CN110213884A - Flexible electronic and preparation method thereof, flexible circuit and preparation method thereof - Google Patents

Flexible electronic and preparation method thereof, flexible circuit and preparation method thereof Download PDF

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Publication number
CN110213884A
CN110213884A CN201910547536.8A CN201910547536A CN110213884A CN 110213884 A CN110213884 A CN 110213884A CN 201910547536 A CN201910547536 A CN 201910547536A CN 110213884 A CN110213884 A CN 110213884A
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CN
China
Prior art keywords
substrate
flexible
circuit
conductive layer
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910547536.8A
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Chinese (zh)
Inventor
董瑛
曾雄
王晓浩
张旻
钱翔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Graduate School Tsinghua University
Original Assignee
Shenzhen Graduate School Tsinghua University
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Filing date
Publication date
Application filed by Shenzhen Graduate School Tsinghua University filed Critical Shenzhen Graduate School Tsinghua University
Priority to CN201910547536.8A priority Critical patent/CN110213884A/en
Publication of CN110213884A publication Critical patent/CN110213884A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/007Manufacture or processing of a substrate for a printed circuit board supported by a temporary or sacrificial carrier
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1266Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by electrographic or magnetographic printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1275Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by other printing techniques, e.g. letterpress printing, intaglio printing, lithographic printing, offset printing

Abstract

The present invention relates to flexible circuit technology fields, provide the preparation method of a kind of flexible electronic and preparation method thereof, flexible circuit, the bearing substrate of flexible electronic includes sequentially connected first substrate, the second substrate and third substrate, it only need to be by third substrate desquamation, so as to have the first substrate transfer of circuit structure layer and electronic component to printing body surface, required flexible circuit can be obtained;In technique, the first substrate, the second substrate and third substrate are in turn connected to form bearing substrate;Circuit structure layer is prepared on the first substrate;Electronic component is arranged on the circuit structure layer, can be obtained above-mentioned flexible electronic;To the bearing substrate of flexible electronic, third substrate desquamation is made, by the first substrate transfer with circuit structure layer and electronic component to printing body surface for after the dissolution of the second substrate through third substrate using medium, it can be obtained flexible circuit, preparation process is simple, easy to implement.

