CN110208885A - Plated film lens, optical lens and the method for forming plated film lens - Google Patents

Plated film lens, optical lens and the method for forming plated film lens Download PDF

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Publication number
CN110208885A
CN110208885A CN201910575804.7A CN201910575804A CN110208885A CN 110208885 A CN110208885 A CN 110208885A CN 201910575804 A CN201910575804 A CN 201910575804A CN 110208885 A CN110208885 A CN 110208885A
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China
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film
layer
refractive index
high refractive
low
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余荣军
蒯泽文
尚达强
赵绚
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Zhejiang Sunny Optics Co Ltd
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Zhejiang Sunny Optics Co Ltd
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Priority to CN201910575804.7A priority Critical patent/CN110208885A/en
Publication of CN110208885A publication Critical patent/CN110208885A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/001Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0015Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/001Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/008Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras designed for infrared light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/14Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

This application discloses a kind of plated film lens, optical lens and the methods for forming plated film lens.Wherein, which includes lens substrate;First film group is coated on the side of the lens substrate, and including middle refractivity film layer and at least one of high refractive index layer and low-index film;And the second film group, including the successively alternately laminated high refractive index layer and low-index film for being sputtered at the first film group, wherein total thicknesses of layers D of the high refractive index layer of the first film group and the high refractive index layer of the second film groupH is totalWith the overall thickness D of the middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。

Description

Plated film lens, optical lens and the method for forming plated film lens
Technical field
This application involves optical element technology field more particularly to a kind of plated film lens, optical lens and form mirror coating The method of piece.
Background technique
In camera field, 3D camera is had a good application prospect.It uses infrared ray as transmitting light, can Solve the problems, such as that the ambient lighting of visible light influences.At present in industry there are three types of used mainstream 3D vision techniques: structure light skill Art, time-of-flight method (TOF) and the polygonal three-dimensional imaging of binocular.TOF scheme due to its is easy to use, cost is relatively low the advantages that most Tool prospect.Wherein, TOF scheme captures near infrared light from the received flight time is emitted to, to judge by sensor special Object distance.This sensor is generally near infrared sensor, needs to receive and transmits near infrared light.
In order to increase near infrared sensor to the acceptance rate of near infrared light, usual antireflective coating is coated on lens, rib It the surface of the optical components such as mirror can especially by inhibition to improve the transmissivity for the optical element being made of multiple lens The reflection of light-exposed spectrum becomes easy the brightness of image and improved optical instrument visible.However, general existing antireflective Film is low to visible light region reflectivity, but near infrared region, reflectivity is increased with the increase of wavelength, therefore can not Suitable for receiving the sensor of near infrared light.
Summary of the invention
This application provides be applicable to portable electronic product, can at least solve or part solve it is in the prior art The plated film lens and optical lens of at least one above-mentioned disadvantage.
The one side of the application provides a kind of plated film lens, and the plated film lens include: lens substrate;First film group, It is coated on the side of the lens substrate, and including in middle refractivity film layer and high refractive index layer and low-index film At least one;And the second film group, including the successively alternately laminated high refractive index layer for being sputtered at the first film group and low Refractivity film layer, wherein total film of the high refractive index layer of the first film group and the high refractive index layer of the second film group Thickness degree DH is totalWith the overall thickness D of the middle refractivity film layerM is totalRatio DH is total/DM is total1≤D can be metH is total/DM is total≤3。
In one embodiment, the high refractive index film of the high refractive index layer of the first film group and the second film group Every layer of refractive index n1 can meet in layer: 2.0≤n1≤4.0.
In one embodiment, the refractive index n2 of the middle refractivity film layer can meet: 1.6≤n2≤2.0.
In one embodiment, the low refractive index film of the low-index film of the first film group and the second film group Every layer of refractive index n3 can meet in layer: 1.4≤n3≤1.6.
In one embodiment, the film layer sum of the second film group can be at least 3 layers.
In one embodiment, the first film group may include middle refractivity film layer, high refractive index layer and low refraction Rate film layer, wherein the middle refractivity film layer is coated in the lens substrate, the high refractive index layer plating of the first film group It makes on the middle refractivity film layer, the low-index film of the first film group is coated on the high refractive index of the first film group In film layer.
