CN110208885A - Plated film lens, optical lens and the method for forming plated film lens - Google Patents
Plated film lens, optical lens and the method for forming plated film lens Download PDFInfo
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- CN110208885A CN110208885A CN201910575804.7A CN201910575804A CN110208885A CN 110208885 A CN110208885 A CN 110208885A CN 201910575804 A CN201910575804 A CN 201910575804A CN 110208885 A CN110208885 A CN 110208885A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 description 32
- 238000002310 reflectometry Methods 0.000 description 17
- 238000010586 diagram Methods 0.000 description 8
- 238000002366 time-of-flight method Methods 0.000 description 8
- 230000003667 anti-reflective effect Effects 0.000 description 7
- 239000006117 anti-reflective coating Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- -1 cyclic olefin Chemical class 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 229920001038 ethylene copolymer Polymers 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- 238000005984 hydrogenation reaction Methods 0.000 description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 3
- 229910003465 moissanite Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 229910009815 Ti3O5 Inorganic materials 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
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- 238000003384 imaging method Methods 0.000 description 2
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- 229920000098 polyolefin Polymers 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/008—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras designed for infrared light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Optical Filters (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
This application discloses a kind of plated film lens, optical lens and the methods for forming plated film lens.Wherein, which includes lens substrate;First film group is coated on the side of the lens substrate, and including middle refractivity film layer and at least one of high refractive index layer and low-index film;And the second film group, including the successively alternately laminated high refractive index layer and low-index film for being sputtered at the first film group, wherein total thicknesses of layers D of the high refractive index layer of the first film group and the high refractive index layer of the second film groupH is totalWith the overall thickness D of the middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
Description
Technical field
This application involves optical element technology field more particularly to a kind of plated film lens, optical lens and form mirror coating
The method of piece.
Background technique
In camera field, 3D camera is had a good application prospect.It uses infrared ray as transmitting light, can
Solve the problems, such as that the ambient lighting of visible light influences.At present in industry there are three types of used mainstream 3D vision techniques: structure light skill
Art, time-of-flight method (TOF) and the polygonal three-dimensional imaging of binocular.TOF scheme due to its is easy to use, cost is relatively low the advantages that most
Tool prospect.Wherein, TOF scheme captures near infrared light from the received flight time is emitted to, to judge by sensor special
Object distance.This sensor is generally near infrared sensor, needs to receive and transmits near infrared light.
In order to increase near infrared sensor to the acceptance rate of near infrared light, usual antireflective coating is coated on lens, rib
It the surface of the optical components such as mirror can especially by inhibition to improve the transmissivity for the optical element being made of multiple lens
The reflection of light-exposed spectrum becomes easy the brightness of image and improved optical instrument visible.However, general existing antireflective
Film is low to visible light region reflectivity, but near infrared region, reflectivity is increased with the increase of wavelength, therefore can not
Suitable for receiving the sensor of near infrared light.
Summary of the invention
This application provides be applicable to portable electronic product, can at least solve or part solve it is in the prior art
The plated film lens and optical lens of at least one above-mentioned disadvantage.
The one side of the application provides a kind of plated film lens, and the plated film lens include: lens substrate;First film group,
It is coated on the side of the lens substrate, and including in middle refractivity film layer and high refractive index layer and low-index film
At least one;And the second film group, including the successively alternately laminated high refractive index layer for being sputtered at the first film group and low
Refractivity film layer, wherein total film of the high refractive index layer of the first film group and the high refractive index layer of the second film group
Thickness degree DH is totalWith the overall thickness D of the middle refractivity film layerM is totalRatio DH is total/DM is total1≤D can be metH is total/DM is total≤3。
In one embodiment, the high refractive index film of the high refractive index layer of the first film group and the second film group
Every layer of refractive index n1 can meet in layer: 2.0≤n1≤4.0.
In one embodiment, the refractive index n2 of the middle refractivity film layer can meet: 1.6≤n2≤2.0.
In one embodiment, the low refractive index film of the low-index film of the first film group and the second film group
Every layer of refractive index n3 can meet in layer: 1.4≤n3≤1.6.
In one embodiment, the film layer sum of the second film group can be at least 3 layers.
In one embodiment, the first film group may include middle refractivity film layer, high refractive index layer and low refraction
Rate film layer, wherein the middle refractivity film layer is coated in the lens substrate, the high refractive index layer plating of the first film group
It makes on the middle refractivity film layer, the low-index film of the first film group is coated on the high refractive index of the first film group
In film layer.
