CN110174527A - A kind of hot type fiber grating wind speed wind direction sensor and detection method - Google Patents
A kind of hot type fiber grating wind speed wind direction sensor and detection method Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
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Abstract
The invention discloses a kind of hot type fiber grating wind speed wind direction sensor and detection methods.Sensor include: substrate, splash resistive heater over the substrate, the orthogonal arrangement of bonding over the substrate resistive heater surrounding four fiber grating temperature sensors.Resistive heater is in spiral shape, and there is the connector of welding lead at both ends；The sensing element of temperature sensor is bragg grating.Detection method is that resistive heater generates heat, when the wind blows, the temperature field around sensor changes, and causes the central wavelength of four fiber gratings that different degrees of drift occurs, the wave length shift situation for detecting four fiber gratings respectively, obtains real-time wind speed and direction through data processing.The present invention can measure wind speed and direction simultaneously, have many advantages, such as that corrosion-resistant, electromagnetism interference, accuracy are high, be applicable to the more severe detection environment of operating condition.
Description
Technical field
The present invention relates to the wind speed wind direction sensor in sensor field, in particular to a kind of hot type fiber grating wind speed and wind
To sensor and detection method.
Background technique
Wind is a kind of very universal natural phenomena, closely related with people's lives, is existed for the detection of wind speed and direction
The numerous areas such as industrial and agricultural production, communications and transportation, energy development and weather forecast suffer from highly important meaning.
It is more that the measurement of wind speed according to principle is broadly divided into mechanical measurement method, Pitot tube measurements, ultrasonic Method for Measuring, laser
General Le mensuration, hot type mensuration etc.；It is for measuring air velocity with hot type anemobiagraph prepared by hot type measuring principle
Instrument, because its accuracy of measurement is high, easy to use, measurement range is wide, high sensitivity due to be widely used；Hot type anemobiagraph is adopted more
Use temperature detecting resistance or thermocouple as temperature element, there is interfering vulnerable to environmental magnetic field, so that sensor is to wind speed and direction
Measurement accuracy reduce.
The Shen Guangping et al. in the laboratory Southeast China University MEMS in 2007 proposes a kind of hot type wind speed and direction of circular configuration
The chip layout of sensor, the chip prepare center adding thermal resistance and four using stripping technology on glass and ceramic substrate respectively
All symmetrical thermometric Pt resistance；The temperature element of the design is temperature detecting resistance.
201510412704.4 patent of application number discloses a kind of aluminium modification enhanced fiber grating temperature sensor manufacture
Method is vacuum-treated the fiber grating with aluminium film in fiber grating surface deposition of aluminum film under the conditions of being higher than 660 DEG C~700 DEG C,
Make aluminium film in molten condition, and one section of temperature constant state is kept to cool down again, obtains fine and close integrated aluminium film, and then improve the temperature of aluminium film
Spend the repeatability and stability of the swollen characteristic of line；Improve the detection sensitivity and resolving power of fiber grating temperature sensor；The patent
Show that using fiber grating be feasible as the sensing element of temperature sensing.
Harbin Engineering University Zhang Hongquan in 2018 et al. proposes a kind of by fiber grating air velocity transducer, design use
Concave wind deflector connects equal strength bar, places fiber-optic grating sensor in equal strength bar；Using the light for being fitted in equal strength bar
Fine grating curvature stress change principle realizes the detection to wind speed, belongs to room temperature detection method, and can only detect to wind direction.
Compared with traditional thermometric original part, fiber grating temperature sensor has that high reliablity, anticorrosive, anti-electromagnetism is dry
Disturb, high sensitivity the features such as, be suitble to work in harsh environment.
It is retrieved by open source information as it can be seen that belonging to hot type air velocity transducer using temperature element is arranged around adding thermal resistance
Universal method, but use fiber grating temperature sensor as temperature element for improve air velocity transducer corrosion resistance,
Electromagnetism interference simultaneously there is highly sensitive wind speed wind direction sensor to have not been reported.