In one embodiment, the high refractive index layer of the second film group include the second high refractive index layer and Third high refractive index layer, the low-index film of the second film group include the second low-index film and the low folding of third Penetrate rate film layer, wherein second low-index film is coated on second high refractive index layer;The third high refractive index Film layer is coated on two low-index film;And the third low-index film is coated on the third high refractive index film On layer.
In one embodiment, the middle refractivity film layer, the high refractive index layer of the first film group, described first The low-index film of film group, second high refractive index layer, second low-index film, the third high refractive index Film layer and the corresponding thicknesses of layers ratio of the third low-index film are 4:1:1:5:1:1:5.
In one embodiment, the middle refractivity film layer, the high refractive index layer of the first film group, described first The low-index film of film group, second high refractive index layer, second low-index film, the third high refractive index Film layer and the corresponding thicknesses of layers ratio of the third low-index film are 5:1:1:6:1:1:6.
In one embodiment, the high refractive index film of the high refractive index layer of the first film group and the second film group The material of layer can include at least: silane, hydrogenation SiGe, SiC or Ti, Sn, Zr, Nb, Ta oxide in any one.
In one embodiment, the material of the middle refractivity film layer can include at least: the oxide of Al, Si, Hf, Y Or any one in nitride.
In one embodiment, the low refractive index film of the low-index film of the first film group and the second film group The material of layer can include at least: MgF2Or any one in the oxide of Si, Al.
In one embodiment, the first film group is sputtered at the one or both sides of the lens substrate.
In one embodiment, the lens substrate is by polymethyl methacrylate materials, epoxide resin material, polyene At least one of hydrocarbon material, cyclic olefine copolymer, cyclic olefin material and ethylene copolymer material is made.
In one embodiment, the refractive index n (sub) of lens substrate can meet 1.5≤n (sub)≤1.7.
In one embodiment, in the wave-length coverage of 430nm~630nm, the plated film lens are averaged incident light Reflectivity Rave can meet Rave≤3%, and maximum reflectivity Rmax can meet Rmax≤5%.
In one embodiment, incident light is in the wave-length coverage of 850nm~1050nm, the maximum of the plated film lens Reflectivity Rmax can meet Rmax≤3%.
In one embodiment, when a length of 850nm or 940nm of incident light wave, the reflectivity of the plated film lens Less than 1%.
In one embodiment, each film layer in the first film group and the second film group meets in the following conditions At least one: the thicknesses of layers range of the middle refractivity film layer can be 80~100nm;The high refractive index film of the first film group The thicknesses of layers range of layer can be 20~30nm;The thicknesses of layers range of the low-index film of the first film group can for 15~ 20nm;The thicknesses of layers range of second high refractive index layer can be 100~110nm;Second low-index film Thicknesses of layers range can be 15~20nm;The thicknesses of layers range of the third high refractive index layer can be 20~30nm;And The thicknesses of layers range of the third low-index film can be 100~120nm.
In one embodiment, each film layer in the first film group and the second film group meets in the following conditions At least one: the thicknesses of layers range of the middle refractivity film layer is 90~100nm;The high refractive index layer of the first film group Thicknesses of layers range be 15~25nm;The thicknesses of layers range of the low-index film of the first film group is 10~20nm; The thicknesses of layers range of second high refractive index layer is 100~120nm;The thicknesses of layers of second low-index film Range is 20~30nm;The thicknesses of layers range of the third high refractive index layer is 15~25nm;And the low folding of the third The thicknesses of layers range for penetrating rate film layer is 100~120nm.
The another aspect of the application provides a kind of optical lens, at least one above-described embodiment of the optical lens provides Plated film lens.
The another aspect of the application provides a kind of method for forming plated film lens, which comprises
The first film group is coated in the side of lens substrate, and the first film group includes middle refractivity film layer and is located at institute State the high refractive index layer and/or low-index film on refractivity film layer;And successively replace in the first film group Stacking is coated with the high refractive index layer and low-index film of the second film group layer, wherein the high refractive index film of the first film group Total thicknesses of layers D of layer and the high refractive index layer of the second film groupH is totalWith the overall thickness D of the middle refractivity film layerM is totalRatio Value DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
Plated film lens provided by the present application include lens substrate;First film group is coated on the side of the lens substrate, and High refractive index layer and/or low-index film including middle refractivity film layer and on the middle refractivity film layer;With And the second film group, including the successively alternately laminated high refractive index layer and low-index film for being sputtered at the first film group, In, total thicknesses of layers D of the high refractive index layer of the high refractive index layer of the first film group and the second film groupH is totalWith institute State the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤ 3, so that obtaining has above-mentioned film layer knot The plated film lens of structure are realized to visible light and the good transmission effects of near infrared light.That is, according to the plated film lens of the application to can Light-exposed and near infrared light can be realized anti-reflective effect.