In one embodiment, the high refractive index layer of the second film group include the second high refractive index layer and
Third high refractive index layer, the low-index film of the second film group include the second low-index film and the low folding of third
Penetrate rate film layer, wherein second low-index film is coated on second high refractive index layer;The third high refractive index
Film layer is coated on two low-index film;And the third low-index film is coated on the third high refractive index film
On layer.
In one embodiment, the middle refractivity film layer, the high refractive index layer of the first film group, described first
The low-index film of film group, second high refractive index layer, second low-index film, the third high refractive index
Film layer and the corresponding thicknesses of layers ratio of the third low-index film are 4:1:1:5:1:1:5.
In one embodiment, the middle refractivity film layer, the high refractive index layer of the first film group, described first
The low-index film of film group, second high refractive index layer, second low-index film, the third high refractive index
Film layer and the corresponding thicknesses of layers ratio of the third low-index film are 5:1:1:6:1:1:6.
In one embodiment, the high refractive index film of the high refractive index layer of the first film group and the second film group
The material of layer can include at least: silane, hydrogenation SiGe, SiC or Ti, Sn, Zr, Nb, Ta oxide in any one.
In one embodiment, the material of the middle refractivity film layer can include at least: the oxide of Al, Si, Hf, Y
Or any one in nitride.
In one embodiment, the low refractive index film of the low-index film of the first film group and the second film group
The material of layer can include at least: MgF2Or any one in the oxide of Si, Al.
In one embodiment, the first film group is sputtered at the one or both sides of the lens substrate.
In one embodiment, the lens substrate is by polymethyl methacrylate materials, epoxide resin material, polyene
At least one of hydrocarbon material, cyclic olefine copolymer, cyclic olefin material and ethylene copolymer material is made.
In one embodiment, the refractive index n (sub) of lens substrate can meet 1.5≤n (sub)≤1.7.
In one embodiment, in the wave-length coverage of 430nm~630nm, the plated film lens are averaged incident light
Reflectivity Rave can meet Rave≤3%, and maximum reflectivity Rmax can meet Rmax≤5%.
In one embodiment, incident light is in the wave-length coverage of 850nm~1050nm, the maximum of the plated film lens
Reflectivity Rmax can meet Rmax≤3%.
In one embodiment, when a length of 850nm or 940nm of incident light wave, the reflectivity of the plated film lens
Less than 1%.
In one embodiment, each film layer in the first film group and the second film group meets in the following conditions
At least one: the thicknesses of layers range of the middle refractivity film layer can be 80~100nm;The high refractive index film of the first film group
The thicknesses of layers range of layer can be 20~30nm;The thicknesses of layers range of the low-index film of the first film group can for 15~
20nm;The thicknesses of layers range of second high refractive index layer can be 100~110nm;Second low-index film
Thicknesses of layers range can be 15~20nm;The thicknesses of layers range of the third high refractive index layer can be 20~30nm;And
The thicknesses of layers range of the third low-index film can be 100~120nm.
In one embodiment, each film layer in the first film group and the second film group meets in the following conditions
At least one: the thicknesses of layers range of the middle refractivity film layer is 90~100nm;The high refractive index layer of the first film group
Thicknesses of layers range be 15~25nm;The thicknesses of layers range of the low-index film of the first film group is 10~20nm;
The thicknesses of layers range of second high refractive index layer is 100~120nm;The thicknesses of layers of second low-index film
Range is 20~30nm;The thicknesses of layers range of the third high refractive index layer is 15~25nm;And the low folding of the third
The thicknesses of layers range for penetrating rate film layer is 100~120nm.
The another aspect of the application provides a kind of optical lens, at least one above-described embodiment of the optical lens provides
Plated film lens.