Summary of the invention
Object of the present invention is to propose a kind of hot type fiber grating wind speed wind direction sensor and detection method, fiber grating is utilized
Temperature sensor has the characteristics such as high reliablity, anticorrosive, electromagnetism interference, solves the existing diamagnetic effect of hot type air velocity transducer
The problems such as difference, the service life is short in the presence of a harsh environment, makes hot type wind speed wind direction sensor have corrosion-resistant, electromagnetism interference, accuracy
The advantages that high, is applicable to the more severe detection environment of operating condition.
Technical solution of the present invention:
A kind of hot type fiber grating wind speed wind direction sensor, comprising: substrate, splash resistive heater over the substrate, viscous
Orthogonal arrangement on substrate is connect in four fiber grating temperature sensors of resistive heater surrounding, which is characterized in that described
Resistive heater is arranged in two-wire spiral, and there are welding points at both ends；The sensing element of the temperature sensor is Prague
Fiber grating.
Further, the substrate be monocrystalline silicon, silicide, glass, ceramics it is a certain or several in different order
Superposition；Substrate thickness is 0.1-2.0mm.
Further, the resistive heater is formed by techniques such as sputtering, plated film, photoetching, etchings in substrate surface；Its
Material is one kind of platinum, tungsten, copper, nichrome, Aludirome；Resistive heater heart position in the substrate, arrangement
Diameter is 1-10mm.
Further, the fiber grating temperature sensor is fixed using the method for unilateral bonding；The bonding of use
Glue is inorganic ceramic glue.
Further, the fiber grating temperature sensor uses Bragg grating optical fiber；Fiber lengths are 2.5-20mm,
Fiber cross-sections diameter is 0.06-0.125mm；Four fiber grating temperature sensors spacing identical as resistance wire holding respectively,
Away from for 1-10mm.
Further, the wavelength monitoring region of the fiber grating temperature sensor is the intermediate region of fiber grating；Four
A fiber grating temperature sensor uses same specification process, and original wavelength is equal.
Further, windward side or leeward side of the fiber grating temperature sensor in the substrate.
The invention also discloses a kind of wind speed and direction detection methods of hot type fiber grating wind speed wind direction sensor, including such as
Lower step；
1) under conditions of calm, power is used to heat for the AC signal of 0.1-1W to the resistive heater, it is described
Resistive heater heats the fiber grating temperature sensor, while detecting 4 fiber grating temperature sensors
Central wavelength drift about situation, record the fiber grating temperature sensor central wavelength to heating time t1 when stablizing constant
And when stablizing each fiber grating temperature sensor wave length shift value；
2) it under environment to be checked, takes heating method identical with step 1) to heat the resistive heater, works as heating
Time is more than the central wavelength drift value of each fiber grating temperature sensor of real-time monitoring after t1；To the wave detected
Long drift value carries out data processing, obtains real-time wind direction and the wind speed in surveyed environment.
Beneficial effects of the present invention:
(1) interference that high-intensitive dynamic outer magnetic field generates resistive heater can effectively be weakened using the resistance wire of spiral
Electric current improves the applicability and stability of gas sensor.
(2) the structure design of four fiber grating temperature sensors of resistive heater surrounding orthogonal arrangement, using maturation
Efficient sensor element layout, while making full use of the electromagnetism interference of fiber grating temperature sensor, corrosion-resistant, loss
It is low, the intrinsic attributes such as be easy to remotely detect, overcome temperature detecting resistance or thermocouple as temperature element, done vulnerable to environmental magnetic field
The problem of disturbing, measurement accuracy caused to reduce, while corrosion resistance is improved, extend the service life of sensor.