Description

Flexible electronic and preparation method thereof, flexible circuit and preparation method thereof
Technical field
The present invention relates to flexible circuit technology field more particularly to flexible electronic and preparation method thereof, flexible circuit and its Preparation method.
Background technique
Flexible circuit has bendable folding endurance, can be bonded various rules or irregular surface, signal-to-noise ratio is high, signal stabilization The features such as, therefore, flexible electronic is widely used in fields such as medical diagnosis, automatic control, smart machines, such as is answered For prosthesis control, human-computer interaction, wearable device etc..However, prior art can not be carried out on substrate flexible it is soft Property circuit preparation, it usually needs by different substrates carry out repeatedly processing obtain, or utilize the skills such as photoetching, vapor deposition Art carries out the preparation of flexible circuit, and preparation process haves the characteristics that step is complicated, technique is cumbersome, is unfavorable for being mass produced.
Summary of the invention
The scheme provided according to embodiments of the present invention provides flexible electronic and preparation method thereof, flexible circuit and its system Preparation Method solves the technical problem that flexible circuit preparation process step is complicated, technique is cumbersome at least to a certain extent.
The technical proposal adopted by the invention to solve the above technical problems is that:
On the one hand the embodiment of the present invention provides a kind of flexible electronic, including bearing substrate and circuit module, in which: described Bearing substrate includes sequentially connected first substrate, the second substrate and third substrate, and first substrate has a flexibility, and described the Two substrates are placed between first substrate and the third substrate, and second substrate can be dissolved by medium, and described Three substrates can be by the medium osmosis;The circuit module is arranged on first substrate.
As an improvement of the above technical solution, the circuit module includes circuit structure layer and electronic component, the circuit Structure sheaf is arranged on first substrate, and the electronic component is set on the circuit structure layer.
As a further improvement of the above technical scheme, the circuit structure layer includes that the first conductive layer and second are conductive Layer, first conductive layer are covered on first substrate, and first conductive layer has viscosity;Second conductive layer covers It covers on first conductive layer.
In another middle preferred embodiment, first conductive layer is covered on first lining by way of coating On bottom and/or second conductive layer is covered on first conductive layer by way of coating.
As a further improvement of the above technical scheme, print setting circuit pattern on first substrate, the circuit Structure sheaf is arranged on first substrate by the initialization circuit pattern.
On the one hand the embodiment of the present invention provides a kind of preparation method of flexible electronic: will have the first substrate flexible, Can by medium dissolve the second substrate and bearing substrate can be in turn connected to form by the third substrate of the medium osmosis; Circuit structure layer is prepared on the first substrate of bearing substrate;Electronic component is arranged on the circuit structure layer.
On the one hand the embodiment of the present invention, additionally provides a kind of preparation method of flexible circuit: using any of the above-described technical side Flexible electronic described in case serves as a contrast the bearing substrate of the flexible electronic with the medium through the third substrate by second After the dissolution of bottom, make third substrate desquamation, by the first substrate transfer with circuit structure layer and electronic component to printing body surface, Obtain flexible circuit.
As an improvement of the above technical solution, second substrate is made of water-soluble material, and the third substrate is adopted It is made of dank material, using water as the medium, the bearing substrate for carrying electronic component is impregnated in water Setting time makes third substrate desquamation so that after second substrate dissolution.
As a further improvement of the above technical scheme, after the completion of transfer, to be transferred to printing body surface have electronics First substrate of element is solidified.
On the one hand the embodiment of the present invention, additionally provides a kind of flexible circuit, the flexible circuit is by any of the above-described technical solution In the preparation method of flexible circuit be made.
The embodiment of the present invention at least have the following advantages that or the utility model has the advantages that
Flexible electronic includes bearing substrate and circuit module, and bearing substrate includes sequentially connected first substrate, the second lining Bottom and third substrate, only need to be by third substrate desquamation, so as to have the first substrate of circuit structure layer and electronic component to turn Print can be obtained required flexible circuit to printing body surface;In technique, successively by the first substrate, the second substrate and third substrate Connection forms bearing substrate;Circuit structure layer is prepared on the first substrate;Electronic component is arranged on the circuit structure layer, It can be obtained above-mentioned flexible electronic;To the bearing substrate of flexible electronic, the second substrate is dissolved through third substrate using medium Afterwards, make third substrate desquamation, the first substrate transfer with circuit structure layer and electronic component to printing body surface can obtain Flexible circuit is obtained, preparation process is simple, easy to implement.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment Attached drawing briefly describes:
Fig. 1 is the structural schematic diagram of flexible electronic one embodiment of the present invention;
Fig. 2 is the decomposition diagram of embodiment illustrated in fig. 1;
Fig. 3 is will have schematic diagram of the first substrate transfer of circuit module in printing body.
Specific embodiment
It is carried out below with reference to technical effect of the embodiment and attached drawing to design of the invention, specific structure and generation clear Chu is fully described by, to be completely understood by the purpose of the present invention, feature and effect.Obviously, described embodiment is this hair Bright a part of the embodiment, rather than whole embodiments, based on the embodiment of the present invention, those skilled in the art are not being paid Other embodiments obtained, belong to the scope of protection of the invention under the premise of creative work.In addition, being related in patent All connection/connection relationships, not singly refer to that component directly connects, and refer to can according to specific implementation situation, by addition or Reduce couple auxiliary, Lai Zucheng more preferably coupling structure.The orientation such as upper and lower, left and right involved in the present invention describe Relative to the position relationship of the components of the invention in the accompanying drawings.Each technical characteristic in the present invention, not It can be with combination of interactions under the premise of conflicting conflict.