The another aspect of the application provides a kind of method for forming plated film lens, which comprises
The first film group is coated in the side of lens substrate, and the first film group includes middle refractivity film layer and is located at institute
State the high refractive index layer and/or low-index film on refractivity film layer;And successively replace in the first film group
Stacking is coated with the high refractive index layer and low-index film of the second film group layer, wherein the high refractive index film of the first film group
Total thicknesses of layers D of layer and the high refractive index layer of the second film groupH is totalWith the overall thickness D of the middle refractivity film layerM is totalRatio
Value DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
Plated film lens provided by the present application include lens substrate;First film group is coated on the side of the lens substrate, and
High refractive index layer and/or low-index film including middle refractivity film layer and on the middle refractivity film layer;With
And the second film group, including the successively alternately laminated high refractive index layer and low-index film for being sputtered at the first film group,
In, total thicknesses of layers D of the high refractive index layer of the high refractive index layer of the first film group and the second film groupH is totalWith institute
State the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤ 3, so that obtaining has above-mentioned film layer knot
The plated film lens of structure are realized to visible light and the good transmission effects of near infrared light.That is, according to the plated film lens of the application to can
Light-exposed and near infrared light can be realized anti-reflective effect.
Detailed description of the invention
In conjunction with attached drawing, by the detailed description of following non-limiting embodiment, other features of the application, purpose and excellent
Point will be apparent.In the accompanying drawings:
Fig. 1 is the film layer structure schematic diagram according to the plated film lens of the application first embodiment;
Fig. 2 is the corresponding mirror coating for being coated with antireflective coating of different lambda1-wavelengths according to the application first embodiment
The reflectance curve relation schematic diagram of piece;
Fig. 3 is the film layer structure schematic diagram according to the plated film lens of the application second embodiment;
Fig. 4 is the corresponding mirror coating for being coated with antireflective coating of different lambda1-wavelengths according to the application second embodiment
The reflectance curve relation schematic diagram of piece.
Specific embodiment
Various aspects of the reference attached drawing to the application are made more detailed description by the application in order to better understand.It answers
Understand, the only description to the illustrative embodiments of the application is described in detail in these, rather than limits the application in any way
Range.In the specification, the identical element of identical reference numbers.Stating "and/or" includes associated institute
Any and all combinations of one or more of list of items.
It should be noted that in the present specification, first, second, third, etc. statement is only used for a feature and another spy
Sign distinguishes, without indicating any restrictions to feature.
It will also be appreciated that term " comprising ", " including ", " having ", "comprising" and/or " including ", when in this theory
It indicates there is stated feature, element and/or component when using in bright book, but does not preclude the presence or addition of one or more
Other feature, component, assembly unit and/or their combination.In addition, ought the statement of such as at least one of " ... " appear in institute
When after the list of column feature, entire listed feature is modified, rather than modifies the individual component in list.In addition, when describing this
When the embodiment of application, " one or more embodiments of the application " are indicated using "available".Also, term " illustrative "
It is intended to refer to example or illustration.
Unless otherwise defined, otherwise all terms (including technical terms and scientific words) used herein all have with
The application one skilled in the art's is generally understood identical meaning.It will also be appreciated that term (such as in everyday words
Term defined in allusion quotation) it should be interpreted as having and their consistent meanings of meaning in the context of the relevant technologies, and
It will not be explained with idealization or excessively formal sense, unless clear herein so limit.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
The feature of the application, principle and other aspects are described in detail below.
In order to meet transmission of the near infrared sensor to visible light and near infrared light, the application provides a kind of mirror coating
Piece, the plated film lens include lens substrate, the first film group and the second film group, which is coated on the side of lens substrate
Face, the second film group are coated in the first film group.
In the exemplary embodiment, the first film group may include middle refractivity film layer and high refractive index layer and low refraction
At least one of rate film layer.That is, the first film group can be middle refractivity film layer and high refractive index layer and low-index film
One or both of any combination.With M indicate in refractivity film layer, L indicate low-index film, H indicate high refractive index
Film layer, then the structure of the first film group may be, for example, MH, ML, HM, LM, MHL, HMH, HLM etc..Second film group may include successively handing over
For high refractive index layer and low-index film that stacking is coated with, and the most inner side film layer of the second film group is coated on the first film group
In outermost layer film layer.
In the exemplary embodiment, the high refractive index layer of the first film group and the high refractive index layer of the second film group is total
Thicknesses of layers DH is totalWith the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is total1≤D can be metH is total/DM is total≤3.Plating is formed with above-mentioned
The plated film lens of film layer structure have good transmission effects to visible light and near infrared light.
In the exemplary embodiment, every in the high refractive index layer of the first film group and the high refractive index layer of the second film group
The refractive index n1 of layer meets: 2.0≤n1≤4.0.The refractive index n2 of middle refractivity film layer meets: 1.6≤n2≤2.0.First film
Every layer of refractive index n3 meets in the low-index film of group and the low-index film of the second film group: 1.4≤n3≤1.6.Root
According to needs, the refractive index of each film layer in plated film lens is controlled in reasonable numberical range, to obtain to visible light and close red
Outer light has the plated film lens of anti-reflective effect.