Detailed description of the invention
In conjunction with attached drawing, by the detailed description of following non-limiting embodiment, other features of the application, purpose and excellent Point will be apparent.In the accompanying drawings:
Fig. 1 is the film layer structure schematic diagram according to the plated film lens of the application first embodiment;
Fig. 2 is the corresponding mirror coating for being coated with antireflective coating of different lambda1-wavelengths according to the application first embodiment The reflectance curve relation schematic diagram of piece;
Fig. 3 is the film layer structure schematic diagram according to the plated film lens of the application second embodiment;
Fig. 4 is the corresponding mirror coating for being coated with antireflective coating of different lambda1-wavelengths according to the application second embodiment The reflectance curve relation schematic diagram of piece.
Specific embodiment
Various aspects of the reference attached drawing to the application are made more detailed description by the application in order to better understand.It answers Understand, the only description to the illustrative embodiments of the application is described in detail in these, rather than limits the application in any way Range.In the specification, the identical element of identical reference numbers.Stating "and/or" includes associated institute Any and all combinations of one or more of list of items.
It should be noted that in the present specification, first, second, third, etc. statement is only used for a feature and another spy Sign distinguishes, without indicating any restrictions to feature.
It will also be appreciated that term " comprising ", " including ", " having ", "comprising" and/or " including ", when in this theory It indicates there is stated feature, element and/or component when using in bright book, but does not preclude the presence or addition of one or more Other feature, component, assembly unit and/or their combination.In addition, ought the statement of such as at least one of " ... " appear in institute When after the list of column feature, entire listed feature is modified, rather than modifies the individual component in list.In addition, when describing this When the embodiment of application, " one or more embodiments of the application " are indicated using "available".Also, term " illustrative " It is intended to refer to example or illustration.
Unless otherwise defined, otherwise all terms (including technical terms and scientific words) used herein all have with The application one skilled in the art's is generally understood identical meaning.It will also be appreciated that term (such as in everyday words Term defined in allusion quotation) it should be interpreted as having and their consistent meanings of meaning in the context of the relevant technologies, and It will not be explained with idealization or excessively formal sense, unless clear herein so limit.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
The feature of the application, principle and other aspects are described in detail below.
In order to meet transmission of the near infrared sensor to visible light and near infrared light, the application provides a kind of mirror coating Piece, the plated film lens include lens substrate, the first film group and the second film group, which is coated on the side of lens substrate Face, the second film group are coated in the first film group.
In the exemplary embodiment, the first film group may include middle refractivity film layer and high refractive index layer and low refraction At least one of rate film layer.That is, the first film group can be middle refractivity film layer and high refractive index layer and low-index film One or both of any combination.With M indicate in refractivity film layer, L indicate low-index film, H indicate high refractive index Film layer, then the structure of the first film group may be, for example, MH, ML, HM, LM, MHL, HMH, HLM etc..Second film group may include successively handing over For high refractive index layer and low-index film that stacking is coated with, and the most inner side film layer of the second film group is coated on the first film group In outermost layer film layer.
In the exemplary embodiment, the high refractive index layer of the first film group and the high refractive index layer of the second film group is total Thicknesses of layers DH is totalWith the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is total1≤D can be metH is total/DM is total≤3.Plating is formed with above-mentioned The plated film lens of film layer structure have good transmission effects to visible light and near infrared light.
In the exemplary embodiment, every in the high refractive index layer of the first film group and the high refractive index layer of the second film group The refractive index n1 of layer meets: 2.0≤n1≤4.0.The refractive index n2 of middle refractivity film layer meets: 1.6≤n2≤2.0.First film Every layer of refractive index n3 meets in the low-index film of group and the low-index film of the second film group: 1.4≤n3≤1.6.Root According to needs, the refractive index of each film layer in plated film lens is controlled in reasonable numberical range, to obtain to visible light and close red Outer light has the plated film lens of anti-reflective effect.