Embodiment one:
The embodiment of the present invention one provides a kind of flexible electronic, and with reference to Fig. 1,2, flexible electronic includes bearing substrate 1 and circuit Module 2, wherein bearing substrate 1 includes sequentially connected first substrate 11, the second substrate 12 and third substrate 13, circuit module 2 Setting on the first substrate 11, the first substrate 11 have flexibility, can be film;Second substrate 12 is placed in the first substrate 11 and third Between substrate 13, the bearing substrate 1 of three-decker is formed, the second substrate 12 is connect with a side surface of the first substrate 11, circuit Another surface of the first substrate 11 is arranged in structure sheaf 21, and the second substrate 12 can be dissolved by medium, and third substrate 13 can By the medium osmosis.
Based on above-mentioned flexible electronic, the second substrate 12 can be dissolved by medium through third substrate 13, third can be made to serve as a contrast Bottom 13 can remove, and so as to have the first substrate 11 of circuit module 2 to be transferred to printing body surface, obtain setting pattern Flexible circuit, it is easy to operate for acquiring the electric signal of printing body, and the flexible circuit can be bonded various rules or irregular Surface has good contact conformability.
In present embodiment, the second substrate 12 has water solubility, then water or the solution including water can be used in its medium, accordingly , third substrate 13 is set as with water penetration, it can be permeated by whom, thus, water is penetrated into third substrate 13 for the second substrate 12 dissolutions, can remove third substrate 13.When it is implemented, the second substrate can also have fat soluble materials composition, to pass through Lipid medium can dissolve the second substrate, to separate third substrate.
The thin-film material with flexible and ductility also may be selected in first substrate 11, so as to holding for flexible adaptation variation Body surface face is printed, advanced optimizes contact conformability, thus obtained flexible circuit can effectively reduce contact impedance and motion artifact.
Circuit module 2 includes circuit structure layer 21 and electronic component, and circuit structure layer 21 is arranged in setting pattern first On substrate 11, electronic component is set on circuit structure layer 21.
Circuit structure layer is covered on the first substrate 11 by conductive material and is formed, so that electrode signal acquisition is formed, Wherein, circuit structure layer includes the first conductive layer and the second conductive layer, and the first conductive layer is covered on the first substrate 11;Second leads Electric layer is covered on the first conductive layer, and the first conductive layer is for carrying the second conductive layer.It is glued specifically, the first conductive layer has Property, so as to the bearing bed as the second conductive layer, certainly, the same conductive energy of the first conductive layer is conductive logical to be formed Road.
In present embodiment, the first conductive layer can be covered on the first substrate 11 by way of coating, the second conductive layer It can also be covered on by way of coating on the first conductive layer.Certainly, in specific implementation process, the first conductive layer can pass through it His mode is arranged on the first substrate 11, such as the first conductive layer of required pattern is first prefabricated into using the first conductive material, then First conductive layer is adhered on the first substrate 11 again by modes such as bondings, similarly, the second conductive layer can also use second Conductive material is pre-formed by the pattern progress of the first conductive layer, and then correspondence is attached on the first conductive layer again.
In present embodiment, the first conductive layer is made of conductive silver glue, and the second conductive layer is made of eutectic gallium-indium alloy, is led Electric elargol realizes the bonding of eutectic gallium-indium alloy, and forms conductive path, so as to the acquisition of electric signal.
For the setting convenient for foregoing circuit structure sheaf and electronic component, first initialization circuit pattern can be arranged in the first substrate The setting of circuit structure layer is carried out on 11 according still further to the initialization circuit pattern, circuit structure layer is by conductive material according to setting electricity The region overlay of road pattern is formed on the first substrate 11, to form electrode signal acquisition, wherein circuit structure layer includes First conductive layer and the second conductive layer, the first conductive layer is according to the region overlay of initialization circuit pattern on the first substrate 11;The Two conductive layers are according to the region overlay of initialization circuit pattern on the first conductive layer.
Initialization circuit pattern can be printed upon on the first substrate 11 by way of printing, consequently facilitating the first conduction material The correct coating of material and the second conductive material, and laser selenium may be selected in designability with higher, specific printing type Drum printer is in 11 printout surface of the first substrate initialization circuit pattern.
In the bearing substrate 1 of flexible electronic, the second substrate 12 can be made of PVA (polyvinyl alcohol film) material, third lining Bottom 13 can be made of paper material, water energy through the papery third substrate 13 PVA (polyvinyl alcohol film) is constituted second Substrate 12 carry out it is water-soluble so that third substrate 13 is removed.
Embodiment two:
Second embodiment of the present invention provides the preparation methods of flexible electronic:
By with the first substrate flexible, can by medium dissolve the second substrate and can be by the medium osmosis Third substrate is in turn connected to form bearing substrate;
Circuit structure layer is prepared on the first substrate of bearing substrate;
Electronic component is arranged on the circuit structure layer.
Based on the preparation method of above-mentioned flexible electronic, when preparing bearing substrate, can be used with water-soluble second lining Bottom and third substrate with water penetration prepare bearing substrate, so as to be used as medium osmosis third substrate using water to dissolve Second substrate is easily peeled off third substrate.
