CN110186486A - Tandem flexible sensor and its method based on resonator and nanofiber - Google Patents
Tandem flexible sensor and its method based on resonator and nanofiber Download PDFInfo
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- CN110186486A CN110186486A CN201910362284.1A CN201910362284A CN110186486A CN 110186486 A CN110186486 A CN 110186486A CN 201910362284 A CN201910362284 A CN 201910362284A CN 110186486 A CN110186486 A CN 110186486A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0271—Resonators; ultrasonic resonators
Abstract
The invention discloses a kind of tandem flexible sensor and its method based on resonator and nanofiber.Sensor is made of resonator, flexible fabric substrate, nanofiber.Sensor can be used for the sensing of the variables such as humidity, gas or stress, its working principle is that changing using the electrology characteristic of nanofiber when detection variable change, and then cause the change with the resonance frequency of the concatenated integrated circuit of resonator, to realize sensing.The structure that the present invention uses sensing material mutually to separate with resonator, compared with the structure of traditional overlay film on the resonator, this structure can be by resonator Vacuum Package, its state is able to maintain stabilization, it is not readily susceptible to extraneous influence or destroys, the interaction of adsorption layer and device is also avoided, its precision and service life can be effectively improved.The advantages of resonator and adsorbent material can be combined by this structure, this is for realizing while improving the various performances of sensor have important meaning.
Description
Technical field
The invention belongs to the sensor fields in MEMS (MEMS) technical field, have height more particularly to one kind
Flexible, highly sensitive tandem flexible sensor.
Background technique
Sensor can experience measured information, and the information that can will be experienced, and be transformed into electric signal according to certain rules
Or the device of the information output of other required forms.Traditional sensor have volume is big, power consumption is high, be unfavorable for it is integrated etc. lack
There is the MEMS sensor of multiple types with the development of MEMS technology in point, and wherein resonant mode MEMS sensor part is because of its body
The advantages that product is small, at low cost, and working frequency is high, stability, sensitivity, high resolution, small, more compatible with integrated circuit temperature drift at
For more popular research field [1].But device brings negative effect while towards miniaturization, and the reduction of volume is led
It causes the area of the sorbing material layer of covering to reduce, the adsorption capacity of hydrone is substantially reduced, and then lead to the sensitive of sensor
The decline of the performances such as degree, precision is unable to satisfy detection demand.Current most resonant transducer or resonant mode flexible sensing
The structure of device is largely that sorbing material layer is directly deposited to device surface, may due to the dissociation effect of adsorbent material
By the certain structure short circuits of device, and device substrate is exposed under humidity environment and is subject to corrode, and influences its service life and stability.
Therefore the place of existing resonant transducer optimization still in need.One kind designed by the present invention is based on resonator and Nanowire
The tandem flexible sensor of dimension can improve the above problem using series-mode frame.The resonator of Vacuum Package is able to maintain
Stablize, avoids extraneous influence or destruction and the interaction of adsorption layer and device, its precision and service life can be effectively improved.This
Transducing part and resonator are mutually separated by kind of structure, both make no longer mutually restriction, area, flexibility and compatibility etc. will no longer by
Limit, can freely design the area of transducing part, and the parameters such as structure avoid the reduction of adsorption area caused by device miniaturization
The problem of, it is also easier to satisfy the use demand.The advantages of resonator and adsorbent material can be combined by this structure, this
For realizing while improving the various performances of sensor have important meaning.
Nano material is a kind of emerging material, has many excellent characteristics.By taking graphene oxide (GO) as an example, as
The derivative of graphene, it possesses very big specific surface area as graphene, can effectively increase the gas molecule quantity of absorption,
So as to improve the sensitivity and detection limit of sensor.GO with it is very strong it is hydrophilic simultaneously, because of the presence of functional group
Cause its conductivity to be deteriorated, has high resistant characteristic [2].And redox graphene (RGO) material is GO by reduction process
Reason and obtain, adjusted by controlling the parameters of reduction process or carrying out element doping etc. to control reducing degree and direction
Control the performance of RGO.The conductivity of GO can be improved by RGO prepared by this method while keeping preferable adsorption capacity.And incite somebody to action
Nano material, which is prepared into fiber, can then obtain nanofiber, the advantage is that the particular advantages for being not only able to maintain raw material, but also can
The advantages of to possess fiber, such as high-flexibility, be easy in conjunction with fabric etc..