In the exemplary embodiment, the film layer sum of the second film group is at least 3 layers.
In the exemplary embodiment, the first film group may include middle refractivity film layer, high refractive index layer and low-refraction Film layer, wherein middle refractivity film layer is coated in lens substrate, and the high refractive index layer of the first film group is coated on middle refractive index film On layer, the low-index film of the first film group is coated on the high refractive index layer of the first film group.That is the first film group has 3 tunics Layer, middle refractivity film layer, high refractive index layer and the low-index film being respectively successively coated with.
In the exemplary embodiment, the high refractive index layer of the second film group includes that the second high refractive index layer and third are high Refractivity film layer, the low-index film of the second film group include the second low-index film and third low-index film, wherein Second low-index film is coated on the second high refractive index layer;Third high refractive index layer is coated on two low-index films; And third low-index film is coated on third high refractive index layer.That is the second film group includes 4 tunic layers, respectively successively The second high refractive index layer, the second low-index film, third high refractive index layer and the third low-index film being coated with.
In the exemplary embodiment, middle refractivity film layer, the high refractive index layer of the first film group, the first film group low folding Penetrate rate film layer, the second high refractive index layer, the second low-index film, third high refractive index layer and third low refractive index film The corresponding thicknesses of layers ratio of layer is 4:1:1:5:1:1:5.As needed, each film layer physical thickness in plated film lens is rationally controlled Ratio, to obtain the plated film lens that there is anti-reflective effect to visible light and near infrared light.
In the exemplary embodiment, middle refractivity film layer, the high refractive index layer of the first film group, the first film group low folding Penetrate rate film layer, the second high refractive index layer, the second low-index film, third high refractive index layer and third low refractive index film The corresponding thicknesses of layers ratio of layer is 5:1:1:6:1:1:6.As needed, each film layer physical thickness in plated film lens is rationally controlled Ratio, to obtain the plated film lens that there is anti-reflective effect to visible light and near infrared light.
In the exemplary embodiment, the material of the high refractive index layer of the first film group and the high refractive index layer of the second film group Material can include at least: silane, hydrogenation SiGe, SiC or Ti, Sn, Zr, Nb, Ta oxide any one.That is the application Plated film lens in high refractive index layer film material be chosen as silane, hydrogenation SiGe, SiC or Ti, Sn, Zr, Nb, Any one in the oxide of Ta.
In the exemplary embodiment, the material of middle refractivity film layer can include at least: the oxide of Al, Si, Hf, Y or Any one in nitride.The film material of middle refractivity film layer i.e. in the plated film lens of the application be chosen as Al, Si, The oxide of Hf, Y or any one in nitride.
In the exemplary embodiment, the material of the low-index film of the first film group and the low-index film of the second film group Material can include at least: MgF2Or any one in the oxide of Si, Al.Low refractive index film i.e. in the plated film lens of the application The film material of layer is chosen as MgF2Or any one in the oxide of Si, Al.
In the exemplary embodiment, the first film group is sputtered at the one or both sides of lens substrate.That is the plated film of the application Eyeglass is as needed, and the film layer of the first film group and the film layer of the second film group are optionally coated in lens substrate side, can also To be coated with the film layer of the first film group and the film layer of the second film group in the two sides of lens substrate, so that the plated film lens have to can The light-exposed and good transmissivity of near infrared light, meets near infrared sensor to the transmission needs of near infrared light and visible light.
In the exemplary embodiment, lens substrate is by polymethyl methacrylate materials, epoxide resin material, polyolefin At least one of material, cyclic olefine copolymer, cyclic olefin material and ethylene copolymer material is made.That is the mirror coating of the application Lens substrate in piece is chosen as polymethyl methacrylate materials, epoxide resin material, polyolefine material, cycloolefin copolymer Any one material in object, cyclic olefin material and ethylene copolymer is made.
In the exemplary embodiment, the refractive index n (sub) of lens substrate meets 1.5≤n (sub)≤1.7.That is this Shen The refractive index of the lens substrate in plated film lens please is between 1.5 and 1.7, so that the plated film lens are with to visible light and closely The good transmissivity of infrared light meets near infrared sensor to the transmission needs of near infrared light and visible light.