Detailed description of the invention
The advantages of above-mentioned and/or additional aspect of the invention, will be apparent from the description of the embodiment in conjunction with the following figures
Be readily appreciated that, in which:
Fig. 1 is a kind of schematic diagram of hot type fiber grating wind speed wind direction sensor；
Fig. 2 is a kind of top view of the first embodiment of hot type fiber grating wind speed wind direction sensor；
Fig. 3 is a kind of sectional view of the first embodiment of hot type fiber grating wind speed wind direction sensor；
Fig. 4 is a kind of top view of second of embodiment of hot type fiber grating wind speed wind direction sensor；
Fig. 5 is a kind of sectional view of second of embodiment of hot type fiber grating wind speed wind direction sensor；
Fig. 6 is a kind of resistive heater layout viewing of hot type fiber grating wind speed wind direction sensor；
Wherein corresponding relationship of the Fig. 1 into Fig. 6 between appended drawing reference and component names are as follows:
1, substrate；2, resistive heater；3, fiber grating temperature sensor；4, Bragg grating wavelength monitors region；5, it is bonded
Glue；6, thin set；7, resistance wire protective layer；8, thermal insulation layer；9, welding point.
Specific embodiment
Below in conjunction with specific embodiment 1-3 the present invention is described in detail；It should be noted that described in following embodiments
The combination of technical characteristic or technical characteristic is not construed as isolated, they can be combined with each other to reaching more preferable
Technical effect.
Further, the hot type fiber grating wind speed wind direction sensor, which is characterized in that the optical fiber grating temperature passes
Windward side or leeward side of the sensor in the substrate.
Embodiment 1
The embodiment of the present invention 1 is described in conjunction with Fig. 1 and Fig. 2: a kind of hot type fiber grating wind speed wind direction sensor, comprising: substrate
1, resistive heater 2 of the splash on the substrate 1, the orthogonal arrangement that is bonded on substrate 1 are the four of 2 surrounding of resistive heater
A fiber grating temperature sensor 3, which is characterized in that the resistive heater 2 arrangement in spiral shape, there are welding points at both ends
9；The sensing element of the temperature sensor is bragg grating.
In embodiment 1, the fiber grating temperature sensor 3, resistive heater 2 and thin set 6 are located at the leeward of substrate 1
Side.
In embodiment 1, the substrate 1 is monocrystalline silicon, a certain or several of silicide, glass, ceramics presses not homogeneous
The superposition of sequence；Substrate 1 is with a thickness of 0.1-2.0mm.
In embodiment 1, the resistive heater 2 is by techniques such as sputtering, plated film, photoetching, etchings in 1 surface shape of substrate
At；Its material is one kind of platinum, tungsten, copper, nichrome, Aludirome；The resistive heater 2 in 1 center of substrate,
Its diameter of arranging is 1-10mm.
In embodiment 1,2 surface of resistive heater applies thermal insulation layer 8, and material is silicon oxide powder；Silica powder
Slurry is made in end, is coated in 2 surface of resistive heater, then carry out heat-agglomerating.
In embodiment 1, the fiber grating temperature sensor 3 is adhesively fixed using unilateral side, and two sides are respectively by half thin set 6
It is positioned；The diameter of thin set 6 is 0.5-5mm；6 materials of thin set are ceramics, stainless steel, glass, plastics, aluminium, iron, copper and its conjunction
Gold.
In embodiment 1, the fiber grating temperature sensor 3 is fixed using the method for unilateral bonding；It uses
Bonded adhesives 5 is inorganic ceramic glue.
In embodiment 1, the fiber grating temperature sensor 3 uses bragg grating；Fiber lengths are 2.5-
20mm, fiber cross-sections diameter are 0.06-0.125mm；Four fiber grating temperature sensors 3 are kept with resistive heater 2 respectively
Certain spacing.
In embodiment 1, the wavelength monitoring region 4 of the fiber grating temperature sensor 3 is the middle area of fiber grating
Domain；Four fiber grating temperature sensors 3 use same specification process, and original wavelength is equal.