Citation:
[1]Chia-Yen Lee and Gwo-Bin Lee,“Humidity Sensors:AReview,”Sensor
Letters Vol.3,1-14,2005
[2]G.Venugopal et al.,“An investigation of the electrical transport
properties of graphene-oxide thin films,”Materials Chemistry and Physics 1332
(2012)29-33
Summary of the invention
It is small it is an object of the invention to solve adsorption area present in existing resonant transducer, it is difficult to realize flexibility,
The problems such as service life is short, and a kind of tandem flexible sensor based on resonator and nanofiber is provided.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of tandem flexible sensor based on resonator and nanofiber, it includes resonator, nanofiber and soft
Property fabric substrate；The resonator has Vacuum Package in rigidity；The nanofiber secure bond is in flexible fabric base
On bottom, and in flexible fabric substrate in the form of transverse and longitudinal is staggered net distribution；Netted nanofiber tool connects there are two external
Head, one of connector are electrically connected with resonator one end, so that resonator and nanofiber is connected, another connector and resonator are another
One end is connected with external contact respectively.
Preferably, the resonator uses piezo-electric resonator or electrostatic resonator.
Preferably, the nanofiber uses graphene oxide fiber, graphene fiber or carbon nano-fiber.
Preferably, the flexible fabric substrate uses cotton fabric or linen.
Preferably, the nanofiber is fixed in flexible fabric substrate by weaving manner.
Preferably, the resonator adhesion is fixed in flexible fabric substrate.
Another object of the present invention is to provide a kind of rings using tandem flexible sensor described in any of the above-described scheme
Border variable method for sensing, the steps include:
The resonator of tandem flexible sensor and nanofiber is exposed with environment to be detected, utilize Vacuum Package
Keep the equivalent parameters of resonator constant, and the electrology characteristic of nanofiber changes with the environmental variance of detection and is changed, in turn
The resonance frequency of the integrated circuit formed of causing to be connected by resonator, nanofiber changes, according to the resonance frequency of integrated circuit
Realize the sensing to environmental variance.
Wherein, the equivalent circuit of resonator can be considered as a LCR concussion circuit, by C0Concatenated L in parallels、Cs、RsGroup
At wherein C0It is current divider direct capacitance, Ls、Cs、RsIt is dynamic coefficient of self-induction, the visibly moved and dynamic electric resistor of dynamic respectively；Nanometer
Fiber equivalent is resistance ReWith capacitor CeIt is in parallel；
The bulk loop resonance frequency F are as follows:
Wherein,It is the element task frequency of the sensor determined by resonator, Y is amplification electricity
The phase parameter on road, surface conductivity Ge=1/Re。
Sensor of the invention working principle is changed using the electrology characteristic of nanofiber when detection variable change,
Cause the change with the resonance frequency of the concatenated integrated circuit of resonator, in turn to realize sensing.
In terms of existing technologies, the invention has the benefit that
The structure that the present invention uses sensing material mutually to separate with resonator, the structure phase with traditional overlay film on the resonator
Than resonator Vacuum Package, state can be able to maintain stabilization by this structure, it is not easy to it is influenced or destroys by the external world,
The interaction of adsorption layer and device is also avoided, its precision and service life can be effectively improved.Simultaneously by transducing part and resonance
Device is mutually separated, so that the attributes such as the area of transducing part, flexibility and compatibility are no longer restricted by resonator, avoids resonator
The problems such as adsorption area caused by being miniaturized reduces.The excellent of resonator and adsorbent material can be combined by this structure
Point, this is for realizing while improving the various performances of sensor have important meaning.The present invention passes through separation sensing material and piezoelectricity
Resonator effectively increases the overall performance of sensor, service life and realizes flexible structure.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples
Fig. 1 is the structural schematic diagram of the tandem flexible sensor based on resonator and nanofiber in the present invention；
Fig. 2 is that tandem flexible sensor based on resonator and nanofiber in the present invention is electrically connected structural representation
Figure；
Fig. 3 is the equivalent circuit diagram of resonator；
Fig. 4 is the equivalent circuit diagram of the tandem flexible sensor based on resonator and nanofiber；
In figure: resonator 1, nanofiber 2, flexible fabric substrate 3.