In the exemplary embodiment, for incident light in the wave-length coverage of 430nm~630nm, being averaged for plated film lens is anti- The rate Rave of penetrating meets Rave≤3%, and maximum reflectivity Rmax meets Rmax≤5%.Plate the plated film for being formed with above-mentioned film layer structure Eyeglass is less than or equal to 3% to the average reflectance of the incident light in the wave-length coverage of 430nm~630nm, and maximum reflectivity is less than Equal to 5%.
In the exemplary embodiment, for incident light in the wave-length coverage of 850nm~1050nm, the maximum of plated film lens is anti- The rate Rmax of penetrating meets Rmax≤3%.Plate wave-length coverage of the plated film lens to 850nm~1050nm for being formed with above-mentioned film layer structure The maximum reflectivity of interior incident light is less than or equal to 3%
In the exemplary embodiment, when a length of 850nm or 940nm of incident light wave, the reflectivity of plated film lens is respectively less than 1%.I.e. it is less than 1% and right to the reflectivity for the incident light that wavelength is 850nm to be formed with the plated film lens of above-mentioned film layer structure for plating Wavelength is the reflectivity of the incident light of 940nm again smaller than 1%.
In the exemplary embodiment, each film layer in the first film group and the second film group meet in the following conditions at least it One: the thicknesses of layers range of middle refractivity film layer is 80~100nm;The thicknesses of layers range of the high refractive index layer of first film group For 20~30nm;The thicknesses of layers range of the low-index film of first film group is 15~20nm;Second high refractive index layer Thicknesses of layers range is 100~110nm;The thicknesses of layers range of second low-index film is 15~20nm;The refraction of third height The thicknesses of layers range of rate film layer is 20~30nm;And the thicknesses of layers range of third low-index film be 100~ 120nm.As needed, can each film layer physical thickness in reasonable set plated film lens thickness range.The physics of each film layer is thick Degree, which cooperates, to be arranged, and to obtain the plated film lens for having anti-reflective effect to visible light and near infrared light, and then improves plated film Transmissivity of the eyeglass to visible light and near infrared light.
In the exemplary embodiment, each film layer in the first film group and the second film group meet in the following conditions at least it One: the thicknesses of layers range of middle refractivity film layer is 90~100nm;The thicknesses of layers range of the high refractive index layer of first film group For 15~25nm;The thicknesses of layers range of the low-index film of first film group is 10~20nm;Second high refractive index layer Thicknesses of layers range is 100~120nm;The thicknesses of layers range of second low-index film is 20~30nm;The refraction of third height The thicknesses of layers range of rate film layer is 15~25nm;And the thicknesses of layers range of third low-index film be 100~ 120nm.As needed, can each film layer physical thickness in reasonable set plated film lens thickness range.The physics of each film layer is thick Degree, which cooperates, to be arranged, and to obtain the plated film lens for having anti-reflective effect to visible light and near infrared light, and then improves plated film Transmissivity of the eyeglass to visible light and near infrared light.
The another aspect of the application provides a kind of optical lens, at least one plating provided by the above embodiment of optical lens Film glass.I.e. the application provides a kind of optical lens of plated film lens for including the various embodiments described above offer, to make full use of The good visible light of plated film lens and transmission of near infra red light rate realize high quality optical imaging.
The another aspect of the application provides a kind of method for forming plated film lens, and method includes:
It is coated with the first film group in the side of lens substrate, the first film group includes middle refractivity film layer and high refractive index film At least one of layer and low-index film;And successively the alternately laminated height for being coated with the second film group layer is rolled in the first film group Penetrate rate film layer and low-index film, wherein the high refractive index layer of the first film group and the high refractive index layer of the second film group Total thicknesses of layers DH is totalWith the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
Optimization eyeglass has benifit under many application scenarios for the transmissivity near infrared light region.For example, in 3D Camera field, this plated film lens have a good application prospect.3D camera is used as transmitting light using infrared ray, can Solve the problems, such as that the ambient lighting of visible light influences.At present in industry there are three types of used mainstream 3D vision techniques: structure light skill Art, time-of-flight method (TOF) and the polygonal three-dimensional imaging of binocular.TOF scheme due to its is easy to use, cost is relatively low the advantages that most Tool prospect.Wherein, TOF scheme captures near infrared light from the received flight time is emitted to, to judge by sensor special Object distance.This sensor is generally near infrared sensor, needs to receive and transmits near infrared light.It is provided by the present application This bloomed lens can meet its application demand well.