In the exemplary embodiment, the film layer sum of the second film group is at least 3 layers.
In the exemplary embodiment, the first film group may include middle refractivity film layer, high refractive index layer and low-refraction
Film layer, wherein middle refractivity film layer is coated in lens substrate, and the high refractive index layer of the first film group is coated on middle refractive index film
On layer, the low-index film of the first film group is coated on the high refractive index layer of the first film group.That is the first film group has 3 tunics
Layer, middle refractivity film layer, high refractive index layer and the low-index film being respectively successively coated with.
In the exemplary embodiment, the high refractive index layer of the second film group includes that the second high refractive index layer and third are high
Refractivity film layer, the low-index film of the second film group include the second low-index film and third low-index film, wherein
Second low-index film is coated on the second high refractive index layer;Third high refractive index layer is coated on two low-index films;
And third low-index film is coated on third high refractive index layer.That is the second film group includes 4 tunic layers, respectively successively
The second high refractive index layer, the second low-index film, third high refractive index layer and the third low-index film being coated with.
In the exemplary embodiment, middle refractivity film layer, the high refractive index layer of the first film group, the first film group low folding
Penetrate rate film layer, the second high refractive index layer, the second low-index film, third high refractive index layer and third low refractive index film
The corresponding thicknesses of layers ratio of layer is 4:1:1:5:1:1:5.As needed, each film layer physical thickness in plated film lens is rationally controlled
Ratio, to obtain the plated film lens that there is anti-reflective effect to visible light and near infrared light.
In the exemplary embodiment, middle refractivity film layer, the high refractive index layer of the first film group, the first film group low folding
Penetrate rate film layer, the second high refractive index layer, the second low-index film, third high refractive index layer and third low refractive index film
The corresponding thicknesses of layers ratio of layer is 5:1:1:6:1:1:6.As needed, each film layer physical thickness in plated film lens is rationally controlled
Ratio, to obtain the plated film lens that there is anti-reflective effect to visible light and near infrared light.
In the exemplary embodiment, the material of the high refractive index layer of the first film group and the high refractive index layer of the second film group
Material can include at least: silane, hydrogenation SiGe, SiC or Ti, Sn, Zr, Nb, Ta oxide any one.That is the application
Plated film lens in high refractive index layer film material be chosen as silane, hydrogenation SiGe, SiC or Ti, Sn, Zr, Nb,
Any one in the oxide of Ta.
In the exemplary embodiment, the material of middle refractivity film layer can include at least: the oxide of Al, Si, Hf, Y or
Any one in nitride.The film material of middle refractivity film layer i.e. in the plated film lens of the application be chosen as Al, Si,
The oxide of Hf, Y or any one in nitride.
In the exemplary embodiment, the material of the low-index film of the first film group and the low-index film of the second film group
Material can include at least: MgF2Or any one in the oxide of Si, Al.Low refractive index film i.e. in the plated film lens of the application
The film material of layer is chosen as MgF2Or any one in the oxide of Si, Al.
In the exemplary embodiment, the first film group is sputtered at the one or both sides of lens substrate.That is the plated film of the application
Eyeglass is as needed, and the film layer of the first film group and the film layer of the second film group are optionally coated in lens substrate side, can also
To be coated with the film layer of the first film group and the film layer of the second film group in the two sides of lens substrate, so that the plated film lens have to can
The light-exposed and good transmissivity of near infrared light, meets near infrared sensor to the transmission needs of near infrared light and visible light.
In the exemplary embodiment, lens substrate is by polymethyl methacrylate materials, epoxide resin material, polyolefin
At least one of material, cyclic olefine copolymer, cyclic olefin material and ethylene copolymer material is made.That is the mirror coating of the application
Lens substrate in piece is chosen as polymethyl methacrylate materials, epoxide resin material, polyolefine material, cycloolefin copolymer
Any one material in object, cyclic olefin material and ethylene copolymer is made.
In the exemplary embodiment, the refractive index n (sub) of lens substrate meets 1.5≤n (sub)≤1.7.That is this Shen
The refractive index of the lens substrate in plated film lens please is between 1.5 and 1.7, so that the plated film lens are with to visible light and closely
The good transmissivity of infrared light meets near infrared sensor to the transmission needs of near infrared light and visible light.
