phenomenon of wire short circuit when the propeller works in a liquid environment. When the acoustic surface wave micro-flow device is used, a prepared micro-propeller moving in liquid is placed in the liquid, a propelling carrier floats on the liquid surface, a part of area of the acoustic surface wave device is immersed in the liquid, the acoustic surface wave device starts to work under the driving of a signal source, excited acoustic surface waves are coupled with the liquid to generate acoustic micro-flow, the acoustic surface waves can generate sound pressure to the liquid due to the acoustic micro-flow effect, and the propelling carrier can move forwards under the action of a reaction force. When the interdigital transducer is rectangular or focused, the propeller in the liquid can move along a straight line; when the interdigital transducer adopts an inclined electrode, the propeller in the liquid can move according to a curved track.
Compared with the prior art, the invention has the beneficial effects that:
due to the adoption of the sound-induced microflow effect, the invention can realize propulsion without any moving part and has the advantages of long service life, no mechanical noise, convenient realization, continuously adjustable driving force, flexible steering and the like.
Since the surface acoustic wave device has a small size, the present invention can realize miniaturization.
The invention can avoid the biological cross contamination problem of the propeller in the traditional liquid due to the active surface of the surface acoustic wave device.
The invention has simple preparation process of the driver in the liquid, and the power and the movement direction of the propeller can be accurately controlled.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of the structure of a micro-thruster for movement in a liquid based on acoustic microfluidization according to the present invention;
FIG. 2 is a schematic view of the angle between the SAW device and the normal to the liquid plane;
FIG. 3 is a schematic diagram of the configuration of the liquid medium propulsion device of the present invention when it is operated in a wired manner;
FIG. 4 is a schematic diagram of a surface acoustic wave device employing a tilted interdigital transducer in accordance with the present invention;
FIG. 5 is a data plot of propeller speed versus power input in a fluid according to the present invention;
FIG. 6 is a graph of data relating propeller speed to input power in a liquid according to the present invention for different SAW device surface contact angles;
description of the labeling: 128-degree Y-cut LiNbO3The device comprises a piezoelectric substrate 1, an interdigital transducer 2, a plastic light boat 3, liquid 4, a signal source 5, a signal generator 6, a power amplifier 7, an interrogator 8 and an antenna 9.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the detailed description and specific examples, while indicating the scope of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Example 1
Referring to fig. 1-2, the micro propeller moving in liquid by sound-induced micro-flow provided by this embodiment includes a surface acoustic wave device, a light plastic boat 3, and a signal source 5, where the surface acoustic wave device is formed by 128 ° Y-cut LiNbO3The piezoelectric substrate 1 and the interdigital transducer 2 are formed, the wavelength of the surface acoustic wave device is 200 mu m, and the working frequency is about 20 MHz; the surface acoustic wave device is attached to the back of the light plastic boat 3 and forms an angle of 23 degrees with the normal direction of the liquid surface,
when the light plastic boat 3 is used, the light plastic boat 3 floats on the liquid surface 4, when the angle theta between the surface acoustic wave device and the normal direction of the liquid surface is 23 degrees, the generated sound micro flow is Rayleigh micro flow, and the solid-liquid coupling effect is optimal. The direction of motion of the propeller is opposite to the direction of the acoustically induced microflow.
Example 2
Referring to fig. 1 to 5, the present embodiment provides a method for preparing a micro-propeller moving in a liquid based on sono-induced microfluidics, including the following steps:
firstly, adopting photoetching and lift-off process to make LiNbO at 128 deg.C Y-cut3A graphical metal film aluminum (200nm thick) is prepared on the surface of the piezoelectric substrate 1 to form the surface acoustic wave interdigital transducer 2. The interdigital transducer 2 has a wavelength of 200 μm and an operating frequency of about 20 MHz. The interdigital transducer 2 is illustrated schematically in fig. 1 when it is rectangular, and in fig. 5 when it employs inclined electrodes.
Then, the surface of the surface acoustic wave device was subjected to lyophilic treatment so that the contact angle was about 10 °.
Next, a lightweight plastic boat 3 is prepared as a propulsion carrier to float in the liquid 4, the length, width and height of the lightweight plastic boat 3 being 4cm × 3cm × 2 cm. The surface acoustic wave device is fixed at the tail of the light plastic boat 3 in a cementing mode, the angle between the surface acoustic wave device and the normal direction of the liquid surface is 23 degrees, and the front part area of the interdigital transducer 2 is immersed in the liquid 4.
When the propeller in the liquid works in a wired mode, as shown in FIG. 3, the signal source comprises a signal generator and a power amplifier, and the output power of the amplifier is adjusted to be within the range of 30-38 dBm. The signal source is electrically connected with the surface acoustic wave device through the coaxial line and the enameled wire, and the enameled wire can prevent the phenomenon of wire short circuit when the propeller works in a liquid environment; when the propeller in the liquid is operated in a wireless manner, as shown in fig. 4, the signal source comprises an interrogator 8 and an antenna 9, the interrogator transmits an inquiry signal through the antenna 8, and the signal source can operate when the antenna 9 on the surface acoustic wave device receives the inquiry signal.