It is now specific with following embodiment to be further elaborated with antireflective coating film structure provided by the embodiments of the present application Explanation.
Embodiment 1
Fig. 1 is the film layer structure schematic diagram according to the plated film lens of the application first embodiment.As shown in Figure 1, this Shen Please embodiment provide plated film lens include lens substrate 100 and seven film structures.Details are as follows for seven film structure.From mirror The first layer that piece substrate side starts is middle refractivity film layer 201, and the second layer is the high refractive index layer 202 of the first film group, the Three layers of low-index film 203 for the first film group, the 4th layer is the second high refractive index layer 204, and layer 5 is the second low folding Rate film layer 205 is penetrated, layer 6 is third high refractive index layer 206, and layer 7 is third low-index film 207.Each high refraction The material of rate film layer is Ti3O5, the material of middle refractivity film layer is Al2O3, the material of each low-index film is Al2O3And SiO2 Mixture.Here each film layer physical thickness ratio of seven tunic architectures is 4:1:1:5:1:1:5, and thickness unit is nm.The thicknesses of layers range of middle refractivity film layer 201 is 80~100nm;The film layer of the high refractive index layer 202 of first film group is thick Degree range is 20~30nm;The thicknesses of layers range of the low-index film 203 of first film group is 15~20nm;Second high refraction The thicknesses of layers range of rate film layer 204 is 100~110nm;The thicknesses of layers range of second low-index film 205 be 15~ 20nm;The thicknesses of layers range of third high refractive index layer 206 is 20~30nm;And the film of third low-index film 207 Layer thickness range is 100~120nm.
Fig. 2 is the corresponding plated film lens for being coated with antireflective coating of different lambda1-wavelengths according to the application embodiment Reflectance curve relation schematic diagram.As shown in Fig. 2, making its plated film lens near infrared band 850nm using the film structure Maximum reflectivity R within the scope of~1050nmmax≤ 1.0%, the average reflectance R within the scope of 920nm to 980nmave≤ 0.5%;It can be seen that the antireflection film system structure of present embodiment, plated film lens and optical lens meet the use need near infrared band It asks.In addition, the maximum reflectivity R within the scope of visible light wave range 430nm to 630nmmax≤ 2.1%, average reflectance Rave≤ 1.2%;Maximum reflectivity R within the scope of 630nm to 900nmmax≤ 1.8%, average reflectance Rave≤ 1.2%.Thus may be used See, the optical lens that loading is coated with the plated film lens of the anti-reflection membrane system of present embodiment reaches in visible light and near infrared band The requirement of transparency.
Embodiment 2
Fig. 3 is the film layer structure schematic diagram according to the plated film lens of the application second embodiment.As shown in figure 3, this Shen Please embodiment provide plated film lens include lens substrate 100 and seven film structures.Details are as follows for seven film structure.From mirror The first layer that piece substrate side starts is middle refractivity film layer 201, and the second layer is the high refractive index layer 202 of the first film group, the Three layers of low-index film 203 for the first film group, the 4th layer is the second high refractive index layer 204, and layer 5 is the second low folding Rate film layer 205 is penetrated, layer 6 is third high refractive index layer 206, and layer 7 is third low-index film 207.Each high refraction The material of rate film layer is Ti3O5, the material of middle refractivity film layer is Al2O3, the material of each low-index film is SiO2.Here Each film layer physical thickness ratio of seven tunic architectures is 5:1:1:6:1:1:6, and thickness unit is nm.Middle refractivity film layer 201 thicknesses of layers range is 90~110nm;The thicknesses of layers range of the high refractive index layer 202 of first film group be 15~ 25nm;The thicknesses of layers range of the low-index film 203 of first film group is 10~20nm;Second high refractive index layer 204 Thicknesses of layers range is 100~120nm;The thicknesses of layers range of second low-index film 205 is 20~30nm;Third height folding The thicknesses of layers range for penetrating rate film layer 206 is 15~25nm;And the thicknesses of layers range of third low-index film 207 is 100~120nm.
