CN110174205B - Measuring method of piezoelectric six-dimensional force sensor for robot joint - Google Patents
Measuring method of piezoelectric six-dimensional force sensor for robot joint Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 8
- 238000007789 sealing Methods 0.000 claims abstract description 33
- 238000005259 measurement Methods 0.000 claims description 12
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 238000013507 mapping Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000036316 preload Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- 239000000758 substrate Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
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Abstract
The invention discloses a piezoelectric six-dimensional force sensor for a robot joint and a measuring method thereof, and the piezoelectric six-dimensional force sensor comprises a sensor base body, an upper sealing plate, a lower sealing plate and a force sensing element, wherein the sensor base body is provided with a first central through hole, four first threaded through holes uniformly distributed in a same circle, four second threaded through holes uniformly distributed in a same circle and four elastic rings, the outer sides of the elastic rings are provided with a third threaded hole and a wire guide groove, the inner sides of the elastic rings are provided with a fourth threaded hole, the outer sides of the wire guide grooves are provided with wire threaded holes, the wire threaded holes are provided with wire adapters, the upper sealing plate is provided with a second central through hole, four third through holes uniformly distributed in a same circle and four through holes uniformly distributed in a same circle, the lower sealing plate is consistent with the upper sealing plate in structure, the force sensing element comprises two adjusting gaskets, five electrode plates and, the invention realizes the self-pretightening of the force-sensitive element by utilizing the special elastic ring structure, and has the advantages of stability, reliability, high rigidity and high test precision.
Description
Technical Field
The invention relates to the field of sensors and monitoring thereof, in particular to a measuring method of a piezoelectric six-dimensional force sensor for a robot joint.
Background
The performance of the piezoelectric sensor, which is a key link in the modern measurement technology, directly determines the precision of the whole test system. Almost all types of piezoelectric sensors must be preloaded, charge eliminated and gap reduced in use. The existing piezoelectric six-dimensional force sensor is mostly realized by adopting a screw pre-tightening mode or a pressing plate-screw pre-tightening mode, the mode mainly utilizes screws to generate pre-tightening force, the structure is simple, the pre-tightening force is adjustable, but the change of the pre-tightening force is brought by the loosening of the screws after a certain using time, and a test error is generated. How to ensure the reliable pretightening force of the piezoelectric sensor is a key problem for improving the testing precision of the sensor.
The whole pre-tightening platform type six-dimensional force sensor disclosed in the Chinese patent CN1263259 is structurally characterized in that a middle pre-tightening branch is additionally arranged between an upper platform and a lower platform of a traditional Stewart platform structure, the upper platform and the lower platform are tightened by utilizing the pre-tightening branch, the sensor is integrally pre-tightened, each ball pair is pre-tightened at the same time, gaps are eliminated, the whole rigidity of the sensor is improved, however, the whole structure is sealed by pre-tightening the middle pre-tightening branch, the required pre-tightening force is large, the structure of the pre-tightening branch is complex, the fact that the pre-tightening branch only bears the acting force along the axis direction is difficult to guarantee.
Patent CN203191135U discloses a spoke formula parallel connection piezoelectricity six-dimensional force transducer, its structure adopts spoke formula structure, eight strong point measurement, force sensing element adopts the form that rhombus overall arrangement and square overall arrangement combine together to realize space six-dimensional force measurement, take the contact clearance that screw pretension mode was eliminated between the sensor and the force sensing element and improve the sensor global rigidity, this structure sensor pretightning force size receives the restriction of screw rigidity, and along with life's increase, the reliability of pretension weakens gradually, the measurement accuracy of sensor receives the influence.
Patent CN104280163B discloses a piezoelectric sensor pre-tightening device, which is composed of a stress block, an upper and lower three-dimensional force sensor, a bolt, a nut, an upper and lower pressing block, and a plurality of T-shaped groove nuts. The direct contact between the elastic preload piece and the stress block is isolated, so that the interference caused by the change of the preload force is eliminated, the accuracy of the measurement precision is improved, but the spatial layout of the sensor is large, and the use condition is limited.