When preparing circuit structure layer, the first conductive layer can be first set on the first substrate, then be arranged on the first conductive layer Second conductive layer, the sticking electrically conductive material of tool can be used in the first conductive layer, for the second conductive layer to be carried and connected Connect fixation.
When preparing circuit structure layer, can the first print setting pattern on the first substrate of bearing substrate, then by setting figure Circuit structure layer is arranged in the region of case, convenient for the preparation of circuit structure layer, thus the circuit structure layer of pattern needed for accurately obtaining, And designability with higher.Laser selenium drum printer may be selected and print the setting pattern in the first substrate surface.
The preparation method of circuit structure layer: on the first substrate according to the region overlay tool sticking first of setting pattern Then conductive layer covers the second conductive layer on the first conductive layer, form circuit structure layer.Painting can be used in the mode of above-mentioned covering The mode covered alternatively, the first conductive material to be prefabricated into the first conductive layer of the setting pattern, then first conductive layer is passed through The modes such as bonding are adhered on the first substrate again, and similarly, the second conductive layer can also be pre-formed by the progress of above-mentioned setting pattern, so It is attached on the first conductive layer again afterwards.
Present embodiment uses conductive silver glue on the first substrate, it is conductive to form first according to the region coating for setting pattern Layer is coated on the first conductive layer using liquid eutectic gallium-indium alloy and forms the second conductive layer, enhances electric conductivity and extensibility, so It is cleaned afterwards using low-concentration hcl, removes extra liquid metal.
First the first conductive layer can be solidified, the first conductive layer will closely be connect with the first substrate after sintering, then Second conductive layer is set on one conductive layer, so that the first conductive layer be made to accelerate molding, improves stability, facilitates subsequent second and lead The setting of electric layer material layer.The method that heating can be used is solidified, settable when using conductive silver glue as the first conductive layer Solidification temperature is 60 DEG C or so, and curing time is 30min or so, and during actual implementation, solidification temperature and curing time can roots Rationally it is arranged according to actual conditions.Above-mentioned curing schedule can certainly be saved, the first conductive layer spontaneous curing is made.
Flexible electronic is prepared using the above method, preparation process is simple, it is easy to accomplish.
Embodiment three:
The embodiment of the present invention three provides the preparation method of flexible circuit:
Second substrate can be dissolved to the bearing substrate of the flexible electronic using the flexible electronic of above-described embodiment one Medium, by after the dissolution of the second substrate, makes third substrate desquamation, to isolate the first substrate, will have circuit through third substrate First substrate 11 ' of structure sheaf and electronic component is transferred to the surface printing body A (with reference to Fig. 3), to obtain flexible circuit, can use In the electric signal of acquisition printing body.
Second substrate can be used water-soluble material and be made, correspondingly, third substrate is made of porous material, therefore, The method of water transfer can be used by the first substrate transfer to supporting body surface, specifically, water saturates third substrate can be used, be second Substrate dissolution, or the bearing substrate for carrying electronic component can be impregnated setting time in water so that the second substrate dissolves Afterwards, make third substrate desquamation.
Above-mentioned water transfer process, the deionized water or tap water that can be used 20 DEG C or so dissolve the second substrate, make First substrate and the separation of third substrate, separation process is about 5min.In specific implementation process, the temperature and disengaging time of water can roots Rationally it is arranged according to actual conditions.
After the completion of above-mentioned transfer process, the first substrate with electronic component for being transferred to printing body surface can be consolidated Change, enhance stability, facilitates the first substrate reliable attachment in the surface of printing body, thus the first substrate of optimization and printing body Conformability is contacted, helps to reduce contact impedance and motion artifact.The mode of heating cure can be used, solidification temperature can be 80 DEG C Left and right, curing time can be 60min or so, and during actual implementation, solidification temperature and curing time can close according to the actual situation Reason setting.Above-mentioned curing schedule can certainly be saved, spontaneous curing is carried out.
The preparation method of the flexible circuit, preparation process is simple, reliably, easy to implement.
Example IV:
The flexible circuit prepared by the preparation method of above-mentioned flexible circuit, can be applied to medical domain, artificial limb manufacture, The fields such as Robot Design, wearable device, for example, the first substrate transfer with the first electronic component is corresponding to robot Surface, can allow robot perception relevant information.
In recent years, with the continuous development of the flexible electronics technologies such as human-computer interaction, skin electronics, prosthesis control.Muscle electricity Signal is gradually transferred to transport from directions such as the analysis of the kinetic system in medicine direction, muscular fatigue analysis, muscle damage rehabilitations The dynamic directions such as mode estimation and Mechanical course.
The preparation method of above-mentioned flexible circuit can also be applied to the preparation of flexible electronic skin: pass through above-mentioned flexible circuit The first above-mentioned substrate transfer to human skin surface is formed flexible electronic skin by preparation method, can be used for acquiring physiology letter Number.It is equally useful for the electronic skin of processing machinery equipment, can there will be circuit by the preparation method of above-mentioned flexible circuit First substrate transfer of structure sheaf and electronic component is to equipment surface, such as is transferred to the corresponding surface of robot, can allow machine The perceptually relevant information of device people.
It above are only presently preferred embodiments of the present invention, but the present invention is not restricted to above-described embodiment, be familiar with this field Technical staff can also make a variety of equivalent deformation or replacement on the premise of without prejudice to spirit of the invention, these equivalent deformations Or replacement is all included in the scope defined by the claims of the present application.