When a signal source is electrified, the surface acoustic wave device starts to work, the advancing surface acoustic wave is coupled with liquid to generate acoustic micro-flow, and the propeller starts to move under the pushing of the reaction force. When the interdigital transducer is rectangular, the propeller in the liquid can move along a straight line; when the interdigital transducer adopts an inclined electrode, the propeller in the liquid can move along a curved track.
Example 3
When the interdigital transducer is rectangular and the thruster is operated in a wired manner as prepared in example 2, the results of the moving speed of the thruster obtained by adjusting the input power in the range of 30-38 dBm (i.e., in the range of 1-6W) are shown in fig. 5. As can be seen from figure 5, the linear motion speed of the propeller varies from 0.8 cm/s to 8.6cm/s, and the highest speed exceeds 2 ship body lengths. Therefore, the micro propeller moving in the liquid based on the sound-induced micro-flow can realize a strong propelling effect, and has important application potential in the fields of military, aviation, biomedicine and the like.
Example 4
The propeller in liquid was prepared according to example 2, and the surface of the saw device was subjected to different treatments with lyophilic and lyophobic liquids so that the contact angles thereof were 10 °, 50 ° and 90 °, respectively, and the relationship between the moving speed of the propeller and the input power under the corresponding contact angles was obtained, respectively, as shown in fig. 6. It can be seen that at the same input power, the speed of movement of the propeller decreases as the contact angle increases. The best driving effect is obtained when the contact angle is 10 °. This can be explained by the fact that as the contact angle decreases, the contact area of the liquid 4 and the surface acoustic wave device increases, and therefore the reverse driving force is greater, resulting in a higher driving rate.
The above-mentioned embodiments are intended to illustrate the technical solutions and advantages of the present invention, and it should be understood that the above-mentioned embodiments are only the most preferred embodiments of the present invention, and are not intended to limit the present invention, and any modifications, additions, equivalents, etc. made within the scope of the principles of the present invention should be included in the scope of the present invention.
Claims (6)
1. A micro-thruster for moving in liquid based on surface acoustic wave drive, comprising:
the acoustic surface wave device comprises a piezoelectric substrate and an interdigital transducer deposited on the piezoelectric substrate, and the working frequency is 10-600 MHz;
the signal source is connected with the surface acoustic wave device in a wired mode and used for exciting the surface acoustic wave device to generate surface acoustic waves;
the propelling carrier is used for carrying the surface acoustic wave device, so that the included angle between the surface direction of the surface acoustic wave device and the normal direction of the liquid surface, namely the inclination angle is 10-30 degrees;
and the surface contact angle of the surface acoustic wave device and the liquid in which the surface acoustic wave device is positioned is 5-30 degrees.
2. The saw driven fluid motion-based micro thruster fluid of claim 1, wherein the signal source comprises a signal generator and a power amplifier for amplifying the signal, the power amplifier outputs the amplified electrical signal to the saw device through coaxial line and enameled wire.
3. The surface acoustic wave drive-based micro thruster liquid moving in liquid as claimed in claim 1, wherein the signal generator of the signal source provides an alternating electric signal, and after the alternating electric signal is amplified by a power amplifier, the power provided for the surface acoustic wave device is 10-50 dBm, and the frequency is 10-600 MHz.
4. The surface acoustic wave driven micro-thruster moving in liquid based on surface acoustic wave as claimed in claim 1, wherein the size of the surface acoustic wave device is 0.5-2 cm long, 0.5-2 cm wide and 500 μm thick, the piezoelectric substrate is one of quartz, lithium niobate, lithium tantalate, piezoelectric ceramics, zinc oxide and aluminum nitride, and the thickness of the interdigital transducer of the surface acoustic wave device is 50 nm-100 um.
5. A surface acoustic wave drive-based micro-mover for motion in a liquid as described in claim 1, wherein said liquid is water, seawater, a body fluid, or blood.
6. The method of claim 1 for preparing a micro-thruster liquid based on surface acoustic wave driven motion in a liquid, comprising the steps of:
(1) depositing a graphical metal film on a piezoelectric substrate to be used as an interdigital transducer to form a surface acoustic wave device;
(2) carrying out lyophilic or lyophobic treatment on the surface of the surface acoustic wave device;
(3) fixing the surface acoustic wave device on the tangent plane of the tail part of the propelling carrier, so that the surface direction of the surface acoustic wave device forms a certain included angle with the normal direction of the liquid surface;
(4) when the surface acoustic wave device works in a wired mode, the signal generator is electrically connected with the power amplifier circuit, and output signals of the power amplifier are transmitted to the surface acoustic wave device through the coaxial line and the enameled wire in sequence;
(5) the signal source sends an excitation signal to excite the surface acoustic wave device to work and generate surface acoustic waves, when the surface acoustic waves are transmitted to the interface between the surface acoustic wave device and the liquid, energy is fed into the liquid to push the liquid, and the surface acoustic wave device moves in the liquid according to acting force and reacting force.
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