Patent CN1032395 discloses a piezoelectricity quartz cutter arbor formula three-dimensional turning dynamometer, its structure is high rigidity elasticity cutter arbor formula, adopts two elasticity semi-rings to press from both sides tight dynamometry crystal assembly and realizes the three-dimensional force and measure, and this dynamometer can only measure the three-dimensional force, and the measurement of space six-dimensional force can't be realized to its structure is long cutter arbor type, and the application environment has the limitation.
Disclosure of Invention
The invention aims to solve the technical problems of good technical performance, reliable work, high accuracy and high reliability of the test for the robot joint.
The invention adopts the following technical means to realize the purpose of the invention:
a measuring method of a piezoelectric six-dimensional force sensor for a robot joint comprises a sensor base body (2), an upper sealing plate (1), a lower sealing plate (3) and a force sensing element (4), wherein the sensor base body (2) is provided with a central through hole I (7), four uniformly distributed thread through holes I (9) in the same circle, four uniformly distributed thread through holes II (8) in the same circle and four elastic rings (10), the outer side of each elastic ring (10) is provided with a thread hole III (14) and a thread groove (12), the inner side of each elastic ring (10) is provided with a thread hole IV (11), the outer side of each thread groove (12) is provided with a thread hole (13), the thread hole (13) is provided with a thread adapter (18), the upper sealing plate (1) is provided with a central through hole II (15), four uniformly distributed through holes III (17) in the same circle and four uniformly distributed through holes IV (16) in the same, the structure of the lower sealing plate (3) is consistent with that of the upper sealing plate (1), the force-sensitive element (4) comprises two adjusting gaskets (19), five electrode plates (20) and six quartz wafers (21), and the force-sensitive element (4) is arranged in the elastic ring (10).
As a further limitation to the technical scheme, the force-sensitive element (4) applies pretightening force through the elastic ring (10), the width of the elastic ring (10) and the thickness of an adjusting gasket (19) in the force-sensitive element (4) can be adjusted to realize pretightening force with different force values, and the pretightening bolt (5) is installed on the threaded hole III (14) and the threaded hole IV (11) to realize fine adjustment of the pretightening force.
As a further limitation to the technical scheme, the lower sealing plate (3) and the upper sealing plate (1) are consistent in structure and welded on the sensor base body (2) in an electron beam mode to achieve a sealing effect, the sensor structure is vertically symmetrical and bilaterally symmetrical, the piezoelectric six-dimensional force sensor for the robot joint can be installed between a robot clamp and a small arm in a positive and negative mode when used, the clamp is fixedly connected through a second threaded through hole (8), the small arm is fixedly connected through a first threaded through hole (9), and the sensor base body (2) is of a circular structure or a square structure.
As a further limitation of this aspect, the force sensitive element comprisesS 1、S 2、S 3、S 4Four groups of force sensitive elements, the global coordinate system of the sensor isXOY，S 1、S 2、S 3、S 4The local coordinate systems of the four groups of force sensitive elements are respectivelyX 1 OY 1、X 2 OY 2、X 3 OY 3、X 4 OY 4And four groups of force sensitive elements can measure the space three-dimensional force. The expression of the mapping relation of the measurement principle is as follows:
in the formula (I), the compound is shown in the specification,Fx i ，Fy i ，Fz i indicating force sensitive elementsS i Measured anisotropy value (i=1,2,3,4），RIs the projected distance from the center of the force sensitive element to the center of the sensor. When the sensor is reversely mounted, the measurement result takes a negative sign.
Compared with the prior art, the invention has the advantages and positive effects that: the measuring method of the piezoelectric six-dimensional force sensor for the robot joint has the advantages of good static and dynamic characteristics, low manufacturing cost, high rigidity and the like, the sensor can be arranged between the robot holder and the small arm in a positive and negative mode and can meet the measuring requirement, the sensor realizes pre-tightening of the force-sensitive element mainly by pressure generated by interference assembly and realizes accurate fine adjustment by a pre-tightening screw, and the pre-tightening effect is good, stable and reliable and is not easy to loosen. When the device is used for the joint part of the robot, the structure is simple and reasonable, and the testing precision is high.
Drawings
Fig. 1 is a structural sectional view of a piezoelectric six-dimensional force sensor for a robot joint.
Fig. 2 is a schematic diagram of a sensor matrix structure.