Fig. 4 is the corresponding mirror coating for being coated with antireflective coating of different lambda1-wavelengths according to the application second embodiment The reflectance curve relation schematic diagram of piece.As shown in figure 4, making its plated film lens near infrared band using the film structure Maximum reflectivity R within the scope of 850nm~1050nmmax≤ 1.0%, the average reflectance R within the scope of 920nm to 980nmave ≤ 0.3%;It can be seen that the antireflection film system structure of present embodiment, plated film lens and optical lens meet the use near infrared band Demand.In addition, the maximum reflectivity R within the scope of visible light wave range 430nm to 630nmmax≤ 2.4%, average reflectance Rave ≤ 2.1%;Maximum reflectivity R within the scope of 630nm to 900nmmax≤ 2.3%, average reflectance Rave≤ 1.4%.Thus As it can be seen that the optical lens that loading is coated with the plated film lens of the anti-reflection membrane system of present embodiment is reached in visible light and near infrared band To the requirement of transparency.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art Member is it should be appreciated that invention scope involved in the application, however it is not limited to technology made of the specific combination of above-mentioned technical characteristic Scheme, while should also cover in the case where not departing from the inventive concept, it is carried out by above-mentioned technical characteristic or its equivalent feature Any combination and the other technical solutions formed.Such as features described above has similar function with (but being not limited to) disclosed herein Can technical characteristic replaced mutually and the technical solution that is formed.

Claims (10)

1. a kind of plated film lens, which is characterized in that the plated film lens include:
Lens substrate;
First film group, is coated on the side of the lens substrate, and including middle refractivity film layer and high refractive index layer and low At least one of refractivity film layer;And
Second film group, including the successively alternately laminated high refractive index layer and low-index film for being sputtered at the first film group, Wherein,
Total thicknesses of layers D of the high refractive index layer of the first film group and the high refractive index layer of the second film groupH is totalWith institute State the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
2. plated film lens according to claim 1, which is characterized in that the high refractive index layer of the first film group and described Every layer of refractive index n1 meets in the high refractive index layer of second film group: 2.0≤n1≤4.0.
3. plated film lens according to claim 2, which is characterized in that the refractive index n2 of the middle refractivity film layer meets: 1.6≤n2≤2.0。
4. plated film lens according to any one of claim 1-3, which is characterized in that the low-refraction of the first film group Every layer of refractive index n3 meets in the low-index film of film layer and the second film group: 1.4≤n3≤1.6.
5. plated film lens according to claim 1, which is characterized in that the film layer sum of the second film group is at least 3 layers.
6. plated film lens according to claim 1, which is characterized in that the first film group includes middle refractivity film layer, height Refractivity film layer and low-index film,
Wherein, the middle refractivity film layer is coated in the lens substrate, and the high refractive index layer of the first film group is coated with On the middle refractivity film layer, the low-index film of the first film group is coated on the high refractive index film of the first film group On layer.
7. plated film lens according to claim 6, which is characterized in that the high refractive index layer of the second film group includes the Two high refractive index layers and third high refractive index layer,
The low-index film of the second film group includes the second low-index film and third low-index film, wherein
Second low-index film is coated on second high refractive index layer;
The third high refractive index layer is coated on second low-index film;And
The third low-index film is coated on the third high refractive index layer.
8. plated film lens according to claim 7, which is characterized in that the middle refractivity film layer, the first film group High refractive index layer, the low-index film of the first film group, second high refractive index layer, second low-refraction Film layer, the third high refractive index layer and the corresponding thicknesses of layers ratio of the third low-index film are 4:1:1:5:1: 1:5。
9. a kind of optical lens, which is characterized in that the optical lens includes such as plated film of any of claims 1-8 Eyeglass.