Claims (10)

1. flexible electronic, it is characterised in that: including bearing substrate and circuit module, in which: the bearing substrate includes successively connecting The first substrate, the second substrate and the third substrate connect, first substrate have flexibility, and second substrate is placed in described first Between substrate and the third substrate, second substrate can be dissolved by medium, and the third substrate can be given an account of Matter infiltration;The circuit module is arranged on first substrate.
2. flexible electronic according to claim 1, it is characterised in that: the circuit module includes circuit structure layer and electronics Element, the circuit structure layer are arranged on first substrate, and the electronic component is set on the circuit structure layer.
3. flexible electronic according to claim 2, it is characterised in that: the circuit structure layer includes the first conductive layer and the Two conductive layers, first conductive layer are covered on first substrate, and first conductive layer has viscosity;Described second leads Electric layer is covered on first conductive layer.
4. flexible electronic according to claim 3, it is characterised in that: first conductive layer is covered by way of coating On first substrate and/or second conductive layer is covered on first conductive layer by way of coating.
5. flexible electronic according to any one of claim 2 to 4, it is characterised in that: print and set on first substrate Determine circuit pattern, the circuit structure layer is arranged on first substrate by the initialization circuit pattern.
6. the preparation method of flexible electronic, it is characterised in that:
By with the first substrate flexible, can by medium dissolve the second substrate and can be by the third of the medium osmosis Substrate is in turn connected to form bearing substrate;
Circuit structure layer is prepared on the first substrate of bearing substrate;
Electronic component is arranged on the circuit structure layer.
7. the preparation method of flexible circuit, it is characterised in that: right using flexible electronic described in any one of claims 1 to 5 The bearing substrate of the flexible electronic makes third substrate for after the dissolution of the second substrate through the third substrate with the medium The first substrate transfer with circuit structure layer and electronic component to printing body surface is obtained flexible circuit by removing.
8. the preparation method of flexible circuit according to claim 7, it is characterised in that: second substrate is using water-soluble Material is made, and the third substrate is made of dank material, using water as the medium, will carry electronic component The bearing substrate impregnates setting time in water so that after second substrate dissolution, makes third substrate desquamation.
9. the preparation method of flexible circuit according to claim 7 or 8, it is characterised in that: after the completion of transfer, to being transferred to First substrate with electronic component on printing body surface is solidified.
10. flexible circuit, it is characterised in that: the preparation method system of the flexible circuit as described in any one of claim 7 to 9 At.
CN201910547536.8A 2019-06-24 2019-06-24 Flexible electronic and preparation method thereof, flexible circuit and preparation method thereof Pending CN110213884A (en)