Embodiment 2
Describe the embodiment of the present invention 2 in conjunction with Fig. 3 and Fig. 4: a kind of hot type fiber grating wind speed wind direction sensor, its construction exist
Above-described embodiment is improved, and the fiber grating temperature sensor 3, resistive heater 2 and thin set 6 are located at substrate 1 windward
Side；Fibre optic temperature sensor 3 is placed in thin set 6, and thin set 6 is fixed on substrate 1 by way of bonding.
In example 2, the fibre optic temperature sensor 3 is entirely placed in one thin set 6 and carries out unilateral fixation,
The diameter of thin set 6 is 0.5-5mm；6 materials of thin set are ceramics, stainless steel, glass, plastics, aluminium, iron, copper and its alloy.
In example 2, there is resistance wire protective layer 7 on the resistive heater surface, and material is alkali-free glass film；Fortune
Slurry is made with alkali-free glass powder, is equably coated on resistive heater 2, heats glass powder extremely in the environment of 350-400 DEG C
Liquid forms resistive heater protective layer 7 after cooling.
The present invention also provides a kind of embodiments: a kind of measurement method of hot type fiber grating wind speed wind direction sensor, packet
Include following steps:
Step 100: under no-wind environment, carrying out calibration measurement, record optical fiber raster center drift value；
Step 200: under environment to be measured, carrying out detection measurement, record optical fiber raster center wave length shift value；
Step 300: to demarcate measured value as reference, data processing is carried out to the fiber bragg grating center wavelength drift value detected,
Obtain the wind direction and wind speed size of measurement environment.
In embodiment, calibration measurement detailed process described in step 100: by AC signal that power is 0.1-1W to adding
Hot water radiation wire is heated, while resistive heater carries out heat transfer heating to fiber grating temperature sensor by substrate, and
The wave length shift situation for detecting the fiber grating temperature sensor simultaneously, records the fiber-optic grating sensor central wavelength extremely
The wave length shift value of heating time t1 when stablizing constant and while stablizing each fiber-optic grating sensor.
In embodiment, described in step 200 detection measurement detailed process: by hot type fiber wind speed wind transducer be placed in
Under testing conditions, heating method identical with step 100 is taken to heat resistive heater, when heated between more than t1
Afterwards, the central wavelength drift value of each fiber-optic grating sensor of real-time monitoring.
Although the embodiment of the present invention is had been presented for herein, for it will be appreciated by those skilled in the art that this hair
Bright patent is not limited to the details of above-mentioned exemplary embodiment, and in the feelings of the spirit or essential attributes without departing substantially from the invention patent
Under condition, the invention patent can be realized with other assembling forms；Above-described embodiment is only exemplary, the model of the invention patent
It encloses and is indicated by the appended claims rather than the foregoing description, it is intended that by the meaning and model of the condition of equivalent for falling in claim
All changes in enclosing are included in the invention patent；It should not be using the embodiments herein as the restriction of interest field of the present invention.
Claims (8)
1. a kind of hot type fiber grating wind speed wind direction sensor, comprising: substrate, splash resistive heater over the substrate,
Four fiber grating temperature sensors of the orthogonal arrangement of bonding on substrate in resistive heater surrounding, which is characterized in that institute
Resistive heater arrangement in spiral shape is stated, there are welding points at both ends；The sensing element of the temperature sensor is Prague light
Fine grating.
2. hot type fiber grating wind speed wind direction sensor as described in claim 1, which is characterized in that the substrate is monocrystalline
The a certain or several superposition in different order of silicon, silicide, glass, ceramics；Substrate thickness is 0.1-2.0mm.
3. hot type fiber grating wind speed wind direction sensor as described in claim 1, which is characterized in that the resistive heater is logical
The techniques such as sputtering, plated film, photoetching, etching are crossed to be formed in substrate surface；Its material is platinum, tungsten, copper, nichrome, ferrum-chromium-aluminum conjunction
One kind of gold；Heart position, arrangement diameter are 1-10mm to the resistive heater in the substrate.