In the exemplary embodiment, for incident light in the wave-length coverage of 430nm~630nm, being averaged for plated film lens is anti-
The rate Rave of penetrating meets Rave≤3%, and maximum reflectivity Rmax meets Rmax≤5%.Plate the plated film for being formed with above-mentioned film layer structure
Eyeglass is less than or equal to 3% to the average reflectance of the incident light in the wave-length coverage of 430nm~630nm, and maximum reflectivity is less than
Equal to 5%.
In the exemplary embodiment, for incident light in the wave-length coverage of 850nm~1050nm, the maximum of plated film lens is anti-
The rate Rmax of penetrating meets Rmax≤3%.Plate wave-length coverage of the plated film lens to 850nm~1050nm for being formed with above-mentioned film layer structure
The maximum reflectivity of interior incident light is less than or equal to 3%
In the exemplary embodiment, when a length of 850nm or 940nm of incident light wave, the reflectivity of plated film lens is respectively less than
1%.I.e. it is less than 1% and right to the reflectivity for the incident light that wavelength is 850nm to be formed with the plated film lens of above-mentioned film layer structure for plating
Wavelength is the reflectivity of the incident light of 940nm again smaller than 1%.
In the exemplary embodiment, each film layer in the first film group and the second film group meet in the following conditions at least it
One: the thicknesses of layers range of middle refractivity film layer is 80~100nm;The thicknesses of layers range of the high refractive index layer of first film group
For 20~30nm;The thicknesses of layers range of the low-index film of first film group is 15~20nm;Second high refractive index layer
Thicknesses of layers range is 100~110nm;The thicknesses of layers range of second low-index film is 15~20nm;The refraction of third height
The thicknesses of layers range of rate film layer is 20~30nm;And the thicknesses of layers range of third low-index film be 100~
120nm.As needed, can each film layer physical thickness in reasonable set plated film lens thickness range.The physics of each film layer is thick
Degree, which cooperates, to be arranged, and to obtain the plated film lens for having anti-reflective effect to visible light and near infrared light, and then improves plated film
Transmissivity of the eyeglass to visible light and near infrared light.
In the exemplary embodiment, each film layer in the first film group and the second film group meet in the following conditions at least it
One: the thicknesses of layers range of middle refractivity film layer is 90~100nm;The thicknesses of layers range of the high refractive index layer of first film group
For 15~25nm;The thicknesses of layers range of the low-index film of first film group is 10~20nm;Second high refractive index layer
Thicknesses of layers range is 100~120nm;The thicknesses of layers range of second low-index film is 20~30nm;The refraction of third height
The thicknesses of layers range of rate film layer is 15~25nm;And the thicknesses of layers range of third low-index film be 100~
120nm.As needed, can each film layer physical thickness in reasonable set plated film lens thickness range.The physics of each film layer is thick
Degree, which cooperates, to be arranged, and to obtain the plated film lens for having anti-reflective effect to visible light and near infrared light, and then improves plated film
Transmissivity of the eyeglass to visible light and near infrared light.
The another aspect of the application provides a kind of optical lens, at least one plating provided by the above embodiment of optical lens
Film glass.I.e. the application provides a kind of optical lens of plated film lens for including the various embodiments described above offer, to make full use of
The good visible light of plated film lens and transmission of near infra red light rate realize high quality optical imaging.
The another aspect of the application provides a kind of method for forming plated film lens, and method includes:
It is coated with the first film group in the side of lens substrate, the first film group includes middle refractivity film layer and high refractive index film
At least one of layer and low-index film;And successively the alternately laminated height for being coated with the second film group layer is rolled in the first film group
Penetrate rate film layer and low-index film, wherein the high refractive index layer of the first film group and the high refractive index layer of the second film group
Total thicknesses of layers DH is totalWith the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
Optimization eyeglass has benifit under many application scenarios for the transmissivity near infrared light region.For example, in 3D
Camera field, this plated film lens have a good application prospect.3D camera is used as transmitting light using infrared ray, can
Solve the problems, such as that the ambient lighting of visible light influences.At present in industry there are three types of used mainstream 3D vision techniques: structure light skill
Art, time-of-flight method (TOF) and the polygonal three-dimensional imaging of binocular.TOF scheme due to its is easy to use, cost is relatively low the advantages that most
Tool prospect.Wherein, TOF scheme captures near infrared light from the received flight time is emitted to, to judge by sensor special
Object distance.This sensor is generally near infrared sensor, needs to receive and transmits near infrared light.It is provided by the present application
This bloomed lens can meet its application demand well.