Specific embodiment
The present invention is further elaborated and is illustrated with reference to the accompanying drawings and detailed description.Each implementation in the present invention
The technical characteristic of mode can carry out the corresponding combination under the premise of not conflicting with each other.
As shown in Fig. 1~2, a kind of tandem flexible sensor based on resonator and nanofiber, mainly includes humorous
Vibration device 1, nanofiber 2 and flexible fabric substrate 3.Resonator 1 has vacuum encapsulation structure in rigidity, so that internal electricity
Learning characteristic will not change with external environment and be changed.2 secure bond of nanofiber is knitted in flexibility in flexible fabric substrate 3
In object substrate 3 in the form of transverse and longitudinal is staggered net distribution.Nanofiber 2 can pass through textile technology and 3 phase of flexible fabric substrate
In conjunction with, nanofiber 2 is staggeredly into the net with trave shape in the present embodiment, two nanofibers 2 contact of intervening portion, because
All nanofibers 2 in this flexible fabric substrate 3 in substance form the entirety of planar distribution.Referring to fig. 2, these nets
There are two external connector, one of connector A is electrically connected with 1 one end of resonator, makes resonator 1 and receive the tool of nanofiber 2 of shape
Rice fiber 2 forms cascaded structure.Another connector B of nanofiber 2 is connected with external contact respectively with 1 other end C of resonator,
External detection device can pass through the signal of the two contact receiving sensors.When working sensor, its working principle is that sharp
It is changed, and then caused humorous with the concatenated integrated circuit of resonator with the electrology characteristic of nanofiber when detection variable change
The change of vibration frequency, to realize sensing.
The types such as piezo-electric resonator, electrostatic resonator can be used in resonator 1, are selected as needed, no type or body
Product limitation.Although its structure is much smaller than the planar structure that flexible fabric substrate 3 is combined with nanofiber 2 in rigidity, its volume,
Therefore entire sensor is overall or in flexible.Nanofiber 2 is using graphene oxide fiber, graphene fiber or carbon nanometer
The types such as fiber, sensing characteristics match with sensor type, the electrology characteristic of nanofiber when variable change to be measured
It will change.Nanofiber 2 need to carry out type selecting according to sensor applications, and using different nanofibers 2, sensor can be used as wet
The sensors such as degree, gas or stress use.Flexible fabric substrate 3 can use cotton fabric or linen.Resonator 1 is using direct
The mode of adhesion carries out physical connection, is fixed in flexible fabric substrate 3.Resonator 1 can be fixed on as shown in Figure 1 flexibility and knit
On one corner of object substrate 3, other middle positions can also be fixed on, without limitation.
It, can be by the humorous of tandem flexible sensor when carrying out environmental variance sensing using above-mentioned tandem flexible sensor
It shakes in device 1 and the exposure of nanofiber 2 and environment to be detected, keeps the equivalent parameters of resonator 1 constant using Vacuum Package, and
The electrology characteristic of nanofiber changes with the environmental variance of detection and is changed, and then causes to be connected by resonator 1, nanofiber 2
The resonance frequency of the integrated circuit of formation changes, and realizes the sensing to environmental variance according to the resonance frequency of integrated circuit.
As shown in figs. 34, the equivalent circuit diagram of above-mentioned resonator 1 is that a LCR shakes circuit, by C0With concatenated Ls、
Cs、RsComposition, wherein C0It is current divider (shunt) direct capacitance, Ls、Cs、RsIt is dynamic (motional) self-induction system respectively
Number, the visibly moved and dynamic electric resistor of dynamic.And nanofiber 2 can be equivalent to resistance ReWith capacitor CeIt is in parallel.Therefore the sensor can wait
Effect is that this two parts is connected, when the variation of the environmental variance (such as humidity, stress) of detection, because resonator 1 is packaged,
Its electrology characteristic will not change substantially, thus equivalent parameters is also constant, and variation is the equivalent of 2 structure of nanofiber being connected in series
Parameter, i.e. Ce, Re, and then cause the change of bulk loop resonance frequency F.Its formula is as follows:
Wherein,It is the element task frequency of the sensor determined by resonator 1.Y is amplification electricity
The phase parameter on road.Ge=1/ReIt is the parallel equivalent conductivity of fiber；Fiber parallel equivalent capacitor Ce=k ε+Cp, wherein ε is
Fiber dielectric constant, k are fiber conductance constant, CpParasitic capacitance between connecting wire.