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WO2010086901A1 (en) * 2009-01-30 2010-08-05 L'oreal Layered structure for cosmetic use
KR20130126062A (en) * 2012-05-10 2013-11-20 한국과학기술원 Method for manufacturing flexible electronic device using water-soluble adhesive and flexible electronic device manufactured by the same
JP2015016612A (en) * 2013-07-10 2015-01-29 日立化成株式会社 Nano thin film transfer sheet and method of producing nano thin film transfer sheet
US20160031192A1 (en) * 2013-02-08 2016-02-04 Hitachi Chemical Company, Ltd. Nano thin-film transfer sheet, method for manufacturing nano thin-film transfer sheet, and mthod for transferring nano thin-fiilm layer into adherend
CN105690974A (en) * 2016-01-21 2016-06-22 京东方科技集团股份有限公司 Flexible thin film attaching method, flexible thin film stripping method, flexible substrate preparation method and base substrate
CN210381467U (en) * 2019-06-24 2020-04-21 清华大学深圳研究生院 Flexible electronics

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020182970A1 (en) * 2001-06-01 2002-12-05 Wen-Tsang Liu Method of fabricating emitter of field emission display
WO2010086901A1 (en) * 2009-01-30 2010-08-05 L'oreal Layered structure for cosmetic use
KR20130126062A (en) * 2012-05-10 2013-11-20 한국과학기술원 Method for manufacturing flexible electronic device using water-soluble adhesive and flexible electronic device manufactured by the same
US20160031192A1 (en) * 2013-02-08 2016-02-04 Hitachi Chemical Company, Ltd. Nano thin-film transfer sheet, method for manufacturing nano thin-film transfer sheet, and mthod for transferring nano thin-fiilm layer into adherend
JP2015016612A (en) * 2013-07-10 2015-01-29 日立化成株式会社 Nano thin film transfer sheet and method of producing nano thin film transfer sheet
CN105690974A (en) * 2016-01-21 2016-06-22 京东方科技集团股份有限公司 Flexible thin film attaching method, flexible thin film stripping method, flexible substrate preparation method and base substrate
CN210381467U (en) * 2019-06-24 2020-04-21 清华大学深圳研究生院 Flexible electronics

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