4. hot type fiber grating wind speed wind direction sensor as described in claim 1, which is characterized in that the optical fiber grating temperature
Sensor is fixed using the method for unilateral bonding；The bonded adhesives used is inorganic ceramic glue.
5. hot type fiber grating wind speed wind direction sensor as claimed in claim 4, which is characterized in that the optical fiber grating temperature
Sensor uses Bragg grating optical fiber；Fiber lengths are 2.5-20mm, and fiber cross-sections diameter is 0.06-0.125mm；Four light
Fine grating temperature sensor spacing identical as resistance wire holding respectively, spacing 1-10mm.
6. hot type fiber grating wind speed wind direction sensor as claimed in claim 5, which is characterized in that the optical fiber grating temperature
The wavelength monitoring region of sensor is the intermediate region of fiber grating；Four fiber grating temperature sensors use same specification
Process, and original wavelength is equal.
7. the hot type fiber grating wind speed wind direction sensor as described in claim 1-6 is any, which is characterized in that the optical fiber light
Windward side or leeward side of the grid temperature sensor in the substrate.
8. based on the wind speed and direction detection method of hot type fiber grating wind speed wind direction sensor described in claim 1, feature
It is: includes the following steps:
1) under conditions of calm, power is used to heat for the AC signal of 0.1-1W to the resistive heater, it is described
Resistive heater heats the fiber grating temperature sensor, while detecting 4 fiber grating temperature sensors
Central wavelength drift about situation, record the fiber grating temperature sensor central wavelength to heating time t1 when stablizing constant
And when stablizing each fiber grating temperature sensor wave length shift value；
2) it under environment to be checked, takes heating method identical with step 1) to heat the resistive heater, works as heating
Time is more than the central wavelength drift value of each fiber grating temperature sensor of real-time monitoring after t1；To the wave detected
Long drift value carries out data processing, obtains real-time wind direction and the wind speed in surveyed environment.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110609150A (en) * | 2019-10-28 | 2019-12-24 | 广州极飞科技有限公司 | Wind speed and direction measuring device and outdoor detection station |
| CN113063960A (en) * | 2021-03-09 | 2021-07-02 | 珠海复旦创新研究院 | Ocean buoy monitoring wind sensor |
| CN114414838A (en) * | 2021-12-20 | 2022-04-29 | 山东微感光电子有限公司 | Wind speed measurement system and method based on VCSEL wavelength demodulation and pulse light source heating |
| CN114518468A (en) * | 2022-03-01 | 2022-05-20 | 合肥工业大学 | Constant-pressure thermal type wind speed measuring method |
| CN115598373A (en) * | 2022-10-24 | 2023-01-13 | 南方电网数字电网研究院有限公司（Cn） | Peltier effect-based wind speed and direction sensor, detection device and electronic equipment |
| CN115656552A (en) * | 2022-12-05 | 2023-01-31 | 北京精诚恒创科技有限公司 | Wind direction sensor based on fiber bragg grating and wind direction measuring method |
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| CN113063960A (en) * | 2021-03-09 | 2021-07-02 | 珠海复旦创新研究院 | Ocean buoy monitoring wind sensor |
| CN113063960B (en) * | 2021-03-09 | 2024-03-15 | 珠海复旦创新研究院 | Ocean buoy monitoring wind sensor |
| CN114414838A (en) * | 2021-12-20 | 2022-04-29 | 山东微感光电子有限公司 | Wind speed measurement system and method based on VCSEL wavelength demodulation and pulse light source heating |
| CN114518468A (en) * | 2022-03-01 | 2022-05-20 | 合肥工业大学 | Constant-pressure thermal type wind speed measuring method |
| CN115598373A (en) * | 2022-10-24 | 2023-01-13 | 南方电网数字电网研究院有限公司（Cn） | Peltier effect-based wind speed and direction sensor, detection device and electronic equipment |
| CN115656552A (en) * | 2022-12-05 | 2023-01-31 | 北京精诚恒创科技有限公司 | Wind direction sensor based on fiber bragg grating and wind direction measuring method |
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