CN110168558A - 光路调制器及其制作方法、指纹识别装置和终端设备 - Google Patents
光路调制器及其制作方法、指纹识别装置和终端设备 Download PDFInfo
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- CN110168558A CN110168558A CN201780002010.0A CN201780002010A CN110168558A CN 110168558 A CN110168558 A CN 110168558A CN 201780002010 A CN201780002010 A CN 201780002010A CN 110168558 A CN110168558 A CN 110168558A
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Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
- G06V40/13—Sensors therefor
- G06V40/1318—Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/10—Image acquisition
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
- G06V40/13—Sensors therefor
- G06V40/1324—Sensors therefor by using geometrical optics, e.g. using prisms
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Multimedia (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Image Input (AREA)
Abstract
一种光路调制器(300),应用于指纹识别装置(130),用于将从手指表面反射回来的反射光导引至设置在光路调制器(300)下方的光学检测单元(134),光学检测单元(134)用于对接收到的反射光进行检测,其中,光路调制器(300)的上表面与下表面之间具有通孔阵列,通孔阵列包括多个倾斜通孔,其中每个倾斜通孔的倾斜角度大于0°,倾斜角度为倾斜通孔的轴线方向与垂直于光路调制器(300)表面的法线方向之间的夹角。由于该光路调制器(300)具有由倾斜通孔组成的通孔阵列,在相同孔深的情况下,可以得到更薄的光路调制器的(300)厚度。并且,通过调整光路调制器(300)里边的倾斜通孔的倾斜角度,可以有效地改变光路的传播路径和角度,使其对光路的调制更为灵活。
Description
PCT国内申请,说明书已公开。
Claims (14)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2017/114620 WO2019109251A1 (zh) | 2017-12-05 | 2017-12-05 | 光路调制器及其制作方法、指纹识别装置和终端设备 |
Publications (2)
Publication Number | Publication Date |
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CN110168558A true CN110168558A (zh) | 2019-08-23 |
CN110168558B CN110168558B (zh) | 2022-07-05 |
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CN201780002010.0A Active CN110168558B (zh) | 2017-12-05 | 2017-12-05 | 光路调制器及其制作方法、指纹识别装置和终端设备 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10922524B2 (zh) |
EP (1) | EP3531336A4 (zh) |
CN (1) | CN110168558B (zh) |
WO (1) | WO2019109251A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108647558B (zh) * | 2018-03-21 | 2021-01-08 | 京东方科技集团股份有限公司 | 一种指纹识别显示设备 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4569080A (en) * | 1982-07-09 | 1986-02-04 | Fingermatrix, Inc. | Fingerprint image refinement |
US20050140737A1 (en) * | 2003-12-15 | 2005-06-30 | Canon Kabushiki Kaisha | Beam, ink jet recording head having beams, and method for manufacturing ink jet recording head having beams |
CN1815262A (zh) * | 2005-02-03 | 2006-08-09 | 达方电子股份有限公司 | 光学式移动传感模块及其光学式移动传感器 |
CN104079718A (zh) * | 2014-06-18 | 2014-10-01 | 京东方科技集团股份有限公司 | 具有指纹识别功能的个人移动终端设备 |
CN204143460U (zh) * | 2014-08-26 | 2015-02-04 | 南昌欧菲生物识别技术有限公司 | 指纹识别装置及终端设备 |
CN106503635A (zh) * | 2016-10-11 | 2017-03-15 | 广东欧珀移动通信有限公司 | 用于光学指纹识别的盖板、输入组件及电子装置 |
US20170220838A1 (en) * | 2015-06-18 | 2017-08-03 | Shenzhen Huiding Technology Co., Ltd. | Under-screen optical sensor module for on-screen fingerprint sensing |
CN107038434A (zh) * | 2017-05-12 | 2017-08-11 | 广东欧珀移动通信有限公司 | 光学指纹识别组件、显示装置和移动终端 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04355917A (ja) * | 1990-10-12 | 1992-12-09 | Seiko Epson Corp | 半導体装置の製造装置 |
WO2007132769A1 (ja) * | 2006-05-17 | 2007-11-22 | Panasonic Corporation | 細胞電位測定デバイスとそれに用いる基板、細胞電位測定デバイス用基板の製造方法 |
US20090026581A1 (en) * | 2007-07-25 | 2009-01-29 | Jin-Ha Park | Flash memory device and method of manufacturing the same |
JP5521359B2 (ja) * | 2008-03-13 | 2014-06-11 | セイコーエプソン株式会社 | 光偏向器及びその製造方法 |
WO2012014718A1 (ja) * | 2010-07-26 | 2012-02-02 | 浜松ホトニクス株式会社 | インターポーザの製造方法 |
JP6098198B2 (ja) * | 2013-02-05 | 2017-03-22 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよび光スキャナーの製造方法 |
US10410037B2 (en) * | 2015-06-18 | 2019-09-10 | Shenzhen GOODIX Technology Co., Ltd. | Under-screen optical sensor module for on-screen fingerprint sensing implementing imaging lens, extra illumination or optical collimator array |
CN106934384B (zh) * | 2017-03-24 | 2018-06-15 | 京东方科技集团股份有限公司 | 指纹识别器件及控制方法、触摸显示面板、触摸显示装置 |
-
2017
- 2017-12-05 EP EP17931827.4A patent/EP3531336A4/en not_active Withdrawn
- 2017-12-05 WO PCT/CN2017/114620 patent/WO2019109251A1/zh unknown
- 2017-12-05 CN CN201780002010.0A patent/CN110168558B/zh active Active
-
2019
- 2019-05-21 US US16/418,992 patent/US10922524B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4569080A (en) * | 1982-07-09 | 1986-02-04 | Fingermatrix, Inc. | Fingerprint image refinement |
US20050140737A1 (en) * | 2003-12-15 | 2005-06-30 | Canon Kabushiki Kaisha | Beam, ink jet recording head having beams, and method for manufacturing ink jet recording head having beams |
CN1815262A (zh) * | 2005-02-03 | 2006-08-09 | 达方电子股份有限公司 | 光学式移动传感模块及其光学式移动传感器 |
CN104079718A (zh) * | 2014-06-18 | 2014-10-01 | 京东方科技集团股份有限公司 | 具有指纹识别功能的个人移动终端设备 |
CN204143460U (zh) * | 2014-08-26 | 2015-02-04 | 南昌欧菲生物识别技术有限公司 | 指纹识别装置及终端设备 |
US20170220838A1 (en) * | 2015-06-18 | 2017-08-03 | Shenzhen Huiding Technology Co., Ltd. | Under-screen optical sensor module for on-screen fingerprint sensing |
CN106503635A (zh) * | 2016-10-11 | 2017-03-15 | 广东欧珀移动通信有限公司 | 用于光学指纹识别的盖板、输入组件及电子装置 |
CN107038434A (zh) * | 2017-05-12 | 2017-08-11 | 广东欧珀移动通信有限公司 | 光学指纹识别组件、显示装置和移动终端 |
Also Published As
Publication number | Publication date |
---|---|
WO2019109251A1 (zh) | 2019-06-13 |
EP3531336A4 (en) | 2020-02-26 |
EP3531336A1 (en) | 2019-08-28 |
US10922524B2 (en) | 2021-02-16 |
US20190272410A1 (en) | 2019-09-05 |
CN110168558B (zh) | 2022-07-05 |
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