It is now specific with following embodiment to be further elaborated with antireflective coating film structure provided by the embodiments of the present application
Explanation.
Embodiment 1
Fig. 1 is the film layer structure schematic diagram according to the plated film lens of the application first embodiment.As shown in Figure 1, this Shen
Please embodiment provide plated film lens include lens substrate 100 and seven film structures.Details are as follows for seven film structure.From mirror
The first layer that piece substrate side starts is middle refractivity film layer 201, and the second layer is the high refractive index layer 202 of the first film group, the
Three layers of low-index film 203 for the first film group, the 4th layer is the second high refractive index layer 204, and layer 5 is the second low folding
Rate film layer 205 is penetrated, layer 6 is third high refractive index layer 206, and layer 7 is third low-index film 207.Each high refraction
The material of rate film layer is Ti3O5, the material of middle refractivity film layer is Al2O3, the material of each low-index film is Al2O3And SiO2
Mixture.Here each film layer physical thickness ratio of seven tunic architectures is 4:1:1:5:1:1:5, and thickness unit is
nm.The thicknesses of layers range of middle refractivity film layer 201 is 80~100nm;The film layer of the high refractive index layer 202 of first film group is thick
Degree range is 20~30nm;The thicknesses of layers range of the low-index film 203 of first film group is 15~20nm;Second high refraction
The thicknesses of layers range of rate film layer 204 is 100~110nm;The thicknesses of layers range of second low-index film 205 be 15~
20nm;The thicknesses of layers range of third high refractive index layer 206 is 20~30nm;And the film of third low-index film 207
Layer thickness range is 100~120nm.
Fig. 2 is the corresponding plated film lens for being coated with antireflective coating of different lambda1-wavelengths according to the application embodiment
Reflectance curve relation schematic diagram.As shown in Fig. 2, making its plated film lens near infrared band 850nm using the film structure
Maximum reflectivity R within the scope of~1050nmmax≤ 1.0%, the average reflectance R within the scope of 920nm to 980nmave≤
0.5%;It can be seen that the antireflection film system structure of present embodiment, plated film lens and optical lens meet the use need near infrared band
It asks.In addition, the maximum reflectivity R within the scope of visible light wave range 430nm to 630nmmax≤ 2.1%, average reflectance Rave≤
1.2%;Maximum reflectivity R within the scope of 630nm to 900nmmax≤ 1.8%, average reflectance Rave≤ 1.2%.Thus may be used
See, the optical lens that loading is coated with the plated film lens of the anti-reflection membrane system of present embodiment reaches in visible light and near infrared band
The requirement of transparency.
Embodiment 2
Fig. 3 is the film layer structure schematic diagram according to the plated film lens of the application second embodiment.As shown in figure 3, this Shen
Please embodiment provide plated film lens include lens substrate 100 and seven film structures.Details are as follows for seven film structure.From mirror
The first layer that piece substrate side starts is middle refractivity film layer 201, and the second layer is the high refractive index layer 202 of the first film group, the
Three layers of low-index film 203 for the first film group, the 4th layer is the second high refractive index layer 204, and layer 5 is the second low folding
Rate film layer 205 is penetrated, layer 6 is third high refractive index layer 206, and layer 7 is third low-index film 207.Each high refraction
The material of rate film layer is Ti3O5, the material of middle refractivity film layer is Al2O3, the material of each low-index film is SiO2.Here
Each film layer physical thickness ratio of seven tunic architectures is 5:1:1:6:1:1:6, and thickness unit is nm.Middle refractivity film layer
201 thicknesses of layers range is 90~110nm;The thicknesses of layers range of the high refractive index layer 202 of first film group be 15~
25nm;The thicknesses of layers range of the low-index film 203 of first film group is 10~20nm;Second high refractive index layer 204
Thicknesses of layers range is 100~120nm;The thicknesses of layers range of second low-index film 205 is 20~30nm;Third height folding
The thicknesses of layers range for penetrating rate film layer 206 is 15~25nm;And the thicknesses of layers range of third low-index film 207 is
100~120nm.