Therefore, according to the relationship between the resonance frequency of integrated circuit and environmental variance to be detected, so that it may realize to ring
The sensing of border variable.
A kind of tandem flexible sensor based on resonator and nanofiber proposed by the invention, by separating resonator
With transducing part and be changed to cascaded structure, both resonator can be encapsulated, improve its precision, service life and stability, while being made no
It mutually restricts again, area, flexibility and compatibility etc. will be no longer limited, and can freely design the area of transducing part, structure etc.
Parameter avoids the problem of adsorption area caused by device miniaturization reduces, is also easier to satisfy the use demand.Pass through this knot
Structure can combine the advantages of resonator and adsorbent material, this for realize and meanwhile improve the various performances of sensor have it is important
Meaning, and be then not only to be able to maintain the particular advantages of nano material using the advantages of nanofiber, but also the height of fiber can be possessed
Flexibility such as is easy in conjunction with fabric at the advantages.
Claims (8)
1. a kind of tandem flexible sensor based on resonator and nanofiber, it is characterised in that: including resonator (1), receive
Rice fiber (2) and flexible fabric substrate (3)；The resonator (1) has Vacuum Package in rigidity；The nanofiber
(2) secure bond is on flexible fabric substrate (3), and on flexible fabric substrate (3) in the form of transverse and longitudinal is staggered net distribution；
There are two external connector, one of connector (A) is electrically connected netted nanofiber (2) tool with resonator (1) one end, makes resonance
Device (1) and nanofiber (2) series connection, another connector (B) are connected with external contact respectively with resonator (1) other end (C).
2. the tandem flexible sensor based on resonator and nanofiber as described in claim 1, it is characterised in that: described
Resonator (1) use piezo-electric resonator or electrostatic resonator.
3. the tandem flexible sensor based on resonator and nanofiber as described in claim 1, it is characterised in that: described
Nanofiber (2) use graphene oxide fiber, graphene fiber or carbon nano-fiber.
4. the tandem flexible sensor based on resonator and nanofiber as described in claim 1, it is characterised in that: described
Flexible fabric substrate (3) use cotton fabric or linen.
5. the tandem flexible sensor based on resonator and nanofiber as described in claim 1, it is characterised in that: described
Nanofiber (2) be fixed on flexible fabric substrate (3) by weaving manner.
6. the tandem flexible sensor based on resonator and nanofiber as described in claim 1, it is characterised in that: described
Resonator (1) adhesion be fixed on flexible fabric substrate (3).
7. a kind of environmental variance method for sensing using the tandem flexible sensor as described in claim 1~6 is any, feature
Be: steps are as follows:
The resonator (1) of tandem flexible sensor and nanofiber (2) is exposed with environment to be detected, utilize vacuum seal
Dress keeps the equivalent parameters of resonator (1) constant, and the electrology characteristic of nanofiber changes with the environmental variance of detection and changed,
And then the resonance frequency of the integrated circuit formed by resonator (1), nanofiber (2) series connection is caused to change, according to integrated circuit
Resonance frequency realize to the sensing of environmental variance.
8. environmental variance method for sensing as claimed in claim 7, it is characterised in that: the equivalent circuit of the resonator (1)
Circuit is shaken for a LCR, by C0Concatenated L in parallels、Cs、RsIt forms, wherein C0It is current divider direct capacitance, Ls、Cs、RsRespectively
It is dynamic coefficient of self-induction, the visibly moved and dynamic electric resistor of dynamic；Nanofiber (2) is equivalent to resistance ReWith capacitor CeIt is in parallel；
The bulk loop resonance frequency F are as follows:
Wherein,It is the element task frequency of the sensor determined by resonator (1), Y is amplifying circuit
Phase parameter, electrical conductivity of fibres Ge=1/Re。
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Cited By (2)
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| CN110926387A (en) * | 2019-11-28 | 2020-03-27 | 华中科技大学 | Flexible stretchable strain sensor and preparation method thereof |
| CN112414435A (en) * | 2020-11-18 | 2021-02-26 | 南通大学 | Multifunctional flexible fabric sensor and use method thereof |
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