10. a kind of method for forming plated film lens, which is characterized in that the described method includes:
It is coated with the first film group in the side of lens substrate, the first film group includes middle refractivity film layer and high refractive index film At least one of layer and low-index film;And
The successively alternately laminated high refractive index layer and low-index film for being coated with the second film group in the first film group, In,
Total thicknesses of layers D of the high refractive index layer of the first film group and the high refractive index layer of the second film groupH is totalWith institute State the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
CN201910575804.7A 2019-06-28 2019-06-28 Plated film lens, optical lens and the method for forming plated film lens Pending CN110208885A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111399095A (en) * 2020-05-15 2020-07-10 浙江舜宇光学有限公司 Optical element, method of manufacturing optical element, and optical lens
CN113031126A (en) * 2021-03-24 2021-06-25 浙江舜宇光学有限公司 Waterproof antireflection film, lens and imaging device
CN113031121A (en) * 2019-12-09 2021-06-25 现代自动车株式会社 Infrared anti-reflection lens
CN113774324A (en) * 2021-08-05 2021-12-10 维达力实业(赤壁)有限公司 Superhard anti-reflection film and preparation method thereof

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63113501A (en) * 1986-10-31 1988-05-18 Canon Inc Reflection preventing film
JP2005165249A (en) * 2003-11-10 2005-06-23 Olympus Corp Antireflection film, optical lens equipped therewith and optical lens unit
US20050219724A1 (en) * 2004-03-31 2005-10-06 Konica Minolta Opto, Inc. Optical element having a dielectric multilayer film
CN101393276A (en) * 2007-09-21 2009-03-25 鸿富锦精密工业(深圳)有限公司 Wide-band antireflective film and optical element with the wide-band antireflective film
CN202453522U (en) * 2011-12-22 2012-09-26 凤凰光学(上海)有限公司 Novel antireflection film system structure
WO2015097898A1 (en) * 2013-12-27 2015-07-02 株式会社シンクロン Process for forming multilayer antireflection film
CN105891928A (en) * 2016-04-29 2016-08-24 杭州科汀光学技术有限公司 Camera filter for day and night
CN207366778U (en) * 2017-05-09 2018-05-15 万能光学科技有限公司 Optical lens
CN109856707A (en) * 2019-02-26 2019-06-07 江西凤凰光学科技有限公司 A kind of anti-reflection film of broadband ultra-low reflectance
CN210323440U (en) * 2019-06-28 2020-04-14 浙江舜宇光学有限公司 Coated lens and optical lens comprising same

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63113501A (en) * 1986-10-31 1988-05-18 Canon Inc Reflection preventing film
JP2005165249A (en) * 2003-11-10 2005-06-23 Olympus Corp Antireflection film, optical lens equipped therewith and optical lens unit
US20050219724A1 (en) * 2004-03-31 2005-10-06 Konica Minolta Opto, Inc. Optical element having a dielectric multilayer film
CN101393276A (en) * 2007-09-21 2009-03-25 鸿富锦精密工业(深圳)有限公司 Wide-band antireflective film and optical element with the wide-band antireflective film
CN202453522U (en) * 2011-12-22 2012-09-26 凤凰光学(上海)有限公司 Novel antireflection film system structure
WO2015097898A1 (en) * 2013-12-27 2015-07-02 株式会社シンクロン Process for forming multilayer antireflection film
CN105891928A (en) * 2016-04-29 2016-08-24 杭州科汀光学技术有限公司 Camera filter for day and night
CN207366778U (en) * 2017-05-09 2018-05-15 万能光学科技有限公司 Optical lens
CN109856707A (en) * 2019-02-26 2019-06-07 江西凤凰光学科技有限公司 A kind of anti-reflection film of broadband ultra-low reflectance
CN210323440U (en) * 2019-06-28 2020-04-14 浙江舜宇光学有限公司 Coated lens and optical lens comprising same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113031121A (en) * 2019-12-09 2021-06-25 现代自动车株式会社 Infrared anti-reflection lens
CN113031121B (en) * 2019-12-09 2024-04-05 现代自动车株式会社 Anti-reflection lens for infrared ray
CN111399095A (en) * 2020-05-15 2020-07-10 浙江舜宇光学有限公司 Optical element, method of manufacturing optical element, and optical lens
CN113031126A (en) * 2021-03-24 2021-06-25 浙江舜宇光学有限公司 Waterproof antireflection film, lens and imaging device
CN113774324A (en) * 2021-08-05 2021-12-10 维达力实业(赤壁)有限公司 Superhard anti-reflection film and preparation method thereof

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