Fig. 3 is a schematic assembly diagram of a piezoelectric six-dimensional force sensor for a robot joint.
FIG. 4 is a schematic view of the upper sealing plate of the sensor.
FIG. 5 is a schematic view of the structure of the force sensor.
FIG. 6 is a schematic diagram of a global coordinate system of a sensor and a local coordinate system of a force sensitive element
In the figure: 1-upper sealing plate, 2-sensor substrate, 3-lower sealing plate, 4-force sensitive element, 5-pre-tightening bolt, 6-lead, 7-central through hole I, 8-threaded through hole II, 9-threaded through hole I, 10-elastic ring, 11-threaded hole IV, 12-lead groove, 13-lead threaded hole, 14-threaded hole III, 15-central through hole II, 16-through hole IV, 17-through hole III, 18-lead adapter, 19-adjusting gasket, 20-electrode plate and 21-quartz wafer.
Detailed Description
The invention is further described in detail with reference to the accompanying drawings and examples, and referring to fig. 1-6, the invention comprises a sensor base body (2), an upper sealing plate (1), a lower sealing plate (3) and a force-sensitive element (4), wherein the sensor base body (2) is provided with a first central through hole (7), four first threaded through holes (9) uniformly distributed in the same circle, four second threaded through holes (8) uniformly distributed in the same circle, and four elastic rings (10), the outer side of each elastic ring (10) is provided with a third threaded hole (14) and a wire guide groove (12), the inner side of each elastic ring (10) is provided with a fourth threaded hole (11), the outer side of each wire guide groove (12) is provided with a wire threaded hole (13), the wire threaded hole (13) is provided with a wire adapter (18), the upper sealing plate (1) is provided with a second central through hole (15), four third through holes (17) uniformly distributed in the same circle and four, the structure of the lower sealing plate (3) is consistent with that of the upper sealing plate (1), the force-sensitive element (4) comprises two adjusting gaskets (19), five electrode plates (20) and six quartz wafers (21), and the force-sensitive element (4) is arranged in the elastic ring (10).
As a further limitation to the technical scheme, the force-sensitive element (4) applies pretightening force through the elastic ring (10), the width of the elastic ring (10) and the thickness of an adjusting gasket (19) in the force-sensitive element (4) can be adjusted to realize pretightening force with different force values, and the pretightening bolt (5) is installed on the threaded hole III (14) and the threaded hole IV (11) to realize fine adjustment of the pretightening force.
As a further limitation to the technical scheme, the lower sealing plate (3) and the upper sealing plate (1) are consistent in structure and welded on the sensor base body (2) in an electron beam mode to achieve a sealing effect, the sensor structure is vertically symmetrical and bilaterally symmetrical, the piezoelectric six-dimensional force sensor for the robot joint can be installed between a robot clamp and a small arm in a positive and negative mode when used, the clamp is fixedly connected through a second threaded through hole (8), the small arm is fixedly connected through a first threaded through hole (9), and the sensor base body (2) is of a circular structure or a square structure.
As a further limitation of this aspect, the force sensitive element comprisesS 1、S 2、S 3、S 4Four groups of force sensitive elements, the global coordinate system of the sensor isXOY，S 1、S 2、S 3、S 4The local coordinate systems of the four groups of force sensitive elements are respectivelyX 1 OY 1、X 2 OY 2、X 3 OY 3、X 4 OY 4And four groups of force sensitive elements can measure the space three-dimensional force. The expression of the mapping relation of the measurement principle is as follows:
in the formula (I), the compound is shown in the specification,Fx i ，Fy i ，Fz i indicating force sensitive elementsS i Measured anisotropy value (i=1,2,3,4），RIs the projected distance from the center of the force sensitive element to the center of the sensor. When the sensor is reversely mounted, the measurement result takes a negative sign. The invention carries out complete decoupling through four groups of force-sensitive elements to measure the space dynamic six-dimensional force, the force/moment range covers +/-10N to +/-5000N/+/-0.2 N.m to +/-350 N.m, the dynamic force state is fed back to the robot in real time, and the test method is simple to operate.