Fig. 4 is the corresponding mirror coating for being coated with antireflective coating of different lambda1-wavelengths according to the application second embodiment
The reflectance curve relation schematic diagram of piece.As shown in figure 4, making its plated film lens near infrared band using the film structure
Maximum reflectivity R within the scope of 850nm~1050nmmax≤ 1.0%, the average reflectance R within the scope of 920nm to 980nmave
≤ 0.3%;It can be seen that the antireflection film system structure of present embodiment, plated film lens and optical lens meet the use near infrared band
Demand.In addition, the maximum reflectivity R within the scope of visible light wave range 430nm to 630nmmax≤ 2.4%, average reflectance Rave
≤ 2.1%;Maximum reflectivity R within the scope of 630nm to 900nmmax≤ 2.3%, average reflectance Rave≤ 1.4%.Thus
As it can be seen that the optical lens that loading is coated with the plated film lens of the anti-reflection membrane system of present embodiment is reached in visible light and near infrared band
To the requirement of transparency.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art
Member is it should be appreciated that invention scope involved in the application, however it is not limited to technology made of the specific combination of above-mentioned technical characteristic
Scheme, while should also cover in the case where not departing from the inventive concept, it is carried out by above-mentioned technical characteristic or its equivalent feature
Any combination and the other technical solutions formed.Such as features described above has similar function with (but being not limited to) disclosed herein
Can technical characteristic replaced mutually and the technical solution that is formed.
Claims (10)
1. a kind of plated film lens, which is characterized in that the plated film lens include:
Lens substrate;
First film group, is coated on the side of the lens substrate, and including middle refractivity film layer and high refractive index layer and low
At least one of refractivity film layer;And
Second film group, including the successively alternately laminated high refractive index layer and low-index film for being sputtered at the first film group,
Wherein,
Total thicknesses of layers D of the high refractive index layer of the first film group and the high refractive index layer of the second film groupH is totalWith institute
State the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
2. plated film lens according to claim 1, which is characterized in that the high refractive index layer of the first film group and described
Every layer of refractive index n1 meets in the high refractive index layer of second film group: 2.0≤n1≤4.0.
3. plated film lens according to claim 2, which is characterized in that the refractive index n2 of the middle refractivity film layer meets:
1.6≤n2≤2.0。
4. plated film lens according to any one of claim 1-3, which is characterized in that the low-refraction of the first film group
Every layer of refractive index n3 meets in the low-index film of film layer and the second film group: 1.4≤n3≤1.6.
5. plated film lens according to claim 1, which is characterized in that the film layer sum of the second film group is at least 3 layers.
6. plated film lens according to claim 1, which is characterized in that the first film group includes middle refractivity film layer, height
Refractivity film layer and low-index film,
Wherein, the middle refractivity film layer is coated in the lens substrate, and the high refractive index layer of the first film group is coated with
On the middle refractivity film layer, the low-index film of the first film group is coated on the high refractive index film of the first film group
On layer.
7. plated film lens according to claim 6, which is characterized in that the high refractive index layer of the second film group includes the
Two high refractive index layers and third high refractive index layer,
The low-index film of the second film group includes the second low-index film and third low-index film, wherein
Second low-index film is coated on second high refractive index layer;
The third high refractive index layer is coated on second low-index film;And
The third low-index film is coated on the third high refractive index layer.
8. plated film lens according to claim 7, which is characterized in that the middle refractivity film layer, the first film group
High refractive index layer, the low-index film of the first film group, second high refractive index layer, second low-refraction
Film layer, the third high refractive index layer and the corresponding thicknesses of layers ratio of the third low-index film are 4:1:1:5:1:
1:5。
9. a kind of optical lens, which is characterized in that the optical lens includes such as plated film of any of claims 1-8
Eyeglass.
10. a kind of method for forming plated film lens, which is characterized in that the described method includes:
It is coated with the first film group in the side of lens substrate, the first film group includes middle refractivity film layer and high refractive index film
At least one of layer and low-index film;And
The successively alternately laminated high refractive index layer and low-index film for being coated with the second film group in the first film group,
In,
Total thicknesses of layers D of the high refractive index layer of the first film group and the high refractive index layer of the second film groupH is totalWith institute
State the overall thickness D of middle refractivity film layerM is totalRatio DH is total/DM is totalMeet 1≤DH is total/DM is total≤3。
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CN113774324A (en) * | 2021-08-05 | 2021-12-10 | 维达力实业(赤壁)有限公司 | Superhard anti-reflection film and preparation method thereof |
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