The upper sealing plate (1), the lower sealing plate (3) and the sensor base body (2) are all made of 304 stainless steel. When the force-sensitive element (4) is installed, the elastic ring (10) is widened through a tension machine, the elastic ring (10) is released after the force-sensitive element (4) is placed according to a local coordinate system, pre-tightening of the force-sensitive element (4) is achieved through pressure generated by interference connection, and pre-tightening force fine adjustment is achieved through pre-tightening bolts (5) installed in a third threaded hole (14) and a fourth threaded hole (11), so that an expected accurate pre-tightening force value is achieved. When the sensor is subjected to external load, electric charge generated by the force-sensitive element (4) is collected by an electrode plate (20), is output to a charge amplifier through a lead (6) and is converted into a voltage signal, the voltage signal is uploaded to an upper computer through signal conditioning and an A/D data acquisition card, and the upper computer calculates according to a measurement principle mapping relation expression to obtain parameters of a space force vector and displays and records the parameters.
The above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and variations, modifications, additions, substitutions and the like that are within the spirit of the present invention by a person of ordinary skill in the art are also within the scope of the present invention.
Claims (2)
1. A measuring method of a piezoelectric six-dimensional force sensor for a robot joint comprises a sensor base body (2), an upper sealing plate (1), a lower sealing plate (3) and a force sensing element (4), wherein the sensor base body (2) is provided with a central through hole I (7), four uniformly distributed thread through holes I (9) in the same circle, four uniformly distributed thread through holes II (8) in the same circle and four elastic rings (10), the outer side of each elastic ring (10) is provided with a thread hole III (14) and a thread groove (12), the inner side of each elastic ring (10) is provided with a thread hole IV (11), the outer side of each thread groove (12) is provided with a thread hole (13), the thread hole (13) is provided with a thread adapter (18), the upper sealing plate (1) is provided with a central through hole II (15), four uniformly distributed through holes III (17) in the same circle and four uniformly distributed through holes IV (16) in the same, the structure of the lower sealing plate (3) is consistent with that of the upper sealing plate (1), the lower sealing plate is welded on a sensor base body (2) in an electron beam mode to achieve a sealing effect, the sensor structure is vertically symmetrical and horizontally symmetrical, the piezoelectric six-dimensional force sensor for the robot joint can be positively and negatively installed between a robot holder and a small arm when used, the sensor base body (2) is of a circular structure or a square structure, the force-sensitive element (4) comprises two adjusting gaskets (19), five electrode plates (20) and six quartz wafers (21), the force-sensitive element (4) is installed in an elastic ring (10), the width of the elastic ring (10) and the thickness of the adjusting gaskets (19) in the force-sensitive element (4) can be adjusted to achieve pre-tightening forces with different force values through the application of the elastic ring (10), and pre-tightening bolts (5) are installed on a threaded hole three (14) and a threaded hole four (11), and fine adjustment of the pretightening force is realized.
2. The method of measuring a piezoelectric six-dimensional force sensor for a robot joint according to claim 1, wherein: the force sensitive element comprisesS 1、S 2、S 3、S 4Four groups of force sensitive elements, the global coordinate system of the sensor isXOY，S 1、S 2、S 3、S 4The local coordinate systems of the four groups of force sensitive elements are respectivelyX 1 O 1 Y 1、X 2 O 2 Y 2、X 3 O 3 Y 3、X 4 O 4 Y 4Four sets of force-sensitive elements can be measuredMeasuring the space three-dimensional force, wherein the expression of the mapping relation of the measurement principle is as follows:
in the formula (I), the compound is shown in the specification,Fx i ，Fy i ，Fz i indicating force sensitive elementsS i Measured anisotropy value (i=1,2,3,4），RIs the projected distance from the center of the force sensitive element to the center of the sensor.
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| CN112611498B (en) * | 2019-09-18 | 2022-02-01 | 马洪文 | Multi-dimensional force acquisition method based on multi-dimensional force sensor of parallel rod system |
| CN112611499B (en) * | 2019-09-18 | 2022-01-28 | 马洪文 | Method for measuring micro displacement of load platform of multi-dimensional force sensor and method for mounting measuring sensitive element |
| CN112067229A (en) * | 2020-09-14 | 2020-12-11 | 中国空气动力研究与发展中心 | Center-loaded large-size unidirectional force piezoelectric sensor |
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